JPH0627657Y2 - 板状被処理物の保持装置 - Google Patents

板状被処理物の保持装置

Info

Publication number
JPH0627657Y2
JPH0627657Y2 JP5430090U JP5430090U JPH0627657Y2 JP H0627657 Y2 JPH0627657 Y2 JP H0627657Y2 JP 5430090 U JP5430090 U JP 5430090U JP 5430090 U JP5430090 U JP 5430090U JP H0627657 Y2 JPH0627657 Y2 JP H0627657Y2
Authority
JP
Japan
Prior art keywords
plate
ring
shaped
fixed
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5430090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413662U (enrdf_load_html_response
Inventor
康詞 稲熊
茂 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chuo Seisakusho KK
Original Assignee
Chuo Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chuo Seisakusho KK filed Critical Chuo Seisakusho KK
Priority to JP5430090U priority Critical patent/JPH0627657Y2/ja
Publication of JPH0413662U publication Critical patent/JPH0413662U/ja
Application granted granted Critical
Publication of JPH0627657Y2 publication Critical patent/JPH0627657Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP5430090U 1990-05-23 1990-05-23 板状被処理物の保持装置 Expired - Lifetime JPH0627657Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5430090U JPH0627657Y2 (ja) 1990-05-23 1990-05-23 板状被処理物の保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5430090U JPH0627657Y2 (ja) 1990-05-23 1990-05-23 板状被処理物の保持装置

Publications (2)

Publication Number Publication Date
JPH0413662U JPH0413662U (enrdf_load_html_response) 1992-02-04
JPH0627657Y2 true JPH0627657Y2 (ja) 1994-07-27

Family

ID=31576241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5430090U Expired - Lifetime JPH0627657Y2 (ja) 1990-05-23 1990-05-23 板状被処理物の保持装置

Country Status (1)

Country Link
JP (1) JPH0627657Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7780825B2 (en) * 2007-05-21 2010-08-24 Lam Research Corporation Substrate gripper with integrated electrical contacts

Also Published As

Publication number Publication date
JPH0413662U (enrdf_load_html_response) 1992-02-04

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