JPH0230829U - - Google Patents
Info
- Publication number
- JPH0230829U JPH0230829U JP10949288U JP10949288U JPH0230829U JP H0230829 U JPH0230829 U JP H0230829U JP 10949288 U JP10949288 U JP 10949288U JP 10949288 U JP10949288 U JP 10949288U JP H0230829 U JPH0230829 U JP H0230829U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- gasket
- thermostatic chamber
- flexible
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003749 cleanliness Effects 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims 1
- 238000002474 experimental method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Other Air-Conditioning Systems (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10949288U JPH0636430Y2 (ja) | 1988-08-19 | 1988-08-19 | 循環式クリーン恒温器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10949288U JPH0636430Y2 (ja) | 1988-08-19 | 1988-08-19 | 循環式クリーン恒温器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0230829U true JPH0230829U (enrdf_load_stackoverflow) | 1990-02-27 |
| JPH0636430Y2 JPH0636430Y2 (ja) | 1994-09-21 |
Family
ID=31345783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10949288U Expired - Lifetime JPH0636430Y2 (ja) | 1988-08-19 | 1988-08-19 | 循環式クリーン恒温器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636430Y2 (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05177145A (ja) * | 1991-12-27 | 1993-07-20 | Tabai Espec Corp | クリーンオーブン |
| JP2003007580A (ja) * | 2001-06-19 | 2003-01-10 | Canon Inc | 温調エア供給装置及び半導体製造装置 |
| JP2007307445A (ja) * | 2006-05-16 | 2007-11-29 | Espec Corp | エアーフィルタユニット、及びこのエアーフィルタユニットを備えた熱処理装置 |
-
1988
- 1988-08-19 JP JP10949288U patent/JPH0636430Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05177145A (ja) * | 1991-12-27 | 1993-07-20 | Tabai Espec Corp | クリーンオーブン |
| JP2003007580A (ja) * | 2001-06-19 | 2003-01-10 | Canon Inc | 温調エア供給装置及び半導体製造装置 |
| JP2007307445A (ja) * | 2006-05-16 | 2007-11-29 | Espec Corp | エアーフィルタユニット、及びこのエアーフィルタユニットを備えた熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636430Y2 (ja) | 1994-09-21 |