CN104476378B - Single excitation ultrasonic elliptic vibration polishing device - Google Patents

Single excitation ultrasonic elliptic vibration polishing device Download PDF

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Publication number
CN104476378B
CN104476378B CN201410740536.7A CN201410740536A CN104476378B CN 104476378 B CN104476378 B CN 104476378B CN 201410740536 A CN201410740536 A CN 201410740536A CN 104476378 B CN104476378 B CN 104476378B
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China
Prior art keywords
ultrasonic
elliptical
vibration
transducer
front shroud
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Application number
CN201410740536.7A
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Chinese (zh)
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CN104476378A (en
Inventor
殷振
李华
汪帮富
曹自洋
李艳
谢鸥
陈玉荣
吴程红
黄强
杨鑫铭
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Jiangsu Jiuxiang Aviation Equipment Co., Ltd
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Suzhou University of Science and Technology
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction

Abstract

The invention discloses a single excitation ultrasonic elliptic vibration polishing device which comprises an outer sleeve, a linear bearing, a reciprocating drive mechanism, a shell unit, an ultrasonic vibration transducer disposed in the shell unit, an elliptic vibration mode converter and a tool head disposed at the front end of the elliptic vibration mode converter. The shell unit comprises a front retaining plate, an inner sleeve and a rear retaining plate. The linear bearing is supported between the shell unit and the outer sleeve. One end of the reciprocating drive mechanism is fixed on the rear retaining plate of the shell unit, and the other end thereof is fixed on the outer sleeve. The ultrasonic vibration transducer comprises a bolt, and a rear cover plate, a piezoelectric ceramic plate, an electrode plate and a front cover plate which sequentially sleeve the bolt. The elliptic vibration mode converter is disposed at the front end of the front cover plate and is of a straight beam-oblique beam composite structure. The elliptic vibration mode converter converts the longitudinal ultrasonic vibration generated by the ultrasonic vibration transducer into longitudinal-bending composite elliptic vibration at the tool head and the tail end of the elliptic vibration mode converter.

Description

A kind of single excitation ultrasonic elliptical vibratory burnishing device
Technical field
The invention belongs to surface of the work Finishing field, is shaken more particularly, to a kind of using the ultrasonic ellipse of single excitation The burnishing device that dynamic and mechanical reciprocation combines.
Background technology
The surface quality to workpiece that develops rapidly of modern industry science and technology is put forward higher requirement, workpiece surface quality shadow The presentation quality and function life-span of workpiece are rung, and grinding and polishing is mould, engineering machinery, armarium, aerospace industry In some vital part Surface Machinings important means, in order to improve the efficiency and quality of grinding and polishing, Publication No. The patent of invention document of CN101362303A discloses the Ginding process that a kind of mechanical reciprocating is combined with supersonic vibration, and it adopts machine Tool is of reciprocating vibration and One-Dimensional Ultrasonic vibrates superimposed method and drives bistrique to be ground the surface of workpiece, and then reaches raising The purpose of working (machining) efficiency and crudy, but because the method uses One-Dimensional Ultrasonic vibration, and mechanical reciprocating and ultrasound In the same direction, its tool heads can only point-blank be polished, therefore in use, still exist for vibration Polishing efficiency is low, not uniform enough the problem of grinding and polishing workpiece surface finish.
Ultrasonic elliptical vibratory UVC, ultra-sonic welded, ultrasonic grinding, ultrasonic polishing, linear ultrasonic motor and The fields such as rotary ultrasonic motor have wide application.At present research worker adopts extensional vibration, twisting vibration, bending mostly Two kinds of vibration modes in vibration and radial vibration are combined to produce ultrasonic elliptical vibratory, need to adopt two groups or two groups with On piezoelectric ceramic piece produce the two or more mode of oscillations with certain phase contrast to excite, it is necessary to be every group of piezoelectricity pottery Ceramics is equipped with ultrasound-driven power supply signal all the way, and needs to control the phase contrast between each road ultrasound-driven power supply signal, ultrasound Vibrational system and Control system architecture complexity, manufacture difficulty is big, control difficulty is high, production cost is high, be difficult realization miniaturization, work It is not sufficiently stable as performance, these problems constrain the application in the industrial production of ultrasonic elliptical vibratory transducer and popularization.
