JPH06196862A - Manufacture of multilayer printed-wiring board - Google Patents

Manufacture of multilayer printed-wiring board

Info

Publication number
JPH06196862A
JPH06196862A JP34308392A JP34308392A JPH06196862A JP H06196862 A JPH06196862 A JP H06196862A JP 34308392 A JP34308392 A JP 34308392A JP 34308392 A JP34308392 A JP 34308392A JP H06196862 A JPH06196862 A JP H06196862A
Authority
JP
Japan
Prior art keywords
board
adhesive layer
hole
substrate
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP34308392A
Other languages
Japanese (ja)
Inventor
Akishi Nakaso
昭士 中祖
Haruo Ogino
晴夫 荻野
Koichi Tsuyama
宏一 津山
Akinari Kida
明成 木田
Shuichi Hatakeyama
修一 畠山
Naoyuki Urasaki
直之 浦崎
Kazuhisa Otsuka
和久 大塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP34308392A priority Critical patent/JPH06196862A/en
Publication of JPH06196862A publication Critical patent/JPH06196862A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To obtain a multilayer printed-wiring board wherein its wiring density is excellent and it is simple and easy by a method wherein an adhesive layer is formed on the surface on the side of an insulating material on a one-sided copper-clad laminated board and the adhesive layer is used as a B stage. CONSTITUTION:A layer by an adhesive 2 is formed on the surface on the side of an insulating material on a one-sided copper-clad laminated board 1, and it is used as a B-stage. In succession, a hole 3 is made in a connecting part in the board 1. Another board is overlapped so as to come into contact with the side of the layer by the adhesive 2 on the board 1 in which the hole 3 has been made, it is pressurized, heated, laminated and integrated. Then, a hole 6 which is passed through the whole of the laminated board is made, and a copper plating operation 7 is performed to the whole surface. Then, an etching resist is formed, inessential copper is etched and removed, and a conductor circuit is formed in a required part on the laminated and integrated board. When the adhesive 2 is used in the state of a B stage in this manner, a working operation such as a hole making operation or the like can be performed easily, and the board can be bonded to another wiring board by a successive pressurization and heating operation.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、多層プリント配線板の
製造法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer printed wiring board.

【0002】[0002]

【従来の技術】多層プリント配線板は、配線の高密度化
に伴って、1つの配線層と他の配線層の電気的接続に使
用される導通穴の数が増加する。従来、この導通穴は、
配線層を多数重ねて積層した後に、全体を貫通する穴を
あけ、その穴内壁をめっきすることによって行われてい
る。この場合、必要な接続を行う層間以外の層にまで穴
があけられ、接続と無関係な層においては、その貫通穴
の箇所を避けて配線を行わなければならず、この方法で
は、設計の自由度や配線の高密度化の障害になってい
る。
2. Description of the Related Art In a multilayer printed wiring board, the number of conductive holes used for electrical connection between one wiring layer and another wiring layer increases as the wiring density increases. Conventionally, this conduction hole is
This is done by stacking a large number of wiring layers and stacking them, then forming a hole penetrating the whole and plating the inner wall of the hole. In this case, holes are drilled up to layers other than the layers that make the necessary connections, and in layers unrelated to the connections, wiring must be performed avoiding the through-holes. This is an obstacle to increasing the density and wiring density.

【0003】そこで、配線板全体を貫通する穴だけを使
用するのではなく、隣接する配線層のみの接続を行う、
いわゆるバイアホールを形成する方法が開発されてい
る。この方法は、現在、基本的に以下の2通りの方法が
知られている。
Therefore, instead of using only holes penetrating the entire wiring board, only adjacent wiring layers are connected.
Methods have been developed for forming so-called via holes. At present, the following two methods are basically known as this method.

