JPH06213929A - Manufacture of probe head of inspecting apparatus and the probe head - Google Patents

Abstract

PURPOSE:To accurately array probe needles at a fine pitch by dividing conductive substance at parts in contact with electrodes to form probe needles, and fixing an insulating housing to the base end sides of the needles. CONSTITUTION:Many probe needles 2, 2,... are arranged on a lower surface of a housing 4 of a rectangular parallelepiped shape of a probe head PH. The needles 2, 2,... provided longitudinally of the housing 4 are arranged parallel to each other at a constant pitch. A method for manufacturing the PH comprises the step of bending a rectangular metal plate to form downward protrusions at its end side, then developing a processing pattern, etching a base end side of the plate, then molding an insulator on a housing connecting part 2b to form the housing 4, then cutting along the base end of a housing fixing part 2a by etching, and then etching the end side of the plate to form the needles 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a probe head of an inspection device having a large number of probe needles at a fine pitch and a probe head of the inspection device, and more particularly to a large number of inspected objects such as liquid crystal display panels. The present invention relates to a method of manufacturing a probe head of an inspection device used for inspecting the electrical characteristics of the electrode by bringing a probe needle into contact with the electrode, and a probe head of the inspection device manufactured by this manufacturing method.

[0002]

2. Description of the Related Art In order to improve the yield of a liquid crystal display panel and reduce its cost, the liquid crystal display panel after manufacturing is inspected, and pixel defects, gate bus lines and sources caused by defects such as TFTs are inspected. When a line defect due to a disconnection of the bus line or the like is detected, the defective liquid crystal display panel may be transported to a repairing process to perform the repairing work.

Here, when the TFT is defective or each bus line is broken, a large number of probe needles mounted on the probe head are brought into contact with these portions, that is, a plurality of electrodes on the liquid crystal display panel, and the electrodes to be inspected are checked. The presence or absence thereof is detected by detecting the electrical characteristics.

FIGS. 7A and 7B show a conventional example of this type of probe head. The probe head shown in FIG. 7A has a structure in which a large number of rectangular metal pieces 102, 102 ... Are arranged parallel to each other at a predetermined pitch d on the lower surface of a rectangular parallelepiped insulator 101.

The probe head shown in FIG. 7 (b) has two kinds and a large number of metal needles (hereinafter referred to as probe needles) 112, 112 on one end face of a similar insulator 111.
..., 113, 113, ... are arranged at a predetermined pitch d with their base ends in contact with the one end face, and then each probe needle 112, 112, ..., 113, using an adhesive, a resin, or the like.
113 is fixed to an insulator.

In these conventional examples, the metal piece 1
02 and the probe needles 112 and 113 were mechanically arranged using, for example, a dedicated jig.

[0007]

However, in the above arrangement method, when the pitch d becomes a very small value of 200 μm or less, the pitch d is accurately maintained and the metal pieces 102, 1
02 ..., probe needles 112, 112 ..., 113, 113
It becomes difficult to arrange ...

In the probe head shown in FIG. 7 (b), the pitch d can be corrected after once fixed, but this correction work is performed by the probe needle 112,
In order to adjust the tip end surface of 113 (contact surface with the electrodes of the liquid crystal display panel) to the pitch d, the tip end portion is twisted in a direction for correcting the pitch deviation. For this reason,
The correction work required a long time, resulting in an increase in the cost of the probe head.

When the probe needles 112 and 113 are twisted, the height of the probe needles 112 and 113 changes.
Depending on the difference in the twist amount between 2 and 113, each probe needle 11
The height dimension of 2,113 varies. Further, since the probe needles have different inclinations, the mechanical characteristics become non-uniform, which causes a problem such as poor contact with the electrode to be inspected.

For these reasons, it is practically difficult to carry out the correction work, and in the conventional structure, it was not possible to obtain a probe head in which the probe needles were accurately arranged at a fine pitch. Is.

The present invention solves the problems of the prior art as described above. It is possible to arrange a large number of probe needles with a fine pitch with high precision, and to provide an electrode to be inspected without contact failure. You can make sure contact,
An object of the present invention is to provide a method of manufacturing a probe head of an inspection device, which enables a highly accurate inspection as a result, and a significant cost reduction, and a probe head of the inspection device manufactured by this manufacturing method. .

[0012]

A method of manufacturing a probe head of an inspection apparatus according to the present invention is an inspection apparatus for inspecting an electrical characteristic of an inspection object by bringing a plurality of probe needles into contact with electrodes on the inspection object. In the method of manufacturing a probe head, a material having a conductive substance at least in a portion which comes into contact with the electrode later is divided by a chemical treatment such as etching or a physical treatment such as laser processing to form a plurality of probe needles. And a step of fixing an insulative housing to the base end side of the probe needle, whereby the above object is achieved.