How to overcome not enough present in above-mentioned supersonic vibration polishing technology and ultrasonic elliptical vibratory technology, and using new Single excitation ultrasonic elliptical vibratory technology, there is provided one kind makes tool heads realize that reciprocating machine motion and the ultrasonic elliptical orbit of single excitation shake Dynamic composite polishing device, further improves the uniformity of polishing efficiency and workpiece surface finish, is mainly grinding for the present invention Study carefully content.
The content of the invention
The invention provides a kind of new single excitation ultrasonic elliptical vibratory burnishing device, in order to overcome existing super Uniformity that is not enough present in sonic vibration finishing method, improving polishing efficiency and workpiece surface finish.
A kind of single excitation ultrasonic elliptical vibratory burnishing device, including including overcoat, linear bearing, reciprocating drive mechanism, shell Body unit, the single-excitation ultrasonic oval vibration energy converter being placed in housing unit, elliptical vibration modal transducer and it is arranged on elliptical vibration mode The tool heads of transducer front end.Described linear bearing is supported between housing unit and overcoat, and linear bearing is sliding straight Bearing or rolling linear bearing.Described housing unit includes front apron, inner sleeve and backboard;Described reciprocating drive mechanism One end is fixed on the backboard of housing unit, and the other end is fixed on the coat, and reciprocating drive mechanism is slider-crank mechanism, partially Xin Lun mechanisms, screw-nut body, cylinder or hydraulic cylinder reciprocating drive mechanism.
Described single-excitation ultrasonic oval vibration energy converter is in integrally cylinder, and it includes bolt and the bonnet being sequentially sleeved on bolt Plate, piezoelectric ceramic piece, electrode slice and front shroud, are provided with the ring flange coupled with housing unit on front shroud, back shroud and Front shroud is compressed the connection of back shroud, piezoelectric ceramic piece, electrode slice and front shroud by bolt, constitutes single-excitation ultrasonic oval vibration energy converter Energy conversion part, the ultrasonic signal of telecommunication that ultrasonic-frequency power supply is exported can be converted to the longitudinal ultrasonic of single-excitation ultrasonic oval vibration energy converter and be shaken It is dynamic.
Described elliptical vibration modal transducer and front shroud is fabricated to a front end for being integrally provided in front shroud, or The welding of elliptical vibration modal transducer is arranged on into the front end of front shroud.Elliptical vibration modal transducer includes straight beam and cant beam structure Into composite construction, straight beam and cant beam be rectangle perpendicular to the section of its center axis, and the central axis and ultrasound of straight beam shake The central axes of dynamic transducer, one end of straight beam couples with the front shroud of ultrasonic transducer, and the other end overhangs;The one of cant beam The middle part connection of the side connection of the front shroud off-center axis of end and ultrasonic transducer, the other end and straight beam, cant beam Central axis and straight beam central axis into 0-90 degree angles, straight beam and cant beam are equal with the connection place of ultrasonic transducer front shroud For arc transition connection, the plane that the geometric centre axes of cant beam and the geometric centre axes of straight beam are formed and polished work Part surface is parallel.
It is super that elliptical vibration modal transducer is arranged on the referred to as single excitation of the molectron constituted behind single-excitation ultrasonic oval vibration energy converter front end Sound elliptical vibration transducer, elliptical vibration modal transducer for the purpose of straight beam and cant beam composite construction is shaken to change ultrasound The mode of oscillation of dynamic transducer so as to which longitudinal vibration mode frequency and flexural vibration mode frequency are close to or equal;Due to cant beam The presence of structure, the longitudinal ultrasonic vibration that single-excitation ultrasonic oval vibration energy converter is produced is decomposed into one after cant beam is delivered in cant beam root Part extensional vibration component and a part of bending vibration component, when the extensional vibration component and bending vibration component of cant beam decomposition are passed After being delivered to straight beam, mutually it is combined with the extensional vibration propagated on straight beam, finally forms vertical with certain phase contrast in straight beam end To the compound ultrasonic elliptical vibratory of oscillating component and bending vibration component.
