CN104475320B - Single-excitation ultrasonic elliptical vibration micro-machining work platform - Google Patents
Single-excitation ultrasonic elliptical vibration micro-machining work platform Download PDFInfo
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- CN104475320B CN104475320B CN201410740582.7A CN201410740582A CN104475320B CN 104475320 B CN104475320 B CN 104475320B CN 201410740582 A CN201410740582 A CN 201410740582A CN 104475320 B CN104475320 B CN 104475320B
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Abstract
The invention discloses a single-excitation ultrasonic elliptical vibration micro-machining work platform. The single-excitation ultrasonic elliptical vibration micro-machining work platform comprises a vibration isolation platform, a transverse moving work platform, a longitudinal moving work platform, a shell unit, an ultrasonic vibration transducer, an ultrasonic wave power supply, an elliptical vibration mode converter and a small work platform, wherein the ultrasonic vibration transducer is placed in the shell unit; the small work platform is arranged at the front end of the elliptical vibration mode converter; the shell unit comprises a front baffle, a sleeve and a rear baffle; the ultrasonic vibration transducer comprises a bolt, a rear cover plate, a piezoelectric ceramic piece, an electrode plate and a front cover plate; the rear cover plate, the piezoelectric ceramic piece, the electrode plate and the front cover plate sequentially sleeve the bolt; the rear cover plate, the piezoelectric ceramic piece, the electrode plate and the front cover plate are connected to one another and are tightly pressed together via the bolt; the elliptical vibration mode converter is arranged at the front end of the front cover and has a wedge-shaped structure; and longitudinal ultrasonic vibration generated by the ultrasonic vibration transducer can be converted into longitudinal and bent composite ultrasonic elliptical vibration at the tail end of the elliptical vibration mode converter and on the small work platform by the elliptical vibration mode converter, so that workpieces on the small work platform can be driven to perform ultrasonic elliptical vibration.
Description
Technical field
The present invention is designed into the Micrometer-Nanometer Processing Technology field of hard crisp difficult-to-machine material, especially relates to a kind of microfabrication work platforms utilizing single excitation ultrasonic elliptical vibratory to carry out secondary process.
Background technology
The efficient high-quality high reliability processing of hard crisp difficult-to-machine material remains a difficult problem the most in the world.Hard brittle material to be typically characterised by fragility high, fracture toughness is low, elastic limit is with intensity closely, add man-hour, the load born when material exceedes elastic limit, rupture failure will occur, form crackle and pit at machined surface, have a strong impact on its surface quality, working (machining) efficiency and reliability of material.In order to solve a processing difficult problem for this kind of material, various countries develop in manufacture field NEW TYPES OF TOOL MATERIALS one after another, develop new process equipment, test new processing method, try hard to improve the working (machining) efficiency of such material and process reliability.
In order to solve the Ultraprecision Machining problem of hard brittle material with low cost effective manner, during supersonic vibration is applied to process, studies the most widely and have been proven that ultrasonic vibrating machining shows certain superiority at aspects such as improving material removing rate, raising machined surface quality and machining accuracy, reduction workpiece surface damage and prolongation wheel life.In order to give full play to the advantage of ultrasonic vibrating machining, different types of two dimensional ultrasonic vibration process technology is successively proposed with Chinese scholar by Japan.A kind of two dimensional ultrasonic vibration auxiliary machining device for large-sized structural parts processing that Zhao Bo in 2007 et al. proposes, the supersonic vibration in two directions is applied on workpiece by two generators respectively, although be demonstrated by the performance of excellence in all many-sides such as working (machining) efficiency and crudy, but this technology work in-process also exists when load, the phenomenon that during change such as temperature machining condition, vibration velocity is unstable, and the instability of vibration velocity will cause the resonant frequency in Ultrasonic machining to be drifted about, vibration amplitude reduces, working (machining) efficiency reduces, the series of problems such as crudy is unstable, and the regulation of its resonant condition relates to mating of two supersonic generators and transducer and workpiece, implement relatively difficult.
