JPH0635487Y2 - Metal vapor laser discharge tube - Google Patents
Metal vapor laser discharge tubeInfo
- Publication number
- JPH0635487Y2 JPH0635487Y2 JP11735589U JP11735589U JPH0635487Y2 JP H0635487 Y2 JPH0635487 Y2 JP H0635487Y2 JP 11735589 U JP11735589 U JP 11735589U JP 11735589 U JP11735589 U JP 11735589U JP H0635487 Y2 JPH0635487 Y2 JP H0635487Y2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- electrode
- electrode side
- metal vapor
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【考案の詳細な説明】 (産業上の利用分野) 本考案は、レーザ媒質として銅等の金属蒸気のプラズマ
を用いる金属蒸気レーザのレーザ放電管に関するもので
あり、ウラン濃縮、医療、各種の材料加工等の広範な用
途を有する外部鏡型の上記レーザ用レーザ管として好適
に用いられる。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a laser discharge tube of a metal vapor laser that uses plasma of metal vapor such as copper as a laser medium, and is used for uranium enrichment, medical treatment, and various materials. It is preferably used as an external mirror type laser tube for the above laser, which has a wide range of applications such as processing.
(従来の技術) この種レーザ放電管として、レーザ管の内部にセラミッ
ク製プラズマ管が断熱材層を介して装填され、その両端
部に筒状部とその一端に連設した取付用フランジ部とか
らなる正極及び負極側の環電極が該筒状部を上記プラズ
マ管内に挿入した状態で配置されると共に、該レーザ管
の両端に上記プラズマ管の軸線上に位置するブルースタ
ー窓を設けたものがある。(Prior Art) As a laser discharge tube of this kind, a ceramic plasma tube is loaded inside a laser tube via a heat insulating material layer, and a tubular portion is provided at both ends thereof and a mounting flange portion continuously provided at one end thereof. A positive electrode and a negative electrode side of the ring electrodes are arranged with the tubular portion inserted into the plasma tube, and a Brewster window located on the axis of the plasma tube is provided at both ends of the laser tube. There is.
すなわち、このようなレーザ放電管は、励起用放電方向
とレーザ発振軸とが一致した所謂同軸放電型であり、プ
ラズマ管内の適当位置に予め銅等の金属片を装填してレ
ーザ管内をヘリウムガス等の低圧雰囲気に封止してお
き、両電極間でパルス放電を行うことにより、その熱で
上記金属片を蒸発させて且つプラズマ化し、更にレーザ
発振に必要な反転分布の励起状態を現出し、レーザ管外
の両側に上記プラズマ管と同軸上に配置した外部反射鏡
によって光増幅を行ってレーザ発振を生起させるように
なっている。That is, such a laser discharge tube is a so-called coaxial discharge type in which the discharge direction for excitation and the laser oscillation axis coincide with each other, and a metal piece such as copper is preliminarily loaded in an appropriate position in the plasma tube to fill the inside of the laser tube with helium gas. It is sealed in a low-pressure atmosphere such as, and a pulse discharge is generated between both electrodes to evaporate the metal piece into plasma by the heat, and reveal the excited state of population inversion necessary for laser oscillation. An external reflecting mirror arranged coaxially with the plasma tube on both sides outside the laser tube performs optical amplification to cause laser oscillation.
(考案が解決しようとする課題) しかしながら、上記従来の金属蒸気レーザ放電管では、
パルス放電における放電の安定性が悪く、励起効率に劣
ると共に、電極取付部等に局所的な過加熱が発生して損
傷をきたし易いため、耐久性が不充分であるという問題
点があった。(Problems to be solved by the invention) However, in the above conventional metal vapor laser discharge tube,
There is a problem that the stability of the discharge in the pulse discharge is poor, the excitation efficiency is inferior, and local overheating easily occurs in the electrode mounting portion or the like to cause damage, so that the durability is insufficient.