Tool heads are arranged on the front end of elliptical vibration modal transducer by the connection of welding, joint bolt or press plate mechanism; After ultrasonic vibrational energy is delivered to elliptical vibration modal transducer end from single-excitation ultrasonic oval vibration energy converter, be converted to certain phase The compound vertical curved composite ultrasonic elliptical vibratory of the extensional vibration of potential difference and bending vibration, that is, be converted to elliptical vibration modal transducer The vertical curved composite ultrasonic elliptical vibratory of end;And ultrasonic ellipse is done together in driving instrument head and elliptical vibration modal transducer end Vibration.
Single-excitation ultrasonic oval vibration energy converter is placed in housing unit, and the ring flange of single-excitation ultrasonic oval vibration energy converter is arranged at the fovea superior of inner sleeve In seam, front apron is arranged on the opposite side of ring flange, and to whole single-excitation ultrasonic oval vibration energy converter fixation is played, and backboard is arranged on Inner sleeve does not have the other end of seam, prevents the debris such as dust, iron filings from entering in housing unit, affects single-excitation ultrasonic oval vibration energy converter Service behaviour;The supersonic vibration polishing system of existing document introduction is compared, the list excitation ultrasonic elliptical vibratory burnishing device has Power capacity is big, energy conversion efficiency is high, simple structure, and easy to manufacture, low cost, the rigidity of structure are big, control drive system letter The advantages of single and vibropolish stable performance is stable.The invention in addition becomes the straight path throwing of common One-Dimensional Ultrasonic vibration tool head Light is the polishing of elliptical vibration track, and within the unit interval, elliptical vibration track is greatly improved the motion path of tool heads, and The width of single supersonic vibration polishing is significantly broadened, therefore the equal of polishing efficiency and workpiece surface finish can be effectively improved Even property.
Further, described single-excitation ultrasonic oval vibration energy converter only has one group of extensional vibration piezoelectric ceramic piece.
Further, described single-excitation ultrasonic oval vibration energy converter only needs to ultrasonic signal of telecommunication excitation all the way.
Further, the operating frequency range of described single-excitation ultrasonic oval vibration energy converter is 18kHz-40kHz.
Present invention employs mechanical vibration MODAL TRANSFORMATION OF A mechanism to be decomposed into the extensional vibration conversion of single-excitation ultrasonic oval vibration energy converter The extensional vibration of straight beam, the extensional vibration of cant beam and bending vibration component, finally synthesize vertical curved composite ultraphonic in straight beam end Elliptical vibration, simplifies the overall structure of single excitation ultrasonic elliptical vibratory polishing system, greatly reduces the complexity of vibrational system Degree, reduces manufacture, assembly difficulty and production cost;The invention in addition only needs control circuit all the way and ultrasonic-frequency power supply to carry out Excitation, control difficulty is low, it is to avoid two-phase or multiphase supersonic vibration is compounded to form the complicated ultrasonic-frequency power supply of elliptical vibration transducer Development cost, simplify control circuit and ultrasonic-frequency power supply structure, reduce control circuit and ultrasonic-frequency power supply cost, it is easy to accomplish control Circuit processed and ultrasonic-frequency power supply it is integrated, improve system functional reliability, stable work in work has a extensive future.
Description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the top view of schematic structural view of the invention.
Fig. 3 is the front view that ultrasonic elliptical vibratory transducer is singly encouraged in the present invention.
Fig. 4 is the top view that ultrasonic elliptical vibratory transducer is singly encouraged in the present invention.
Fig. 5 is the application example schematic diagram of the present invention.
