JPH0634369Y2 - Vacuum sealing device for continuous vacuum film forming equipment - Google Patents
Vacuum sealing device for continuous vacuum film forming equipmentInfo
- Publication number
- JPH0634369Y2 JPH0634369Y2 JP228590U JP228590U JPH0634369Y2 JP H0634369 Y2 JPH0634369 Y2 JP H0634369Y2 JP 228590 U JP228590 U JP 228590U JP 228590 U JP228590 U JP 228590U JP H0634369 Y2 JPH0634369 Y2 JP H0634369Y2
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- chamber
- vacuum
- sealing device
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【考案の詳細な説明】 （産業上の利用分野） 本考案は連続式真空成膜装置（以下、真空成膜装置とい
う。）に設けた真空シール装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a vacuum sealing device provided in a continuous vacuum film forming apparatus (hereinafter referred to as a vacuum film forming apparatus).
（従来の技術） 従来、例えば、金属帯，プラスチックフィルム等の帯状
体の表面に成膜を形成するために使用する真空成膜装置
は、アンコイラ室で巻戻コイルに巻回した帯状体を巻き
戻し、成膜室でその表面を成膜し、リコイラ室で巻取コ
イルに巻き取る構成のもので、成膜時、装置内部は所定
の減圧に維持されている。(Prior Art) Conventionally, for example, a vacuum film forming apparatus used for forming a film on the surface of a band-shaped body such as a metal band, a plastic film, or the like winds a band-shaped body wound around a rewinding coil in an uncoiler chamber. The structure is such that the film is returned, the surface of the film is formed in the film forming chamber, and the film is wound around the winding coil in the chiller chamber. During film formation, the inside of the apparatus is maintained at a predetermined reduced pressure.
そして、この真空成膜装置においては、コイルの交換時
等に走行ラインをストップしてアンコイラ室あるいはリ
コイラ室を開放しなければならず、このとき前記成膜室
に外気が入り込まないようにして真空常態を維持する必
要がある。Further, in this vacuum film forming apparatus, it is necessary to stop the traveling line and open the uncoiler chamber or the chiller chamber at the time of replacing the coil, etc. It is necessary to maintain a normal state.
このため、前記アンコイラ室およびリコイラ室と成膜室
との間に、例えば、実開昭63−19567号公報等に開示さ
れているような真空シール装置を配設したものが提案さ
れている。Therefore, it has been proposed to provide a vacuum seal device as disclosed in, for example, Japanese Utility Model Laid-Open No. 63-19567, between the uncoiler chamber and the chiller chamber and the film forming chamber.
この真空シール装置は、走行ライン停止時に、対向配設
したフッソゴム等の弾性体を備えた締切板を、作動手段
によってチャンバの内周面を摺動させることにより開閉
動作を行わせ、前記弾性体で帯状体を隙間なく挟持して
成膜室内を真空状態に持するものである。In this vacuum seal device, when the traveling line is stopped, a shut-off plate provided with an elastic body such as fluorine rubber arranged oppositely is slid on the inner peripheral surface of the chamber by an operating means to open and close the elastic body. In order to hold the strip-shaped body in a vacuum state inside the deposition chamber.
（考案が解決しようとする課題） しかしながら、前記真空シール装置では、締切板とチャ
ンバの摺動面間にどうしてもわずかな隙間ができるた
め、完全なシールは不可能である。(Problem to be Solved by the Invention) However, in the vacuum sealing device, a perfect gap is inevitable between the shutoff plate and the sliding surface of the chamber, and thus a complete seal is impossible.
また、使用により前記摺動面が摩耗劣化したり、締切板
あるいはチャンバの熱変形により摺動面に歪が生じたり
すればシール機能は低下するという問題点がある。Further, if the sliding surface is worn and deteriorated due to use, or if the sliding surface is distorted due to thermal deformation of the shutoff plate or the chamber, the sealing function is deteriorated.
本考案は前記問題点に鑑みてなされたもので、簡単な構
造で、確実に成膜室内を密封することのできる真空成膜
装置の真空シール装置を提供することを目的とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide a vacuum sealing device of a vacuum film forming apparatus that has a simple structure and can reliably seal the inside of the film forming chamber.
