JPH06273482A - 裸の半導体チップのバーンインおよび試験用キャリアおよびその方法 - Google Patents

裸の半導体チップのバーンインおよび試験用キャリアおよびその方法

Info

Publication number
JPH06273482A
JPH06273482A JP5272594A JP27259493A JPH06273482A JP H06273482 A JPH06273482 A JP H06273482A JP 5272594 A JP5272594 A JP 5272594A JP 27259493 A JP27259493 A JP 27259493A JP H06273482 A JPH06273482 A JP H06273482A
Authority
JP
Japan
Prior art keywords
carrier
socket
chip
bare
burn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5272594A
Other languages
English (en)
Japanese (ja)
Inventor
Anthony M Chiu
エム.チウ アンソニー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of JPH06273482A publication Critical patent/JPH06273482A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0483Sockets for unleaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2884Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5272594A 1992-10-30 1993-10-29 裸の半導体チップのバーンインおよび試験用キャリアおよびその方法 Pending JPH06273482A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US96874092A 1992-10-30 1992-10-30
US968740 1992-10-30

Publications (1)

Publication Number Publication Date
JPH06273482A true JPH06273482A (ja) 1994-09-30

Family

ID=25514700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5272594A Pending JPH06273482A (ja) 1992-10-30 1993-10-29 裸の半導体チップのバーンインおよび試験用キャリアおよびその方法

Country Status (4)

Country Link
EP (1) EP0600604A1 (enExample)
JP (1) JPH06273482A (enExample)
KR (1) KR940010259A (enExample)
TW (1) TW267244B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578934A (en) * 1991-06-04 1996-11-26 Micron Technology, Inc. Method and apparatus for testing unpackaged semiconductor dice
US6937044B1 (en) 1992-11-20 2005-08-30 Kulicke & Soffa Industries, Inc. Bare die carrier
US5402077A (en) * 1992-11-20 1995-03-28 Micromodule Systems, Inc. Bare die carrier
JPH07161426A (ja) * 1993-12-03 1995-06-23 Furukawa Electric Co Ltd:The ベアチップバーンインテスト用ソケット及びその製造方法
JP2002243796A (ja) * 2001-01-25 2002-08-28 Promos Technologies Inc 封止材除去されたチップのテスト治具
CN102520280A (zh) * 2011-12-08 2012-06-27 台晶(宁波)电子有限公司 多温度点同步动态高温加速老化测试设备
CN116224036B (zh) * 2023-01-06 2023-10-27 法特迪精密科技(苏州)有限公司 一种芯片温度循环老化测试台的加热插座

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3573617A (en) * 1967-10-27 1971-04-06 Aai Corp Method and apparatus for testing packaged integrated circuits
EP0107327A1 (en) * 1982-09-17 1984-05-02 Coordinate Probe Card Company Limited Probe device for testing an integrated circuit and method of making same
US5006792A (en) * 1989-03-30 1991-04-09 Texas Instruments Incorporated Flip-chip test socket adaptor and method
US4940935A (en) * 1989-08-28 1990-07-10 Ried Ashman Manufacturing Automatic SMD tester

Also Published As

Publication number Publication date
TW267244B (enExample) 1996-01-01
EP0600604A1 (en) 1994-06-08
KR940010259A (ko) 1994-05-24

Similar Documents

Publication Publication Date Title
EP0746772B1 (en) Reusable die carrier for burn-in and burn-in process
US6258609B1 (en) Method and system for making known good semiconductor dice
US5367253A (en) Clamped carrier for testing of semiconductor dies
US6627483B2 (en) Method for mounting an electronic component
US5570032A (en) Wafer scale burn-in apparatus and process
US5495179A (en) Carrier having interchangeable substrate used for testing of semiconductor dies
JP2837829B2 (ja) 半導体装置の検査方法
US5644247A (en) Test socket and method for producing known good dies using the test socket
JP2009510396A (ja) 個片化されたダイを検査するデバイスおよび方法
CN1294787C (zh) 用于安装电子元件的方法
JPH06273482A (ja) 裸の半導体チップのバーンインおよび試験用キャリアおよびその方法
WO2000033360A1 (en) A method and apparatus for the transport and tracking of an electronic component
JP2716663B2 (ja) 半導体ダイの試験装置
US10177021B2 (en) Integrated circuits and methods therefor
US7105380B2 (en) Method of temporarily securing a die to a burn-in carrier
KR20000042989A (ko) 번인 테스터용 번인보드
KR950012291B1 (ko) 테스트 소켓 및 그를 이용한 노운 굿 다이 제조방법
JP2004047336A (ja) コンタクトシートおよびそれを備える半導体装置用ソケット
US6968614B2 (en) Method for positioning an electronic module having a contact column array into a template
WO2002013261A2 (en) Heat spreading die cover
De Lambilly et al. Packaging of silicon particle detectors: how to adapt microelectronic processes to large dies
JPH0875819A (ja) パッケージに封入されていないダイのバーンイン検査のための再使用可能なキャリア
JPH04290244A (ja) 半導体装置のエージング方法
JPH0745677A (ja) 半導体部品の製造方法及びその製造装置
JPH07147356A (ja) ソケット装置