【0004】第一の方法は、隣接する配線層を先に形成
し、接続穴を形成しておいて、多層化する方法である。
具体的には、両面銅張り積層板に穴をあけ、穴内壁に無
電解めっきあるいは必要な場合に電解めっきを行って接
続用導体を形成し、片面の銅箔の不要な箇所のみをエッ
チング除去し、もう一方の面は全面に銅箔を残してお
き、他の基板と積層一体化した後、全体を貫通する穴を
あけて、穴内壁を金属化する方法や、絶縁基板の表面に
配線層を形成し、その配線層の表面に感光性絶縁材料に
よって層を形成し、導通穴となる箇所のみを除去するよ
うに光を照射し現像して、この絶縁材料の表面を粗化
し、必要な回路導体と穴内壁とに無電解めっきを行って
導体を形成するという、配線層の層間に感光性材料を用
いる方法等がある。これらの技術は、いずれも、さらに
必要な配線層を、同じ技術で形成して多層化するもので
ある。
The first method is a method in which adjacent wiring layers are first formed, connection holes are formed, and then a multilayer structure is formed.
Specifically, a hole is made in the double-sided copper-clad laminate, electroless plating is performed on the inner wall of the hole, or electrolytic plating is performed when necessary to form a connecting conductor, and only unnecessary portions of the copper foil on one side are removed by etching. Then, leave the copper foil on the entire other surface, and after laminating and integrating with the other substrate, make a hole through the whole and metallize the inner wall of the hole, or wire on the surface of the insulating substrate. A layer is formed on the surface of the wiring layer with a photosensitive insulating material, and the surface of this insulating material is roughened by irradiating with light so as to remove only the portion that becomes a conduction hole and developing, There is a method of using a photosensitive material between the layers of the wiring layers, such as electroless plating on the circuit conductor and the inner wall of the hole to form the conductor. In all of these techniques, further required wiring layers are formed by the same technique to form multiple layers.

【0005】第二の方法は、先に積層しておいて、表面
層と、その表面層と接続を行う層の接続を行う方法であ
って、導通穴を、接続を行う層までにしかあけないこと
が特徴となっている。具体的には、複数の配線層とそれ
を支える絶縁層を交互に積層しておき、表面には銅箔を
残しておき、表面の回路と接続する箇所に、接続する層
に達する深さまで、ドリルで穴をあけ、穴内壁に無電解
めっきを行い、必要な場合には続いて電解めっきを行
い、表面の回路を不要な部分をエッチング除去して形成
する方法や、穴をあけるのに、レーザ光を用い、レーザ
光が接続を必要としない層までに照射されないように、
接続する層の箇所に銅箔を残しておく方法等がある。
The second method is a method of connecting the surface layer and a layer for connecting to the surface layer after being laminated in advance, and the conductive hole is opened only up to the layer to be connected. It is characterized by not having. Specifically, a plurality of wiring layers and insulating layers that support the wiring layers are alternately stacked, and a copper foil is left on the surface, where the surface is connected to the circuit, and the depth to reach the layer to be connected is reached. Drill a hole, electrolessly plate the inner wall of the hole, and if necessary, subsequently perform electrolytic plating to form a circuit on the surface by etching away unnecessary parts, or to make a hole. Use laser light so that the laser light does not reach the layers that do not require connection,
There is a method of leaving a copper foil on the layer to be connected.

【0006】[0006]

【発明が解決しようとする課題】ところで、これらの従
来の方法においては、以下のような課題があった。すな
わち、第一の方法において両面銅張り積層板を使用する
場合、片面に回路を形成するので基板の寸法変化が起り
易く、複数の基板を重ねて積層するときに、各配線層間
の位置精度に十分の注意を払わなければならず、また、
導通穴内壁の接続のために行うめっきによって他方の導
体の厚さが厚くなり、多層化したときに全体の厚さを小
さくすることが困難となる。また、感光性材料を各配線
層間の絶縁層として用いる場合、めっきの密着力を高め
る粗化処理と、貫通穴を設けるための感光性を同時に満
足できる材料が少なく、現存する材料ではめっき皮膜の
密着力は十分ではない。第二の方法においてドリルを用
いる場合、基板の厚さにばらつきがあり、接続する箇所
でドリルの進行を止める位置精度を高くできない。ま
た、レーザを用いる場合、装置が高価である。さらに、
この第二の方法においては、穴をあける箇所において、
表面層と接続層の間には、他の層には配線ができない。
However, these conventional methods have the following problems. That is, when a double-sided copper-clad laminate is used in the first method, since the circuit is formed on one side, the dimensional change of the substrate is likely to occur, and when a plurality of substrates are stacked and laminated, the positional accuracy between each wiring layer is improved. You have to be very careful, and
The thickness of the other conductor is increased by the plating performed for connecting the inner wall of the conduction hole, making it difficult to reduce the total thickness when the conductor is multilayered. In addition, when a photosensitive material is used as an insulating layer between each wiring layer, there are few materials that can simultaneously satisfy the roughening treatment that enhances the adhesion of plating and the photosensitivity for forming a through hole. Adhesion is not enough. When a drill is used in the second method, there is variation in the thickness of the substrate, and it is not possible to increase the positional accuracy of stopping the progress of the drill at the connecting point. Moreover, when a laser is used, the device is expensive. further,
In this second method, at the place where a hole is made,
No wiring can be provided to other layers between the surface layer and the connection layer.

