JPH06307960A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPH06307960A
JPH06307960A JP6082551A JP8255194A JPH06307960A JP H06307960 A JPH06307960 A JP H06307960A JP 6082551 A JP6082551 A JP 6082551A JP 8255194 A JP8255194 A JP 8255194A JP H06307960 A JPH06307960 A JP H06307960A
Authority
JP
Japan
Prior art keywords
pressure sensor
diaphragm
diaphragms
film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP6082551A
Other languages
English (en)
Japanese (ja)
Inventor
Markus Biebl
ビーブル マルクス
Thomas Scheiter
シヤイター トーマス
Helmut Klose
クローゼ ヘルムート
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPH06307960A publication Critical patent/JPH06307960A/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP6082551A 1993-03-30 1994-03-28 圧力センサ Withdrawn JPH06307960A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4310244.1 1993-03-30
DE4310244 1993-03-30

Publications (1)

Publication Number Publication Date
JPH06307960A true JPH06307960A (ja) 1994-11-04

Family

ID=6484179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6082551A Withdrawn JPH06307960A (ja) 1993-03-30 1994-03-28 圧力センサ

Country Status (5)

Country Link
US (1) US5450754A (enExample)
EP (1) EP0618435A3 (enExample)
JP (1) JPH06307960A (enExample)
KR (1) KR940022070A (enExample)
TW (1) TW239188B (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11298011A (ja) * 1998-04-13 1999-10-29 Denso Corp 半導体力学量センサ及びその製造方法
JP2003509984A (ja) * 1999-09-13 2003-03-11 カーネギー−メロン ユニバーシティ エラーキャンセレーションを有するｍｅｍｓデジタル−音響トランスデューサ
US6640642B1 (en) 2000-02-23 2003-11-04 Hitachi, Ltd. Capacitance-type pressure sensor
WO2009131006A1 (ja) * 2008-04-24 2009-10-29 パナソニック電工株式会社 圧力センサ
JP2012501237A (ja) * 2008-09-02 2012-01-19 クリスチャン エム パットリッツ コンサルティング エルエルシー バイオｍｅｍｓセンサ及び装置ならびにその方法
JP2015219044A (ja) * 2014-05-14 2015-12-07 キヤノン株式会社 力覚センサおよび把持装置
KR20180032169A (ko) * 2016-09-21 2018-03-29 엘지디스플레이 주식회사 센서 장치
KR20180130439A (ko) * 2017-05-29 2018-12-07 엘지디스플레이 주식회사 힘 검출 장치
JP2021501324A (ja) * 2017-10-31 2021-01-14 エンサイト エルエルシー 広範囲マイクロ圧力センサ

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59508560D1 (de) * 1994-11-24 2000-08-17 Siemens Ag Kapazitiver Drucksensor
US5983727A (en) * 1997-08-19 1999-11-16 Pressure Profile Systems System generating a pressure profile across a pressure sensitive membrane
JP2000283866A (ja) * 1999-01-27 2000-10-13 Furukawa Electric Co Ltd:The フィルム状圧力センサ
DE19920990C2 (de) * 1999-05-06 2002-02-14 Siemens Ag Druckerfassungs-Anordnung
US6770505B1 (en) * 2001-09-21 2004-08-03 Lsi Logic Corporation Arrangement for measuring pressure on a semiconductor wafer and an associated method for fabricating a semiconductor wafer
GB2383420A (en) * 2001-12-22 2003-06-25 Michael John Tudor A capacitive pressure sensor with multiple diaphragms
US7436327B2 (en) * 2003-12-22 2008-10-14 Daktronics, Inc. Capacitive relay takeoff swimming platform sensor system
US7155980B2 (en) * 2005-01-07 2007-01-02 Kulite Semiconductor Products, Inc. Resonating transducer
EP1907811B1 (en) * 2005-07-22 2012-04-25 STMicroelectronics Srl Integrated pressure sensor with double measuring scale and a high full-scale value
US7401527B2 (en) * 2006-10-11 2008-07-22 Toyota Motor Engineering & Manufacturing North America, Inc. Windshield wiper pressure sensor
WO2009130628A1 (en) * 2008-04-23 2009-10-29 Nxp B.V. Capacitive pressure sensor
CN103644985A (zh) * 2013-12-11 2014-03-19 江苏物联网研究发展中心 多量程cmos mems电容式压力传感器芯片
DE102018211331A1 (de) * 2018-07-10 2019-10-31 Robert Bosch Gmbh Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren
DE102018211330A1 (de) 2018-07-10 2020-01-16 Robert Bosch Gmbh Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren
DE102022206969A1 (de) * 2022-07-07 2024-01-18 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanischer Drucksensor mit wenigstens zwei Membranen zur Bestimmung eines Druckwerts sowie entsprechendes Verfahren
DE102023205811A1 (de) * 2023-06-21 2024-12-24 Robert Bosch Gesellschaft mit beschränkter Haftung Drucksensormodul und Verfahren zum Messen eines Drucks