Label declaration in figure:1. bolt, 2. back shroud, 3. piezoelectric ceramic piece, 4. electrode slice, 5. front shroud, 6. ring flange, 7. elliptical vibration modal transducer, 8. tool heads, 9. front apron, 10. workpiece, 11. inner sleeves, 12. linear bearings, keep off after 13. Plate, 14. reciprocating drive mechanisms, 15. overcoats, 16. ultrasonic-frequency power supplies.
Specific embodiment
With reference to shown in Fig. 1,2,3,4, a kind of single excitation ultrasonic elliptical vibratory burnishing device, including including overcoat 15, straight line Bearing 12, reciprocating drive mechanism 14, housing unit, the single-excitation ultrasonic oval vibration energy converter being placed in housing unit, elliptical vibration mode turn Parallel operation 7 and the tool heads 8 for being arranged on the front end of elliptical vibration modal transducer 7.Described linear bearing 12 is supported on housing unit And overcoat 15 between, linear bearing 12 is sliding straight bearing.Described reciprocating drive mechanism 14 be slider-crank mechanism, one End is fixed on the backboard 13 of housing unit, and the other end is fixed on overcoat 15, and the amplitude of reciprocating drive mechanism 14 is 6mm.
Described housing unit includes front apron 9, inner sleeve 11 and backboard 13;Described single-excitation ultrasonic oval vibration energy converter entirety In cylinder, its back shroud 2, piezoelectric ceramic piece 3, electrode slice 4 and front shroud for including bolt 1 and being sequentially sleeved on bolt 1 5, the ring flange 6 coupled with housing unit is provided with front shroud 5, back shroud 2 and front shroud 5 pass through bolt 1 by back shroud 2nd, piezoelectric ceramic piece 3, electrode slice 4 and front shroud 5 connection is compressed, and constitutes the energy conversion part of single-excitation ultrasonic oval vibration energy converter, can The ultrasonic signal of telecommunication that ultrasonic-frequency power supply 16 is exported is converted to into the longitudinal ultrasonic vibration of single-excitation ultrasonic oval vibration energy converter.Single-excitation ultrasonic oval vibration energy converter Only one group extensional vibration piezoelectric ceramic piece 3, piezoelectric ceramic transducer section diameter 30mm, piezoelectric ceramic piece 3 be PZT-8, size For:Ф30×Ф15×5, the piece number of piezoelectric ceramic piece 3 is 2.
Elliptical vibration modal transducer 7 and front shroud 5 are fabricated to the front end that an one-piece parts are arranged on front shroud 5, ellipse Circular vibration modal transducer 7 includes the composite construction that straight beam and cant beam are constituted, straight beam and cant beam cutting perpendicular to its center axis Face is rectangle, the central axis of straight beam and the central axes of single-excitation ultrasonic oval vibration energy converter, one end of straight beam and ultrasonic transduction The front shroud 5 of device couples, and the other end overhangs, and the section length of side is 12×12mm, long 72mm;One end of cant beam and ultrasonic transducer The connection place of the side connection of the off-center axis of front shroud 5, cant beam central axis and front shroud 5 is apart from the center of front shroud 5 Axial line distance is the middle part connection of 25mm, the other end and straight beam, and the section length of side is 12×12mm.The central axis of cant beam and The central axis of straight beam is arc transition and couples into 30 angles, straight beam and cant beam with the connection place of ultrasonic transducer front shroud 5, Transition arc radius are 5mm, the plane that the geometric centre axes of cant beam and the geometric centre axes of straight beam are formed with it is polished Plane is parallel.
Tool heads 8 are arranged on the front end of elliptical vibration modal transducer 7 by welding;When ultrasonic vibrational energy is shaken from ultrasound Dynamic transducer is delivered to behind the end of elliptical vibration modal transducer 7, is converted to the extensional vibration with certain phase contrast and bending The compound vertical curved composite ultrasonic elliptical vibratory of vibration, that is, be converted to the vertical curved composite ultraphonic of the end of elliptical vibration modal transducer 7 Elliptical vibration;And ultrasonic elliptical vibratory is done together in driving instrument 8 and the end of elliptical vibration modal transducer 7.
