JPH0627951Y2 - インライン式成膜装置 - Google Patents

インライン式成膜装置

Info

Publication number
JPH0627951Y2
JPH0627951Y2 JP9324688U JP9324688U JPH0627951Y2 JP H0627951 Y2 JPH0627951 Y2 JP H0627951Y2 JP 9324688 U JP9324688 U JP 9324688U JP 9324688 U JP9324688 U JP 9324688U JP H0627951 Y2 JPH0627951 Y2 JP H0627951Y2
Authority
JP
Japan
Prior art keywords
film forming
substrate
roller
forming chamber
cart
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9324688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0215724U (enrdf_load_stackoverflow
Inventor
博 高宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP9324688U priority Critical patent/JPH0627951Y2/ja
Publication of JPH0215724U publication Critical patent/JPH0215724U/ja
Application granted granted Critical
Publication of JPH0627951Y2 publication Critical patent/JPH0627951Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9324688U 1988-07-13 1988-07-13 インライン式成膜装置 Expired - Lifetime JPH0627951Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9324688U JPH0627951Y2 (ja) 1988-07-13 1988-07-13 インライン式成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9324688U JPH0627951Y2 (ja) 1988-07-13 1988-07-13 インライン式成膜装置

Publications (2)

Publication Number Publication Date
JPH0215724U JPH0215724U (enrdf_load_stackoverflow) 1990-01-31
JPH0627951Y2 true JPH0627951Y2 (ja) 1994-07-27

Family

ID=31317693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9324688U Expired - Lifetime JPH0627951Y2 (ja) 1988-07-13 1988-07-13 インライン式成膜装置

Country Status (1)

Country Link
JP (1) JPH0627951Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0215724U (enrdf_load_stackoverflow) 1990-01-31

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