JPH06218864A - Transparent conductive laminate and touch panel - Google Patents

Transparent conductive laminate and touch panel

Info

Publication number
JPH06218864A
JPH06218864A JP2732493A JP2732493A JPH06218864A JP H06218864 A JPH06218864 A JP H06218864A JP 2732493 A JP2732493 A JP 2732493A JP 2732493 A JP2732493 A JP 2732493A JP H06218864 A JPH06218864 A JP H06218864A
Authority
JP
Japan
Prior art keywords
transparent
thin film
film
transparent conductive
touch panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2732493A
Other languages
Japanese (ja)
Other versions
JP2624930B2 (en
Inventor
Shozo Kawazoe
昭造 河添
Hidehito Okano
秀仁 岡野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2732493A priority Critical patent/JP2624930B2/en
Publication of JPH06218864A publication Critical patent/JPH06218864A/en
Application granted granted Critical
Publication of JP2624930B2 publication Critical patent/JP2624930B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Laminated Bodies (AREA)
  • Position Input By Displaying (AREA)
  • Non-Insulated Conductors (AREA)

Abstract

PURPOSE:To provide a transparent conductive laminate having sufficient transparency, scratch resistance, and strength for use as a touch panel. CONSTITUTION:A transparent conductive laminate is constituted by forming a transparent dielectric membrane 2 on one surface of a transparent film base material with a thickness of 2-120mum and further forming a transparent conductive membrane 3 on the membrane and, when the light refractive index of the film base material is set to n1 and the light refractive index of the dielectric membrane 2 is set to n2 and that of the conductive membrane 3 is set to n3, the relation of n1<n3<n2 is satisfied.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、フイルム基材を有す
る透明導電性積層体と、これを用いたタツチパネルに関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transparent conductive laminate having a film base material and a touch panel using the same.

【0002】[0002]

【従来の技術】一般に、可視光線領域で透明であり、か
つ導電性を有する薄膜は、液晶デイスプレイ、エレクト
ロルミネツセンスデイスプレイなどの新しいデイスプレ
イ方式やタツチパネルなどにおける透明電極のほか、透
明物品の帯電防止や電磁波遮断などのために用いられて
いる。
2. Description of the Related Art Generally, a thin film which is transparent in a visible light region and has conductivity is used for a new display system such as a liquid crystal display and an electroluminescence display, a transparent electrode in a touch panel, and an antistatic material for a transparent article. It is used to block electromagnetic waves.

【0003】従来、このような透明導電性薄膜として、
ガラス上に酸化インジウム薄膜を形成した、いわゆる導
電性ガラスがよく知られているが、基材がガラスである
ために、可撓性,加工性に劣り、用途によつては好まし
くない場合がある。
Conventionally, as such a transparent conductive thin film,
A so-called conductive glass in which an indium oxide thin film is formed on glass is well known, but since the base material is glass, it is inferior in flexibility and workability and may not be preferable for some applications. .

【0004】このため、近年では、可撓性,加工性に加
えて、耐衝撃性にすぐれ、軽量であるなどの利点から、
ポリエチレンテレフタレ―トフイルムをはじめとする各
種のプラスチツクフイルムを基材とした透明導電性薄膜
が賞用されている。
Therefore, in recent years, in addition to flexibility and workability, it has excellent impact resistance and is lightweight,
Transparent conductive thin films based on various plastic films such as polyethylene terephthalate film have been used for awards.

【0005】[0005]

【発明が解決しようとする課題】しかるに、このような
フイルム基材を用いた従来の透明導電性薄膜は、薄膜表
面の光線反射率が大きいために、透明性に劣るという問
題があるほか、導電性薄膜の耐擦傷性に劣り、使用中に
傷がついて電気抵抗が増大したり、断線を生じるといつ
た問題があつた。
However, the conventional transparent conductive thin film using such a film substrate has a problem that it is inferior in transparency due to a large light ray reflectance on the surface of the thin film. There was a problem in that the thin film of the conductive film was inferior in scratch resistance, scratched during use, electrical resistance increased, and wire breakage occurred.

【0006】また、とくにタツチパネル用の導電性薄膜
では、スペ―サを介して対向させた一対の薄膜同志がそ
の一方のパネル板側からの押圧打点で強く接触するもの
であるため、これに抗しうる良好な耐久特性つまり打点
特性を有していることが望まれるが、上記従来の透明導
電性薄膜ではかかる特性に劣り、そのぶんタツチパネル
としての寿命が短くなるという問題があつた。
Particularly in a conductive thin film for a touch panel, a pair of thin films opposed to each other via a spacer are strongly in contact with each other at a pressing point from the panel plate side of one of them, and therefore, this is counteracted. It is desired that the conventional transparent conductive thin film has a good durability property, that is, a hitting property, which is inferior to such a property and the life of the touch panel is shortened accordingly.

【0007】この発明は、上記従来の問題点に鑑み、ポ
リエチレンテレフタレ―トフイルムなどのフイルム基材
を用いた透明導電性薄膜において、その透明性および導
電性薄膜の耐擦傷性を改良するとともに、タツチパネル
用としての打点特性の改良をはかることを目的としてい
る。
In view of the above conventional problems, the present invention improves the transparency and scratch resistance of the conductive thin film in a transparent conductive thin film using a film substrate such as polyethylene terephthalate film. The purpose is to improve the dot characteristics for touch panels.

【0008】[0008]

【課題を解決するための手段】この発明者らは、上記の
目的を達成するために、鋭意検討した結果、フイルム基
材として特定膜厚のものを用いて、その一方の面に透明
な導電性薄膜をこの薄膜に比べ光の屈折率が大きい透明
な誘電体薄膜を介して形成する一方、他方の面に透明な
粘着剤層を介して別の透明基体を貼り合わせることによ
り、透明性および導電性薄膜の耐擦傷性を改良できると
ともに、タツチパネル用としての打点特性の改良をもは
かれることを知り、この発明を完成するに至つた。
Means for Solving the Problems The inventors of the present invention have conducted extensive studies in order to achieve the above object. As a result, a film base material having a specific thickness is used, and a transparent conductive film is formed on one surface of the base material. Thin film is formed through a transparent dielectric thin film having a larger refractive index of light than this thin film, while another transparent substrate is attached to the other surface through a transparent pressure-sensitive adhesive layer. The inventors have found that the scratch resistance of the conductive thin film can be improved and that the dot properties for touch panels can be improved, and the present invention has been completed.

