JPH0639294Y2 - マスフロ−コントロ−ラ - Google Patents
マスフロ−コントロ−ラInfo
- Publication number
- JPH0639294Y2 JPH0639294Y2 JP5514487U JP5514487U JPH0639294Y2 JP H0639294 Y2 JPH0639294 Y2 JP H0639294Y2 JP 5514487 U JP5514487 U JP 5514487U JP 5514487 U JP5514487 U JP 5514487U JP H0639294 Y2 JPH0639294 Y2 JP H0639294Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- mass flow
- flow controller
- inspection
- supply gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 27
- 239000007789 gas Substances 0.000 description 89
- 238000007789 sealing Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Examining Or Testing Airtightness (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5514487U JPH0639294Y2 (ja) | 1987-04-10 | 1987-04-10 | マスフロ−コントロ−ラ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5514487U JPH0639294Y2 (ja) | 1987-04-10 | 1987-04-10 | マスフロ−コントロ−ラ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63161330U JPS63161330U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-10-21 |
| JPH0639294Y2 true JPH0639294Y2 (ja) | 1994-10-12 |
Family
ID=30882782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5514487U Expired - Lifetime JPH0639294Y2 (ja) | 1987-04-10 | 1987-04-10 | マスフロ−コントロ−ラ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639294Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006025467A1 (ja) * | 2004-08-31 | 2006-03-09 | Asahi Organic Chemicals Industry Co., Ltd. | 流体制御装置 |
| WO2006025550A1 (ja) * | 2004-08-31 | 2006-03-09 | Asahi Organic Chemicals Industry Co., Ltd. | 流体制御装置 |
-
1987
- 1987-04-10 JP JP5514487U patent/JPH0639294Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006025467A1 (ja) * | 2004-08-31 | 2006-03-09 | Asahi Organic Chemicals Industry Co., Ltd. | 流体制御装置 |
| WO2006025550A1 (ja) * | 2004-08-31 | 2006-03-09 | Asahi Organic Chemicals Industry Co., Ltd. | 流体制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63161330U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-10-21 |