JPH0644006Y2 - イオン源 - Google Patents

イオン源

Info

Publication number
JPH0644006Y2
JPH0644006Y2 JP14154688U JP14154688U JPH0644006Y2 JP H0644006 Y2 JPH0644006 Y2 JP H0644006Y2 JP 14154688 U JP14154688 U JP 14154688U JP 14154688 U JP14154688 U JP 14154688U JP H0644006 Y2 JPH0644006 Y2 JP H0644006Y2
Authority
JP
Japan
Prior art keywords
ion source
chamber
microwave
source chamber
axial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14154688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0262649U (US06650917-20031118-M00005.png
Inventor
義孝 笹村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP14154688U priority Critical patent/JPH0644006Y2/ja
Publication of JPH0262649U publication Critical patent/JPH0262649U/ja
Application granted granted Critical
Publication of JPH0644006Y2 publication Critical patent/JPH0644006Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14154688U 1988-10-28 1988-10-28 イオン源 Expired - Lifetime JPH0644006Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14154688U JPH0644006Y2 (ja) 1988-10-28 1988-10-28 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14154688U JPH0644006Y2 (ja) 1988-10-28 1988-10-28 イオン源

Publications (2)

Publication Number Publication Date
JPH0262649U JPH0262649U (US06650917-20031118-M00005.png) 1990-05-10
JPH0644006Y2 true JPH0644006Y2 (ja) 1994-11-14

Family

ID=31406705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14154688U Expired - Lifetime JPH0644006Y2 (ja) 1988-10-28 1988-10-28 イオン源

Country Status (1)

Country Link
JP (1) JPH0644006Y2 (US06650917-20031118-M00005.png)

Also Published As

Publication number Publication date
JPH0262649U (US06650917-20031118-M00005.png) 1990-05-10

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