【0007】本発明は、配線密度に優れかつ簡便な多層
プリント配線板の製造法を提供することを目的とする。
An object of the present invention is to provide a method for manufacturing a multilayer printed wiring board which is excellent in wiring density and simple.

【0008】[0008]

【課題を解決するための手段】本発明の多層プリント配
線板の製造法は、以下の工程を含むことを特徴とする。 (a) 片面銅張り積層板の絶縁材料側の表面に接着剤層を
設け、この接着剤層をBステー ジにする工程 (b) 前記基板に穴をあける工程 (c) 前記穴をあけた基板の接着剤層側に、他の基板が接
触するように重ね合わせ、加圧 加熱して積層一体化す
る工程 (d) 前記積層一体化した基板の必要な箇所に、導体回路
を形成する工程
The method for manufacturing a multilayer printed wiring board according to the present invention is characterized by including the following steps. (a) A step of forming an adhesive layer on the surface of the single-sided copper-clad laminate on the side of the insulating material and using this adhesive layer as a B stage (b) A step of making a hole in the substrate (c) A hole having been made Step of stacking on the adhesive layer side of the board so that another board is in contact, pressurizing and heating to laminate and integrate (d) Step of forming a conductor circuit at a necessary portion of the board

【0009】また、この片面銅張り積層板に代えて、プ
リント配線板用銅箔の粗化処理面に接着剤層を設けたも
のを用いることもでき、この場合製造法は以下の工程と
なる。 (a) プリント配線板用銅箔の粗化処理面に接着剤層を設
け、この接着剤層をBステージ にする工程 (b) 前記基板に穴をあける工程 (c) 前記穴をあけた基板の接着剤層側に、他の基板が接
触するように重ね合わせ、加圧 加熱して積層一体化す
る工程 (d) 前記積層一体化した基板の必要な箇所に、導体回路
を形成する工程
Instead of the single-sided copper-clad laminate, a copper foil for printed wiring board having an adhesive layer on the roughened surface can be used. In this case, the manufacturing method is as follows. . (a) A step of providing an adhesive layer on the roughened surface of the copper foil for printed wiring board and using this adhesive layer as a B stage (b) A step of making a hole in the board (c) A board having the hole Step (d) of forming a conductor circuit on a necessary portion of the laminated and integrated substrate by superposing it on the adhesive layer side so that another substrate comes into contact therewith, and applying pressure and heating.

【0010】このような技術を用いて、多層化するため
には、上記工程に続いて、以下の工程を設けることによ
り実現できる。 (e) 他の片面銅張り積層板の絶縁材料側の表面に接着剤
層を設け、この接着剤層をBス テージにする工程 (f) 前記他の基板に穴をあける工程 (g) 前記穴をあけた他の基板の接着剤層側に、前記工程
(d)で作成した基板が接触するように重ね合わせ、加圧
加熱して積層一体化する工程 (h) 必要に応じて、前記工程(e)〜(g)を繰返し、多層化
する工程 あるいは、 (e) 他のプリント配線板用銅箔の粗化処理面に接着剤層
を設け、この接着剤層をBステ ージにする工程 (f) 前記他の基板に穴をあける工程 (g) 前記穴をあけた他の基板の接着剤層側に、前記工程
(d)で作成した基板が接触するように重ね合わせ、加圧
加熱して積層一体化する工程 (h) 必要に応じて、前記工程(e)〜(g)を繰返し、多層化
する工程
In order to form a multilayer using such a technique, the following steps may be provided after the above steps. (e) A step of providing an adhesive layer on the surface of the other one-sided copper-clad laminate on the side of the insulating material and using this adhesive layer as a B stage (f) A step of making a hole in the other substrate (g) On the adhesive layer side of the other board with holes,
(d) step of superimposing so that the substrates are in contact with each other, step of heating under pressure to integrally integrate the layers (h) step of repeating the steps (e) to (g) to make a multilayer , (E) Providing an adhesive layer on the roughened surface of another copper foil for printed wiring board and making this adhesive layer a B stage (f) Making a hole in the other substrate (g) ) On the adhesive layer side of the other substrate in which the hole is formed, the step
Step of stacking so that the substrates prepared in (d) are in contact with each other, pressurizing and heating to laminate and integrate (h) Steps (e) to (g) are repeated to form multiple layers, if necessary.