【0009】すなわち、この発明の第1は、厚さが2〜
120μmの透明なフイルム基材の一方の面に透明な誘
電体薄膜とさらにこの上に透明な導電性薄膜を形成し、
他方の面に透明な粘着剤層を介して透明基体を貼り合わ
せてなる透明導電性積層体であつて、かつ上記フイルム
基材の光の屈折率をn1 、上記誘電体薄膜の光の屈折率
をn2 、上記導電性薄膜の光の屈折率をn3 としたと
き、n1 <n3 <n2 の関係を満たすことを特徴とする
透明導電性積層体に係るものである。
That is, the first aspect of the present invention is that the thickness is 2 to
A transparent dielectric thin film is formed on one surface of a 120 μm transparent film substrate, and a transparent conductive thin film is formed on the transparent dielectric thin film.
A transparent electroconductive laminate comprising a transparent substrate adhered to the other surface via a transparent adhesive layer, wherein the film substrate has a light refractive index of n 1 , and the dielectric thin film has a light refraction index. the rate n 2, and the refractive index of light of the conductive thin film was n 3, which relates to a transparent conductive laminate according to satisfy the relation of n 1 <n 3 <n 2 .

【0010】また、この発明の第2は、導電性薄膜を有
する一対のパネル板を、導電性薄膜同志が対向するよう
に、スペ―サを介して対向配置してなるタツチパネルに
おいて、少なくとも一方のパネル板が上記第1の発明に
係る透明導電性積層体からなることを特徴とするタツチ
パネルに係るものである。
A second aspect of the present invention is a touch panel in which a pair of panel plates having a conductive thin film are opposed to each other via a spacer so that the conductive thin films face each other. The touch panel is characterized in that the panel plate is made of the transparent conductive laminate according to the first aspect of the present invention.

【0011】[0011]

【発明の構成・作用】この発明において使用するフイル
ム基材としては、透明性を有する各種のプラスチツクフ
イルムを使用できる。具体的には、ポリエチレンテレフ
タレ―ト、ポリイミド、ポリエ―テルサルフオン、ポリ
エ―テルエ―テルケトン、ポリカ―ボネ―ト、ポリプロ
ピレン、ポリアミド、ポリアクリル、セルロ―スプロピ
オネ―トなどが挙げられる。
As the film base material used in the present invention, various transparent plastic films can be used. Specific examples thereof include polyethylene terephthalate, polyimide, polyether sulfone, polyether ether ketone, polycarbonate, polypropylene, polyamide, polyacryl and cellulose propionate.

【0012】これらフイルム基材の厚みは、2〜120
μmの範囲にあることが必要で、とくに好適には6〜1
00μmの範囲にあるのがよい。2μm未満では基材と
しての機械的強度が不足し、この基材をロ―ル状にして
誘電体薄膜や導電性薄膜さらには粘着剤層を連続的に形
成する操作が難しくなる。一方、120μmを超える
と、後述する粘着剤層のクツシヨン効果に基づく導電性
薄膜の耐擦傷性やタツチパネル用としての打点特性の向
上を図れなくなる。
The thickness of these film base materials is 2 to 120.
It is necessary to be in the range of μm, particularly preferably 6 to 1
It is preferably in the range of 00 μm. If the thickness is less than 2 μm, the mechanical strength of the substrate is insufficient, and it becomes difficult to continuously form a dielectric thin film, a conductive thin film, and an adhesive layer by making this substrate into a roll shape. On the other hand, when it exceeds 120 μm, it becomes impossible to improve the scratch resistance of the conductive thin film based on the cushioning effect of the pressure-sensitive adhesive layer, which will be described later, and the dot properties for a touch panel.

【0013】このフイルム基材は、表面にあらかじめス
パツタリング、コロナ放電、火炎、紫外線照射、電子線
照射、化成、酸化などのエツチング処理や下塗り処理を
施して、この上に設けられる誘電体薄膜の上記基材に対
する密着性を向上させるようにしてもよい。また、誘電
体薄膜を設ける前に、必要に応じて溶剤洗浄や超音波洗
浄などにより除塵,清浄化してもよい。
The surface of this film substrate is previously subjected to etching treatment such as sputtering, corona discharge, flame, ultraviolet ray irradiation, electron beam irradiation, chemical conversion, oxidation or the like, or an undercoating treatment, and the above-mentioned dielectric thin film is provided thereon. You may make it improve the adhesiveness with respect to a base material. Further, before providing the dielectric thin film, if necessary, it may be removed by dusting or cleaning by solvent cleaning or ultrasonic cleaning.

【0014】この発明においては、このようなフイルム
基材の一方の面に、透明な誘電体薄膜を形成する。この
薄膜の光の屈折率n2 は、この薄膜上に設けられる導電
性薄膜の光の屈折率n3 に比べて大きいことが必要で、
通常導電性薄膜の光の屈折率n3 は約2程度であるた
め、誘電体薄膜の光の屈折率n2 としては、通常2.0
5〜2.4程度であるのがよい。この誘電体薄膜の形成
により、主に透明性および導電性薄膜の耐擦傷性が大幅
に向上し、またタツチパネル用としての打点特性の向上
にも好結果が得られる。
In the present invention, a transparent dielectric thin film is formed on one surface of such a film substrate. It is necessary that the refractive index n 2 of light of this thin film is larger than the refractive index n 3 of light of the conductive thin film provided on this thin film.
Since the refractive index n 3 of light of a conductive thin film is usually about 2, the refractive index n 2 of light of a dielectric thin film is usually 2.0.
It is preferably about 5 to 2.4. By forming this dielectric thin film, mainly the transparency and the scratch resistance of the conductive thin film are greatly improved, and good results are also obtained in the improvement of the dot characteristics for the touch panel.