Not enough in order to overcome present in above-mentioned ultrasonic vibrating machining technology and ultrasonic elliptical vibratory technology, the present invention utilizes novel single excitation ultrasonic elliptical vibratory technology, provide a kind of microfabrication work platforms, realize the ultrasonic elliptical vibratory of work platforms and microscale workpieces, this technique improves the job stability of ultrasonic elliptical vibratory system, applied widely, stable performance, easy and simple to handle, it is possible to improve working (machining) efficiency and the crudy of hard brittle material micro parts further.
Summary of the invention
The invention provides a kind of novel list excitation ultrasonic elliptical vibratory microfabrication work platforms, purpose is not enough in order to overcome present in existing supersonic vibration work platforms, simplifies the structure of ultrasonic elliptical vibratory system, reduces the cost, reduces and control difficulty, improve system job stability, the working (machining) efficiency improving hard brittle material micro parts and crudy.
Single excitation ultrasonic elliptical vibratory microfabrication work platforms, including vibration-isolating platform, by bolt-connection transverse shifting work platforms above vibration-isolating platform, vertically move work platforms, housing unit, the single-excitation ultrasonic oval vibration energy converter being placed in housing unit, elliptical vibration modal transducer, the small-sized work platforms being arranged on elliptical vibration modal transducer front end and ultrasonic power by bolt-connection above transverse shifting work platforms.Below elliptical vibration modal transducer end, it is provided with auxiliary support, between elliptical vibration modal transducer end and auxiliary support, is provided with rolling support body.Described housing unit is vertically moving above work platforms by bolt-connection, and described housing unit includes front apron, sleeve and backboard；Described single-excitation ultrasonic oval vibration energy converter outline is cylindrical, it includes bolt and the back shroud being sequentially sleeved on bolt, piezoelectric ceramic piece, electrode slice and front shroud, the ring flange coupled with housing unit it is provided with on front shroud, back shroud, piezoelectric ceramic piece, electrode slice and front shroud are coupled compression by bolt by back shroud and front shroud, constitute the energy conversion part of single-excitation ultrasonic oval vibration energy converter, the ultrasonic electric signal that ultrasonic-frequency power supply exports can be converted to the longitudinal ultrasonic vibration of single-excitation ultrasonic oval vibration energy converter.
Described elliptical vibration modal transducer and front shroud are fabricated to a front end being integrally provided in front shroud, or the welding of elliptical vibration modal transducer is arranged on the front end of front shroud, described elliptical vibration modal transducer is inclined wedge-shaped structure, the former generally cuboid of inclined wedge-shaped structure elliptical vibration modal transducer, inclined wedge-shaped structure is formed after being cut a part along its side of single-excitation ultrasonic oval vibration energy converter axis direction, formed in two sides of inclined wedge-shaped, not cut one side is parallel to single-excitation ultrasonic oval vibration energy converter axis, the another side being cut becomes 3-30 degree angle with single-excitation ultrasonic oval vibration energy converter axis.It is provided with transition arc in the connection place of elliptical vibration modal transducer Yu ultrasonic transducer front shroud.In inclined wedge-shaped structure elliptical vibration modal transducer, the side of two approximate trapezoid is parallel with plane to be processed.
The molectron that elliptical vibration modal transducer is constituted after being arranged on single-excitation ultrasonic oval vibration energy converter front end is referred to as single excitation ultrasonic elliptical vibratory transducer, the purpose making elliptical vibration modal transducer become inclined wedge-shaped structure is to change single mode of oscillation encouraging ultrasonic elliptical vibratory transducer so that it is longitudinal vibration mode frequency and flexural vibration mode frequency are close or equal；Existence due to inclined wedge-shaped structure elliptical vibration modal transducer, the longitudinal ultrasonic vibration that single-excitation ultrasonic oval vibration energy converter produces is after being delivered to inclined wedge-shaped structure elliptical vibration modal transducer, end at inclined wedge-shaped structure elliptical vibration modal transducer is decomposed into a part of extensional vibration component and a part of bending vibration component, and two oscillating component there is certain phase contrast, and then be compounded to form elliptic vibrations at the end of inclined wedge-shaped structure elliptical vibration modal transducer.
