JPH0252366U - - Google Patents
Info
- Publication number
- JPH0252366U JPH0252366U JP1988129765U JP12976588U JPH0252366U JP H0252366 U JPH0252366 U JP H0252366U JP 1988129765 U JP1988129765 U JP 1988129765U JP 12976588 U JP12976588 U JP 12976588U JP H0252366 U JPH0252366 U JP H0252366U
- Authority
- JP
- Japan
- Prior art keywords
- positioning mechanism
- bellows
- micro
- piece
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 2
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims 2
- 229910001020 Au alloy Inorganic materials 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000003353 gold alloy Substances 0.000 claims 1
- 230000001050 lubricating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 241000256247 Spodoptera exigua Species 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988129765U JPH0635364Y2 (ja) | 1988-10-03 | 1988-10-03 | 微小位置決め機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988129765U JPH0635364Y2 (ja) | 1988-10-03 | 1988-10-03 | 微小位置決め機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0252366U true JPH0252366U (enExample) | 1990-04-16 |
| JPH0635364Y2 JPH0635364Y2 (ja) | 1994-09-14 |
Family
ID=31384343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988129765U Expired - Lifetime JPH0635364Y2 (ja) | 1988-10-03 | 1988-10-03 | 微小位置決め機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635364Y2 (enExample) |
-
1988
- 1988-10-03 JP JP1988129765U patent/JPH0635364Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635364Y2 (ja) | 1994-09-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3888102D1 (de) | Einrichtung zur Durchführung der Zustellbewegung eines Arbeitsorgans zu einer Arbeitsstation. | |
| JPH0252366U (enExample) | ||
| US4925139A (en) | Mechanical stage support for a scanning tunneling microscope | |
| CN2158072Y (zh) | 精密扫描隧道显微技术微进给及定位机构 | |
| JPS6442888U (enExample) | ||
| JP2743394B2 (ja) | ワイヤクランプ方法及び装置 | |
| JPH0160890U (enExample) | ||
| JPH09215353A (ja) | 電気機械変換素子を使用した駆動機構 | |
| JPS6133643Y2 (enExample) | ||
| JPS62168207A (ja) | マイクロマニピユレ−タの微動装置 | |
| JPS5821646Y2 (ja) | トレ−サヘツド | |
| JPS58120485A (ja) | 異径円筒状可撓性ワ−ク定圧チヤツク用ロボツトハンド | |
| JPS59163438U (ja) | ツ−ルクランププリセツタ− | |
| JPH0263904U (enExample) | ||
| JPH02120745U (enExample) | ||
| JPS60178508U (ja) | ラインボ−リング加工機のツ−ルホルダ | |
| JPH0376105U (enExample) | ||
| JPH0653007U (ja) | チャック装置 | |
| JPS61194950U (enExample) | ||
| JPS613447U (ja) | 摩耗試験装置 | |
| JPS61148539U (enExample) | ||
| JPS60130042U (ja) | 駆動用圧電装置 | |
| JPH04128191U (ja) | ロボツトの工具取付グリツパ | |
| JPH0555118U (ja) | 微動ステージ | |
| JPS59109439U (ja) | ストロ−クリミツト装置 |