JPH0643019B2 - Vibration processing method - Google Patents

Vibration processing method

Info

Publication number
JPH0643019B2
JPH0643019B2 JP60239992A JP23999285A JPH0643019B2 JP H0643019 B2 JPH0643019 B2 JP H0643019B2 JP 60239992 A JP60239992 A JP 60239992A JP 23999285 A JP23999285 A JP 23999285A JP H0643019 B2 JPH0643019 B2 JP H0643019B2
Authority
JP
Japan
Prior art keywords
tool
machining
vibration
laminated
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60239992A
Other languages
Japanese (ja)
Other versions
JPS6299062A (en
Inventor
辰男 早乙女
利雄 高橋
厚 滝沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilot Corp
Original Assignee
Pilot Pen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilot Pen Co Ltd filed Critical Pilot Pen Co Ltd
Priority to JP60239992A priority Critical patent/JPH0643019B2/en
Publication of JPS6299062A publication Critical patent/JPS6299062A/en
Publication of JPH0643019B2 publication Critical patent/JPH0643019B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、電歪振動子を駆動して上下方向に振動する工
具を工作物表面に押しあて工作物を加工する振動加工方
法に関する。
Description: TECHNICAL FIELD The present invention relates to a vibration machining method for machining a workpiece by driving a tool that vibrates in the vertical direction by driving an electrostrictive oscillator against the surface of the workpiece.

〔従来の技術〕 この種の振動加工方法としては、一般に超音波加工が知
られている。超音波加工は振動子を結合した振幅拡大ホ
ーンに工具を取りつけ、全体として縦振動共振を行わせ
つつ、工具を工作物に押しつける加工法であり、穴あけ
加工や、切断、研磨、彫刻、ねじ切り等を行うのに使用
されている。
[Prior Art] As a vibration machining method of this type, ultrasonic machining is generally known. Ultrasonic processing is a processing method in which a tool is attached to an amplitude-enhancing horn that is connected to a vibrator, and the tool is pressed against the workpiece while performing longitudinal vibration resonance as a whole. Used to do.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかしながら、超音波加工は工具の交換性に厳しい制約
を受けるという欠点がある。その理由は、前述のとおり
超音波加工が振動子を結合したホーンを取りつけ、全体
として共振を行わせるものであり、このような共振を得
るためには工具をその密度および縦弾性係数により決定
される形状および長さにしなければならず、したがっ
て、共振周波数以外の異なる形状、長さの工具に交換す
ると共振が得られず加工が行えないからである。
However, ultrasonic machining has a drawback that the exchangeability of tools is severely restricted. The reason is that ultrasonic machining attaches a horn to which a vibrator is coupled as described above and causes resonance as a whole.To obtain such resonance, the tool is determined by its density and longitudinal elastic coefficient. This is because the shape and the length must be changed, and therefore, if the tool having a different shape and length other than the resonance frequency is replaced, resonance cannot be obtained and machining cannot be performed.

このような理由から、超音波加工では限られた僅かな種
類の工具しか使用できず、工作物が、例えば金型のよう
に複雑な形状の場合、その形状の各部に対応できる多様
な工具の使用が困難であり、そのため、現在まで問題は
解決されないまま、数少ない工具で比較的単純な形状の
工具物を加工するに過ぎなかった。
For this reason, only a limited number of tools can be used in ultrasonic machining, and when the workpiece has a complicated shape such as a die, various tools that can handle various parts of the shape can be used. It is difficult to use, and thus, until now, the problem has not been solved, and only a relatively simple shape of tool tool is machined with a few tools.

したがって、本発明の目的は上述の欠点を除去し、工作
物の性質および加工目的に応じて種々な工具を採用でき
る振動加工方法を提供することである。
Therefore, an object of the present invention is to eliminate the above-mentioned drawbacks and to provide a vibration machining method capable of adopting various tools depending on the properties of the workpiece and the machining purpose.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、複数の圧電体を積層して各圧電体の振幅の総
和として変位を取り出す積層型電歪振動子に継手を一体
に結合した振動系とその継手にねじ締めつけにより交換
自在に結合した工具を具備した振動加工手段を用い、前
記振動系をその固有振動数未満の駆動周波数で駆動しつ
つ、工具を上下方向に振動させ、この工具を工作物表面
に押しあてることにより工作物の加工を行うことを特徴
とする振動加工方法に係わるものである。
The present invention relates to a vibration system in which a joint is integrally coupled to a laminated electrostrictive oscillator in which a plurality of piezoelectric bodies are laminated and displacement is obtained as a sum of amplitudes of the respective piezoelectric bodies, and the joint is exchangeably coupled by screw tightening. Machining a workpiece by vibrating the tool in a vertical direction while driving the vibration system at a driving frequency lower than its natural frequency using a vibration machining means equipped with a tool and pressing the tool against the surface of the workpiece. The present invention relates to a vibration processing method characterized by performing