【0015】このような誘電体薄膜の材料としては、た
とえばCeO2 (2.3)、Nd23 (2.15)、
Sb2 3 (2.1)、TiO2 (2.35)、Ta2
5(2.1)、ZrO2 (2.05)、ZnO(2.
1)、ZnS(2.3)などの無機物〔上記各材料の
( )内の数値は光の屈折率n2 である〕や、これらの
無機物とアクリル樹脂、ウレタン樹脂、シロキサン系ポ
リマ―などの有機物との混合体などがある。これらの中
でも、実用上、光の屈折率n2 が2.3〜2.4程度の
CeO2 、TiO2 、ZnSなどがとくに好適に用いら
れる。
Examples of materials for such a dielectric thin film include CeO 2 (2.3), Nd 2 O 3 (2.15),
Sb 2 O 3 (2.1), TiO 2 (2.35), Ta 2
O 5 (2.1), ZrO 2 (2.05), ZnO (2.
1), ZnS (2.3), etc. [the numerical value in () of each of the above materials is the refractive index n 2 of light], and these inorganic materials and acrylic resins, urethane resins, siloxane polymers, etc. There are mixtures with organic substances. Among these, CeO 2 , TiO 2 , ZnS and the like having a light refractive index n 2 of about 2.3 to 2.4 are particularly suitable for practical use.

【0016】誘電体薄膜の厚さとしては、50Å以上と
するのがよく、好ましくは100〜3,000Å、とく
に好ましくは400〜1,600Åの範囲とするのがよ
い。50Å未満では連続被膜となりにくく、透明性や耐
擦傷性の向上をあまり期待できない。なお、厚くなりす
ぎると透明性の向上が期待できなくなり、またクラツク
を生じるおそれがあり、好ましくない。
The thickness of the dielectric thin film is preferably 50 Å or more, preferably 100 to 3,000 Å, particularly preferably 400 to 1,600 Å. When it is less than 50Å, it is difficult to form a continuous film, and improvement in transparency and scratch resistance cannot be expected so much. If it is too thick, improvement in transparency cannot be expected and cracking may occur, which is not preferable.

【0017】誘電体薄膜の形成方法としては、たとえば
真空蒸着法、スパツタリング法、イオンプレ―テイング
法、塗工法などがあり、上記の材料の種類および必要と
する膜厚に応じて適宜の方法を採用することができる。
As the method for forming the dielectric thin film, there are, for example, a vacuum vapor deposition method, a sputtering method, an ion plating method, a coating method and the like, and an appropriate method is adopted depending on the kind of the above material and the required film thickness. can do.

【0018】この発明においては、上記の如く透明な誘
電体薄膜を形成したのち、さらにこの薄膜上に透明な導
電性薄膜を形成する。導電性薄膜の形成方法としては、
誘電体薄膜の場合と同様の技術を採用できる。用いる薄
膜材料もとくに制限されるものではなく、たとえば、酸
化スズを含有する酸化インジウム、アンチモンを含有す
る酸化スズなどが好ましく用いられる。
In the present invention, after the transparent dielectric thin film is formed as described above, the transparent conductive thin film is further formed on this thin film. As a method for forming the conductive thin film,
The same technique as in the case of the dielectric thin film can be adopted. The thin film material used is not particularly limited, and for example, indium oxide containing tin oxide and tin oxide containing antimony are preferably used.

【0019】これら材料からなる導電性薄膜の光の屈折
率n3 は、既述のとおり、通常約2程度であり、フイル
ム基材の光の屈折率n1 が通常1.4〜1.7程度のた
め、この屈折率n1 よりは大きくなる。したがつて、こ
れらと誘電体薄膜の光の屈折率n2 との関係は、n1
3 <n2 となる。
The light refractive index n 3 of the conductive thin film made of these materials is usually about 2 as described above, and the light refractive index n 1 of the film base material is usually 1.4 to 1.7. Due to the degree, it becomes larger than this refractive index n 1 . Therefore, the relationship between these and the light refractive index n 2 of the dielectric thin film is n 1 <
n 3 <n 2 .

【0020】この導電性薄膜の厚さは、50Å以上とす
るのが好ましく、これより薄いと表面抵抗が103 Ω/
□以下となる良好な導電性を有する連続被膜となりにく
い。また、あまり厚くしすぎると透明性の低下などをき
たすため、とくに好適な厚さとしては、100〜3,0
00Å程度とするのがよい。
The thickness of this conductive thin film is preferably 50 Å or more, and if it is thinner than this, the surface resistance is 10 3 Ω /
□ It is difficult to form a continuous film with good conductivity below. Further, if it is made too thick, the transparency may be deteriorated. Therefore, a particularly preferable thickness is 100 to 3,0.
It is good to set it to about 00Å.

【0021】このような透明な誘電体薄膜と透明な導電
性薄膜とが順次形成されたフイルム基材の他方の面に
は、透明な粘着剤層を介して透明基体が貼り合わされ
る。この貼り合わせは、透明基体の方に上記の粘着剤層
を設けておき、これに上記のフイルム基材を貼り合わせ
るようにしてもよいし、逆にフイルム基材の方に上記の
粘着剤層を設けておき、これに透明基体を貼り合わせる
ようにしてもよい。後者の方法では、粘着剤層の形成を
フイルム基材をロ―ル状にして連続的に行うことができ
るから、生産性の面でより有利である。
A transparent substrate is attached to the other surface of the film substrate on which such a transparent dielectric thin film and a transparent conductive thin film are sequentially formed, with a transparent adhesive layer interposed therebetween. For this bonding, the above-mentioned pressure-sensitive adhesive layer may be provided on the transparent substrate and the above-mentioned film base material may be bonded thereto, or conversely, the above-mentioned pressure-sensitive adhesive layer may be bonded to the film base material. May be provided and a transparent substrate may be attached thereto. The latter method is more advantageous in terms of productivity because the pressure-sensitive adhesive layer can be continuously formed by making the film substrate into a roll shape.

