JPH0634369Y2 - 連続式真空成膜装置の真空シール装置 - Google Patents
連続式真空成膜装置の真空シール装置Info
- Publication number
- JPH0634369Y2 JPH0634369Y2 JP228590U JP228590U JPH0634369Y2 JP H0634369 Y2 JPH0634369 Y2 JP H0634369Y2 JP 228590 U JP228590 U JP 228590U JP 228590 U JP228590 U JP 228590U JP H0634369 Y2 JPH0634369 Y2 JP H0634369Y2
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- chamber
- vacuum
- sealing device
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 title description 21
- 239000012530 fluid Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 238000004804 winding Methods 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP228590U JPH0634369Y2 (ja) | 1990-01-12 | 1990-01-12 | 連続式真空成膜装置の真空シール装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP228590U JPH0634369Y2 (ja) | 1990-01-12 | 1990-01-12 | 連続式真空成膜装置の真空シール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0392770U JPH0392770U (enrdf_load_stackoverflow) | 1991-09-20 |
| JPH0634369Y2 true JPH0634369Y2 (ja) | 1994-09-07 |
Family
ID=31506163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP228590U Expired - Lifetime JPH0634369Y2 (ja) | 1990-01-12 | 1990-01-12 | 連続式真空成膜装置の真空シール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634369Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010053411B4 (de) | 2009-12-15 | 2023-07-06 | Vat Holding Ag | Vakuumventil |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4714714B2 (ja) * | 2007-07-30 | 2011-06-29 | 株式会社ブイテックス | 気密を保持するゲートバルブ、このゲートバルブを使用したフィルム製造装置およびフィルム製造方法 |
| WO2011072315A1 (de) * | 2009-12-14 | 2011-06-23 | Vat Holding Ag | Vakuumventil |
| JP2013087315A (ja) * | 2011-10-17 | 2013-05-13 | Takada Tekku Kk | 基材連続処理装置 |
| CN113416939B (zh) * | 2021-06-29 | 2023-06-02 | 辽宁分子流科技有限公司 | 一种用于卷对卷工艺过程的卷辊更换方法 |
| CN119243113B (zh) * | 2024-12-06 | 2025-02-28 | 四川海格锐特科技有限公司 | 真空卷绕镀膜设备 |
-
1990
- 1990-01-12 JP JP228590U patent/JPH0634369Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010053411B4 (de) | 2009-12-15 | 2023-07-06 | Vat Holding Ag | Vakuumventil |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0392770U (enrdf_load_stackoverflow) | 1991-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0634369Y2 (ja) | 連続式真空成膜装置の真空シール装置 | |
| JP3199162B2 (ja) | 連続真空処理装置 | |
| US20110140019A1 (en) | Vacuum valve | |
| US6627259B1 (en) | Masking tapes and application methods | |
| EP2374914B1 (en) | A device for sealing a chamber inlet or a chamber outlet for a flexible substrate; substrate processing apparatus, and method for assembling such a device | |
| JP4327269B2 (ja) | 巻回スプリングを備えた複合タイプの金属製シールおよびその製造方法 | |
| JP4714714B2 (ja) | 気密を保持するゲートバルブ、このゲートバルブを使用したフィルム製造装置およびフィルム製造方法 | |
| TW201233455A (en) | Web coating device | |
| US8499784B2 (en) | Lock valve in particular for a strip processing unit | |
| JPH0989708A (ja) | ホイールリムのエア洩れ検査装置 | |
| JP2000169962A (ja) | スパッタリング装置および水冷カソード | |
| JPS62201760A (ja) | フイルム等帯状物の巻取装置 | |
| JP4815510B2 (ja) | ゲートバルブおよびフィルムのゲートバルブ通過方法 | |
| JPS63105198A (ja) | シ−ト材表面加工用ロ−ル及びその製造方法 | |
| JP4423966B2 (ja) | 連続真空成膜装置 | |
| JPH0499166A (ja) | 両面蒸着フィルムの製造方法 | |
| JP3205763B2 (ja) | シールド工法のエントランスパッキン | |
| CN223047585U (zh) | 一种真空绕卷镀膜设备 | |
| JPH06319965A (ja) | スパイラル型流体分離素子 | |
| KR100807709B1 (ko) | 밴드 처리 장치용 에어로크 밸브 | |
| JPH11125387A (ja) | 移動式導管遮断装置 | |
| JP3413982B2 (ja) | 密封装置 | |
| JP2905607B2 (ja) | 密封装置 | |
| CN120212273A (zh) | 一种气囊阀装置 | |
| JPS57116782A (en) | Washing and drying method for metallic strip material |