（課題を解決するための手段） 本考案は前記目的を達成するために、成膜室に入口通路
および出口通路を介してそれぞれ設けたアンコイラ室お
よびリコイラ室を備えた連続式真空成膜装置において、
前記入口通路および出口通路に、スリット状の貫通孔の
内周面に環状溝を形成したチューブ保持材と前記環状溝
内に配設した環状の弾性チューブとからなるシール部材
を所定間隔で複数配設し、帯状体の非通板時、前記弾性
チューブ内に流体を供給して、帯状体を圧着挟持するよ
うにしたものである。(Means for Solving the Problems) In order to achieve the above object, the present invention provides a continuous vacuum film forming apparatus including an uncoiler chamber and a recoiler chamber, which are provided in the film forming chamber through an inlet passage and an outlet passage, respectively. ,
In the inlet passage and the outlet passage, a plurality of seal members, each including a tube holding member having an annular groove formed on the inner peripheral surface of a slit-shaped through hole and an annular elastic tube disposed in the annular groove, are arranged at predetermined intervals. When the strip-shaped body is not passed through, the fluid is supplied into the elastic tube to clamp the strip-shaped body.
（実施例） 次に、本考案に係る真空シール装置の一実施例を添付図
面にしたがって説明する。(Embodiment) Next, an embodiment of the vacuum sealing device according to the present invention will be described with reference to the accompanying drawings.
第１図は、この真空シール装置を適用した真空成膜装置
を示し、大略、成膜室１と、入口通路２および出口通路
３と、該通路2,3を介してそれぞれ設けたアンコイラ室
４およびリコイラ室６と、真空シール装置を構成するシ
ール部材10a,10b,11a,11bとからなる。FIG. 1 shows a vacuum film forming apparatus to which this vacuum sealing device is applied, which is roughly composed of a film forming chamber 1, an inlet passage 2 and an outlet passage 3, and an uncoiler chamber 4 provided through the passages 2 and 3, respectively. Also, it is composed of the recoiler chamber 6 and the seal members 10a, 10b, 11a, 11b constituting the vacuum sealing device.
前記アンコイラ室４内には帯鋼等の帯状体Ｗを巻回した
巻戻コイル５が、成膜室１内には帯状体Ｗを成膜するた
めの公知の蒸着源８が、リコイラ室６には帯状体Ｗを巻
き取るための巻取コイル７がそれぞれ設けられている。
そして、前記成膜室1,アンコイラ室４およびリコイラ室
６にはそれぞれ真空ポンプP1，P2，P3が接続されてい
る。In the uncoiler chamber 4, a rewinding coil 5 around which a strip W of strip steel or the like is wound, a known vapor deposition source 8 for depositing the strip W in the film forming chamber 1, and a chiller chamber 6 are provided. A winding coil 7 for winding the strip W is provided in each of them.
Vacuum pumps P 1 , P 2 and P 3 are connected to the film forming chamber 1, the uncoiler chamber 4 and the chiller chamber 6, respectively.
また、前記入口通路２にはシール部材10aおよび10bが、
前記出口通路３にはシール部材11aおよび11bがそれぞれ
所定間隔で設けられ真空シール装置を形成している。そ
して、各シール部材10a,10b間および11a,11b間にはそれ
ぞれ真空ポンプP4，P5が接続されている。In addition, seal members 10a and 10b are provided in the inlet passage 2,
Sealing members 11a and 11b are provided in the outlet passage 3 at predetermined intervals to form a vacuum sealing device. Vacuum pumps P 4 and P 5 are connected between the seal members 10a and 10b and between the seal members 11a and 11b, respectively.
前記シール部材10a,10b,11a,11bはすべて、第２図およ
び第３図に示すように、チューブ保持材12と弾性チュー
ブ15とからなる。The sealing members 10a, 10b, 11a, 11b are all composed of a tube holding material 12 and an elastic tube 15, as shown in FIGS. 2 and 3.
チューブ保持材12は、帯状体Ｗを挿通するためのスリッ
ト状の貫通孔13を有し、この貫通孔13の内周面には蟻溝
形状の環状溝14が設けられている。The tube holding member 12 has a slit-shaped through hole 13 for inserting the band-shaped body W, and an inner peripheral surface of the through hole 13 is provided with a dovetail-shaped annular groove 14.
弾性チューブ15は、フッソゴム等からなる環状のもの
で、図示しない加圧手段によって内部に流体（気体ある
いは流体）を供給あるいは排出することができるように
なっている。そして、この弾性チューブ15は、前記チュ
ーブ保持材12に設けた環状溝14内に脱出できないように
嵌め込まれ、前記環状溝14の底面に接着されており、内
部に流体を供給することにより、変形して内周面から膨
出する。The elastic tube 15 is an annular tube made of fluorine rubber or the like, and is capable of supplying or discharging a fluid (gas or fluid) to the inside by a pressurizing means (not shown). The elastic tube 15 is fitted into the annular groove 14 provided in the tube holding member 12 so as not to escape, is adhered to the bottom surface of the annular groove 14, and is deformed by supplying a fluid inside. And bulges from the inner peripheral surface.
