JPH0636480Y2 - チャンバ覗窓用ｏリングの過熱防止構造 - Google Patents
チャンバ覗窓用ｏリングの過熱防止構造Info
- Publication number
- JPH0636480Y2 JPH0636480Y2 JP1134388U JP1134388U JPH0636480Y2 JP H0636480 Y2 JPH0636480 Y2 JP H0636480Y2 JP 1134388 U JP1134388 U JP 1134388U JP 1134388 U JP1134388 U JP 1134388U JP H0636480 Y2 JPH0636480 Y2 JP H0636480Y2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- chamber
- viewing window
- cooling water
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002265 prevention Effects 0.000 title claims 2
- 239000000498 cooling water Substances 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 10
- 239000005357 flat glass Substances 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000013021 overheating Methods 0.000 description 3
- 244000144985 peep Species 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1134388U JPH0636480Y2 (ja) | 1988-01-29 | 1988-01-29 | チャンバ覗窓用ｏリングの過熱防止構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1134388U JPH0636480Y2 (ja) | 1988-01-29 | 1988-01-29 | チャンバ覗窓用ｏリングの過熱防止構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01116400U JPH01116400U (enrdf_load_html_response) | 1989-08-04 |
| JPH0636480Y2 true JPH0636480Y2 (ja) | 1994-09-21 |
Family
ID=31219815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1134388U Expired - Lifetime JPH0636480Y2 (ja) | 1988-01-29 | 1988-01-29 | チャンバ覗窓用ｏリングの過熱防止構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636480Y2 (enrdf_load_html_response) |
-
1988
- 1988-01-29 JP JP1134388U patent/JPH0636480Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01116400U (enrdf_load_html_response) | 1989-08-04 |
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