JPH0636926Y2 - イオン生成装置 - Google Patents
イオン生成装置Info
- Publication number
- JPH0636926Y2 JPH0636926Y2 JP1988018139U JP1813988U JPH0636926Y2 JP H0636926 Y2 JPH0636926 Y2 JP H0636926Y2 JP 1988018139 U JP1988018139 U JP 1988018139U JP 1813988 U JP1813988 U JP 1813988U JP H0636926 Y2 JPH0636926 Y2 JP H0636926Y2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- electrode
- voltage
- thin film
- ion generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 40
- 239000010409 thin film Substances 0.000 claims description 35
- 230000006698 induction Effects 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 8
- 239000003990 capacitor Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Dot-Matrix Printers And Others (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988018139U JPH0636926Y2 (ja) | 1988-02-16 | 1988-02-16 | イオン生成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988018139U JPH0636926Y2 (ja) | 1988-02-16 | 1988-02-16 | イオン生成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01122941U JPH01122941U (enrdf_load_stackoverflow) | 1989-08-21 |
| JPH0636926Y2 true JPH0636926Y2 (ja) | 1994-09-28 |
Family
ID=31232514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988018139U Expired - Lifetime JPH0636926Y2 (ja) | 1988-02-16 | 1988-02-16 | イオン生成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636926Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06215854A (ja) * | 1993-01-13 | 1994-08-05 | Japan Vilene Co Ltd | 放電用電極基材 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62105163A (ja) * | 1985-10-31 | 1987-05-15 | Canon Inc | イオン発生装置 |
-
1988
- 1988-02-16 JP JP1988018139U patent/JPH0636926Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01122941U (enrdf_load_stackoverflow) | 1989-08-21 |
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