Small-sized work platforms couples the front end being arranged on elliptical vibration modal transducer by welding, joint bolt or press plate mechanism；When ultrasonic vibrational energy is after single-excitation ultrasonic oval vibration energy converter is delivered to elliptical vibration modal transducer end, the extensional vibration being converted to have certain phase contrast and the compound vertical curved composite ultrasonic elliptical vibratory of bending vibration, be i.e. converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer end；And drive small-sized work platforms to do ultrasonic elliptical vibratory together with elliptical vibration modal transducer end, and then the workpiece on small-sized workbench is driven to carry out ultrasonic elliptical vibratory.
Single-excitation ultrasonic oval vibration energy converter is placed in housing unit, the ring flange of single-excitation ultrasonic oval vibration energy converter is arranged in the fovea superior seam of sleeve, front apron is arranged on the opposite side of ring flange, whole single-excitation ultrasonic oval vibration energy converter is played fixation, backboard is arranged on sleeve does not has the other end of seam, prevent the foreign material such as dust, iron filings from entering in housing unit, affect single-excitation ultrasonic oval vibration energy converter service behaviour；Compare the supersonic vibration Work platform system that existing document is introduced, the advantages such as this list excitation ultrasonic elliptical vibratory microfabrication work platforms has that power capacity is big, energy conversion efficiency is high, simple in construction, easy to manufacture, low cost, the rigidity of structure big, it is simple to control drive system and vibration stable work in work is stable.
Further, described single-excitation ultrasonic oval vibration energy converter only has one group of extensional vibration piezoelectric ceramic piece.
Further, described single-excitation ultrasonic oval vibration energy converter has only to a road ultrasonic electric signal excitation.
Further, the operating frequency range of described single-excitation ultrasonic oval vibration energy converter is 18kHz-40kHz.
Present invention employs mechanical vibration MODAL TRANSFORMATION OF A mechanism and the extensional vibration of single-excitation ultrasonic oval vibration energy converter is converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer end and vibration head, simplify single overall structure encouraging ultrasonic elliptical vibratory work platforms, greatly reduce the complexity of vibrational system, reduce manufacture, assembly difficulty and production cost；Additionally this invention only needs a road control circuit and ultrasonic-frequency power supply to encourage, control difficulty low, avoid two-phase or multiphase supersonic vibration and be compounded to form the complicated ultrasonic-frequency power supply development cost of elliptical vibration transducer, simplify control circuit and ultrasonic-frequency power supply structure, reduce control circuit and ultrasonic-frequency power supply cost, it is easy to accomplish control circuit and ultrasonic-frequency power supply integrated, improve system functional reliability, stable work in work, has a extensive future.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the top view of present configuration schematic diagram.
Fig. 3 is single front view encouraging ultrasonic elliptical vibratory transducer in the present invention.
Fig. 4 is single top view encouraging ultrasonic elliptical vibratory transducer in the present invention.
Fig. 5 is the application example schematic diagram of the present invention.
Label declaration in figure: 1. bolt, 2. back shroud, 3. piezoelectric ceramic piece, 4. electrode slice, 5. front shroud, 6. ring flange, 7. elliptical vibration modal transducer, the most small-sized work platforms, 9. front apron, 10. sleeve, 11. backboards, 12. ultrasonic-frequency power supplies, 13. vertically move work platforms, 14. transverse shifting work platformses, 15. vibration-isolating platforms, 16. auxiliary support, 17. rolling support bodies.
