JPH0627276Y2 - レーザ出射装置 - Google Patents

レーザ出射装置

Info

Publication number
JPH0627276Y2
JPH0627276Y2 JP1988052458U JP5245888U JPH0627276Y2 JP H0627276 Y2 JPH0627276 Y2 JP H0627276Y2 JP 1988052458 U JP1988052458 U JP 1988052458U JP 5245888 U JP5245888 U JP 5245888U JP H0627276 Y2 JPH0627276 Y2 JP H0627276Y2
Authority
JP
Japan
Prior art keywords
laser beam
section
laser
cross
quadrangular prism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988052458U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01159990U (enrdf_load_stackoverflow
Inventor
和義 数藤
Original Assignee
宮地電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 宮地電子株式会社 filed Critical 宮地電子株式会社
Priority to JP1988052458U priority Critical patent/JPH0627276Y2/ja
Publication of JPH01159990U publication Critical patent/JPH01159990U/ja
Application granted granted Critical
Publication of JPH0627276Y2 publication Critical patent/JPH0627276Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Lasers (AREA)
JP1988052458U 1988-04-19 1988-04-19 レーザ出射装置 Expired - Lifetime JPH0627276Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988052458U JPH0627276Y2 (ja) 1988-04-19 1988-04-19 レーザ出射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988052458U JPH0627276Y2 (ja) 1988-04-19 1988-04-19 レーザ出射装置

Publications (2)

Publication Number Publication Date
JPH01159990U JPH01159990U (enrdf_load_stackoverflow) 1989-11-07
JPH0627276Y2 true JPH0627276Y2 (ja) 1994-07-27

Family

ID=31278457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988052458U Expired - Lifetime JPH0627276Y2 (ja) 1988-04-19 1988-04-19 レーザ出射装置

Country Status (1)

Country Link
JP (1) JPH0627276Y2 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57142242A (en) * 1981-02-26 1982-09-02 Tokyo Shibaura Electric Co Laser apparatus
JPS5883973A (ja) * 1981-11-13 1983-05-19 株式会社東芝 レ−ザ装置
JPS63173322A (ja) * 1987-01-13 1988-07-16 Toshiba Corp 半導体露光装置

Also Published As

Publication number Publication date
JPH01159990U (enrdf_load_stackoverflow) 1989-11-07

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