JPH0644005Y2 - イオン源本体着脱装置 - Google Patents
イオン源本体着脱装置Info
- Publication number
- JPH0644005Y2 JPH0644005Y2 JP6065786U JP6065786U JPH0644005Y2 JP H0644005 Y2 JPH0644005 Y2 JP H0644005Y2 JP 6065786 U JP6065786 U JP 6065786U JP 6065786 U JP6065786 U JP 6065786U JP H0644005 Y2 JPH0644005 Y2 JP H0644005Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- housing
- shutter
- source body
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 16
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 description 4
- 239000003440 toxic substance Substances 0.000 description 4
- 231100000167 toxic agent Toxicity 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6065786U JPH0644005Y2 (ja) | 1986-04-22 | 1986-04-22 | イオン源本体着脱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6065786U JPH0644005Y2 (ja) | 1986-04-22 | 1986-04-22 | イオン源本体着脱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62171149U JPS62171149U (enrdf_load_stackoverflow) | 1987-10-30 |
| JPH0644005Y2 true JPH0644005Y2 (ja) | 1994-11-14 |
Family
ID=30893259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6065786U Expired - Lifetime JPH0644005Y2 (ja) | 1986-04-22 | 1986-04-22 | イオン源本体着脱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644005Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-04-22 JP JP6065786U patent/JPH0644005Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62171149U (enrdf_load_stackoverflow) | 1987-10-30 |
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