Detailed description of the invention
Shown in Fig. 1,2,3,4, single excitation ultrasonic elliptical vibratory microfabrication work platforms, including vibration-isolating platform 15, by bolt-connection transverse shifting work platforms 14 above vibration-isolating platform 15, by bolt-connection vertically moving work platforms 13, housing unit, the single-excitation ultrasonic oval vibration energy converter being placed in housing unit, ultrasonic-frequency power supply 12, elliptical vibration modal transducer 7 and being arranged on the small-sized work platforms 8 of elliptical vibration modal transducer 7 front end above transverse shifting work platforms 14.Below elliptical vibration modal transducer 7 end, it is provided with auxiliary support 16, supports at elliptical vibration modal transducer 7 end and auxiliary and be provided with rolling support body 17 between 16.Described housing unit is vertically moving above work platforms 13 by bolt-connection, and transverse shifting work platforms 14 and the impulse stroke vertically moving work platforms 13 are 100mm.
Described housing unit includes front apron 9, sleeve 10 and backboard 11；Described single-excitation ultrasonic oval vibration energy converter outline is cylindrical, it includes bolt 1 and the back shroud 2 being sequentially sleeved on bolt 1, piezoelectric ceramic piece 3, electrode slice 4 and front shroud 5, the ring flange 6 coupled with housing unit it is provided with on front shroud 5, back shroud 2, piezoelectric ceramic piece 3, electrode slice 4 and front shroud 5 are coupled compression by bolt 1 by back shroud 2 and front shroud 5, constitute the energy conversion part of single-excitation ultrasonic oval vibration energy converter, the ultrasonic electric signal that ultrasonic-frequency power supply 12 exports can be converted to the longitudinal ultrasonic vibration of single-excitation ultrasonic oval vibration energy converter.Single-excitation ultrasonic oval vibration energy converter only has one group of extensional vibration piezoelectric ceramic piece 3, piezoelectric ceramic transducer section diameter 30mm, and piezoelectric ceramic piece 3 is PZT-8, a size of:Ф 30 ×Ф 15 × 5, the sheet number of piezoelectric ceramic piece 3 is 2.
Elliptical vibration modal transducer 7 and front shroud 5 are fabricated to an one-piece parts and are arranged on the front end of front shroud 5, elliptical vibration modal transducer 7 generally inclined wedge-shaped structure, and the former generally cuboid of inclined wedge-shaped structure elliptical vibration modal transducer 7, the cross section length of side is 15×15mm, long 40mm, inclined wedge-shaped structure is formed after being cut a part along its side of single-excitation ultrasonic oval vibration energy converter axis direction, formed in two sides of inclined wedge-shaped, not cut one side is parallel to single-excitation ultrasonic oval vibration energy converter axis, and the another side being cut becomes 10 degree of angles with single-excitation ultrasonic oval vibration energy converter axis.Being provided with transition arc in the connection place of elliptical vibration modal transducer 7 with ultrasonic transducer front shroud 5, arc radius is 5mm, and in inclined wedge-shaped structure elliptical vibration modal transducer 7, the side of two approximate trapezoid is parallel with plane to be processed.
Small-sized work platforms 8 is arranged on the front end of elliptical vibration modal transducer 7 by welding；When ultrasonic vibrational energy is after single-excitation ultrasonic oval vibration energy converter is delivered to elliptical vibration modal transducer 7 end, the extensional vibration being converted to have certain phase contrast and the compound vertical curved composite ultrasonic elliptical vibratory of bending vibration, be i.e. converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer 7 end；And drive small-sized work platforms 8 to do ultrasonic elliptical vibratory together with elliptical vibration modal transducer 7 end, and then drive the workpiece on small-sized workbench to carry out ultrasonic elliptical vibratory, the work top of small-sized work platforms 8 is 12×8mm, workpiece can use paraffin or glue bonding on the table, it is possible to use screw or pressing plate couple on the table.
