JPH06213181A - 回転ピストン真空ポンプ - Google Patents

回転ピストン真空ポンプ

Info

Publication number
JPH06213181A
JPH06213181A JP5324066A JP32406693A JPH06213181A JP H06213181 A JPH06213181 A JP H06213181A JP 5324066 A JP5324066 A JP 5324066A JP 32406693 A JP32406693 A JP 32406693A JP H06213181 A JPH06213181 A JP H06213181A
Authority
JP
Japan
Prior art keywords
piston
recess
housing
gas outlet
control piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5324066A
Other languages
English (en)
Japanese (ja)
Inventor
Hermann Lang
ヘルマン・ラング
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Balzers Pfeiffer GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Pfeiffer GmbH filed Critical Balzers Pfeiffer GmbH
Publication of JPH06213181A publication Critical patent/JPH06213181A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/20—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with dissimilar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0035—Equalization of pressure pulses

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP5324066A 1992-12-24 1993-12-22 回転ピストン真空ポンプ Pending JPH06213181A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4244063A DE4244063A1 (de) 1992-12-24 1992-12-24 Wälzkolben-Vakuumpumpe
DE4244063:7 1992-12-24

Publications (1)

Publication Number Publication Date
JPH06213181A true JPH06213181A (ja) 1994-08-02

Family

ID=6476527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5324066A Pending JPH06213181A (ja) 1992-12-24 1993-12-22 回転ピストン真空ポンプ

Country Status (3)

Country Link
EP (1) EP0603698B1 (de)
JP (1) JPH06213181A (de)
DE (2) DE4244063A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013046852A1 (ja) * 2011-09-30 2013-04-04 アネスト岩田株式会社 クローポンプ

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19809957A1 (de) * 1998-03-07 1999-09-09 Pfeiffer Vacuum Gmbh Mehrwellenvakuumpumpe
DE102007057813A1 (de) 2007-11-30 2009-06-04 Heinig, Jürgen, Dr.-Ing. Anordnung eines Einflügel-Wälzkolbenverdichters und Verfahren zur Verdichtung von förderbaren und kompressiblen Medien
DE102008044856A1 (de) 2008-08-28 2010-03-04 Heinig, Jürgen, Dr.-Ing. Anordnung eines Turbo-Schubgebläses und Verfahren zum Antrieb von Luftfahrzeugen
CN114704465A (zh) * 2022-04-11 2022-07-05 浙江创为真空设备股份有限公司 一种罗茨真空泵预抽结构

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH405585A (fr) * 1961-10-13 1966-01-15 Studia Technica Ets Machine rotative, notamment compresseur ou pompe
FR1324941A (fr) * 1962-02-09 1963-04-26 Studia Technica Ets Machine volumétrique telle que compresseur ou pompe
GB1128051A (en) * 1965-05-24 1968-09-25 Lucas Industries Ltd Gear pumps
CH621854A5 (en) * 1977-06-06 1981-02-27 Balzers Hochvakuum Roots pump
DE3018638C2 (de) * 1980-05-16 1986-10-16 Walter 4791 Schlangen Plöger Drehkolben-Brennkraftmaschine
DE3332361C2 (de) * 1983-09-08 1994-05-26 Balzers Pfeiffer Gmbh Wälzkolbenpumpe
US5071328A (en) * 1990-05-29 1991-12-10 Schlictig Ralph C Double rotor compressor with two stage inlets

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013046852A1 (ja) * 2011-09-30 2013-04-04 アネスト岩田株式会社 クローポンプ
JP2013076361A (ja) * 2011-09-30 2013-04-25 Anest Iwata Corp クローポンプ
CN103842657A (zh) * 2011-09-30 2014-06-04 阿耐思特岩田株式会社 爪式泵
CN103842657B (zh) * 2011-09-30 2016-08-17 阿耐思特岩田株式会社 爪式泵
US9702361B2 (en) 2011-09-30 2017-07-11 Anest Iwata Corporation Claw pump with relief space

Also Published As

Publication number Publication date
DE59305337D1 (de) 1997-03-13
EP0603698B1 (de) 1997-01-29
EP0603698A1 (de) 1994-06-29
DE4244063A1 (de) 1994-06-30

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