The probe head of the inspection device of the present invention is the probe head of the inspection device for inspecting the electrical characteristics of the inspection object by bringing a plurality of probe needles into contact with the electrodes on the inspection object. The needle is formed by cutting a material having conductivity at least the contact surface with respect to the electrode, thereby achieving the above object.

[0014] Preferably, the material is made of an integral conductive material.

Further, preferably, the material is constituted by combining a conductive substance and a non-conductive substance.

Further, preferably, the cutting process is performed by a chemical treatment such as etching. Also, preferably,
The dividing process is performed by a physical process such as laser processing. Also, preferably, the tip portion of the probe needle is reinforced.

As the reinforcement, it is preferable to perform a rigid reinforcement by bending the corresponding portion of the material before the division.

Further, preferably, after the division, a bending process is performed to reinforce in rigidity.

Further, preferably, the width dimension of the tip portion of the probe needle is made smaller than the width dimension of the base end portion to elastically reinforce.

Preferably, at least the tip of the probe needle has a cross-sectional shape that is convex toward the contact surface side to reinforce it rigidly.

[0021] Preferably, the base end portion of the material is divided and then fixed by an insulating fixing material, and then the tip end portion is divided to form the probe needle.

Further, preferably, a resin is used as the fixing material.

Further, preferably, at least the outer periphery of the tip of the probe needle is covered with a conductive film.

[0024]

As described above, if a material, such as a metal plate, which has been bent in advance according to the shape of the probe needle as necessary, is divided by a chemical treatment such as etching or a physical treatment such as laser machining, A large number of probe needles arranged at equal pitch can be obtained. That is, according to this manufacturing method, it is possible to obtain probe needles having an equal arrangement pitch without requiring a troublesome work such as mechanically arranging a large number of probe heads.

Further, it is possible to realize a probe needle having an arrangement pitch of a fine pitch simply by controlling the processing accuracy.

If the tip of the probe needle is mechanically reinforced by bending or the like, the life and reliability of the probe head can be improved.

[0027]

EXAMPLES Examples of the present invention will be described below.

(Embodiment 1) FIGS. 1 to 3 show Embodiment 1 of the probe head of the inspection apparatus of the present invention. As shown in FIG. 1, the probe head PH includes a rectangular parallelepiped housing 4
Has a schematic structure in which a large number of probe needles 2, 2, ... The probe needles 2, 2, ... Provided in the longitudinal direction of the housing 4 are arranged parallel to each other and at equal pitches. These probe needles 2, 2, ... Are manufactured by cutting the metal plate 1 shown in FIG. As the metal plate 1, for example, a beryllium copper plate is used.

The proximal ends of the probe needles 2, 2 ... On which the housing 4 is fixed later are parallel housing fixing portions 2b. On the other hand, the tip end side of each probe needle 2, 2, ... Is bent downward to be convex. This bending process is performed at the stage of the metal plate 1 shown in FIG. 2, and the bending part functions as a reinforcing part 2 a that imparts elasticity to the probe needle 2. That is, when such bending is performed, the mechanical rigidity of that portion is improved, so that the life and reliability of the probe needle 2 can be improved.

This probe head PH is manufactured through the following steps. First, as shown in FIG. 2, the tip side of a rectangular metal plate 1 is bent, and a downwardly projecting portion 1 is formed on the tip side.
a is formed. This convex portion 1a is later divided by etching to be a plurality of reinforcing portions 2a, 2a ... (See FIG. 1).

Next, as shown in FIG. 3, a processing pattern is developed using a photoresist, and then the base end side of the metal plate 1 is etched using an etching solution, whereby the base end side is etched. Multiple lines at equal intervals in the width direction (4 in the illustrated example
The housing fixing portion 2b having the openings 2c, 2c ... Is formed. The opening 2c has a long slit shape in the longitudinal direction of the metal plate 1, and the pitch d of the portion including the opening 2c and both side edges in the width direction thereof is set to 80 μm, for example. The base end of the opening 2c is located slightly inward of the base end of the housing fixing portion 2a.

Next, an insulator such as resin is molded on the housing connecting portion 2b to form the housing 4. Thereby, the metal plate 1 and the housing 4 are fixed. At this time, the base end of the housing fixing portion 2 a slightly projects from the housing 4. Then, by etching, the base end portion of the housing fixing portion 2a, that is, the protruding portion is cut along the line AA 'shown in FIG.