このようにして加工を行えば、振動系をその固有振動数
未満の駆動周波数で駆動して振動系と工具を全体として
共振させないようにしたものであるから、異なる形状、
長さの工具を電歪振動子の出力に応じて広範囲に交換す
ることができる。
If the machining is performed in this way, the vibration system is driven at a driving frequency lower than its natural frequency so that the vibration system and the tool do not resonate as a whole.
It is possible to replace the length tool with a wide range according to the output of the electrostrictive vibrator.

本発明おいて、電歪振動子として積層型のものを用いる
ことが、高い振動数と大きな振幅が得られ、これにより
負荷が軽減されて加工速度を速めることができ、また、
負荷により振幅が減衰せず、さらに、負荷変動にかかわ
らず一定の振幅が得られるので有利である。これらは、
積層型圧電変位素子が複数に圧電体を積層して各圧電体
の振幅の総和として変位を取り出す構造をとることによ
る効果である。
In the present invention, the use of a laminated type electrostrictive oscillator provides a high frequency and a large amplitude, thereby reducing the load and increasing the processing speed.
This is advantageous because the amplitude is not attenuated by the load and a constant amplitude is obtained regardless of the load fluctuation. They are,
This is an effect of the laminated piezoelectric displacement element having a structure in which a plurality of piezoelectric bodies are laminated and the displacement is taken out as the sum of the amplitudes of the respective piezoelectric bodies.

〔実施例〕〔Example〕

次に、本発明の実施例を述べる。 Next, examples of the present invention will be described.

本振動加工方法に用いる工具は工作物の性質および加工
目的に応じて砥石、ヤスリ、ナイフ、ラツプ棒等種々な
形の工具を採用するものであるが、例えば第1図に示す
ようなシヤンクつき砥石を代表的に挙げて以下説明す
る。工具1はねじ締めつけにより交換自在に継手2に結
合され、継手2は電歪振動子3に一体に結合され、電歪
振動子3はその一端が手持ち用の筒状保護カバー4の内
底部に結合され、保護カバー4の先端に設けられた小孔
5がそこを挿通する継手2の案内となっており、継手2
と電歪振動子3とが振動系6を構成している。7は電歪
振動子3に駆動周波数を付与する発振器である。
The tool used in this vibration machining method employs various types of tools such as a grindstone, a file, a knife, and a lap rod according to the property of the workpiece and the purpose of machining. For example, with a shank as shown in FIG. A grindstone will be described below as a representative example. The tool 1 is replaceably coupled to a joint 2 by screwing, the joint 2 is integrally coupled to an electrostrictive oscillator 3, and one end of the electrostrictive oscillator 3 is attached to an inner bottom portion of a handheld cylindrical protective cover 4. A small hole 5 that is joined and provided at the tip of the protective cover 4 serves as a guide for the joint 2 that is inserted therethrough.
The electrostrictive vibrator 3 and the electrostrictive vibrator 3 constitute a vibration system 6. Reference numeral 7 is an oscillator that gives a drive frequency to the electrostrictive oscillator 3.

本例においては、電歪振動子3として積層型圧電変位素
子を用い、工具1に振動数約50〜2万Hz、好ましくは
約1千〜2万Hz、振幅約5〜50ミクロンの振動が付与
されるようになされている。積層型圧電変位素子として
は種々なものを採用するものであるが、例えば商品名:
積層圧電アクチエータ(日本電気社製)を代表的に挙げ
ることができる。この積層型圧電変位素子に電圧:後述
Hz直流100Vを付与して駆動した。
In this example, a laminated piezoelectric displacement element is used as the electrostrictive oscillator 3, and the tool 1 is subjected to vibrations of a frequency of about 50 to 20,000 Hz, preferably about 1,000 to 20,000 Hz, and an amplitude of about 5 to 50 microns. It is designed to be granted. Various types of laminated piezoelectric displacement elements are adopted, for example, trade name:
A typical example is a laminated piezoelectric actuator (manufactured by NEC Corporation). Voltage applied to this laminated piezoelectric displacement element:
It was driven by applying 100 VDC of Hz direct current.

