JPH0642163Y2 - 光学式形状測定装置 - Google Patents

光学式形状測定装置

Info

Publication number
JPH0642163Y2
JPH0642163Y2 JP1880989U JP1880989U JPH0642163Y2 JP H0642163 Y2 JPH0642163 Y2 JP H0642163Y2 JP 1880989 U JP1880989 U JP 1880989U JP 1880989 U JP1880989 U JP 1880989U JP H0642163 Y2 JPH0642163 Y2 JP H0642163Y2
Authority
JP
Japan
Prior art keywords
light
measured
focus error
shape measuring
arithmetic processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1880989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02110804U (enrdf_load_html_response
Inventor
健太 御厨
智昭 南光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1880989U priority Critical patent/JPH0642163Y2/ja
Publication of JPH02110804U publication Critical patent/JPH02110804U/ja
Application granted granted Critical
Publication of JPH0642163Y2 publication Critical patent/JPH0642163Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1880989U 1989-02-20 1989-02-20 光学式形状測定装置 Expired - Lifetime JPH0642163Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1880989U JPH0642163Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1880989U JPH0642163Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Publications (2)

Publication Number Publication Date
JPH02110804U JPH02110804U (enrdf_load_html_response) 1990-09-05
JPH0642163Y2 true JPH0642163Y2 (ja) 1994-11-02

Family

ID=31233780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1880989U Expired - Lifetime JPH0642163Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Country Status (1)

Country Link
JP (1) JPH0642163Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH02110804U (enrdf_load_html_response) 1990-09-05

Similar Documents

Publication Publication Date Title
US4850673A (en) Optical scanning apparatus which detects scanning spot focus error
JPH0363001B2 (enrdf_load_html_response)
EP0900356A1 (en) Optical measurement
JP2010121960A (ja) 測定装置及び被検物の測定方法
JPS59116007A (ja) 表面の測定方法
US5995215A (en) Autocollimator with grating
JPS5979104A (ja) 光学装置
JPH0792925B2 (ja) 光デイスク装置の光ヘツド
JPH0642163Y2 (ja) 光学式形状測定装置
JP2720749B2 (ja) 光スポット歪測定調整装置
JPH0370859B2 (enrdf_load_html_response)
JPS6024401B2 (ja) 被測定物の物理定数を測定する方法
JP4580579B2 (ja) 表面形状測定方法および表面形状測定装置
JPH0710244Y2 (ja) 光学式形状測定装置
JPH11132940A (ja) 複屈折測定装置及び複屈折測定方法
JP2966950B2 (ja) 試料変位測定装置
JPH0471453B2 (enrdf_load_html_response)
JPH02187933A (ja) 傾き角測定方法
JPH0449887B2 (enrdf_load_html_response)
JP2808713B2 (ja) 光学式微小変位測定装置
JPH0416896Y2 (enrdf_load_html_response)
JPH0921981A (ja) 平行光調整装置
JPH11325848A (ja) 非球面形状測定装置
JP2002329338A (ja) 光ヘッドの調整方法及び装置
JPH02132310A (ja) シアリング干渉計の補正方法