Next, the tip side of the metal plate 1 is etched to form the probe needles 2 having an arrangement pitch d '(for example, 80 μm). That is, the tip side of the metal plate 1 is divided by etching to form a plurality of probe needles 2, 2. To be more specific, the opening 2 on the base end side
An opening is formed on the tip side so as to communicate with c, and probe needles 2, 2, ... Are formed on the remaining portion. The probe head PH of the first embodiment is manufactured through the above steps. In addition, the electric wiring of the inspection device body (not shown) is connected to the base terminal of the housing fixing portion 2b.

Thus, the probe head P of the first embodiment is
In H, since the probe needles 2, 2, ... Are manufactured by dividing one metal plate 1 by etching, the arrangement pitch d of the probe needles 2 is different from that of the above-mentioned conventional example in which the probe needles are mechanically fixed. The accuracy of 'can be improved significantly. Further, by bending the metal plate 1 with high accuracy in advance, it is possible to accurately align the shapes of all the probe needles 2. The troublesome work of twisting the tip and adjusting to the pitch is unnecessary. For this reason, the first embodiment
According to the probe head PH, the probe needles 2 can be brought into uniform contact with the electrodes to be inspected, and the manufacturability can be improved.

(Embodiment 2) FIG. 4 shows Embodiment 2 of the probe head of the inspection apparatus of the present invention. In the second embodiment, the probe needle 20 is formed straight without bending the tip side. In addition, the tip end of the probe needle 20 is processed so that its width dimension is narrower than that of the base end portion, and has a triangular shape in plan view as a whole.

When the probe needle 20 has such a shape, a substantially uniform bending moment is generated in the cross section of the probe needle 20 at the time of inspection in which the needle tip is in contact with the electrode, so that stress concentration occurs at the base end (needle root). Does not occur.
That is, with such a shape, the probe needle 20 is uniformly bent as a whole and the force is dispersed, so that excessive stress does not occur at the needle base. As a result, the probe needle 20 can be effectively protected from plastic deformation, and the life and reliability of the probe needle 2 can be improved.

Also in the second embodiment, the housing 40 is fixed on the housing fixing portion 20b which is continuously provided on the base end side of the probe needle 2. Also, this probe needle 2
Similarly to the above, 0 is also divided and formed by etching.

(Other Embodiments) The application of the present invention is not limited to the above-described first and second embodiments, and various modifications described below are possible.

First, in the above embodiment, one metal plate 1
Therefore, the probe needle 2 and the housing fixing portion 2b are separated from each other, but instead of the single metal plate 1, a composite structure as shown in FIGS. 5A to 5C is used. You can also

That is, in the example shown in FIG. 5A, the composite structure 10 in which the plate-like bodies 11 and 12 made of two kinds of conductive materials are bonded together is used. Further, in the example shown in FIG. 5B, a composite structure 1 in which plate-like bodies 15 made of a non-conductive substance are vertically sandwiched between plate-like bodies 13 and 14 made of a conductive substance.
0'is used. Furthermore, in the example shown in FIG.
Contrary to (b), a composite structure 10 ″ is used in which the plate-shaped body 16 made of a conductive material is vertically sandwiched by plate-shaped bodies 17, 18 made of a non-conductive material.

In addition to the above beryllium copper plate, examples of the conductive material include tungsten, aluminum,
Stainless steel, silver-palladium alloy, etc. can be used. Further, the fixing structure to the housing is not limited to that of the above-mentioned embodiment, and may be any structure capable of finally fixing the probe needle, for example, a structure for sandwiching the housing fixing portion or a housing connecting portion. Another structure that fixes the housing to the lower surface of the can be adopted.

In the first embodiment described above, the pitch d of the housing fixing portion 2b and the arrangement pitch d'of the probe needles 2 are made to coincide with each other, and both are set to 80 μm, but both pitches d and d'necessarily coincide. No need. Furthermore, the pitches d and d ′ do not have to be uniform in the entire probe head PH, but may be formed in a shape that matches the shape of the electrode pattern of the device under test. That is, for example, the embodiment in which one probe needle is brought into contact with the electrode to be inspected may be adopted, or the embodiment in which a plurality of probe needles are brought into contact with one electrode may be adopted. As a specific numerical value of the pitch d ′, for example, a value of about several tens of mm can be used, or several hundred m
It is also possible to take a value of m or more.

Further, regarding the cross-sectional shape of the tip portion of the probe needle to be the contact portion, by appropriately selecting the etching time, the type of etching solution, etc., FIG.
Various sectional shapes shown in (a), (b) and (c) can be selected.

Incidentally, in FIG. 6 (a), the tip 21 of the probe needle is formed in a downward trapezoidal shape to increase the section modulus and increase its rigidity, thereby improving the mechanical strength. And effectively protects the probe needle. Further, in FIG. 6B, the tip portion 22 of the probe head is formed in a semicircular shape that is convex downward, and the mechanical strength is similarly improved. Further, in FIG. 6C, a conductive film 24 is formed on the outer periphery of the tip portion 23 of the probe needle by plating, sputtering, etc.
The conductivity of the probe needle is improved. According to FIG. 6C, the reliability of the inspection can be improved.