この駆動は振動系6の固有振動数未満の駆動周波数でな
す。振動系6の固有振動数は工具1を外した振動系6の
全体を軸方向に軽く叩いて生ずる微小変位の周波数を測
定することにより求めることができる。こうして求めた
駆動系6の固有振動数30KHzであった。
This drive is performed at a drive frequency lower than the natural frequency of the vibration system 6. The natural frequency of the vibration system 6 can be obtained by tapping the entire vibration system 6 excluding the tool 1 in the axial direction and measuring the frequency of minute displacement. The natural frequency of the drive system 6 thus obtained was 30 KHz.

そして、積層型圧電変位素子の変位動作により重量5g
の工具1を上下方向に振動させた。駆動周波数が異なる
周波数のときのそれぞれの振動を第2図に示す。第2図
に示すごとく、駆動周波数が50、100、300、5
00および1000Hzのときそれぞれの振幅は30、3
0、29、28および25ミクロンであった。このよう
に駆動周波数を変化させても工具1はいずれも駆動周波
数に良く追従して振動し、工具1の振動にさほどの変化
はなかった。
Then, the displacement of the laminated piezoelectric displacement element causes a weight of 5 g.
The tool 1 of No. 1 was vibrated vertically. The respective vibrations when the drive frequencies are different are shown in FIG. As shown in FIG. 2, the driving frequency is 50, 100, 300, 5
At 00 and 1000 Hz, the respective amplitudes are 30, 3
0, 29, 28 and 25 microns. In this way, even if the drive frequency was changed, all the tools 1 vibrated following the drive frequency well, and the vibration of the tool 1 did not change so much.

次に、異なる形状および長さで定まる種々の重量の工具
を交換し、振動系6を電圧:1000Hz直流130Vで
駆動した。工具が異なる重量のときのそれぞれの振動を
第3図に示す。第3図に示す。第3図に示すごとく、工
具重量が5、20、35および50gのときそれぞれの
振幅は30、27、25および23ミクロンであった。
このように工具重量が変化しても、いずれの工具1も付
与した駆動周波数に良く追従して振動し、実用に供にす
るのに十分な振幅が得られた。そうして、第1図に示す
ごとく、工具1を工作物表面8に押しあて工作物の加工
を行ったところ、いずれの場合も満足のいく加工速度で
工作物の加工を行うことができた。
Next, the tools of various weights determined by different shapes and lengths were exchanged, and the vibration system 6 was driven at a voltage of 1000 Hz and a direct current of 130 V. The respective vibrations when the weight of the tool is different are shown in FIG. It is shown in FIG. As shown in FIG. 3, when the tool weights were 5, 20, 35 and 50 g, the respective amplitudes were 30, 27, 25 and 23 microns.
Even when the tool weight was changed in this way, any of the tools 1 vibrated well following the applied drive frequency, and an amplitude sufficient for practical use was obtained. Then, as shown in FIG. 1, when the tool 1 was pressed against the workpiece surface 8 to perform the machining of the workpiece, the machining could be performed at a satisfactory machining speed in any case. .

なお、振動系6の固有振動数と一致する駆動周波数を付
与して駆動した場合は、振動系6と工具1のそれぞれの
固有振動数が等しいのだけが共振して振動するために、
振動系6の固有振動数と異なる固有振動数の工具1は振
動させることができなかった。しかしながら、上述の例
によれば、振動系をその固有振動数未満の駆動周波数で
駆動しているので、工具の長さや形状に制約がなく、積
層型圧電変位素子の出力に応じた範囲であれば広範囲な
工具が使用できることになる。
When the driving frequency is given to match the natural frequency of the vibration system 6, the vibration system 6 and the tool 1 resonate and vibrate only because they have the same natural frequency.
The tool 1 having a natural frequency different from the natural frequency of the vibration system 6 could not be vibrated. However, according to the above-mentioned example, since the vibration system is driven at a driving frequency lower than its natural frequency, there is no restriction on the length or shape of the tool, and the range may be in accordance with the output of the laminated piezoelectric displacement element. Therefore, a wide range of tools can be used.