【0022】粘着剤層としては、透明性を有するもので
あればとくに制限なく使用でき、たとえば、アクリル系
粘着剤、シリコ―ン系粘着剤、ゴム系粘着剤などが用い
られる。この粘着剤層は、透明基体の接着後そのクツシ
ヨン効果により、フイルム基材の一方の面に設けられた
導電性薄膜の耐擦傷性やタツチパネル用としての打点特
性を向上させる機能を有する。この機能をより良く発揮
させる観点から、その弾性係数を1×105 〜1×10
7 dyn /cm2 の範囲、厚さを1μm以上、通常5〜10
0μmの範囲に設定するのが望ましい。
The pressure-sensitive adhesive layer can be used without particular limitation as long as it has transparency. For example, an acrylic pressure-sensitive adhesive, a silicone-based pressure-sensitive adhesive, a rubber-based pressure-sensitive adhesive and the like can be used. This adhesive layer has a function of improving the scratch resistance of the conductive thin film provided on one surface of the film base material and the dot properties for a touch panel by the cushioning effect after the transparent base material is adhered. From the viewpoint of better exhibiting this function, its elastic coefficient is set to 1 × 10 5 to 1 × 10.
Range of 7 dyn / cm 2 , thickness of 1 μm or more, usually 5-10
It is desirable to set in the range of 0 μm.

【0023】上記の弾性係数が1×105 dyn /cm2
満となると、粘着剤層は非弾性となるため、加圧により
容易に変形してフイルム基材ひいては導電性薄膜に凹凸
を生じさせ、また加工切断面からの粘着剤のはみ出しな
どが生じやすくなり、そのうえ導電性薄膜の耐擦傷性や
タツチパネル用としての打点特性の向上効果が低減す
る。一方、弾性係数が1×107 dyn /cm2 を超える
と、粘着剤層が硬くなり、そのクツシヨン効果を期待で
きなくなるため、導電性薄膜の耐擦傷性やタツチパネル
用としての打点特性を向上できない。
When the above elastic modulus is less than 1 × 10 5 dyn / cm 2 , the pressure-sensitive adhesive layer becomes inelastic, so that it is easily deformed by pressurization to cause unevenness on the film substrate and hence the conductive thin film. Moreover, the pressure-sensitive adhesive is likely to protrude from the processed cut surface, and the effect of improving the scratch resistance of the conductive thin film and the dot properties for a touch panel is reduced. On the other hand, when the elastic modulus exceeds 1 × 10 7 dyn / cm 2 , the pressure-sensitive adhesive layer becomes hard and the cushioning effect cannot be expected, so that the scratch resistance of the conductive thin film and the dot property for a touch panel cannot be improved. .

【0024】また、粘着剤層の厚さが1μm未満となる
と、そのクツシヨン効果をやはり期待できないため、導
電性薄膜の耐擦傷性やタツチパネル用としての打点特性
の向上を望めない。厚くしすぎると、透明性を損なつた
り、粘着剤層の形成や透明基体の貼り合わせ作業性さら
にコストの面で好結果を得にくい。
If the thickness of the pressure-sensitive adhesive layer is less than 1 μm, the cushioning effect cannot be expected, so that the abrasion resistance of the conductive thin film and the hitting property for a touch panel cannot be expected to be improved. If the thickness is too large, the transparency may be impaired, and it may be difficult to obtain good results in terms of workability of forming the pressure-sensitive adhesive layer and bonding of the transparent substrate and cost.

【0025】このような粘着剤層を介して貼り合わされ
る透明基体は、フイルム基材に対して良好な機械的強度
を付与し、とくにカ―ルなどの発生防止に寄与するもの
であり、これを貼り合わせたのちにおいても可撓性であ
ることが要求される場合は、通常6〜300μm程度の
プラスチツクフイルムが、可撓性がとくに要求されない
場合は、通常0.05〜10mm程度のガラス板やフイル
ム状ないし板状のプラスチツクが、それぞれ用いられ
る。プラスチツクの材質としては、前記したフイルム基
材と同様のものが挙げられる。
The transparent substrate adhered via such an adhesive layer imparts good mechanical strength to the film substrate and particularly contributes to the prevention of curling. If it is required to be flexible even after being attached, a plastic film of about 6 to 300 μm is usually used. If flexibility is not particularly required, a glass plate of about 0.05 to 10 mm is usually used. A film-shaped or plate-shaped plastic is used. As the material for the plastic, the same materials as those for the above-mentioned film base material can be mentioned.

【0026】また、必要に応じて、上記透明基体の外表
面(粘着剤層とは反対側の面)に、視認性の向上を目的
とした防眩処理層や反射防止処理層を設けたり、外表面
の保護を目的としたハ―ドコ―ト処理層を設けるように
してもよい。後者のハ―ドコ―ト処理層としては、たと
えば、メラニン系樹脂、ウレタン系樹脂、アルキド系樹
脂、アクリル系樹脂、シリコン系樹脂などの硬化型樹脂
からなる硬化被膜が好ましく用いられる。
If necessary, an antiglare treatment layer or an antireflection treatment layer may be provided on the outer surface of the transparent substrate (the surface opposite to the pressure-sensitive adhesive layer) for the purpose of improving visibility. A hard coat treatment layer may be provided for the purpose of protecting the outer surface. As the latter hard coat-treated layer, for example, a cured coating made of a curable resin such as a melanin resin, a urethane resin, an alkyd resin, an acrylic resin or a silicone resin is preferably used.

【0027】図1は、この発明の透明導電性積層体の一
例を示したもので、透明なフイルム基材1の一方の面に
透明な誘電体薄膜2とさらにこの上に透明な導電性薄膜
3とが形成され、他方の面に透明な粘着剤層4を介して
透明基体5が貼り合わされている。また、図2は、この
発明の透明導電性積層体の他の例を示したもので、上記
透明基体5の外表面にハ―ドコ―ト処理層6を設けるよ
うにしたものであり、その他の構成は図1と全く同様で
ある。
FIG. 1 shows an example of the transparent electroconductive laminate of the present invention. A transparent dielectric thin film 2 is formed on one surface of a transparent film substrate 1 and a transparent electroconductive thin film is formed on the transparent dielectric thin film 2. 3 is formed, and the transparent substrate 5 is attached to the other surface of the transparent substrate 5 via the transparent adhesive layer 4. FIG. 2 shows another example of the transparent conductive laminate of the present invention, in which the hard coat treatment layer 6 is provided on the outer surface of the transparent substrate 5, and The configuration is exactly the same as in FIG.

