JPH0634666Y2 - 半導体圧力検出器 - Google Patents

半導体圧力検出器

Info

Publication number
JPH0634666Y2
JPH0634666Y2 JP1987037633U JP3763387U JPH0634666Y2 JP H0634666 Y2 JPH0634666 Y2 JP H0634666Y2 JP 1987037633 U JP1987037633 U JP 1987037633U JP 3763387 U JP3763387 U JP 3763387U JP H0634666 Y2 JPH0634666 Y2 JP H0634666Y2
Authority
JP
Japan
Prior art keywords
pressure
base
pressure detector
sensitive chip
semiconductor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987037633U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63145141U (en, 2012
Inventor
有正 安部
昭博 青井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP1987037633U priority Critical patent/JPH0634666Y2/ja
Publication of JPS63145141U publication Critical patent/JPS63145141U/ja
Application granted granted Critical
Publication of JPH0634666Y2 publication Critical patent/JPH0634666Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1987037633U 1987-03-13 1987-03-13 半導体圧力検出器 Expired - Lifetime JPH0634666Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987037633U JPH0634666Y2 (ja) 1987-03-13 1987-03-13 半導体圧力検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987037633U JPH0634666Y2 (ja) 1987-03-13 1987-03-13 半導体圧力検出器

Publications (2)

Publication Number Publication Date
JPS63145141U JPS63145141U (en, 2012) 1988-09-26
JPH0634666Y2 true JPH0634666Y2 (ja) 1994-09-07

Family

ID=30849136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987037633U Expired - Lifetime JPH0634666Y2 (ja) 1987-03-13 1987-03-13 半導体圧力検出器

Country Status (1)

Country Link
JP (1) JPH0634666Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7000478B1 (en) * 2005-01-31 2006-02-21 Texas Instruments Incorporated Combined pressure and temperature transducer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51102589A (en, 2012) * 1975-03-07 1976-09-10 Hitachi Ltd
JPS59190633A (ja) * 1983-04-13 1984-10-29 Hitachi Ltd 半導体圧力変換器
JPS6015643U (ja) * 1983-07-08 1985-02-02 株式会社日立製作所 Ｐｃｂオンボ−ド形圧力変換器

Also Published As

Publication number Publication date
JPS63145141U (en, 2012) 1988-09-26

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