JPH0235007U - - Google Patents
Info
- Publication number
- JPH0235007U JPH0235007U JP11364788U JP11364788U JPH0235007U JP H0235007 U JPH0235007 U JP H0235007U JP 11364788 U JP11364788 U JP 11364788U JP 11364788 U JP11364788 U JP 11364788U JP H0235007 U JPH0235007 U JP H0235007U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum chamber
- height
- exchange vacuum
- photocoupler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11364788U JPH0641124Y2 (ja) | 1988-08-30 | 1988-08-30 | 試料高さ検出機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11364788U JPH0641124Y2 (ja) | 1988-08-30 | 1988-08-30 | 試料高さ検出機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0235007U true JPH0235007U (enExample) | 1990-03-06 |
| JPH0641124Y2 JPH0641124Y2 (ja) | 1994-10-26 |
Family
ID=31353670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11364788U Expired - Lifetime JPH0641124Y2 (ja) | 1988-08-30 | 1988-08-30 | 試料高さ検出機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641124Y2 (enExample) |
-
1988
- 1988-08-30 JP JP11364788U patent/JPH0641124Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0641124Y2 (ja) | 1994-10-26 |
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