前記構成からなる真空成膜装置では、真空ポンプP1，
P2，P3を作動して、成膜室1,アンコイラ室４およびリコ
イラ室６内をそれぞれ所定圧以下に設定した状態で、ア
ンコイラ室４の巻戻コイル５に巻回された帯状体Ｗを成
膜室１で成膜し、リコイラ室６の巻取コイル７に巻き取
る。このとき、弾性チューブ15は、第２図および第３図
中２点鎖線で示すように、チューブ保持材12の貫通孔13
から退避した形状となっている。In the vacuum film forming apparatus having the above structure, the vacuum pump P 1 ,
The strip-shaped body W wound around the rewinding coil 5 of the uncoiler chamber 4 with P 2 and P 3 actuated to set the inside of the film forming chamber 1, the uncoiler chamber 4 and the chiller chamber 6 to a predetermined pressure or less, respectively. Is formed into a film in the film forming chamber 1 and is wound around the winding coil 7 in the chiller chamber 6. At this time, the elastic tube 15 has the through hole 13 of the tube holding member 12 as shown by the chain double-dashed line in FIGS. 2 and 3.
The shape is retracted from.
そして、巻戻コイル５に巻回した帯状体Ｗがすべて巻き
戻される、あるいは帯状体Ｗが巻取コイル７に所定量巻
き取られると、走行ラインを一旦停止し、入口通路２の
真空シール装置あるいは出口通路３の真空シール装置を
作動させる。すなわち、弾性チューブ15内に加圧流体を
供給することにより、弾性チューブ15を、第２図および
第３図中実線で示すように、前記貫通孔13内に膨出させ
て帯状体Ｗを圧着挟持する。When all the strips W wound around the rewinding coil 5 are unwound or when the strip W is wound around the winding coil 7 by a predetermined amount, the traveling line is temporarily stopped and the vacuum sealing device for the inlet passage 2 is provided. Alternatively, the vacuum sealing device of the outlet passage 3 is activated. That is, by supplying a pressurized fluid into the elastic tube 15, the elastic tube 15 is swollen into the through hole 13 as shown by the solid line in FIGS. 2 and 3 to crimp the strip W. Hold it.
その後、シール部材10a,10bあるいは11a,11bによってそ
れぞれ形成される空間を真空ポンプP4あるいはP5によっ
て減圧させながら、アンコイラ室４あるいはリコイラ室
６を開放することによって、巻戻コイル５あるいは巻取
コイル７を取り替える。After that, the uncoiler chamber 4 or the chiller chamber 6 is opened while the space formed by the seal members 10a, 10b or 11a, 11b is being decompressed by the vacuum pump P 4 or P 5 , respectively, so that the rewinding coil 5 or the winding coil 5 is wound. Replace coil 7.
したがって、アンコイラ室４あるいはリコイラ室６より
成膜室１に外気が流入することは殆どなく、成膜室１内
は常に所定圧以下に維持することができる。Therefore, the outside air hardly flows into the film forming chamber 1 from the uncoiler chamber 4 or the chiller chamber 6, and the inside of the film forming chamber 1 can always be maintained at a predetermined pressure or less.
なお、本実施例では真空シール装置に真空ポンプP4，P5
を設けてシール性を高めるようにしたが、必ずしも必要
とするものではない。In this embodiment, the vacuum seal device is equipped with vacuum pumps P 4 , P 5
Although a seal is provided to improve the sealing property, it is not always necessary.
また、真空シール装置としてシール部材10a,10bおよび1
1a,11bをそれぞれ入口通路２および出口通路３に設ける
ようにしたが、さらに多く設けるようにすれば、より確
実に成膜室１内を最適な真空状態に維持することができ
る。Further, as the vacuum sealing device, the sealing members 10a, 10b and 1
Although 1a and 11b are provided in the inlet passage 2 and the outlet passage 3, respectively, if more are provided, the inside of the film forming chamber 1 can be more reliably maintained in an optimum vacuum state.
