JPH01153635U - - Google Patents
Info
- Publication number
- JPH01153635U JPH01153635U JP4660388U JP4660388U JPH01153635U JP H01153635 U JPH01153635 U JP H01153635U JP 4660388 U JP4660388 U JP 4660388U JP 4660388 U JP4660388 U JP 4660388U JP H01153635 U JPH01153635 U JP H01153635U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- thermocouple
- thin film
- barrel
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4660388U JPH0627947Y2 (ja) | 1988-04-05 | 1988-04-05 | 薄膜気相成長装置における熱電対支持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4660388U JPH0627947Y2 (ja) | 1988-04-05 | 1988-04-05 | 薄膜気相成長装置における熱電対支持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01153635U true JPH01153635U (enExample) | 1989-10-23 |
| JPH0627947Y2 JPH0627947Y2 (ja) | 1994-07-27 |
Family
ID=31272870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4660388U Expired - Lifetime JPH0627947Y2 (ja) | 1988-04-05 | 1988-04-05 | 薄膜気相成長装置における熱電対支持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627947Y2 (enExample) |
-
1988
- 1988-04-05 JP JP4660388U patent/JPH0627947Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627947Y2 (ja) | 1994-07-27 |