Single-excitation ultrasonic oval vibration energy converter is placed in housing unit, the ring flange 6 of single-excitation ultrasonic oval vibration energy converter is arranged in the fovea superior seam of sleeve 10, and front apron 9 is arranged on the opposite side of ring flange 6, and whole single-excitation ultrasonic oval vibration energy converter is risen fixation, backboard 11 is arranged on sleeve 10 does not has the other end of seam
Natural frequency after single-excitation ultrasonic oval vibration energy converter and elliptical vibration modal transducer 7 couple is 19.84KHz, impedance is 83 ohm, dynamic electric resistor is 19 ohm, ultrasonic-frequency power supply 12 output voltage range is 0-400V, current range is 0-4A, output frequency is 19.84 ± 0.01KHz, and ultrasonic-frequency power supply 12 has automatic frequency tracking function in designated frequency range.
Shown in Fig. 5, during operation, the electrode slice 4 of single-excitation ultrasonic oval vibration energy converter is connected with ultrasonic-frequency power supply 12, after the electrode slice 4 of single-excitation ultrasonic oval vibration energy converter accesses the signal of telecommunication of ultrasonic-frequency power supply 12 output, inverse piezoelectric effect due to piezoelectric ceramic piece 3, piezoelectric ceramic piece 3 will produce longitudinal ultrasonic vibration, the electric energy that ultrasonic-frequency power supply 12 exports is converted to longitudinal ultrasonic vibration by i.e. single-excitation ultrasonic oval vibration energy converter, and drive whole single-excitation ultrasonic oval vibration energy converter system to carry out longitudinal ultrasonic vibration, ultrasonic vibrational energy is after single-excitation ultrasonic oval vibration energy converter is delivered to elliptical vibration modal transducer 7 end, the extensional vibration being converted to there is certain phase contrast and the compound vertical curved composite ultrasonic elliptical vibratory of bending vibration, i.e. be converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer 7 end；And drive small-sized work platforms 8 to do ultrasonic elliptical vibratory together with elliptical vibration modal transducer 7 end.
After on-load voltage runs 10 minutes, single excitation ultrasonic elliptical vibratory microfabrication work platforms reaches stable vibration state, now the regulated output voltage of ultrasonic-frequency power supply 12 is 220V, electric current is 1.35A, use laser doppler vibrometer to record ultrasonic elliptical vibratory long semi-minor axis amplitude and be respectively 14.3 microns and 5.2 microns, and the signal recorded laser doppler vibrometer by having the dual trace oscilloscope of lissajouf figure calculation function carries out graphic operation, the ultrasonic elliptical vibratory track that axial ratio is 2.73 can be obtained, fully meet the requirement of ultrasonic elliptical vibratory microfabrication work platforms.
Claims (6)
1. single excitation ultrasonic elliptical vibratory microfabrication work platforms, it is characterised in that: this list encourages ultrasonic elliptical vibratory microfabrication work platforms to include vibration-isolating platform, by bolt-connection transverse shifting work platforms above vibration-isolating platform, vertically move work platforms, housing unit, the single-excitation ultrasonic oval vibration energy converter being placed in housing unit, elliptical vibration modal transducer, the small-sized work platforms being arranged on elliptical vibration modal transducer front end and ultrasonic power by bolt-connection above transverse shifting work platforms；Below elliptical vibration modal transducer end, it is provided with auxiliary support, between elliptical vibration modal transducer end and auxiliary support, is provided with rolling support body；Described housing unit is vertically moving above work platforms by bolt-connection, and housing unit includes front apron, sleeve and backboard；Described single-excitation ultrasonic oval vibration energy converter outline is cylindrical, it includes bolt and the back shroud being sequentially sleeved on bolt, piezoelectric ceramic piece, electrode slice and front shroud, it is provided with the ring flange coupled with housing unit, back shroud and front shroud on front shroud, by bolt, back shroud, piezoelectric ceramic piece, electrode slice and front shroud is coupled compression；Described elliptical vibration modal transducer is arranged on the front end of front shroud, described elliptical vibration modal transducer is inclined wedge-shaped structure, the former generally cuboid of inclined wedge-shaped structure elliptical vibration modal transducer, inclined wedge-shaped structure is formed after being cut a part along its side of single-excitation ultrasonic oval vibration energy converter axis direction, formed in two sides of inclined wedge-shaped, not cut one side is parallel to single-excitation ultrasonic oval vibration energy converter axis, and the another side being cut becomes 3-30 degree angle with single-excitation ultrasonic oval vibration energy converter axis；It is provided with transition arc in the connection place of elliptical vibration modal transducer Yu single-excitation ultrasonic oval vibration energy converter front shroud.