本考案は、上述の事情に鑑み、放電安定性に優れて高い
励起効率が得られ且つ長寿命な金属蒸気レーザ放電管を
提供することを目的としている。The present invention has been made in view of the above circumstances, and an object thereof is to provide a metal vapor laser discharge tube having excellent discharge stability, high excitation efficiency, and long life.
(課題を解決するための手段) 上記目的を達成する手段として、本考案に係る金属蒸気
レーザ放電管は、レーザ管本体の内部に、セラミック製
プラズマ管がこれを囲繞する断熱材層を介して装填さる
と共に、該プラズマ管の両端部に、筒状部とその一端に
連設した取付用フランジ部とからなる正極及び負極側の
環電極が該筒状部を上記プラズマ管内に挿入して各別に
配置されてなる金属蒸気レーザ放電管において、少なく
とも負極側の上記環電極の外側に、1枚以上の平坦ドー
ナツ状の副電極板が該環電極及び隣り合う副電極板から
離間して且つ同軸状に取付けられていることを特徴とす
る構成を採用したものである。(Means for Solving the Problem) As a means for achieving the above object, the metal vapor laser discharge tube according to the present invention is such that a ceramic plasma tube is provided inside a laser tube body with an insulating layer surrounding the plasma tube. At the same time as loading, the positive and negative ring electrodes, each of which has a tubular portion and a mounting flange portion continuously provided at one end of the tubular portion, are inserted into the plasma tube at both ends thereof. In a separately arranged metal vapor laser discharge tube, at least one flat doughnut-shaped sub-electrode plate is coaxial with the ring electrode and an adjacent sub-electrode plate at least outside the ring electrode on the negative electrode side. It adopts a configuration characterized by being attached in a shape.
また、本考案では、蒸気レーザ放電管として、副電極板
が正極及び負極側の両方に取付けられると共に、プラズ
マ管が軸方向に所要間隔で分割されて端部相互をスライ
ド可能に嵌合した複数個の短筒体にて構成され、正極側
にこれら短筒体をばね力によって負極側へ押圧するセラ
ミック製押し棒が正極側の副電極板を移動用ガイドとし
て設けられてなる構成を好適態様としている。Further, in the present invention, as the vapor laser discharge tube, the sub-electrode plates are attached to both the positive electrode side and the negative electrode side, and the plasma tube is divided into a plurality of portions which are axially divided at required intervals and slidably fitted to each other at their ends. A preferred embodiment is configured by a plurality of short cylinders, and a ceramic push rod that presses these short cylinders toward the negative electrode side by a spring force on the positive electrode side is provided with the auxiliary electrode plate on the positive electrode side as a moving guide. I am trying.
(作用) 本考案の金属蒸気レーザ放電管では、負極側の環電極の
外側に平坦ドーナツ状の副電極板が離間して且つ同軸状
に取付けられていることから、パルス放電時の放電安定
性が極めて良好となる。すなわち、従来のように環電極
のみでパルス放電を行った場合は、負極側の環電極の放
電面積が不足し、その本来の放電部である筒状部以外の
部位、例えば電極取付部分の金属基体や電極取付ネジ等
のプラズマ管軸から大きく外れた位置からも電子放出が
なされる結果、放電領域に部分的な偏りを生じると共に
局部的な過加熱を生起して放電が不安定になると考えら
れる。しかるに、上記の副電極板を設けた場合は、パル
ス放電時に該副電極板の内周部より均一な電子放出が行
われて環電極の放電面積不足を補うため、電極取付部分
の金属基体や電極取付ネジ等からの電子放出を生じず、
もって放電領域の偏りや局部的な過加熱が防止され均一
で安定した放電が得られると推定される。(Operation) In the metal vapor laser discharge tube of the present invention, since the flat donut-shaped auxiliary electrode plates are spaced apart and coaxially attached to the outside of the ring electrode on the negative electrode side, discharge stability during pulse discharge Is extremely good. That is, when pulse discharge is performed only by the ring electrode as in the conventional case, the discharge area of the ring electrode on the negative electrode side becomes insufficient, and the part other than the tubular part which is the original discharge part, for example, the metal of the electrode mounting part Electrons are emitted from positions far away from the plasma tube axis, such as the substrate and electrode mounting screws, resulting in a partial bias in the discharge area and local overheating, resulting in unstable discharge. To be However, when the above-mentioned sub-electrode plate is provided, in order to compensate for the discharge area shortage of the ring electrode due to uniform electron emission from the inner peripheral portion of the sub-electrode plate during pulse discharge, Electrons are not emitted from the electrode mounting screws,
Therefore, it is presumed that uneven discharge area and local overheating are prevented and uniform and stable discharge can be obtained.
