JPH0633643Y2 - 電子銃のカソード支持構造 - Google Patents
電子銃のカソード支持構造Info
- Publication number
- JPH0633643Y2 JPH0633643Y2 JP134990U JP134990U JPH0633643Y2 JP H0633643 Y2 JPH0633643 Y2 JP H0633643Y2 JP 134990 U JP134990 U JP 134990U JP 134990 U JP134990 U JP 134990U JP H0633643 Y2 JPH0633643 Y2 JP H0633643Y2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- holder
- electron gun
- primary
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 229910052746 lanthanum Inorganic materials 0.000 claims description 8
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical group [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 8
- 239000003575 carbonaceous material Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 description 19
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP134990U JPH0633643Y2 (ja) | 1990-01-11 | 1990-01-11 | 電子銃のカソード支持構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP134990U JPH0633643Y2 (ja) | 1990-01-11 | 1990-01-11 | 電子銃のカソード支持構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0394759U JPH0394759U (enExample) | 1991-09-26 |
| JPH0633643Y2 true JPH0633643Y2 (ja) | 1994-08-31 |
Family
ID=31505261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP134990U Expired - Lifetime JPH0633643Y2 (ja) | 1990-01-11 | 1990-01-11 | 電子銃のカソード支持構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0633643Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023541837A (ja) * | 2020-09-09 | 2023-10-04 | ケーエルエー コーポレイション | 磁気液浸電子銃 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011040293A (ja) * | 2009-08-12 | 2011-02-24 | Ulvac Japan Ltd | 電子銃、電子銃を用いた真空処理装置 |
| JP5159724B2 (ja) * | 2009-08-12 | 2013-03-13 | 株式会社アルバック | 電子銃、電子銃を用いた真空処理装置 |
-
1990
- 1990-01-11 JP JP134990U patent/JPH0633643Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023541837A (ja) * | 2020-09-09 | 2023-10-04 | ケーエルエー コーポレイション | 磁気液浸電子銃 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0394759U (enExample) | 1991-09-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |