JPH0641124Y2 - 試料高さ検出機構 - Google Patents

試料高さ検出機構

Info

Publication number
JPH0641124Y2
JPH0641124Y2 JP11364788U JP11364788U JPH0641124Y2 JP H0641124 Y2 JPH0641124 Y2 JP H0641124Y2 JP 11364788 U JP11364788 U JP 11364788U JP 11364788 U JP11364788 U JP 11364788U JP H0641124 Y2 JPH0641124 Y2 JP H0641124Y2
Authority
JP
Japan
Prior art keywords
sample
vacuum chamber
chamber
height
photocoupler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11364788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235007U (enExample
Inventor
敏則 篠岡
誠 窪山
裕博 若月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11364788U priority Critical patent/JPH0641124Y2/ja
Publication of JPH0235007U publication Critical patent/JPH0235007U/ja
Application granted granted Critical
Publication of JPH0641124Y2 publication Critical patent/JPH0641124Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11364788U 1988-08-30 1988-08-30 試料高さ検出機構 Expired - Lifetime JPH0641124Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11364788U JPH0641124Y2 (ja) 1988-08-30 1988-08-30 試料高さ検出機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11364788U JPH0641124Y2 (ja) 1988-08-30 1988-08-30 試料高さ検出機構

Publications (2)

Publication Number Publication Date
JPH0235007U JPH0235007U (enExample) 1990-03-06
JPH0641124Y2 true JPH0641124Y2 (ja) 1994-10-26

Family

ID=31353670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11364788U Expired - Lifetime JPH0641124Y2 (ja) 1988-08-30 1988-08-30 試料高さ検出機構

Country Status (1)

Country Link
JP (1) JPH0641124Y2 (enExample)

Also Published As

Publication number Publication date
JPH0235007U (enExample) 1990-03-06

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