このような副電極板は、1枚に限らず放電安定化のため
に必要とあらば2枚以上、好ましくは3〜5枚程度を相
互間に間隙を保つ平行配置状態として取付けることがで
きる。また、この副電極板は熱反射板としても作用する
ことから、正極側にも取付けることにより、両極の電極
取付部周辺を放電による高熱から保護することが可能と
なる。The number of such sub-electrode plates is not limited to one, and if necessary to stabilize the discharge, two or more, preferably about 3 to 5, can be attached in a parallel arrangement state in which a gap is maintained between them. Further, since this sub-electrode plate also functions as a heat reflection plate, by attaching it to the positive electrode side as well, it becomes possible to protect the periphery of the electrode attachment portions of both electrodes from high heat due to discharge.
一方、プラズマ管を軸方向に所定間隔で分割されて端部
相互がスライド可能に嵌合した複数個の短筒体にて構成
し、且つ正極側にこれら短筒体をばね力により負極側へ
押圧する押し棒を設けることにより、プラズマ管の熱伸
縮を吸収して該熱伸縮による破損を回避することが可能
となる。しかして、この場合に正極側にも上記副電極板
を設け、これを上記押し棒の移動用ガイドとして利用す
ることが可能である。On the other hand, the plasma tube is composed of a plurality of short cylinders which are axially divided at a predetermined interval and whose ends are slidably fitted to each other. By providing the push rod for pressing, it is possible to absorb the thermal expansion and contraction of the plasma tube and avoid damage due to the thermal expansion and contraction. In this case, however, it is possible to provide the auxiliary electrode plate on the positive electrode side and use it as a guide for moving the push rod.
(実施例) 以下、本考案の実施例につき図面を参照しつつ説明す
る。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
第1図〜第3図において、1はレーザ放電管であり、石
英ガラス管からなる長尺円筒2aの両端に、アルミニウム
等よりなる環状の電極フランジ3,4を介して、同様の石
英ガラス管よりなる短尺円筒2a,2bが連結され、且つ両
短尺円筒2b,2bの端部が中央にブルースター窓5を取付
けた端部プレート6にて閉塞されてレーザ管本体7を形
成している。しかして、レーザ管本体7の内部には、相
互の端部をスライド可能に嵌合して直線状に連結した多
数本のアルミナ製短筒体8a,8a…からなるプラズマ管8
が、両電極フランジ3,4間に配置した断熱材層9を介し
て、同心状に装填されており、該レーザ管本体7の内部
両端側には電極フランジ3,4のそれぞれと端部プレート
6との間で電極室7a,7bが構成されている。なお、両側
のブルースター窓5,5はプラズマ管8の軸線上に配置す
るように設定されている。In FIGS. 1 to 3, reference numeral 1 denotes a laser discharge tube, and a similar quartz glass tube is provided at both ends of an elongated cylinder 2a made of a quartz glass tube through annular electrode flanges 3 and 4 made of aluminum or the like. The short cylinders 2a and 2b are connected to each other, and the ends of the short cylinders 2b and 2b are closed by an end plate 6 having a Brewster window 5 attached to the center thereof to form a laser tube body 7. Then, inside the laser tube body 7, a plasma tube 8 composed of a large number of alumina short tube bodies 8a, 8a ...
