JPH0621245Y2 - 逆置防止装置付キャリヤ支持台 - Google Patents

逆置防止装置付キャリヤ支持台

Info

Publication number
JPH0621245Y2
JPH0621245Y2 JP13526087U JP13526087U JPH0621245Y2 JP H0621245 Y2 JPH0621245 Y2 JP H0621245Y2 JP 13526087 U JP13526087 U JP 13526087U JP 13526087 U JP13526087 U JP 13526087U JP H0621245 Y2 JPH0621245 Y2 JP H0621245Y2
Authority
JP
Japan
Prior art keywords
carrier
partition wall
carrier support
prevention device
mounting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13526087U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6439640U (US07166745-20070123-C00016.png
Inventor
喜之 播磨
貴庸 浅野
克己 奈良崎
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP13526087U priority Critical patent/JPH0621245Y2/ja
Publication of JPS6439640U publication Critical patent/JPS6439640U/ja
Application granted granted Critical
Publication of JPH0621245Y2 publication Critical patent/JPH0621245Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13526087U 1987-09-04 1987-09-04 逆置防止装置付キャリヤ支持台 Expired - Lifetime JPH0621245Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13526087U JPH0621245Y2 (ja) 1987-09-04 1987-09-04 逆置防止装置付キャリヤ支持台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13526087U JPH0621245Y2 (ja) 1987-09-04 1987-09-04 逆置防止装置付キャリヤ支持台

Publications (2)

Publication Number Publication Date
JPS6439640U JPS6439640U (US07166745-20070123-C00016.png) 1989-03-09
JPH0621245Y2 true JPH0621245Y2 (ja) 1994-06-01

Family

ID=31394727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13526087U Expired - Lifetime JPH0621245Y2 (ja) 1987-09-04 1987-09-04 逆置防止装置付キャリヤ支持台

Country Status (1)

Country Link
JP (1) JPH0621245Y2 (US07166745-20070123-C00016.png)

Also Published As

Publication number Publication date
JPS6439640U (US07166745-20070123-C00016.png) 1989-03-09

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