Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol LtdfiledCriticalJeol Ltd
Priority to JP1986108660UpriorityCriticalpatent/JPH0635673Y2/ja
Publication of JPS6315191UpublicationCriticalpatent/JPS6315191U/ja
Application grantedgrantedCritical
Publication of JPH0635673Y2publicationCriticalpatent/JPH0635673Y2/ja