JPH0640954Y2 - ねじ溝真空ポンプ - Google Patents
ねじ溝真空ポンプInfo
- Publication number
- JPH0640954Y2 JPH0640954Y2 JP764788U JP764788U JPH0640954Y2 JP H0640954 Y2 JPH0640954 Y2 JP H0640954Y2 JP 764788 U JP764788 U JP 764788U JP 764788 U JP764788 U JP 764788U JP H0640954 Y2 JPH0640954 Y2 JP H0640954Y2
- Authority
- JP
- Japan
- Prior art keywords
- stator
- vacuum pump
- rotor
- housing
- thread groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP764788U JPH0640954Y2 (ja) | 1988-01-26 | 1988-01-26 | ねじ溝真空ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP764788U JPH0640954Y2 (ja) | 1988-01-26 | 1988-01-26 | ねじ溝真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01113191U JPH01113191U (US06312121-20011106-C00033.png) | 1989-07-31 |
JPH0640954Y2 true JPH0640954Y2 (ja) | 1994-10-26 |
Family
ID=31212835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP764788U Expired - Lifetime JPH0640954Y2 (ja) | 1988-01-26 | 1988-01-26 | ねじ溝真空ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0640954Y2 (US06312121-20011106-C00033.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6926493B1 (en) * | 1997-06-27 | 2005-08-09 | Ebara Corporation | Turbo-molecular pump |
JP2006170217A (ja) * | 1997-06-27 | 2006-06-29 | Ebara Corp | ターボ分子ポンプ |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022062902A (ja) * | 2020-10-09 | 2022-04-21 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わる回転円筒体 |
-
1988
- 1988-01-26 JP JP764788U patent/JPH0640954Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6926493B1 (en) * | 1997-06-27 | 2005-08-09 | Ebara Corporation | Turbo-molecular pump |
JP2006170217A (ja) * | 1997-06-27 | 2006-06-29 | Ebara Corp | ターボ分子ポンプ |
Also Published As
Publication number | Publication date |
---|---|
JPH01113191U (US06312121-20011106-C00033.png) | 1989-07-31 |
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