【0011】本発明に用いる片面銅張り積層板は、その
片面に銅箔を貼り合わせた絶縁材料、例えば、ガラス布
−エポキシ樹脂を用いた片面銅張り積層板や、フレキシ
ブルなポリイミドフィルムを用いた片面銅張りフレキシ
ブルシート等が使用できる。この絶縁材料には、紙、不
織布あるいはガラス布等の強化繊維に樹脂を含浸した有
機材料や、強化しない樹脂製品、フレキシブルなフィル
ム、あるいは、このような材料とセラミックス等の複合
化された材料が使用できる。樹脂としては、フェノール
樹脂、エポキシ樹脂、ポリイミド樹脂、ポリエステル樹
脂、ふっ素含有樹脂等が使用できる。さらにまた、これ
らの絶縁材料中に無電解めっき用触媒を分散させたもの
も使用できる。
The single-sided copper-clad laminate used in the present invention uses an insulating material having a copper foil bonded to one side thereof, for example, a single-sided copper-clad laminate using glass cloth-epoxy resin or a flexible polyimide film. A flexible sheet with copper on one side can be used. The insulating material may be an organic material obtained by impregnating a reinforcing fiber such as paper, non-woven fabric or glass cloth with a resin, a non-reinforced resin product, a flexible film, or a composite material of such a material and ceramics. Can be used. As the resin, a phenol resin, an epoxy resin, a polyimide resin, a polyester resin, a fluorine-containing resin or the like can be used. Furthermore, those in which a catalyst for electroless plating is dispersed in these insulating materials can also be used.

【0012】接着剤としては、エポキシ樹脂系接着剤、
アクリル変性樹脂系、あるいはポリイミド樹脂系接着剤
等が使用でき、これらを、ロールコーティング、ディッ
プコーティングあるいはカーテンコーティング法等によ
って塗布することができる。また、さらにこれらの接着
剤をフィルム化したものも使用でき、G604(日立化
成工業株式会社製、商品名)等のエポキシ接着フィル
ム、パイララックス(デュポン社製、商品名)等のアク
リル変性樹脂フィルム、あるいはAS−2210(日立
化成工業株式会社製、商品名)等のポリイミド接着フィ
ルム等が使用できる。これらの接着フィルムを、片面銅
張り積層板や銅箔に貼り合わせるのであるが、貼り合わ
せた後には、Bステージの状態となっている必要があ
る。本発明でいうBステージとは、片面銅張り積層板や
銅箔に貼り合わせた状態で、40℃以下では粘着性をも
たず、その後の多層化接着によって、接着強度が0.8
kgf/cm2以上を与えることができる半硬化状態をいう。
このようなBステージ状態にする方法は、通常の樹脂の
ように、完全には硬化しない温度と時間、加熱して行
う。この程度は、実験的に求めるのが通常である。ま
た、加圧加熱して積層一体化する工程において、このB
ステージの接着剤層の流動量は、基板の表面方向に対し
て200mm未満であることが好ましい。この流動量が大
きいと、加圧加熱したときに、他の配線板の配線導体上
に拡がり、めっきによって接続される面積が小さくな
り、接続信頼性を低下させる。
As the adhesive, an epoxy resin adhesive,
An acrylic modified resin-based or polyimide resin-based adhesive or the like can be used, and these can be applied by roll coating, dip coating, curtain coating or the like. Further, a film obtained by further forming these adhesives can be used, and an epoxy adhesive film such as G604 (manufactured by Hitachi Chemical Co., Ltd., trade name), an acrylic modified resin film such as Piralux (manufactured by DuPont, trade name) Alternatively, a polyimide adhesive film such as AS-2210 (trade name, manufactured by Hitachi Chemical Co., Ltd.) can be used. These adhesive films are bonded to a single-sided copper-clad laminate or copper foil, but after bonding, they need to be in the B stage state. The B stage referred to in the present invention is a state in which it is attached to a single-sided copper-clad laminate or copper foil, has no tackiness at 40 ° C. or lower, and has an adhesive strength of 0.8 due to subsequent multi-layer adhesion.
It means a semi-cured state that can give more than kgf / cm 2 .
Such a B-stage state method is carried out by heating at a temperature and for a time at which the resin does not completely cure like ordinary resins. This degree is usually obtained experimentally. In addition, in the step of heating and pressurizing to integrate the layers, the B
The flow rate of the adhesive layer of the stage is preferably less than 200 mm with respect to the surface direction of the substrate. When this flow amount is large, when it is pressurized and heated, it spreads over the wiring conductor of another wiring board, the area to be connected by plating becomes small, and the connection reliability deteriorates.