Are concentrically loaded through a heat insulating material layer 9 disposed between both electrode flanges 3 and 4, and the electrode flanges 3 and 4 and the end plate are provided on both inner ends of the laser tube body 7. Electrode chambers 7a and 7b are formed between the electrode chambers 6 and 6. The Brewster windows 5, 5 on both sides are set to be arranged on the axis of the plasma tube 8.
両電極フランジ3,4の各々電極室7a,7bに臨む側面には、
該側面に当接する平坦ドーナツ状の電極取付板10とこれ
より外側に位置する同様の平坦ドーナツ状をなす4枚の
副電極板11,11…とが、第2図、第3図に示すように、
周方向に等配する複数箇所において取付ネジ12によっ
て、且つ該取付ネジ12に嵌装した導電性スペーサリング
12a,12a…を介して相互間に間隙を保持する状態で、プ
ラズマ管8と同軸上に取付けられている。しかして、各
電極取付板10の内周側には、筒状部13aとその一端に連
設された取付用フランジ部13bとからなるモリブデン製
環電極13が、筒状部13aをプラズマ管8内にその内周か
ら離間する状態で挿入した配置形態で取付用フランジ部
13bにおいて固着されている。On the side surfaces of the two electrode flanges 3 and 4 facing the electrode chambers 7a and 7b, respectively,
As shown in FIGS. 2 and 3, a flat donut-shaped electrode mounting plate 10 abutting against the side surface and four flat donut-shaped sub-electrode plates 11, 11 ... To
Conductive spacer rings fitted to and attached to the mounting screws 12 at a plurality of locations evenly arranged in the circumferential direction.
They are mounted coaxially with the plasma tube 8 while maintaining a gap between them via 12a, 12a .... Then, on the inner peripheral side of each electrode mounting plate 10, a molybdenum ring electrode 13 composed of a tubular portion 13a and a mounting flange portion 13b continuously provided at one end thereof is provided. The mounting flange part is installed in a state where it is inserted into the inside while being separated from the inner circumference.
It is fixed at 13b.
また、正極側(第1図の左側)には、断熱材層9の内周
と環電極13の筒状部13aとの間に環状空間9aが形成され
ており、この空間9aにプラズマ管8を負極側へ押圧する
複数本のセラミック製押し棒14が環電極13のフランジ部
13aの周方向に等配して設けられている。この各押し棒1
4は、軸部14aの先端にプラズマ管8の最も正極側に位置
した筒状体8aの端面に接当する押し板部14bが一体形成
をされたもので、軸部14aが環電極13のフランジ部13b及
び副電極板11,11…をスライド自在に貫通すると共に、
上記フランジ部13bと押し板部14bとの間に嵌装した圧縮
コイルスプリング15によって負極側へ弾圧付勢されてい
る。On the positive electrode side (left side in FIG. 1), an annular space 9a is formed between the inner circumference of the heat insulating material layer 9 and the tubular portion 13a of the ring electrode 13, and the plasma tube 8 is provided in this space 9a. The plurality of ceramic push rods 14 that press the
They are evenly arranged in the circumferential direction of 13a. This each push rod 1
Reference numeral 4 denotes an integrally formed push plate portion 14b at the tip of the shaft portion 14a, which is in contact with the end surface of the tubular body 8a located on the most positive electrode side of the plasma tube 8, and the shaft portion 14a is formed of the ring electrode 13. While slidably penetrating the flange portion 13b and the sub-electrode plates 11, 11 ...
A compression coil spring 15 fitted between the flange portion 13b and the push plate portion 14b is elastically biased toward the negative electrode side.