In the example shown in FIGS. 6 (a), 6 (b) and 6 (c), the entire probe needle can be formed in such a shape.

Further, although the probe needle is divided by etching in the above embodiment, it may be performed by another chemical treatment, or the probe needle forming portion of a material such as a metal plate is irradiated with a laser beam. It may be performed by a physical process in which the probe needle is divided by laser processing.

Further, in the first embodiment, the tip side of the metal plate 1 is bent before cutting, but it is also possible to bend the probe needle 2 after cutting.

[0048]

As described above, according to the present invention, it is possible to efficiently obtain a probe head having probe needles having an arrangement pitch of equal pitch. Therefore, the manufacturability can be improved and the cost can be significantly reduced. Moreover, by simply managing the processing accuracy, it is possible to easily realize a probe head having a fine pitch in which the array pitch of the probe needles is 200 μm or less.

In particular, according to the probe head of the inspection device of the seventh to eleventh aspects, since the probe needle is reinforced rigidly or elastically, it is possible to improve the contact property and the life. , The reliability can be further improved.

Further, in particular, according to the probe head of the inspection apparatus of the fourteenth aspect, the conductivity of the probe needle can be improved and the reliability can be further improved.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of a probe head of the present invention.

FIG. 2 is a perspective view showing a state where a tip end portion of a metal plate which is a material for forming a probe needle is bent.

FIG. 3 is a perspective view showing a metal plate on which a housing fixing portion is formed on a base end side by etching.

FIG. 4 is a perspective view showing a second embodiment of the probe head of the present invention.

FIG. 5 is a perspective view showing another example of a material for forming a probe needle.

FIG. 6 is a cross-sectional view showing another example of the cross-sectional structure of the probe needle.

FIG. 7 is a perspective view showing a conventional example of a probe head.

FIG. 8 is a perspective view showing a work of correcting a probe needle.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Metal plate 2 and 20 Probe needle 2a Reinforcing part 2b and 20b Housing fixing part 2c Opening 4,40 Housing 10, 10 ', 10' 'Composite structure 21, 22, 23 Probe needle tip part 24 Conductive membrane PH probe head

Claims (14)

[Claims] 1. A method for manufacturing a probe head of an inspection apparatus, comprising: contacting a plurality of probe needles to an electrode on an object to be inspected to inspect the electrical characteristics of the object to be inspected; A step of forming a plurality of probe needles by subjecting a material having a conductive substance to a chemical treatment such as etching or a physical treatment such as laser processing to form a plurality of probe needles, and an insulating housing on the proximal end side of the probe needles. A method of manufacturing a probe head of an inspection apparatus, the method including a step of fixing. 2. A probe head of an inspection apparatus for inspecting an electrical characteristic of an inspected object by bringing a plurality of probe needles into contact with an electrode on the inspected object, wherein the probe needle has at least a contact surface for the electrode. A probe head for an inspection apparatus, which is formed by cutting a conductive material. 3. The probe head of the inspection device according to claim 2, wherein the material is made of an integral conductive material. 4. The probe head of the inspection apparatus according to claim 2, wherein the material is formed by combining a conductive substance and a non-conductive substance. 5. The probe head of the inspection device according to claim 2, wherein the dividing process is performed by a chemical treatment such as etching. 6. The probe head of the inspection apparatus according to claim 2, wherein the cutting process is performed by a physical process such as laser processing. 7. The probe head of an inspection apparatus according to claim 2, wherein the tip portion of the probe needle is reinforced. 8. The probe head of an inspection apparatus according to claim 7, wherein the material before being divided is bent to rigidly reinforce the probe needle. 9. The probe head of an inspection apparatus according to claim 7, wherein the probe needle is rigidly reinforced by bending after division. 10. A probe head for an inspection apparatus according to claim 7, wherein the width dimension of the tip portion of the probe needle is made smaller than the width dimension of the base end portion to be elastically reinforced. 11. The probe head of an inspection apparatus according to claim 7, wherein at least a tip end portion of the probe needle has a cross-sectional shape convex toward the contact surface side and is reinforced for rigidity. 12. The probe head of an inspection apparatus according to claim 2, wherein the base end portion of the material is divided, fixed by an insulating fixing material, and then the tip portion is divided to form the probe needle. 13. The probe head of the inspection device according to claim 12, wherein the fixing material is resin. 14. The probe head of the inspection apparatus according to claim 2, wherein at least the outer circumference of the tip of the probe needle is covered with a conductive film.