JPH0230829U - - Google Patents
Info
- Publication number
- JPH0230829U JPH0230829U JP10949288U JP10949288U JPH0230829U JP H0230829 U JPH0230829 U JP H0230829U JP 10949288 U JP10949288 U JP 10949288U JP 10949288 U JP10949288 U JP 10949288U JP H0230829 U JPH0230829 U JP H0230829U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- gasket
- thermostatic chamber
- flexible
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003749 cleanliness Effects 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims 1
- 238000002474 experimental method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
Landscapes
- Other Air-Conditioning Systems (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Description
第１図は本考案の一実施例の概略断面図、第２
図はフイルタ支持枠にフイルタを取りつけた状態
の正面図、第３図は実施例と比較例による恒温器
内温度変化に対する器内清浄度測定実験結果を示
すグラフ、第４図はフイルタの浄化能力実験の説
明図である。
１０……物品収容部、４……ヒータ、５……フ
アン、６……フイルタ、７……ガスケツト、８…
…フイルタ支持枠。
Fig. 1 is a schematic sectional view of one embodiment of the present invention;
The figure is a front view of the filter attached to the filter support frame, Figure 3 is a graph showing the results of an experiment to measure the internal cleanliness of the chamber against temperature changes in the thermostatic chamber according to the example and comparative example, and Figure 4 is the purification capacity of the filter. It is an explanatory diagram of an experiment. 10... Article storage section, 4... Heater, 5... Fan, 6... Filter, 7... Gasket, 8...
...Filter support frame.
Claims (1)
器内に循環させて所定の器内清浄度および温度を
得るようにした循環式クリーン恒温器において、
前記フイルタを支持する器内支持体と該フイルタ
との間に柔軟性ある弗素樹脂製ガスケツトを介在
させたことを特徴とする恒温器。 (2) 前記ガスケツトが四弗化エチレン樹脂製の
マシユマロ状ないしスポンジ状の柔軟性あるガス
ケツトである請求項１記載の恒温器。[Scope of Claim for Utility Model Registration] (1) In a circulation-type clean thermostatic chamber in which a predetermined internal cleanliness and temperature are obtained by circulating gas heated by a heater into the chamber through a filter,
A thermostatic chamber characterized in that a flexible fluororesin gasket is interposed between the filter and an internal support for the filter. (2) The thermostat according to claim 1, wherein the gasket is a marshmallow-like or sponge-like flexible gasket made of tetrafluoroethylene resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10949288U JPH0636430Y2 (en) | 1988-08-19 | 1988-08-19 | Circulating clean incubator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10949288U JPH0636430Y2 (en) | 1988-08-19 | 1988-08-19 | Circulating clean incubator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0230829U true JPH0230829U (en) | 1990-02-27 |
| JPH0636430Y2 JPH0636430Y2 (en) | 1994-09-21 |
Family
ID=31345783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10949288U Expired - Lifetime JPH0636430Y2 (en) | 1988-08-19 | 1988-08-19 | Circulating clean incubator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636430Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05177145A (en) * | 1991-12-27 | 1993-07-20 | Tabai Espec Corp | Clean oven |
| JP2003007580A (en) * | 2001-06-19 | 2003-01-10 | Canon Inc | Thermoregulating air supply device and semiconductor manufacturing apparatus |
| JP2007307445A (en) * | 2006-05-16 | 2007-11-29 | Espec Corp | Air filter unit and thermal treatment apparatus equipped with the air filter unit |
-
1988
- 1988-08-19 JP JP10949288U patent/JPH0636430Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05177145A (en) * | 1991-12-27 | 1993-07-20 | Tabai Espec Corp | Clean oven |
| JP2003007580A (en) * | 2001-06-19 | 2003-01-10 | Canon Inc | Thermoregulating air supply device and semiconductor manufacturing apparatus |
| JP2007307445A (en) * | 2006-05-16 | 2007-11-29 | Espec Corp | Air filter unit and thermal treatment apparatus equipped with the air filter unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636430Y2 (en) | 1994-09-21 |