Single-excitation ultrasonic oval vibration energy converter is placed in housing unit, and the ring flange 6 of single-excitation ultrasonic oval vibration energy converter is arranged at inner sleeve 11 In fovea superior seam, front apron 9 is arranged on the opposite side of ring flange 6, and to whole single-excitation ultrasonic oval vibration energy converter fixation, backboard are played 13 are arranged on the other end of the inner sleeve 11 without seam,
Natural frequency after single-excitation ultrasonic oval vibration energy converter and elliptical vibration modal transducer 7 couple is 19.84KHz, and impedance is 83 ohm, dynamic electric resistor is 19 ohm, and the output voltage range of ultrasonic-frequency power supply 16 is 0-400V, and current range is 0-4A, output frequency Rate is 19.84 ± 0.01KHz, and ultrasonic-frequency power supply 16 has automatic frequency tracking function in designated frequency range.
With reference to shown in Fig. 5, during system operation, the electrode slice 4 of single-excitation ultrasonic oval vibration energy converter is connected with ultrasonic-frequency power supply 16, works as ultrasound The electrode slice 4 of vibration transducer is accessed after the signal of telecommunication of the output of ultrasonic-frequency power supply 16, due to the inverse piezoelectric effect of piezoelectric ceramic piece 3, Piezoelectric ceramic piece 3 will produce longitudinal ultrasonic vibration, i.e. single-excitation ultrasonic oval vibration energy converter and be converted to the electric energy that ultrasonic-frequency power supply 16 is exported Longitudinal ultrasonic vibration, and drive whole single-excitation ultrasonic oval vibration energy converter system to carry out longitudinal ultrasonic vibration, ultrasonic vibrational energy is from ultrasound Vibration transducer is delivered to behind the end of elliptical vibration modal transducer 7, is converted to the extensional vibration with certain phase contrast and curved Qu Zhendong compound vertical curved composite ultrasonic elliptical vibratory, that is, be converted to the vertical curved compound super of the end of elliptical vibration modal transducer 7 Sound elliptical vibration;And ultrasonic elliptical vibratory is done together in driving instrument 8 and the end of elliptical vibration modal transducer 7.
After on-load voltage runs 10 minutes, single excitation ultrasonic elliptical vibratory burnishing device reaches stable vibration state, this When ultrasonic-frequency power supply 16 regulated output voltage be 220V, electric current is 1.35A, and using laser doppler vibrometer ultrasonic ellipse is measured Vibrate long semi-minor axis amplitude and be respectively 14.3 microns and 5.2 microns, and shown by the double tracks with lissajouf figure calculation function The signal that ripple device is measured to laser doppler vibrometer carries out graphic operation, can obtain the ultrasound that axial ratio is 2.73 oval Oscillation trajectory, fully meets the requirement of ultrasonic elliptical vibratory polishing.When reciprocating drive mechanism 14 and the ultrasonic ellipticity of single excitation are shaken Dynamic system is while when driving instrument 8 carries out compound motion work, the motion polishing area of tool heads 8 is filled compared with One-Dimensional Ultrasonic ultrasound Put and improve 5 times or so, and the uniformity of surface smoothness also improves 50%.