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4443383A (en) * 1981-03-19 1984-04-17 Rohm And Haas Company Preparation of methacrolein and methacrylonitrile from tert-butyl alkanoates
US4445383A (en) * 1982-06-18 1984-05-01 General Signal Corporation Multiple range capacitive pressure transducer
DE3704870C1 (de) * 1987-02-16 1988-04-28 Peter Seitz Vorrichtung zur Messung der flaechigen Verteilung von Druckkraeften
US5022270A (en) * 1989-06-15 1991-06-11 Rosemount Inc. Extended measurement capability transmitter having shared overpressure protection means
DE4004179A1 (de) * 1990-02-12 1991-08-14 Fraunhofer Ges Forschung Integrierbarer, kapazitiver drucksensor und verfahren zum herstellen desselben

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11298011A (ja) * 1998-04-13 1999-10-29 Denso Corp 半導体力学量センサ及びその製造方法
JP2003509984A (ja) * 1999-09-13 2003-03-11 カーネギー−メロン ユニバーシティ エラーキャンセレーションを有するｍｅｍｓデジタル−音響トランスデューサ
JP4987201B2 (ja) * 1999-09-13 2012-07-25 カーネギー−メロン ユニバーシティ エラーキャンセレーションを有するｍｅｍｓデジタル−音響トランスデューサ
US6640642B1 (en) 2000-02-23 2003-11-04 Hitachi, Ltd. Capacitance-type pressure sensor
US8201455B2 (en) 2008-04-24 2012-06-19 Panasonic Corporation Pressure sensor having thin film sections
JP2009264890A (ja) * 2008-04-24 2009-11-12 Panasonic Electric Works Co Ltd 圧力センサ
WO2009131006A1 (ja) * 2008-04-24 2009-10-29 パナソニック電工株式会社 圧力センサ
JP2012501237A (ja) * 2008-09-02 2012-01-19 クリスチャン エム パットリッツ コンサルティング エルエルシー バイオｍｅｍｓセンサ及び装置ならびにその方法
US9326728B2 (en) 2008-09-02 2016-05-03 Innovative In Vivo Sensing, Llc BioMEMS sensor and apparatuses and methods therefor
JP2015219044A (ja) * 2014-05-14 2015-12-07 キヤノン株式会社 力覚センサおよび把持装置
US10126190B2 (en) 2014-05-14 2018-11-13 Canon Kabushiki Kaisha Capacitive force sensor and grasping device
KR20180032169A (ko) * 2016-09-21 2018-03-29 엘지디스플레이 주식회사 센서 장치
JP2018048909A (ja) * 2016-09-21 2018-03-29 エルジー ディスプレイ カンパニー リミテッド センサ装置
KR20180130439A (ko) * 2017-05-29 2018-12-07 엘지디스플레이 주식회사 힘 검출 장치
JP2021501324A (ja) * 2017-10-31 2021-01-14 エンサイト エルエルシー 広範囲マイクロ圧力センサ

Also Published As

Publication number Publication date
EP0618435A2 (de) 1994-10-05
KR940022070A (ko) 1994-10-20
TW239188B (enExample) 1995-01-21
US5450754A (en) 1995-09-19
EP0618435A3 (de) 1995-02-01

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Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20010605