【0028】図3は、この発明の透明導電性積層体を用
いたタツチパネルの例を示したもので、導電性薄膜
1d,P2dを有する一対のパネル板P1,P2を、互い
に直交する縞状に形成した導電性薄膜P1d,P2d同志が
対向するように、スペ―サSを介して対向配置してなる
タツチパネルにおいて、一方のパネル板P1として、上
記の図2に示す透明導電性積層体を用いたものである。
FIG. 3 shows an example of a touch panel using the transparent conductive laminate of the present invention, in which a pair of panel plates P1 and P2 having conductive thin films P 1d and P 2d are arranged in stripes orthogonal to each other. In the touch panel in which the conductive thin films P 1d and P 2d formed in a strip shape are opposed to each other with the spacer S interposed therebetween, the transparent conductive film shown in FIG. A laminated body is used.

【0029】このタツチパネルは、パネル板P1側よ
り、手の指Mにてスペ―サSの弾性力に抗して押圧打点
したとき、導電性薄膜P1d,P2d同志が接触して、電気
回路のON状態となり、上記押圧を解除すると、元のO
FF状態に戻る、透明スイツチ構体として機能する。そ
の際、パネル板P1が上記の透明導電性積層体からなる
ために、導電性薄膜の耐擦傷性や打点特性などにすぐ
れ、長期にわたつて上記機能を安定に維持させることが
できる。
When the touch panel is pressed against the elastic force of the spacer S by the finger M of the hand from the panel plate P1 side, the conductive thin films P 1d and P 2d come into contact with each other to generate electricity. When the circuit is turned on and the above pressure is released, the original O
It functions as a transparent switch structure that returns to the FF state. At this time, since the panel plate P1 is made of the above-mentioned transparent conductive laminate, the conductive thin film has excellent scratch resistance and hitting property, and the above functions can be stably maintained over a long period of time.

【0030】なお、図3において、パネル板P1は、図
1に示す透明導電性積層体であつてもよい。また、パネ
ル板P2は、プラスチツクフイルムやガラス板などから
なる透明基体5´に導電性薄膜P2dを設けたものである
が、上記のパネル板P1と同様の図1または図2に示す
透明導電性積層体を用いてもよい。
In FIG. 3, the panel plate P1 may be the transparent conductive laminate shown in FIG. The panel plate P2 is a transparent substrate 5'made of a plastic film or a glass plate and a conductive thin film P2d provided on the transparent substrate 5 '. The transparent conductive film shown in FIG. A layered product may be used.

【0031】[0031]

【発明の効果】以上のように、この発明によれば、誘電
体薄膜のハ―ド効果および粘着剤層のクツシヨン効果に
基づいて、導電性薄膜の耐擦傷性およびタツチパネルと
しての打点特性が改良され、かつ誘電体薄膜および導電
性薄膜の組み合わせに基づく反射防止効果により透明性
が著しく改良された透明導電性積層体を提供でき、また
これを用いたタツチパネルを提供することができる。
As described above, according to the present invention, the scratch resistance of the conductive thin film and the hitting property as a touch panel are improved based on the hard effect of the dielectric thin film and the cushioning effect of the adhesive layer. It is possible to provide a transparent conductive laminate having significantly improved transparency due to the antireflection effect based on the combination of the dielectric thin film and the conductive thin film, and to provide a touch panel using the same.

【0032】[0032]

【実施例】以下に、この発明の実施例を記載してより具
体的に説明する。なお、以下において、部とあるのは重
量部を意味する。
EXAMPLES Examples of the present invention will be described below for more specific description. In the following, "parts" means "parts by weight".

【0033】実施例1 厚さが25μmのポリエチレンテレフタレ―トフイルム
(以下、PETフイルムという)からなるフイルム基材
(光の屈折率n1 =1.66)の一方の面に、TiO2
を電子ビ―ム加熱法により、(1〜2)×10-4Tor
rの真空度で真空蒸着して、厚さ約1,000ÅのTi
2 (光の屈折率n2 =2.35)からなる透明な誘電
体薄膜(以下、TiO2 薄膜という)を形成した。
Example 1 TiO 2 was formed on one surface of a film substrate (light refractive index n 1 = 1.66) made of a polyethylene terephthalate film (hereinafter referred to as PET film) having a thickness of 25 μm.
(1-2) × 10 −4 Tor by electron beam heating method
Vacuum-deposited at a vacuum degree of r to obtain Ti with a thickness of about 1,000Å
A transparent dielectric thin film (hereinafter referred to as TiO 2 thin film) made of O 2 (light refractive index n 2 = 2.35) was formed.

【0034】つぎに、上記のTiO2 薄膜上に、アルゴ
ンガス80%と酸素ガス20%とからなる4×10-3
orrの雰囲気中で、インジウム−スズ合金を用いた反
応性スパツタリング法により、厚さ300Åの酸化イン
ジウムと酸化スズとの複合酸化物(光の屈折率n3
2.00)からなる透明な導電性薄膜(以下、ITO薄
膜という)を形成した。
Next, 4 × 10 −3 T consisting of 80% argon gas and 20% oxygen gas was formed on the TiO 2 thin film.
In an atmosphere of orr, a compound oxide of indium oxide and tin oxide having a thickness of 300 Å (refractive index n 3 of light = 3) was formed by a reactive sputtering method using an indium-tin alloy.
A transparent conductive thin film (hereinafter referred to as an ITO thin film) made of 2.00) was formed.

