JPH0631721Y2 - ウエハの枚数読取り装置 - Google Patents

ウエハの枚数読取り装置

Info

Publication number
JPH0631721Y2
JPH0631721Y2 JP1987021637U JP2163787U JPH0631721Y2 JP H0631721 Y2 JPH0631721 Y2 JP H0631721Y2 JP 1987021637 U JP1987021637 U JP 1987021637U JP 2163787 U JP2163787 U JP 2163787U JP H0631721 Y2 JPH0631721 Y2 JP H0631721Y2
Authority
JP
Japan
Prior art keywords
wafers
wafer
image
reading
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987021637U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63128733U (enrdf_load_stackoverflow
Inventor
淳郎 小林
訓章 足立
Original Assignee
大日本スクリ−ン製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリ−ン製造株式会社 filed Critical 大日本スクリ−ン製造株式会社
Priority to JP1987021637U priority Critical patent/JPH0631721Y2/ja
Publication of JPS63128733U publication Critical patent/JPS63128733U/ja
Application granted granted Critical
Publication of JPH0631721Y2 publication Critical patent/JPH0631721Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Image Processing (AREA)
JP1987021637U 1987-02-16 1987-02-16 ウエハの枚数読取り装置 Expired - Lifetime JPH0631721Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987021637U JPH0631721Y2 (ja) 1987-02-16 1987-02-16 ウエハの枚数読取り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987021637U JPH0631721Y2 (ja) 1987-02-16 1987-02-16 ウエハの枚数読取り装置

Publications (2)

Publication Number Publication Date
JPS63128733U JPS63128733U (enrdf_load_stackoverflow) 1988-08-23
JPH0631721Y2 true JPH0631721Y2 (ja) 1994-08-22

Family

ID=30818259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987021637U Expired - Lifetime JPH0631721Y2 (ja) 1987-02-16 1987-02-16 ウエハの枚数読取り装置

Country Status (1)

Country Link
JP (1) JPH0631721Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111307034A (zh) * 2018-12-12 2020-06-19 丰田自动车株式会社 位置检测方法以及位置检测装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4762209B2 (ja) * 2007-07-25 2011-08-31 大日本スクリーン製造株式会社 基板検出装置および基板処理装置
JP5304016B2 (ja) * 2008-05-09 2013-10-02 富士通株式会社 位置検出装置、位置検出プログラム、位置検出方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61286708A (ja) * 1985-06-12 1986-12-17 Hokuyo Automatic Co 板材の積層枚数測定器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111307034A (zh) * 2018-12-12 2020-06-19 丰田自动车株式会社 位置检测方法以及位置检测装置
CN111307034B (zh) * 2018-12-12 2022-10-11 丰田自动车株式会社 位置检测方法以及位置检测装置

Also Published As

Publication number Publication date
JPS63128733U (enrdf_load_stackoverflow) 1988-08-23

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