JPH0642199Y2 - 欠陥弁別回路 - Google Patents

欠陥弁別回路

Info

Publication number
JPH0642199Y2
JPH0642199Y2 JP1986137810U JP13781086U JPH0642199Y2 JP H0642199 Y2 JPH0642199 Y2 JP H0642199Y2 JP 1986137810 U JP1986137810 U JP 1986137810U JP 13781086 U JP13781086 U JP 13781086U JP H0642199 Y2 JPH0642199 Y2 JP H0642199Y2
Authority
JP
Japan
Prior art keywords
signal
circuit
scanning
discrimination
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986137810U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6344149U (enExample
Inventor
雅良 島田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1986137810U priority Critical patent/JPH0642199Y2/ja
Publication of JPS6344149U publication Critical patent/JPS6344149U/ja
Application granted granted Critical
Publication of JPH0642199Y2 publication Critical patent/JPH0642199Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1986137810U 1986-09-10 1986-09-10 欠陥弁別回路 Expired - Lifetime JPH0642199Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986137810U JPH0642199Y2 (ja) 1986-09-10 1986-09-10 欠陥弁別回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986137810U JPH0642199Y2 (ja) 1986-09-10 1986-09-10 欠陥弁別回路

Publications (2)

Publication Number Publication Date
JPS6344149U JPS6344149U (enExample) 1988-03-24
JPH0642199Y2 true JPH0642199Y2 (ja) 1994-11-02

Family

ID=31042211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986137810U Expired - Lifetime JPH0642199Y2 (ja) 1986-09-10 1986-09-10 欠陥弁別回路

Country Status (1)

Country Link
JP (1) JPH0642199Y2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957886A (enExample) * 1972-09-30 1974-06-05
JPS5190873U (enExample) * 1975-01-17 1976-07-21
JPS52125389A (en) * 1976-04-13 1977-10-21 Omron Tateisi Electronics Co Defect inspection apparatus

Also Published As

Publication number Publication date
JPS6344149U (enExample) 1988-03-24

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