【0035】ついで、上記PETフイルムの他方の面
に、弾性係数が1×106 dyn /cm2に調整されたアク
リル系の透明な粘着剤層(アクリル酸ブチルとアクリル
酸と酢酸ビニルとの重量比100:2:5のアクリル系
共重合体100部にイソシアネ―ト系架橋剤を1部配合
してなるもの)を約20μmの厚さに形成し、この上に
厚さが125μmのPETフイルムからなる透明基体を
貼り合わせて、図1に示す構造の透明導電性積層フイル
ムを作製した。
Then, on the other surface of the PET film, an acrylic transparent pressure-sensitive adhesive layer (weight of butyl acrylate, acrylic acid and vinyl acetate) whose elastic modulus was adjusted to 1 × 10 6 dyn / cm 2 was used. 100 parts acrylic copolymer having a ratio of 100: 2: 5 and 1 part isocyanate-based cross-linking agent) are formed to a thickness of about 20 μm, and a PET film having a thickness of 125 μm is formed thereon. A transparent substrate composed of the above was bonded to produce a transparent conductive laminated film having a structure shown in FIG.

【0036】この透明導電性積層フイルムを一方のパネ
ル板とし、他方のパネル板として、ガラス板上に厚さ3
00ÅのITO薄膜を上記と同様の方法で形成したもの
を用い、この両パネル板を、ITO薄膜同志が対向する
ように、厚さ100μmのスペ―サを介して対向配置し
て、スイツチ構体としてのタツチパネルを作製した。な
お、両パネル板の各ITO薄膜は、上記の対向配置に先
立つて、あらかじめ、互いに直交する縞状に形成した。
This transparent conductive laminated film was used as one panel plate and the other panel plate with a thickness of 3 on a glass plate.
Using a 00 Å ITO thin film formed by the same method as above, both panel plates are arranged facing each other with a spacer of 100 μm in thickness so that the ITO thin films face each other to form a switch structure. A touch panel was manufactured. The ITO thin films on both panel plates were formed in advance in stripes orthogonal to each other prior to the above facing arrangement.

【0037】実施例2 厚さが125μmのPETフイルムの一方の面に、アク
リル・ウレタン系樹脂〔大日本インキ化学(株)製のユ
ニデイツク17−806〕100部に光重合開始剤とし
てのヒドロキシシクロヘキシルフエニルケトン〔チバガ
イギ―(株)製のイルガキユア184〕5部を加えて、
50重量%濃度に希釈してなるトルエン溶液を塗布し、
100℃で3分間乾燥したのち、ただちにオゾンタイプ
高圧水銀灯(80W/cm、15cm集光型)2灯で紫外線
照射を行い、厚さ5μmのハ―ドコ―ト処理層を形成し
た。
Example 2 On one side of a PET film having a thickness of 125 μm, 100 parts of an acrylic / urethane type resin [UNIDIK 17-806 manufactured by Dainippon Ink and Chemicals, Inc.] was added to hydroxycyclohexyl as a photopolymerization initiator. Add 5 parts of phenylketone [Irgakiure 184 manufactured by Ciba-Geigy Co., Ltd.],
Apply a toluene solution diluted to a concentration of 50% by weight,
After drying at 100 ° C. for 3 minutes, ultraviolet rays were immediately irradiated with two ozone type high pressure mercury lamps (80 W / cm, 15 cm condensing type) to form a hard coat treatment layer having a thickness of 5 μm.

【0038】このハ―ドコ―ト処理層を形成したPET
フイルムを、透明基体として用い、この透明基体のハ―
ドコ―ト処理層とは反対側の面より粘着剤層を介して貼
り合わせるようにした以外は、実施例1と同様にして、
図2に示す構造の透明導電性積層フイルムを作製した。
また、この積層フイルムを用いて、実施例1と同様にし
て、図3に示す構造のタツチパネルを作製した。
PET formed with this hard coat treated layer
The film is used as a transparent substrate, and the transparent substrate is
In the same manner as in Example 1 except that the surface opposite to the doctrine-treated layer was adhered via an adhesive layer,
A transparent conductive laminated film having the structure shown in FIG. 2 was produced.
Further, using this laminated film, a touch panel having a structure shown in FIG. 3 was produced in the same manner as in Example 1.

【0039】実施例3,4 TiO2 薄膜の厚さを400Å(実施例3)、1,60
0Å(実施例4)に変更した以外は、実施例2と同様に
して、図2に示す構造の2種の透明導電性積層フイルム
を作製した。また、これらの積層フイルムを用いて、実
施例1と同様にして、図3に示す構造の2種のタツチパ
ネルを作製した。
Examples 3, 4 The thickness of the TiO 2 thin film was 400 Å (Example 3), 1, 60
Two types of transparent conductive laminated films having the structure shown in FIG. 2 were produced in the same manner as in Example 2 except that the thickness was changed to 0Å (Example 4). Also, using these laminated films, two types of touch panels having the structure shown in FIG. 3 were produced in the same manner as in Example 1.

【0040】実施例5 TiO2 薄膜に代え、ZnSを電子ビ―ム加熱法で、
(1〜2)×10-4Torrの真空度で真空蒸着して、
厚さ約1,000ÅのZnS(光の屈折率n2 =2.
3)からなる透明な誘電体薄膜を形成するようにした以
外は、実施例2と同様にして、図2に示す構造の透明導
電性積層フイルムを作製した。また、この積層フイルム
を用いて、実施例1と同様にして、図3に示す構造のタ
ツチパネルを作製した。
Example 5 ZnS was replaced by an electron beam heating method in place of the TiO 2 thin film,
(1 to 2) × 10 −4 Torr vacuum-deposited at a vacuum degree,
ZnS having a thickness of about 1,000Å (refractive index of light n 2 = 2.
A transparent conductive laminated film having the structure shown in FIG. 2 was produced in the same manner as in Example 2 except that the transparent dielectric thin film consisting of 3) was formed. Further, using this laminated film, a touch panel having a structure shown in FIG. 3 was produced in the same manner as in Example 1.

【0041】比較例1 TiO2 薄膜および粘着剤層の形成と透明基体の貼り合
わせを行わなかつた以外は、実施例1と同様にして、透
明導電性積層フイルムを作製し、またこのフイルムを用
いて、実施例1と同様にして、タツチパネルを作製し
た。
Comparative Example 1 A transparent conductive laminated film was prepared in the same manner as in Example 1 except that the formation of the TiO 2 thin film and the pressure-sensitive adhesive layer and the bonding of the transparent substrate were not performed, and this film was used. Then, a touch panel was produced in the same manner as in Example 1.

