JPH0635364Y2 - 微小位置決め機構 - Google Patents
微小位置決め機構Info
- Publication number
- JPH0635364Y2 JPH0635364Y2 JP1988129765U JP12976588U JPH0635364Y2 JP H0635364 Y2 JPH0635364 Y2 JP H0635364Y2 JP 1988129765 U JP1988129765 U JP 1988129765U JP 12976588 U JP12976588 U JP 12976588U JP H0635364 Y2 JPH0635364 Y2 JP H0635364Y2
- Authority
- JP
- Japan
- Prior art keywords
- positioning mechanism
- rod body
- fixed
- bellows
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 53
- 238000001514 detection method Methods 0.000 claims description 21
- 241000256247 Spodoptera exigua Species 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 230000001050 lubricating effect Effects 0.000 claims description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 2
- 229910001020 Au alloy Inorganic materials 0.000 claims 1
- 239000003353 gold alloy Substances 0.000 claims 1
- 230000033001 locomotion Effects 0.000 description 18
- 239000011295 pitch Substances 0.000 description 8
- 238000002955 isolation Methods 0.000 description 7
- 230000005641 tunneling Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000314 lubricant Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 244000144985 peep Species 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988129765U JPH0635364Y2 (ja) | 1988-10-03 | 1988-10-03 | 微小位置決め機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988129765U JPH0635364Y2 (ja) | 1988-10-03 | 1988-10-03 | 微小位置決め機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0252366U JPH0252366U (enExample) | 1990-04-16 |
| JPH0635364Y2 true JPH0635364Y2 (ja) | 1994-09-14 |
Family
ID=31384343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988129765U Expired - Lifetime JPH0635364Y2 (ja) | 1988-10-03 | 1988-10-03 | 微小位置決め機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635364Y2 (enExample) |
-
1988
- 1988-10-03 JP JP1988129765U patent/JPH0635364Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0252366U (enExample) | 1990-04-16 |
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