（考案の効果） 以上の説明から明らかなように、本考案に係る真空シー
ル装置によれば、チューブ保持材の環状溝内に弾性チュ
ーブを配設し、この弾性チューブ内に流体を供給するだ
けの簡単な構造で容易に成膜室をシールすることができ
る。(Effect of the Invention) As is apparent from the above description, according to the vacuum sealing device of the present invention, the elastic tube is arranged in the annular groove of the tube holding member, and only the fluid is supplied into the elastic tube. The film-forming chamber can be easily sealed with this simple structure.
また、従来のように摺動面を設けていないので、シール
性が高く、成膜室内を最適な真空状態に維持することが
できる。Further, unlike the conventional case, since no sliding surface is provided, the sealing property is high, and the inside of the film forming chamber can be maintained in an optimum vacuum state.
第１図は本考案に係る真空シール装置を備えた連続式帯
鋼真空成膜装置の概略正面図、第２図はその真空シール
装置の部分断面図、第３図は第２図の部分側面断面図で
ある。 １…成膜室、２…入口通路、３…出口通路、４…アンコ
イラ室、６…リコイラ室、10a,10b,11a,11b…シール部
材、12…チューブ保持材、13…貫通孔、15…弾性チュー
ブ、Ｗ…帯状体、P1,P2,P3,P4,P5…真空ポンプ。FIG. 1 is a schematic front view of a continuous strip steel vacuum film forming apparatus equipped with a vacuum sealing device according to the present invention, FIG. 2 is a partial sectional view of the vacuum sealing device, and FIG. 3 is a partial side view of FIG. FIG. 1 ... Film forming chamber, 2 ... Inlet passage, 3 ... Exit passage, 4 ... Uncoiler chamber, 6 ... Recoiler chamber, 10a, 10b, 11a, 11b ... Sealing member, 12 ... Tube holding material, 13 ... Through hole, 15 ... elastic tube, W ... strip, P 1, P 2, P 3, P 4, P 5 ... vacuum pump.
Claims (1)
それぞれ設けたアンコイラ室およびリコイラ室を備えた
連続式真空成膜装置において、前記入口通路および出口
通路に、スリット状の貫通孔の内周面に環状溝を形成し
たチューブ保持材と前記環状溝内に配設した環状の弾性
チューブとからなるシール部材を所定間隔で複数配設
し、帯状体の非通板時、前記弾性チューブ内に流体を供
給して、帯状体を圧着挟持することを特徴とする連続式
真空成膜装置の真空シール装置。1. A continuous vacuum film forming apparatus comprising an uncoiler chamber and a chiller chamber provided in a film forming chamber via an inlet passage and an outlet passage, respectively, wherein a slit-shaped through hole is provided in the inlet passage and the outlet passage. A plurality of seal members each including a tube holding material having an annular groove formed on the inner peripheral surface thereof and an annular elastic tube arranged in the annular groove are arranged at predetermined intervals, and the elastic tube is provided when the strip-shaped body is not passed through. A vacuum seal device for a continuous vacuum film forming apparatus, characterized in that a fluid is supplied into the inside to press and sandwich the strip-shaped body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP228590U JPH0634369Y2 (en) | 1990-01-12 | 1990-01-12 | Vacuum sealing device for continuous vacuum film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP228590U JPH0634369Y2 (en) | 1990-01-12 | 1990-01-12 | Vacuum sealing device for continuous vacuum film forming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0392770U JPH0392770U (en) | 1991-09-20 |
| JPH0634369Y2 true JPH0634369Y2 (en) | 1994-09-07 |
Family
ID=31506163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP228590U Expired - Lifetime JPH0634369Y2 (en) | 1990-01-12 | 1990-01-12 | Vacuum sealing device for continuous vacuum film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634369Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010053411B4 (en) | 2009-12-15 | 2023-07-06 | Vat Holding Ag | vacuum valve |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4714714B2 (en) * | 2007-07-30 | 2011-06-29 | 株式会社ブイテックス | Gate valve for maintaining airtightness, film manufacturing apparatus and film manufacturing method using the gate valve |
| WO2011072315A1 (en) * | 2009-12-14 | 2011-06-23 | Vat Holding Ag | Vacuum valve |
| JP2013087315A (en) * | 2011-10-17 | 2013-05-13 | Takada Tekku Kk | Apparatus for continuous treatment of substrate |
| CN113416939B (en) * | 2021-06-29 | 2023-06-02 | 辽宁分子流科技有限公司 | Method for replacing winding roller in winding-to-winding process |
-
1990
- 1990-01-12 JP JP228590U patent/JPH0634369Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010053411B4 (en) | 2009-12-15 | 2023-07-06 | Vat Holding Ag | vacuum valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0392770U (en) | 1991-09-20 |
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