JPH06309829A - Inspecting device of surface defect of optical disk - Google Patents
Inspecting device of surface defect of optical diskInfo
- Publication number
- JPH06309829A JPH06309829A JP9953693A JP9953693A JPH06309829A JP H06309829 A JPH06309829 A JP H06309829A JP 9953693 A JP9953693 A JP 9953693A JP 9953693 A JP9953693 A JP 9953693A JP H06309829 A JPH06309829 A JP H06309829A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- optical disk
- circuit
- defect
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Optical Recording Or Reproduction (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は情報を記録する光ディス
クの表面欠陥検査装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface defect inspection apparatus for recording information on an optical disk.
【0002】[0002]
【従来の技術】図3は光ディスクの外観検査機の構造を
示す。図3に示すように、光源1で発生した光は、照射
用光学系2を通過した後、光ディスク3に照射される。
光ディスク3は、検査中回転している。光ディスク3か
ら反射された光は、受光用光学系4によってCCD5に
受光される。2. Description of the Related Art FIG. 3 shows the structure of a visual inspection machine for optical disks. As shown in FIG. 3, the light generated by the light source 1 passes through the irradiation optical system 2 and then is irradiated onto the optical disc 3.
The optical disc 3 is rotating during the inspection. The light reflected from the optical disc 3 is received by the CCD 5 by the light receiving optical system 4.
【0003】光ディスク3上に外観欠陥がある場合、図
4に従来例によるビデオ信号の例で示すようにCCD5
からの信号6は、光ディスク3の外周から内周までの範
囲に応答して発生し、光ディスク3上に外観欠陥がある
と、欠陥により生じる信号8を判定信号7と比較するこ
とによって検出する。When there is an appearance defect on the optical disk 3, the CCD 5 as shown in the example of the conventional video signal in FIG.
Is generated in response to the range from the outer circumference to the inner circumference of the optical disc 3, and if there is an appearance defect on the optical disc 3, the signal 8 caused by the defect is detected by comparing with the determination signal 7.
【0004】この判定信号7は、正常な面に応答する信
号のレベルにある乗数をかけて作られる。This decision signal 7 is made by multiplying the level of the signal responding to the normal surface by a multiplier.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、上述の
ように、従来の検査方法では、光ディスク3の内周,外
周の鏡面に隣あった信号面部分および鏡面については大
きな信号9,10が発生するため、信号6のレベルが不
安定もしくは欠陥があるにもかかわらず、正確に検査で
きなかった。However, as described above, in the conventional inspection method, large signals 9 and 10 are generated for the signal surface portion and the mirror surface adjacent to the mirror surfaces of the inner and outer circumferences of the optical disk 3. Therefore, although the level of the signal 6 is unstable or defective, it cannot be accurately inspected.
【0006】そこで本発明の目的は以上のような問題を
解消した光ディスクの表面欠陥検査装置を提供すること
にある。Therefore, an object of the present invention is to provide a surface defect inspection apparatus for an optical disk which solves the above problems.
【0007】[0007]
【課題を解決するための手段】上記目的を達成するため
本発明は光ディスクの表面に光を照射する手段と、前記
光ディスクの表面からの反射光を受光して光電変換する
受光手段と、該受光手段からの信号と判定用信号とを比
較して前記光ディスクの表面欠陥を検出する欠陥検出手
段と、前記光ディスクへの前記光の照射位置を検出する
位置検出手段と、該位置検出手段の検出結果に基づいて
前記光ディスクの所定位置からの反射光に関する前記受
光手段からの信号をローパスフィルタを通してから前記
欠陥検出手段に供給する手段とを具えたことを特徴とす
る。In order to achieve the above object, the present invention provides means for irradiating the surface of an optical disk with light, light receiving means for receiving reflected light from the surface of the optical disk and performing photoelectric conversion, and the light receiving means. Defect detection means for detecting a surface defect of the optical disc by comparing a signal from the means with a determination signal, position detection means for detecting the irradiation position of the light on the optical disc, and a detection result of the position detection means And a means for supplying a signal from the light receiving means concerning reflected light from a predetermined position of the optical disk to the defect detecting means after passing through a low pass filter.
【0008】[0008]
【作用】本発明によれば、光ディスクの所定位置からの
反射光に応答する受光手段からの信号をローパスフィル
タを通して判定することによって、光ディスクの内周,
外周の鏡面に隣あった信号面および鏡面についても正確
な検査が行えるようになる。According to the present invention, by determining the signal from the light receiving means in response to the reflected light from the predetermined position of the optical disc through the low pass filter, the inner circumference of the optical disc
Accurate inspection can be performed on the signal surface and the mirror surface adjacent to the mirror surface on the outer periphery.
【0009】[0009]
【実施例】以下、図面を参照して本発明の実施例を詳細
に説明する。Embodiments of the present invention will now be described in detail with reference to the drawings.
