JPH0636430Y2 - 循環式クリーン恒温器 - Google Patents
循環式クリーン恒温器Info
- Publication number
- JPH0636430Y2 JPH0636430Y2 JP10949288U JP10949288U JPH0636430Y2 JP H0636430 Y2 JPH0636430 Y2 JP H0636430Y2 JP 10949288 U JP10949288 U JP 10949288U JP 10949288 U JP10949288 U JP 10949288U JP H0636430 Y2 JPH0636430 Y2 JP H0636430Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- incubator
- temperature
- gasket
- cleanliness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003749 cleanliness Effects 0.000 claims description 24
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 5
- 239000000428 dust Substances 0.000 description 15
- 238000002474 experimental method Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000010410 dusting Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 3
- 229920000544 Gore-Tex Polymers 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Other Air-Conditioning Systems (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10949288U JPH0636430Y2 (ja) | 1988-08-19 | 1988-08-19 | 循環式クリーン恒温器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10949288U JPH0636430Y2 (ja) | 1988-08-19 | 1988-08-19 | 循環式クリーン恒温器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0230829U JPH0230829U (enrdf_load_stackoverflow) | 1990-02-27 |
| JPH0636430Y2 true JPH0636430Y2 (ja) | 1994-09-21 |
Family
ID=31345783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10949288U Expired - Lifetime JPH0636430Y2 (ja) | 1988-08-19 | 1988-08-19 | 循環式クリーン恒温器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636430Y2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2624597B2 (ja) * | 1991-12-27 | 1997-06-25 | タバイエスペック株式会社 | クリーンオーブン |
| JP4789352B2 (ja) * | 2001-06-19 | 2011-10-12 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
| JP2007307445A (ja) * | 2006-05-16 | 2007-11-29 | Espec Corp | エアーフィルタユニット、及びこのエアーフィルタユニットを備えた熱処理装置 |
-
1988
- 1988-08-19 JP JP10949288U patent/JPH0636430Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230829U (enrdf_load_stackoverflow) | 1990-02-27 |
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