Claims (8)

1. a kind of list encourages ultrasonic elliptical vibratory burnishing device, it is characterised in that:The vibropolish device includes overcoat, linear axis Hold, reciprocating drive mechanism, housing unit, the single-excitation ultrasonic oval vibration energy converter being placed in housing unit, elliptical vibration modal transducer and It is arranged on the tool heads of elliptical vibration modal transducer front end;Described linear bearing is supported between housing unit and overcoat; Described housing unit includes front apron, inner sleeve and backboard;Described reciprocating drive mechanism one end is fixed on housing unit Backboard on, the other end fix on the coat;Described single-excitation ultrasonic oval vibration energy converter integrally be in cylinder, it include bolt and according to The secondary back shroud being set on bolt, piezoelectric ceramic piece, electrode slice and front shroud, are provided with front shroud and couple with housing unit Ring flange, back shroud and front shroud are compressed the connection of back shroud, piezoelectric ceramic piece, electrode slice and front shroud by bolt; Described elliptical vibration modal transducer is arranged on the front end of front shroud, described elliptical vibration modal transducer include straight beam and The composite construction that cant beam is constituted, straight beam and cant beam are rectangle perpendicular to the section of its center axis, the central axis of straight beam and The central axes of single-excitation ultrasonic oval vibration energy converter, one end of straight beam couples with the front shroud of ultrasonic transducer, and the other end overhangs;Tiltedly The middle part connection of the side connection of one end of beam and the front shroud off-center axis of ultrasonic transducer, the other end and straight beam Connect, the central axis of cant beam and the central axis of straight beam are into 0-90 degree angles, straight beam and cant beam and ultrasonic transducer front shroud Connection place is arc transition connection, and transition arc radius are 5mm;The geometric centre axes of cant beam and the geometrical central axis of straight beam The plane that line is formed is parallel with polished surface of the work;Described single-excitation ultrasonic oval vibration energy converter only has one group of extensional vibration piezoelectricity Potsherd, described single-excitation ultrasonic oval vibration energy converter only needs to ultrasonic signal of telecommunication excitation all the way;Described ultrasonic elliptical vibratory length half Axle amplitude is respectively 14.3 microns and 5.2 microns.
2. list according to claim 1 encourages ultrasonic elliptical vibratory burnishing device, it is characterised in that:Described elliptical vibration Modal transducer and front shroud are fabricated to a front end for being integrally provided in front shroud.
3. list according to claim 1 encourages ultrasonic elliptical vibratory burnishing device, it is characterised in that:Described elliptical vibration Modal transducer welding is arranged on protecgulum front edge of board.
4. the list according to claim 1 or 2 or 3 encourages ultrasonic elliptical vibratory burnishing device, it is characterised in that:Described work Tool head is arranged on the front end of elliptical vibration modal transducer by welding.
5. the list according to claim 1 or 2 or 3 encourages ultrasonic elliptical vibratory burnishing device, it is characterised in that:Also include one Individual joint bolt, for tool heads to be connected in the front end of elliptical vibration modal transducer.
6. the list according to claim 1 or 2 or 3 encourages ultrasonic elliptical vibratory burnishing device, it is characterised in that:Also include pressure Trigger structure, described tool heads are connected in the front end of elliptical vibration modal transducer by press plate mechanism.
7. the list according to claim 1 or 2 or 3 encourages ultrasonic elliptical vibratory burnishing device, it is characterised in that:Described is straight Bobbin is held as sliding straight bearing or rolling linear bearing.
8. the list according to claim 1 or 2 or 3 encourages ultrasonic elliptical vibratory burnishing device, it is characterised in that:Described is past Multiple drive mechanism is slider-crank mechanism, eccentric mechanism, screw-nut body, cylinder or hydraulic cylinder reciprocating drive mechanism.
CN201410740536.7A 2014-12-09 2014-12-09 Single excitation ultrasonic elliptic vibration polishing device Active CN104476378B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107584348A (en) * 2017-06-06 2018-01-16 成都飞易达科技有限公司 A kind of building decoration wall surface grinding device
CN107584347A (en) * 2017-06-06 2018-01-16 成都飞易达科技有限公司 A kind of dust-collecting type building wall sanding apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624262B2 (en) * 1991-11-25 1994-03-30 山一電機株式会社 Transverse bending type vibrator
JP4223629B2 (en) * 1999-06-16 2009-02-12 日本特殊陶業株式会社 Transceiver for ultrasonic probe, method for manufacturing the same, and ultrasonic probe using the transducer
CN101362303A (en) * 2008-09-10 2009-02-11 苏州协成模具科技有限公司 Grinding method combining mechanical reciprocation and supersonic vibration
CN103192097B (en) * 2013-05-08 2015-01-07 苏州科技学院 Single driven ultrasonic elliptical vibration turning device
CN204262955U (en) * 2014-12-09 2015-04-15 苏州科技学院 A kind of single excitation ultrasonic elliptical vibratory burnishing device

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