一方、レーザ管本体1の外周には、電極フランジ3,4間
に内外2重のガラス管16a,16bが嵌装されると共に、該
電極フランジ3,4と端部プレート6,6との間にもそれぞれ
ガラス管16cが嵌装されている。しかして、長尺円筒2a
と内側ガラス管16aとの間はガス抜き口17aからの真空吸
引によって高真空に維持される環状の真空室17を構成
し、また内外のガラス管16aと16bの間は水入口18aと水
出口18bを介して継続的に冷却水を流通させる水冷室18
を構成すると共に、両側の短尺円筒2b,2bとガラス管16
c,16cとの間もそれぞれ水入口19aと水出口19bを有する
同様の水冷室19を構成している。On the other hand, the inner and outer double glass tubes 16a and 16b are fitted between the electrode flanges 3 and 4 on the outer periphery of the laser tube body 1, and the gap between the electrode flanges 3 and 4 and the end plates 6 and 6 is Also, the glass tube 16c is fitted in each of them. Then, long cylinder 2a
Between the inner glass tube 16a and the inner glass tube 16a constitutes an annular vacuum chamber 17 maintained at a high vacuum by vacuum suction from the gas vent 17a, and between the inner and outer glass tubes 16a and 16b a water inlet 18a and a water outlet. Water cooling chamber 18 that continuously circulates cooling water via 18b
And the short cylinders 2b, 2b on both sides and the glass tube 16
A similar water cooling chamber 19 having a water inlet 19a and a water outlet 19b is formed between c and 16c.
更にレーザ管本体7の負極側電極室7aにはガス入口20a
が、正極側電極室7bにはガス出口20bがそれぞれ設けて
あり、これらガス入口20aとガス出口20bとは図示しない
ガス還流路を介して連通されており、これによるガス帰
還によって放電に伴う電場にて荷電粒子が移動して放電
管内に圧力差を生じるのを防止するようになされてい
る。Further, the gas inlet 20a is provided in the negative electrode chamber 7a of the laser tube body 7.
However, a gas outlet 20b is provided in the positive electrode side electrode chamber 7b, respectively, and these gas inlet 20a and gas outlet 20b are communicated with each other through a gas recirculation path (not shown). In order to prevent the charged particles from moving and causing a pressure difference in the discharge tube.
21は放電による高熱で蒸発してレーザ媒質となるプラズ
マを生成する銅等の金属片であり、予めプラズマ管8内
の適当位置に装填される。しかして、プラズマ管8の各
筒状体8aには内周面に上記金属片21を定位置で保持する
ための環状溝8bが設けてある。Reference numeral 21 is a metal piece such as copper that evaporates with high heat due to discharge to generate plasma that becomes a laser medium, and is loaded in an appropriate position in the plasma tube 8 beforehand. Then, each tubular body 8a of the plasma tube 8 is provided with an annular groove 8b on the inner peripheral surface for holding the metal piece 21 at a fixed position.
なお、断熱材層9には、断熱性に優れた短円筒形のセラ
ミック成形体を単独もしくは相互間にセラミックファイ
バーを介して軸方向に並べたものが好適に使用される。
また、副電極板11の材質としては、環電極13と同様のモ
リブデンも使用できるが、経済性等よりアルミニウム、
銅もしくはこれらの合金が好適である。しかして、副電
極板11の内径は、環電極13の内径と同じか、もしくはそ
れよりも若干大きく設定するのがよい。また、プラズマ
管8の短筒体8aの形状は例示以外に種々設計変更可能で
ある。As the heat insulating material layer 9, short cylindrical ceramic molded bodies having excellent heat insulating properties are preferably used alone or arranged in the axial direction with ceramic fibers interposed therebetween.
Further, as the material of the sub-electrode plate 11, molybdenum similar to that of the ring electrode 13 can be used, but aluminum is used in view of economical efficiency,
Copper or alloys thereof are preferred. Therefore, the inner diameter of the sub electrode plate 11 is preferably set to be the same as or slightly larger than the inner diameter of the ring electrode 13. The shape of the short tubular body 8a of the plasma tube 8 can be changed in various ways other than the example.
