JPH0639294Y2 - マスフロ−コントロ−ラ - Google Patents

マスフロ−コントロ−ラ

Info

Publication number
JPH0639294Y2
JPH0639294Y2 JP5514487U JP5514487U JPH0639294Y2 JP H0639294 Y2 JPH0639294 Y2 JP H0639294Y2 JP 5514487 U JP5514487 U JP 5514487U JP 5514487 U JP5514487 U JP 5514487U JP H0639294 Y2 JPH0639294 Y2 JP H0639294Y2
Authority
JP
Japan
Prior art keywords
gas
mass flow
flow controller
inspection
supply gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5514487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63161330U (en:Method
Inventor
純一 高原
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP5514487U priority Critical patent/JPH0639294Y2/ja
Publication of JPS63161330U publication Critical patent/JPS63161330U/ja
Application granted granted Critical
Publication of JPH0639294Y2 publication Critical patent/JPH0639294Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
  • Examining Or Testing Airtightness (AREA)
JP5514487U 1987-04-10 1987-04-10 マスフロ−コントロ−ラ Expired - Lifetime JPH0639294Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5514487U JPH0639294Y2 (ja) 1987-04-10 1987-04-10 マスフロ−コントロ−ラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5514487U JPH0639294Y2 (ja) 1987-04-10 1987-04-10 マスフロ−コントロ−ラ

Publications (2)

Publication Number Publication Date
JPS63161330U JPS63161330U (en:Method) 1988-10-21
JPH0639294Y2 true JPH0639294Y2 (ja) 1994-10-12

Family

ID=30882782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5514487U Expired - Lifetime JPH0639294Y2 (ja) 1987-04-10 1987-04-10 マスフロ−コントロ−ラ

Country Status (1)

Country Link
JP (1) JPH0639294Y2 (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006025467A1 (ja) * 2004-08-31 2006-03-09 Asahi Organic Chemicals Industry Co., Ltd. 流体制御装置
WO2006025550A1 (ja) * 2004-08-31 2006-03-09 Asahi Organic Chemicals Industry Co., Ltd. 流体制御装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006025467A1 (ja) * 2004-08-31 2006-03-09 Asahi Organic Chemicals Industry Co., Ltd. 流体制御装置
WO2006025550A1 (ja) * 2004-08-31 2006-03-09 Asahi Organic Chemicals Industry Co., Ltd. 流体制御装置

Also Published As

Publication number Publication date
JPS63161330U (en:Method) 1988-10-21

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