JPH0621267Y2 - 半導体レーザ装置 - Google Patents
半導体レーザ装置Info
- Publication number
- JPH0621267Y2 JPH0621267Y2 JP14332787U JP14332787U JPH0621267Y2 JP H0621267 Y2 JPH0621267 Y2 JP H0621267Y2 JP 14332787 U JP14332787 U JP 14332787U JP 14332787 U JP14332787 U JP 14332787U JP H0621267 Y2 JPH0621267 Y2 JP H0621267Y2
- Authority
- JP
- Japan
- Prior art keywords
- submount
- laser
- semiconductor laser
- laser device
- interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 5
- 238000005468 ion implantation Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- -1 silicon ions Chemical class 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14332787U JPH0621267Y2 (ja) | 1987-09-18 | 1987-09-18 | 半導体レーザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14332787U JPH0621267Y2 (ja) | 1987-09-18 | 1987-09-18 | 半導体レーザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448062U JPS6448062U (cs) | 1989-03-24 |
| JPH0621267Y2 true JPH0621267Y2 (ja) | 1994-06-01 |
Family
ID=31410047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14332787U Expired - Lifetime JPH0621267Y2 (ja) | 1987-09-18 | 1987-09-18 | 半導体レーザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0621267Y2 (cs) |
-
1987
- 1987-09-18 JP JP14332787U patent/JPH0621267Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6448062U (cs) | 1989-03-24 |
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