JPH0627947Y2 - 薄膜気相成長装置における熱電対支持装置 - Google Patents

薄膜気相成長装置における熱電対支持装置

Info

Publication number
JPH0627947Y2
JPH0627947Y2 JP1988046603U JP4660388U JPH0627947Y2 JP H0627947 Y2 JPH0627947 Y2 JP H0627947Y2 JP 1988046603 U JP1988046603 U JP 1988046603U JP 4660388 U JP4660388 U JP 4660388U JP H0627947 Y2 JPH0627947 Y2 JP H0627947Y2
Authority
JP
Japan
Prior art keywords
thermocouple
thin film
susceptor
vapor phase
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988046603U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01153635U (enExample
Inventor
清 久保田
潤一 立道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988046603U priority Critical patent/JPH0627947Y2/ja
Publication of JPH01153635U publication Critical patent/JPH01153635U/ja
Application granted granted Critical
Publication of JPH0627947Y2 publication Critical patent/JPH0627947Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1988046603U 1988-04-05 1988-04-05 薄膜気相成長装置における熱電対支持装置 Expired - Lifetime JPH0627947Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988046603U JPH0627947Y2 (ja) 1988-04-05 1988-04-05 薄膜気相成長装置における熱電対支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988046603U JPH0627947Y2 (ja) 1988-04-05 1988-04-05 薄膜気相成長装置における熱電対支持装置

Publications (2)

Publication Number Publication Date
JPH01153635U JPH01153635U (enExample) 1989-10-23
JPH0627947Y2 true JPH0627947Y2 (ja) 1994-07-27

Family

ID=31272870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988046603U Expired - Lifetime JPH0627947Y2 (ja) 1988-04-05 1988-04-05 薄膜気相成長装置における熱電対支持装置

Country Status (1)

Country Link
JP (1) JPH0627947Y2 (enExample)

Also Published As

Publication number Publication date
JPH01153635U (enExample) 1989-10-23

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