上記構成の金属蒸気レーザ放電管1によれば、従来のも
のと同様にその両側外部に反射鏡をプラズマ管8の軸線
上に位置するように配置した上で、両側の環電極13,13
間でパルス放電を行うことにより、金属片21が蒸発して
プラズマを生成し、更に逆転分布状態まで励起され、そ
のエネルギー準位の変化に伴う光が両反射鏡を介して増
幅されて所要の強度に達した際にレーザ光を出射するパ
ルスレーザ発振が行われる。しかして、上記放電時に
は、負極側からの電子放出は環電極13の筒上部13aの特
に先端部と副電極板11,11…の内周部とを主体として行
われ、取付ネジ12や電極フランジ3の内面部からの電子
放出を生じずこれら部位の局部的な過加熱が回避される
と共に、両極側の副電極板11,11…による熱反射作用も
相まってプラズマ管8の管軸方向に沿った均一で極めて
安定した放電が行われることになる。また、放電に伴う
高熱によるプラズマ管8の熱膨張はコイルスプリング15
の圧縮によって吸収される。According to the metal vapor laser discharge tube 1 having the above-described structure, as in the conventional one, the reflecting mirrors are arranged outside the both sides so as to be positioned on the axis of the plasma tube 8, and the ring electrodes 13, 13 on both sides are arranged.
By performing pulse discharge between them, the metal piece 21 evaporates to generate plasma and is further excited to the inverted distribution state, and the light accompanying the change in the energy level is amplified through both reflecting mirrors and required. Pulse laser oscillation is performed to emit laser light when the intensity is reached. At the time of the above-mentioned discharge, the electrons are emitted from the negative electrode side mainly by the tip portion of the cylindrical upper portion 13a of the ring electrode 13 and the inner peripheral portions of the sub-electrode plates 11, 11 ... 3 does not generate electron emission from the inner surface portion, local overheating of these portions is avoided, and the heat reflecting action of the sub-electrode plates 11, 11 ... A uniform and extremely stable discharge is performed. Further, the thermal expansion of the plasma tube 8 due to the high heat generated by the discharge causes the coil spring 15
Absorbed by the compression of.
(考案特有の効果) 本考案によれば、外部鏡型の金属蒸気レーザ用の同軸放
電型レーザ放電管として、放電安定性に極めて優れ、高
い励起効率が得られると共に、電極部以外の局所的な過
加熱を生じず電極取付部周辺の損傷が防止されて長寿命
で且つ構造的に簡素なレーザ放電管を提供できる。(Effects peculiar to the device) According to the present invention, the coaxial discharge type laser discharge tube for an external mirror type metal vapor laser has extremely excellent discharge stability, high excitation efficiency, and local area other than the electrode part. It is possible to provide a laser discharge tube having a long life and a structurally simple structure in which damage around the electrode mounting portion is prevented without causing excessive overheating.
また、本考案の請求項(2)の構成によれば、プラズマ
管の熱伸縮が無理なく吸収されて該熱伸縮に起因した破
壊を生じる恐れがなく、また正負両極側で電極部以外の
熱衝撃が緩和されて耐久性がより向上し、しかも上記熱
伸縮の吸収作用と熱衝撃の緩和作用とが極めて簡単な構
造に基づいて機能的に発揮される上記レーザ放電管を提
供できる。Further, according to the configuration of claim (2) of the present invention, there is no fear that the thermal expansion and contraction of the plasma tube will be naturally absorbed, and the destruction due to the thermal expansion and contraction will not occur, and the heat other than the electrode parts on the positive and negative electrode sides will be generated. It is possible to provide the laser discharge tube in which the impact is alleviated and the durability is further improved, and the functions of absorbing the thermal expansion and contraction and relaxing the thermal shock are functionally exhibited based on an extremely simple structure.
