JPH0392770U - - Google Patents
Info
- Publication number
- JPH0392770U JPH0392770U JP228590U JP228590U JPH0392770U JP H0392770 U JPH0392770 U JP H0392770U JP 228590 U JP228590 U JP 228590U JP 228590 U JP228590 U JP 228590U JP H0392770 U JPH0392770 U JP H0392770U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- chamber
- strip
- annular
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP228590U JPH0634369Y2 (ja) | 1990-01-12 | 1990-01-12 | 連続式真空成膜装置の真空シール装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP228590U JPH0634369Y2 (ja) | 1990-01-12 | 1990-01-12 | 連続式真空成膜装置の真空シール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0392770U true JPH0392770U (enrdf_load_stackoverflow) | 1991-09-20 |
| JPH0634369Y2 JPH0634369Y2 (ja) | 1994-09-07 |
Family
ID=31506163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP228590U Expired - Lifetime JPH0634369Y2 (ja) | 1990-01-12 | 1990-01-12 | 連続式真空成膜装置の真空シール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634369Y2 (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009030754A (ja) * | 2007-07-30 | 2009-02-12 | V Tex:Kk | 気密を保持するゲートバルブ、このゲートバルブを使用したフィルム製造装置およびフィルム製造方法 |
| WO2011072315A1 (de) * | 2009-12-14 | 2011-06-23 | Vat Holding Ag | Vakuumventil |
| JP2013087315A (ja) * | 2011-10-17 | 2013-05-13 | Takada Tekku Kk | 基材連続処理装置 |
| CN113416939A (zh) * | 2021-06-29 | 2021-09-21 | 辽宁分子流科技有限公司 | 一种用于卷对卷工艺过程的卷辊更换方法 |
| CN119243113A (zh) * | 2024-12-06 | 2025-01-03 | 四川海格锐特科技有限公司 | 真空卷绕镀膜设备 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010053411B4 (de) | 2009-12-15 | 2023-07-06 | Vat Holding Ag | Vakuumventil |
-
1990
- 1990-01-12 JP JP228590U patent/JPH0634369Y2/ja not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009030754A (ja) * | 2007-07-30 | 2009-02-12 | V Tex:Kk | 気密を保持するゲートバルブ、このゲートバルブを使用したフィルム製造装置およびフィルム製造方法 |
| WO2011072315A1 (de) * | 2009-12-14 | 2011-06-23 | Vat Holding Ag | Vakuumventil |
| JP2013087315A (ja) * | 2011-10-17 | 2013-05-13 | Takada Tekku Kk | 基材連続処理装置 |
| CN113416939A (zh) * | 2021-06-29 | 2021-09-21 | 辽宁分子流科技有限公司 | 一种用于卷对卷工艺过程的卷辊更换方法 |
| CN119243113A (zh) * | 2024-12-06 | 2025-01-03 | 四川海格锐特科技有限公司 | 真空卷绕镀膜设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0634369Y2 (ja) | 1994-09-07 |