【0042】比較例2 TiO2 薄膜の形成を行わなかつた以外は、実施例1と
同様にして、透明導電性積層フイルムを作製し、またこ
のフイルムを用いて、実施例1と同様にして、タツチパ
ネルを作製した。
Comparative Example 2 A transparent conductive laminated film was produced in the same manner as in Example 1 except that the TiO 2 thin film was not formed, and this film was used in the same manner as in Example 1. A touch panel was produced.

【0043】比較例3 粘着剤層の形成と透明基体の貼り合わせを行わなかつた
以外は、実施例1と同様にして、透明導電性積層フイル
ムを作製し、またこのフイルムを用いて、実施例1と同
様にして、タツチパネルを作製した。
Comparative Example 3 A transparent conductive laminated film was prepared in the same manner as in Example 1 except that the pressure-sensitive adhesive layer was not formed and the transparent substrate was not adhered. A touch panel was produced in the same manner as in 1.

【0044】比較例4 フイルム基材として、厚さが125μmのPETフイル
ムを使用した以外は、実施例1と同様にして、透明導電
性積層フイルムを作製し、またこのフイルムを用いて、
実施例1と同様にして、タツチパネルを作製した。
Comparative Example 4 A transparent conductive laminated film was prepared in the same manner as in Example 1 except that a PET film having a thickness of 125 μm was used as a film base material, and this film was also used.
A touch panel was produced in the same manner as in Example 1.

【0045】以上の実施例1〜5および比較例1〜4の
各透明導電性積層フイルムにつき、フイルム抵抗、光の
透過率および導電性薄膜の耐擦傷性を、下記の方法で測
定した。また、上記の実施例1〜5および比較例1〜4
の各タツチパネルについて、下記の方法で打点特性を測
定した。これらの結果を表1に示す。
For each of the transparent conductive laminated films of Examples 1 to 5 and Comparative Examples 1 to 4 described above, the film resistance, the light transmittance and the scratch resistance of the conductive thin film were measured by the following methods. In addition, Examples 1 to 5 and Comparative Examples 1 to 4 described above
With respect to each of the touch panels, the dot properties were measured by the following method. The results are shown in Table 1.

【0046】<フイルム抵抗>二端子法を用いて、フイ
ルムの表面電気抵抗(Ω/□)を測定した。
<Film Resistance> The surface electric resistance (Ω / □) of the film was measured by the two-terminal method.

【0047】<光の透過率>島津製作所製の分光分析装
置UV−240を用いて、光波長550nmにおける可視
光線透過率を測定した。
<Light Transmittance> A visible light transmittance at a light wavelength of 550 nm was measured by using a spectrophotometer UV-240 manufactured by Shimadzu Corporation.

【0048】<導電性薄膜の耐擦傷性>新東科学社製の
ヘイドン表面性測定機TYPE−HEIDON14を用
いて、擦傷子:ガ―ゼ(日本薬局方タイプI)、荷
重:100g/cm2 、擦傷速度:30cm/分、擦傷
回数:100回(往復50回)の条件で、導電性薄膜表
面を擦つたのちにフイルム抵抗(Rs)を測定し、初期
のフイルム抵抗(Ro)に対する変化率(Rs/Ro)
を求めて、耐擦傷性を評価した。
<Abrasion resistance of conductive thin film> Using Hayden surface property measuring instrument TYPE-HEIDON14 manufactured by Shinto Kagaku Co., Ltd., abrasion: gaze (Japanese Pharmacopoeia type I), load: 100 g / cm 2 , Scratch rate: 30 cm / min, number of scratches: 100 times (50 reciprocations), the film resistance (Rs) was measured after rubbing the surface of the conductive thin film, and the rate of change with respect to the initial film resistance (Ro) (Rs / Ro)
Then, the scratch resistance was evaluated.

【0049】<打点特性>透明導電性積層フイルムで構
成したパネル板側から、硬度40度のウレタンゴムから
なるロツド(鍵先7R)を用いて荷重100gで100
万回のセンタ―打点を行つたのち、フイルム抵抗(R
d)を測定し、初期のフイルム抵抗(Ro)に対する変
化率(Rd/Ro)を求めて、打点特性を評価した。な
お、上記フイルム抵抗の測定は、対向配置した導電性薄
膜同志の打点時の接触抵抗について行い、その平均値で
表したものである。
<Spotting Characteristics> From a panel plate side composed of a transparent conductive laminated film, a rod (key point 7R) made of urethane rubber having a hardness of 40 degrees is used and a load of 100 g is applied to 100.
After performing the center dot for 10,000 times, the film resistance (R
d) was measured, the rate of change (Rd / Ro) with respect to the initial film resistance (Ro) was determined, and the dot characteristics were evaluated. The film resistance is measured by measuring the contact resistance of the conductive thin films arranged opposite to each other at the time of hitting, and is represented by an average value thereof.

【0050】[0050]

【表1】 [Table 1]

【0051】上記表1の結果から、この発明の透明導電
性積層フイルムは、導電性および透明性が良好で、かつ
導電性薄膜の耐擦傷性にすぐれており、しかも、この透
明導電性積層フイルムを用いることにより、打点特性に
すぐれたタツチパネルを作製できるものであることが明
らかである。
From the results shown in Table 1, the transparent conductive laminated film of the present invention has good conductivity and transparency, and the conductive thin film has excellent scratch resistance, and the transparent conductive laminated film is also excellent. It is obvious that the touch panel having excellent hitting properties can be manufactured by using.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の透明導電性積層体の一例を示す断面
図である。
FIG. 1 is a sectional view showing an example of a transparent conductive laminate of the present invention.

【図2】この発明の透明導電性積層体の他の例を示す断
面図である。
FIG. 2 is a cross-sectional view showing another example of the transparent conductive laminate of the present invention.

