JPH0644006Y2 - イオン源 - Google Patents
イオン源Info
- Publication number
- JPH0644006Y2 JPH0644006Y2 JP14154688U JP14154688U JPH0644006Y2 JP H0644006 Y2 JPH0644006 Y2 JP H0644006Y2 JP 14154688 U JP14154688 U JP 14154688U JP 14154688 U JP14154688 U JP 14154688U JP H0644006 Y2 JPH0644006 Y2 JP H0644006Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- chamber
- microwave
- source chamber
- axial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14154688U JPH0644006Y2 (ja) | 1988-10-28 | 1988-10-28 | イオン源 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14154688U JPH0644006Y2 (ja) | 1988-10-28 | 1988-10-28 | イオン源 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0262649U JPH0262649U (US06650917-20031118-M00005.png) | 1990-05-10 |
JPH0644006Y2 true JPH0644006Y2 (ja) | 1994-11-14 |
Family
ID=31406705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14154688U Expired - Lifetime JPH0644006Y2 (ja) | 1988-10-28 | 1988-10-28 | イオン源 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0644006Y2 (US06650917-20031118-M00005.png) |
-
1988
- 1988-10-28 JP JP14154688U patent/JPH0644006Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0262649U (US06650917-20031118-M00005.png) | 1990-05-10 |
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