JPH0628774Y2 - イオン引出電極駆動装置 - Google Patents

イオン引出電極駆動装置

Info

Publication number
JPH0628774Y2
JPH0628774Y2 JP14805186U JP14805186U JPH0628774Y2 JP H0628774 Y2 JPH0628774 Y2 JP H0628774Y2 JP 14805186 U JP14805186 U JP 14805186U JP 14805186 U JP14805186 U JP 14805186U JP H0628774 Y2 JPH0628774 Y2 JP H0628774Y2
Authority
JP
Japan
Prior art keywords
bearing
extraction electrode
arc chamber
electrode
extraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14805186U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6354242U (enrdf_load_stackoverflow
Inventor
司 野上
恒雄 平松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP14805186U priority Critical patent/JPH0628774Y2/ja
Publication of JPS6354242U publication Critical patent/JPS6354242U/ja
Application granted granted Critical
Publication of JPH0628774Y2 publication Critical patent/JPH0628774Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14805186U 1986-09-26 1986-09-26 イオン引出電極駆動装置 Expired - Lifetime JPH0628774Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14805186U JPH0628774Y2 (ja) 1986-09-26 1986-09-26 イオン引出電極駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14805186U JPH0628774Y2 (ja) 1986-09-26 1986-09-26 イオン引出電極駆動装置

Publications (2)

Publication Number Publication Date
JPS6354242U JPS6354242U (enrdf_load_stackoverflow) 1988-04-12
JPH0628774Y2 true JPH0628774Y2 (ja) 1994-08-03

Family

ID=31061970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14805186U Expired - Lifetime JPH0628774Y2 (ja) 1986-09-26 1986-09-26 イオン引出電極駆動装置

Country Status (1)

Country Link
JP (1) JPH0628774Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6354242U (enrdf_load_stackoverflow) 1988-04-12

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