【図3】この発明のタツチパネルの一例を示す断面図で
ある。
FIG. 3 is a sectional view showing an example of the touch panel of the present invention.

【符号の説明】[Explanation of symbols]

1 透明なフイルム基材 2 透明な誘電体薄膜 3 透明な導電性薄膜 4 透明な粘着剤層 5 透明基体 P1,P2 一対のパネル板 P1d,P2d 導電性薄膜 S スペ―サ1 Transparent Film Substrate 2 Transparent Dielectric Thin Film 3 Transparent Conductive Thin Film 4 Transparent Adhesive Layer 5 Transparent Substrates P1, P2 Pair of Panel Plates P 1d , P 2d Conductive Thin Film S Spacer

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 厚さが2〜120μmの透明なフイルム
基材の一方の面に透明な誘電体薄膜とさらにこの上に透
明な導電性薄膜を形成し、他方の面に透明な粘着剤層を
介して透明基体を貼り合わせてなる透明導電性積層体で
あつて、かつ上記フイルム基材の光の屈折率をn1 、上
記誘電体薄膜の光の屈折率をn2 、上記導電性薄膜の光
の屈折率をn3 としたとき、n1 <n3 <n2 の関係を
満たすことを特徴とする透明導電性積層体。
1. A transparent film substrate having a thickness of 2 to 120 μm, wherein a transparent dielectric thin film is formed on one surface of the transparent film substrate, and a transparent conductive thin film is formed on the transparent dielectric thin film, and a transparent adhesive layer is formed on the other surface. A transparent conductive laminate obtained by bonding a transparent substrate via a transparent substrate, the refractive index of light of the film base material is n 1 , the refractive index of light of the dielectric thin film is n 2 , and the conductive thin film is When the refractive index of light of n is 3 , the transparent electroconductive laminate is characterized by satisfying the relationship of n 1 <n 3 <n 2 .
【請求項2】 導電性薄膜を有する一対のパネル板を、
導電性薄膜同志が対向するように、スペ―サを介して対
向配置してなるタツチパネルにおいて、少なくとも一方
のパネル板が請求項1に記載の透明導電性積層体からな
ることを特徴とするタツチパネル。
2. A pair of panel plates having a conductive thin film,
A touch panel in which conductive thin films are opposed to each other via a spacer so that at least one panel plate is made of the transparent conductive laminate according to claim 1.
JP2732493A 1993-01-23 1993-01-23 Transparent conductive laminate and touch panel Expired - Lifetime JP2624930B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2732493A JP2624930B2 (en) 1993-01-23 1993-01-23 Transparent conductive laminate and touch panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2732493A JP2624930B2 (en) 1993-01-23 1993-01-23 Transparent conductive laminate and touch panel

Publications (2)

Publication Number Publication Date
JPH06218864A true JPH06218864A (en) 1994-08-09
JP2624930B2 JP2624930B2 (en) 1997-06-25

Family

ID=12217899

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001216842A (en) * 2000-02-03 2001-08-10 Toyobo Co Ltd Transparent conductive film, transparent conductive sheet and touch panel
WO2003020509A1 (en) 2001-09-03 2003-03-13 Teijin Limited Transparent conductive laminate
WO2005052956A1 (en) * 2003-11-28 2005-06-09 Teijin Limited Transparent conductive laminate and transparent touch panel utilizing the same
CN100338692C (en) * 2002-05-23 2007-09-19 日本油脂株式会社 Transparent conductive laminate film, touch panel having this transparent conductive laminate film, and production method for this transparent conductive laminate film
JP2012071422A (en) * 2010-09-27 2012-04-12 Toppan Printing Co Ltd Functional substrate and method for producing the same, and touch panel including the functional substrate
JP2013507683A (en) * 2009-10-08 2013-03-04 エルジー イノテック カンパニー リミテッド Plate member for touch panel, manufacturing method thereof, and touch panel
JP2013507682A (en) * 2009-10-08 2013-03-04 エルジー イノテック カンパニー リミテッド Plate member for touch panel and manufacturing method thereof
CN105619911A (en) * 2016-02-18 2016-06-01 烟台正海科技股份有限公司 Full-lamination method of touch products

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001216842A (en) * 2000-02-03 2001-08-10 Toyobo Co Ltd Transparent conductive film, transparent conductive sheet and touch panel
US7294395B2 (en) 2001-09-03 2007-11-13 Teijin Limited Transparent electroconductive laminate
WO2003020509A1 (en) 2001-09-03 2003-03-13 Teijin Limited Transparent conductive laminate
EP1886799A2 (en) 2001-09-03 2008-02-13 Teijin Limited Transparent electroconductive laminate and transparent touch panel using the same
US7521123B2 (en) 2002-05-23 2009-04-21 Nof Corporation Transparent conductive laminate film, touch panel having this transparent conductive laminate film, and production method for this transparent conductive laminate film
CN100338692C (en) * 2002-05-23 2007-09-19 日本油脂株式会社 Transparent conductive laminate film, touch panel having this transparent conductive laminate film, and production method for this transparent conductive laminate film
WO2005052956A1 (en) * 2003-11-28 2005-06-09 Teijin Limited Transparent conductive laminate and transparent touch panel utilizing the same
US7807261B2 (en) 2003-11-28 2010-10-05 Teijin Limited Transparent conductive laminate and transparent touch panel comprising the same
JP2013507683A (en) * 2009-10-08 2013-03-04 エルジー イノテック カンパニー リミテッド Plate member for touch panel, manufacturing method thereof, and touch panel
JP2013507682A (en) * 2009-10-08 2013-03-04 エルジー イノテック カンパニー リミテッド Plate member for touch panel and manufacturing method thereof
US9760191B2 (en) 2009-10-08 2017-09-12 Lg Innotek Co., Ltd. Plate member for touch panel and method of manufacturing the same, and touch panel
JP2012071422A (en) * 2010-09-27 2012-04-12 Toppan Printing Co Ltd Functional substrate and method for producing the same, and touch panel including the functional substrate
CN105619911A (en) * 2016-02-18 2016-06-01 烟台正海科技股份有限公司 Full-lamination method of touch products

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