Single excitation ultrasonic elliptical vibratory microfabrication work platforms the most according to claim 1, it is characterised in that: described elliptical vibration modal transducer and front shroud are fabricated to a front end being integrally provided in front shroud.
Single excitation ultrasonic elliptical vibratory microfabrication work platforms the most according to claim 1, it is characterised in that: described elliptical vibration modal transducer welding is arranged on front shroud front end.
4. encourage ultrasonic elliptical vibratory microfabrication work platforms according to the list described in claim 1 or 2 or 3, it is characterised in that: described small-sized work platforms is arranged on the front end of elliptical vibration modal transducer by welding.
5. encourage ultrasonic elliptical vibratory microfabrication work platforms according to the list described in claim 1 or 2 or 3, it is characterised in that: also include joint bolt, for small-sized work platforms being connected in the front end of elliptical vibration modal transducer.
6. encourage ultrasonic elliptical vibratory microfabrication work platforms according to the list described in claim 1 or 2 or 3, it is characterised in that: also include that press plate mechanism, described small-sized work platforms are connected in the front end of elliptical vibration modal transducer by press plate mechanism.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410740582.7A CN104475320B (en) | 2014-12-09 | 2014-12-09 | Single-excitation ultrasonic elliptical vibration micro-machining work platform |
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| CN201410740582.7A CN104475320B (en) | 2014-12-09 | 2014-12-09 | Single-excitation ultrasonic elliptical vibration micro-machining work platform |
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| CN104475320B true CN104475320B (en) | 2017-01-11 |
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| CN107552368A (en) * | 2017-10-31 | 2018-01-09 | 哈尔滨工业大学 | A kind of sandwich elliptical ultrasonic vibration system based on symmetrical structure |
| CN109227152A (en) * | 2018-11-01 | 2019-01-18 | 天津科技大学 | A kind of two-dimension vibration platform for precision ultrasonic processing |
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| ES2503517B1 (en) * | 2013-04-03 | 2015-07-09 | José Antonio TEJERO LÓPEZ | Clamping device for workbenches and other uses |
| CN103406250B (en) * | 2013-08-26 | 2015-08-05 | 苏州科技学院 | Single excitation ultrasonic elliptical vibratory transducer |
| CN103769958B (en) * | 2014-01-27 | 2017-01-04 | 河北工业大学 | A kind of supersonic vibration platform |
| CN204320631U (en) * | 2014-12-09 | 2015-05-13 | 苏州科技学院 | Single excitation ultrasonic elliptical vibratory microfabrication workbench |
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Inventor after: Cao Ziyang Inventor after: Yang Xinming Inventor after: Song Na Inventor after: Li Hua Inventor after: Guo Lihua Inventor after: Yin Zhen Inventor after: Yang Jianfeng Inventor after: Qi Wenchun Inventor after: Huang Ying Inventor after: Zhang Lei Inventor before: Yin Zhen Inventor before: Yang Xinming Inventor before: Cao Ziyang Inventor before: Guo Lihua Inventor before: Li Hua Inventor before: Wang Bangfu Inventor before: Yang Jianfeng Inventor before: Wu Yongzhi Inventor before: Wu Lei Inventor before: Xu Tie |
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