〔発明の効果〕〔The invention's effect〕

本発明によれば、振動系をその固有振動数未満の駆動周
波数で駆動して振動系と工具を全体として共振させない
ようにしたものであるから、異なる形状、長さの工具を
広範囲に交換することができる。また、電歪振動子に結
合した継手にねじ締めつけにより工具を結合することに
より電歪振動子の変位を直接工具の変位とすることがで
きるため、エネルギーの伝達効率が良好となる。さら
に、電歪振動子が複数の圧電体を積層して各圧電体の振
幅の総和として変位を取り出す積層型であるため、高い
振動数と大きな振幅が得られ、これにより負荷が軽減さ
れて加工速度を速めることができ、また、負荷により振
幅が減衰せず、さらに、負荷変動にかかわらず一定の振
幅が得られる。
According to the present invention, the vibrating system is driven at a driving frequency lower than its natural frequency so that the vibrating system and the tool do not resonate as a whole, so that tools having different shapes and lengths are exchanged over a wide range. be able to. Further, since the displacement of the electrostrictive vibrator can be directly converted into the displacement of the tool by connecting the tool to the joint connected to the electrostrictive vibrator by tightening the screw, the energy transfer efficiency is improved. Further, since the electrostrictive vibrator is a laminated type in which a plurality of piezoelectric bodies are laminated and displacement is obtained as the sum of the amplitudes of the respective piezoelectric bodies, a high frequency and a large amplitude are obtained, which reduces the load and reduces the machining. The speed can be increased, the amplitude is not attenuated by the load, and a constant amplitude can be obtained regardless of the load fluctuation.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明方法に使用する振動加工手段の縦断面
図、第2図は振幅と駆動周波との関係を示す図、第3図
は振幅と工具重量の関係を示す図である。 また図面に用いられている符号において、1は工具、2
は継手、3は電歪振動子、4は保護カバー、5は小孔、
6は振動系、7は発振器、8は工作物表面である。
FIG. 1 is a vertical cross-sectional view of a vibration machining means used in the method of the present invention, FIG. 2 is a diagram showing a relation between amplitude and drive frequency, and FIG. 3 is a diagram showing a relation between amplitude and tool weight. Further, in the reference numerals used in the drawings, 1 is a tool, 2 is
Is a joint, 3 is an electrostrictive oscillator, 4 is a protective cover, 5 is a small hole,
6 is a vibration system, 7 is an oscillator, and 8 is a workpiece surface.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】複数の圧電体を積層して各圧電体の振幅の
総和として変位を取り出す積層型電歪振動子に継手を一
体に結合した振動系と、その継手にねじ締めつけにより
交換自在に結合した工具を具備した振動加工手段を用
い、前記振動系をその固有振動数未満の駆動周波数で駆
動しつつ、工具を上下方向に振動させ、この工具を工作
物表面に押しあてることにより工作物の加工を行うこと
を特徴とする振動加工方法。
1. A vibrating system in which a joint is integrally connected to a laminated electrostrictive oscillator in which a plurality of piezoelectric bodies are laminated and displacement is obtained as a sum of amplitudes of the respective piezoelectric bodies, and the joint is exchangeable by screwing. Using a vibration machining means equipped with a coupled tool, the tool is vibrated in the up-and-down direction while driving the vibration system at a drive frequency lower than its natural frequency, and the tool is pressed against the surface of the work piece. A vibration machining method characterized by performing the machining of.
JP60239992A 1985-10-25 1985-10-25 Vibration processing method Expired - Lifetime JPH0643019B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60239992A JPH0643019B2 (en) 1985-10-25 1985-10-25 Vibration processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60239992A JPH0643019B2 (en) 1985-10-25 1985-10-25 Vibration processing method

Publications (2)

Publication Number Publication Date
JPS6299062A JPS6299062A (en) 1987-05-08
JPH0643019B2 true JPH0643019B2 (en) 1994-06-08

Family

ID=17052860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60239992A Expired - Lifetime JPH0643019B2 (en) 1985-10-25 1985-10-25 Vibration processing method

Country Status (1)

Country Link
JP (1) JPH0643019B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08153682A (en) * 1994-11-29 1996-06-11 Nec Corp Plasma cvd device
DE102012219254B4 (en) * 2012-10-22 2015-01-29 Sauer Ultrasonic Gmbh Supply circuit, supply system, tool actuator, tool

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501875A (en) * 1973-05-11 1975-01-09
JPS54113592A (en) * 1978-02-23 1979-09-05 Nippon Denshi Kogyo Kk Ultrasonic wave vibration tool

Also Published As

Publication number Publication date
JPS6299062A (en) 1987-05-08

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