第1図は本考案の一実施例に係る金属蒸気レーザ放電管
の縦断図面、第2図は同上の正極側の要部を示す拡大縦
断面図、第3図は同じく負極側の要部を示す拡大縦断面
図である。 1……レーザ放電管、7……レーザ管本体、8……プラ
ズマ管、8a……短筒体、9……断熱材層、11……副電極
板、13……環電極、13a……筒上部、13b……取付用フラ
ンジ部、14……押し棒、15……圧縮コイルスプリング。FIG. 1 is a vertical cross-sectional view of a metal vapor laser discharge tube according to an embodiment of the present invention, FIG. 2 is an enlarged vertical cross-sectional view showing a main part on the positive electrode side of the same, and FIG. 3 is a main part on the negative electrode side. It is an expanded longitudinal cross-sectional view shown. 1 ... Laser discharge tube, 7 ... Laser tube body, 8 ... Plasma tube, 8a ... Short cylinder, 9 ... Heat insulation layer, 11 ... Sub-electrode plate, 13 ... Ring electrode, 13a .... Upper part of cylinder, 13b …… Flange for mounting, 14 …… Push bar, 15 …… Compression coil spring.
Claims (2)
ズマ管がこれを囲繞する断熱材層を介して装填さると共
に、該プラズマ管の両端部に、筒状部とその一端に連設
した取付用フランジ部とからなる正極及び負極側の環電
極が該筒状部を上記プラズマ管内に挿入して各別に配置
されてなる金属蒸気レーザ放電管において、少なくとも
負極側の上記環電極の外側に、1枚以上の平坦ドーナツ
状の副電極板が該環電極及び隣り合う副電極板から離間
して且つ同軸状に取付けられていることを特徴とする金
属蒸気レーザ放電管。1. A laser tube body is loaded with a ceramic plasma tube via a heat insulating material layer surrounding the laser tube body, and a tubular portion and an end thereof are continuously attached to both end portions of the plasma tube. In the metal vapor laser discharge tube in which the positive electrode and the negative electrode on the negative electrode side, which are composed of the flange portion, are arranged separately by inserting the tubular portion into the plasma tube, at least outside the ring electrode on the negative electrode side, A metal vapor laser discharge tube, characterized in that one or more flat donut-shaped sub-electrode plates are mounted coaxially apart from the ring electrode and adjacent sub-electrode plates.
られると共に、プラズマ管が軸方向に所要間隔で分割さ
れて端部相互をスライド可能に嵌合した複数個の短筒体
にて構成され、正極側にこれら短筒体をばね力によって
負極側へ押圧するセラミック製押し棒が正極側の副電極
板を移動用ガイドとして設けられてなる請求項(1)記
載の金属蒸気レーザ放電管。2. A sub-electrode plate is attached to both the positive electrode side and the negative electrode side, and the plasma tube is divided into a plurality of short tube bodies which are axially divided at required intervals and slidably fitted to each other at their ends. The metal vapor laser discharge according to claim 1, wherein a ceramic push rod configured to press these short cylinders toward the negative electrode side by a spring force is provided on the positive electrode side, and the auxiliary electrode plate on the positive electrode side is provided as a moving guide. tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11735589U JPH0635487Y2 (en) | 1989-10-05 | 1989-10-05 | Metal vapor laser discharge tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11735589U JPH0635487Y2 (en) | 1989-10-05 | 1989-10-05 | Metal vapor laser discharge tube |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0356164U JPH0356164U (en) | 1991-05-30 |
JPH0635487Y2 true JPH0635487Y2 (en) | 1994-09-14 |
Family
ID=31665573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11735589U Expired - Lifetime JPH0635487Y2 (en) | 1989-10-05 | 1989-10-05 | Metal vapor laser discharge tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0635487Y2 (en) |
-
1989
- 1989-10-05 JP JP11735589U patent/JPH0635487Y2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0356164U (en) | 1991-05-30 |
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