【0010】図1は本発明を適用した検出回路のブロッ
ク図である。本検出回路は、図3に示した外観検査機の
CCD5からの信号を入力する。CCD5からのビデオ
信号は整形回路11を通して整形する。12は照射位置
検出回路であって、図3に示した外観検査機における光
源1の走査手段等からの信号に基づいて光ディスクへの
光源1の照射位置を検出し、その検出位置に応じてスイ
ッチSWを切替える。すなわち、光ディスクの鏡面付近
(内周,外周の鏡面に隣あった信号面部分を含む)を検
出したときは整形回路11からの出力信号をローパスフ
ィルタ13を介して取り出し、それ以外の位置を検出し
たときは整形回路11からの出力信号を直接取り出すよ
うにスイッチSWを制御する。したがって、ローパスフ
ィルタ13から取り出した信号は他の部分、すなわち光
ディスクの信号面部分と同じように平坦になり、これら
がスイッチSWを通して判定信号作成回路14に入力さ
れ判定信号が作成され、判定回路15によって、スイッ
チSWを通して得られたビデオ信号と比較される。判定
回路15ではこのビデオ信号が判定信号のレベルまで低
下したところが欠陥として判定され、判定信号が出力さ
れる。FIG. 1 is a block diagram of a detection circuit to which the present invention is applied. This detection circuit inputs a signal from the CCD 5 of the visual inspection machine shown in FIG. The video signal from the CCD 5 is shaped by the shaping circuit 11. An irradiation position detection circuit 12 detects the irradiation position of the light source 1 onto the optical disk based on a signal from the scanning means of the light source 1 in the appearance inspection machine shown in FIG. 3, and switches according to the detected position. Switch SW. That is, when the vicinity of the mirror surface of the optical disk (including the signal surface portions adjacent to the inner and outer mirror surfaces) is detected, the output signal from the shaping circuit 11 is taken out through the low-pass filter 13, and the other positions are detected. In this case, the switch SW is controlled so that the output signal from the shaping circuit 11 is directly taken out. Therefore, the signal taken out from the low-pass filter 13 becomes flat like other portions, that is, the signal surface portion of the optical disc, and these are input to the determination signal generating circuit 14 through the switch SW to generate the determination signal, and the determination circuit 15 Is compared with the video signal obtained through the switch SW. The judgment circuit 15 judges that the video signal has dropped to the level of the judgment signal as a defect and outputs the judgment signal.
【0011】このように、図2に本発明実施例における
ビデオ信号の例で示すごとく光ディスクの内周,外周付
近のビデオ信号であっても、その信号面のそれと同等の
レベルとなり、判定信号を作成して比較することができ
るので、これら内周,外周付近の欠陥も正確に検出する
ことができる。Thus, as shown in the example of the video signal in the embodiment of the present invention in FIG. 2, even a video signal in the vicinity of the inner circumference and the outer circumference of the optical disk has a level equivalent to that of the signal surface and the judgment signal is obtained. Since they can be created and compared, it is possible to accurately detect the defects around the inner circumference and the outer circumference.
【0012】[0012]
【発明の効果】以上説明したように本発明によれば、光
ディスクの信号面(記録膜)全面および内周,外周の鏡
面部分の表面欠陥も検出することができる。As described above, according to the present invention, it is possible to detect the surface defects of the entire signal surface (recording film) of the optical disk and the inner and outer mirror surface portions.
【図1】本発明の実施例のブロック図である。FIG. 1 is a block diagram of an embodiment of the present invention.
【図2】同実施例におけるビデオ信号の一例を示す図で
ある。FIG. 2 is a diagram showing an example of a video signal in the embodiment.
【図3】外観検査機の構造を示す図である。FIG. 3 is a diagram showing a structure of an appearance inspection machine.
【図4】従来例によるビデオ信号の一例を示す図であ
る。FIG. 4 is a diagram showing an example of a conventional video signal.
【符号の説明】 1 光源 2 照射用光学系 3 光ディスク 4 受光用光学系 5 CCD 11 整形回路 12 照射位置検出回路 13 ローパスフィルタ 14 判定信号作成回路 15 判定回路[Explanation of reference numerals] 1 light source 2 irradiation optical system 3 optical disk 4 light receiving optical system 5 CCD 11 shaping circuit 12 irradiation position detection circuit 13 low-pass filter 14 determination signal generation circuit 15 determination circuit
Claims (1)
と、前記光ディスクの表面からの反射光を受光して光電
変換する受光手段と、該受光手段からの信号と判定用信
号とを比較して前記光ディスクの表面欠陥を検出する欠
陥検出手段と、前記光ディスクへの前記光の照射位置を
検出する位置検出手段と、該位置検出手段の検出結果に
基づいて前記光ディスクの所定位置からの反射光に関す
る前記受光手段からの信号をローパスフィルタを通して
から前記欠陥検出手段に供給する手段とを具えたことを
特徴とする光ディスクの表面欠陥検査装置。1. A means for irradiating the surface of an optical disk with light, a light receiving means for receiving reflected light from the surface of the optical disk and photoelectrically converting the reflected light, and comparing a signal from the light receiving means with a determination signal. Defect detecting means for detecting a surface defect of the optical disc, position detecting means for detecting an irradiation position of the light on the optical disc, and reflected light from a predetermined position of the optical disc based on a detection result of the position detecting means A device for inspecting a surface defect of an optical disc, comprising: means for supplying a signal from the light receiving means to the defect detecting means after passing through a low pass filter.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9953693A JPH06309829A (en) | 1993-04-26 | 1993-04-26 | Inspecting device of surface defect of optical disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9953693A JPH06309829A (en) | 1993-04-26 | 1993-04-26 | Inspecting device of surface defect of optical disk |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06309829A true JPH06309829A (en) | 1994-11-04 |
Family
ID=14249931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9953693A Pending JPH06309829A (en) | 1993-04-26 | 1993-04-26 | Inspecting device of surface defect of optical disk |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06309829A (en) |
-
1993
- 1993-04-26 JP JP9953693A patent/JPH06309829A/en active Pending
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