JPH0394759U - - Google Patents

Info

Publication number
JPH0394759U
JPH0394759U JP134990U JP134990U JPH0394759U JP H0394759 U JPH0394759 U JP H0394759U JP 134990 U JP134990 U JP 134990U JP 134990 U JP134990 U JP 134990U JP H0394759 U JPH0394759 U JP H0394759U
Authority
JP
Japan
Prior art keywords
cathode
holder
electron gun
support structure
primary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP134990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0633643Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP134990U priority Critical patent/JPH0633643Y2/ja
Publication of JPH0394759U publication Critical patent/JPH0394759U/ja
Application granted granted Critical
Publication of JPH0633643Y2 publication Critical patent/JPH0633643Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP134990U 1990-01-11 1990-01-11 電子銃のカソード支持構造 Expired - Lifetime JPH0633643Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP134990U JPH0633643Y2 (ja) 1990-01-11 1990-01-11 電子銃のカソード支持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP134990U JPH0633643Y2 (ja) 1990-01-11 1990-01-11 電子銃のカソード支持構造

Publications (2)

Publication Number Publication Date
JPH0394759U true JPH0394759U (enExample) 1991-09-26
JPH0633643Y2 JPH0633643Y2 (ja) 1994-08-31

Family

ID=31505261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP134990U Expired - Lifetime JPH0633643Y2 (ja) 1990-01-11 1990-01-11 電子銃のカソード支持構造

Country Status (1)

Country Link
JP (1) JPH0633643Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040293A (ja) * 2009-08-12 2011-02-24 Ulvac Japan Ltd 電子銃、電子銃を用いた真空処理装置
JP2011040291A (ja) * 2009-08-12 2011-02-24 Ulvac Japan Ltd 電子銃、電子銃を用いた真空処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11636996B2 (en) * 2020-09-09 2023-04-25 Kla Corporation Magnetic immersion electron gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040293A (ja) * 2009-08-12 2011-02-24 Ulvac Japan Ltd 電子銃、電子銃を用いた真空処理装置
JP2011040291A (ja) * 2009-08-12 2011-02-24 Ulvac Japan Ltd 電子銃、電子銃を用いた真空処理装置

Also Published As

Publication number Publication date
JPH0633643Y2 (ja) 1994-08-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term