JPH0627947Y2 - 薄膜気相成長装置における熱電対支持装置 - Google Patents
薄膜気相成長装置における熱電対支持装置Info
- Publication number
- JPH0627947Y2 JPH0627947Y2 JP4660388U JP4660388U JPH0627947Y2 JP H0627947 Y2 JPH0627947 Y2 JP H0627947Y2 JP 4660388 U JP4660388 U JP 4660388U JP 4660388 U JP4660388 U JP 4660388U JP H0627947 Y2 JPH0627947 Y2 JP H0627947Y2
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- thin film
- susceptor
- vapor phase
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4660388U JPH0627947Y2 (ja) | 1988-04-05 | 1988-04-05 | 薄膜気相成長装置における熱電対支持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4660388U JPH0627947Y2 (ja) | 1988-04-05 | 1988-04-05 | 薄膜気相成長装置における熱電対支持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01153635U JPH01153635U (US20020051482A1-20020502-M00012.png) | 1989-10-23 |
JPH0627947Y2 true JPH0627947Y2 (ja) | 1994-07-27 |
Family
ID=31272870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4660388U Expired - Lifetime JPH0627947Y2 (ja) | 1988-04-05 | 1988-04-05 | 薄膜気相成長装置における熱電対支持装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0627947Y2 (US20020051482A1-20020502-M00012.png) |
-
1988
- 1988-04-05 JP JP4660388U patent/JPH0627947Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01153635U (US20020051482A1-20020502-M00012.png) | 1989-10-23 |
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