【0013】[0013]

【作用】本発明の方法は、接着剤をBステージの状態で
用いるので、穴をあける等の加工が容易であり、また、
続く加圧加熱によって、他の配線板との接着も可能とな
る。
In the method of the present invention, since the adhesive is used in the B stage, it is easy to make a hole or the like.
Subsequent pressurization and heating also enables adhesion to other wiring boards.

【0014】[0014]

【実施例】実施例1 図1(a)に示すような片面銅張り積層板であるMCL−
E−67(日立化成工業株式会社製、商品名)の絶縁材
料側の表面に接着剤フィルムであるG604(日立化成
工業株式会社製、商品名)を貼り、圧力10kgf/cm2
150℃で7分間加熱して、Bステージにする(図1
(b)に示す。)。続いて、図1(c)に示すように、前記基
板に、数値制御されたドリルマシンにより、接続箇所に
穴をあける。このときに、最も小さい穴径は、0.25
mmであった。続いて、前記穴をあけた基板の接着剤層側
に、図1(d)に示すような他の基板が接触するように重
ね合わせ、加圧加熱して積層一体化する(図1(e)に示
す。)。このときの積層条件は、圧力40kgf/cm2、温度17
0℃で45分間であった。続いて、この積層した板全体を
貫通する穴をあけ(図1(f)に示す。)、全面に銅めっき
を行う(図1(g)に示す。)。続いて、エッチングレジス
トを形成し、不要な銅をエッチング除去して、図1(h)
に示すように、前記積層一体化した基板の必要な箇所
に、導体回路を形成する。
EXAMPLES Example 1 MCL- which is a single-sided copper-clad laminate as shown in FIG.
Adhesive film G604 (manufactured by Hitachi Chemical Co., Ltd.) on the surface of the insulating material side of E-67 (manufactured by Hitachi Chemical Co., Ltd.), pressure 10 kgf / cm 2 ,
Heat at 150 ° C for 7 minutes to reach B stage (Fig. 1
Shown in (b). ). Subsequently, as shown in FIG. 1 (c), a hole is drilled in the substrate at a connection point by a numerically controlled drill machine. At this time, the smallest hole diameter is 0.25
It was mm. Subsequently, the substrate having the holes is superposed on the adhesive layer side so that another substrate as shown in FIG. 1 (d) is brought into contact with the substrate, and is pressurized and heated to be laminated and integrated (see FIG. 1 (e ).). The lamination conditions at this time are: pressure 40 kgf / cm 2 , temperature 17
It was 45 minutes at 0 ° C. Subsequently, a hole is formed through the entire laminated plate (shown in FIG. 1 (f)), and copper plating is performed on the entire surface (shown in FIG. 1 (g)). Then, an etching resist is formed and unnecessary copper is removed by etching.
As shown in FIG. 3, a conductor circuit is formed at a necessary portion of the laminated and integrated substrate.

【0015】実施例2 図2(a)に示す厚さ18μmのプリント配線板用銅箔の粗化
処理面に、接着剤フィルムG604(日立化成工業株式
会社製、商品名)層を設け、この接着剤フィルムを、圧
力10kgf/cm2、150℃で7分間加熱してBステージ
にする(図2(b)に示す。)続いて、図2(c)に示すよう
に、前記基板に、数値制御されたドリルマシンにより、
接続箇所に穴をあける。このときに、最も小さい穴径
は、0.25mmであった。続いて、図2(d)に示すよう
な他の基板を、前記穴をあけた基板の接着剤層側に接触
するように重ね合わせ、加圧加熱して積層一体化する
(図2(e)に示す。)。このときの積層条件は、40kgf/cm
2、温度170℃で45分間行った。続いて、この積層した板
全体を貫通する穴をあけ(図2(f)に示す。)、全面に銅
めっきを行う(図2(g)に示す。)。続いて、エッチング
レジストを形成し、不要な銅をエッチング除去して、図
2(h)に示すように、前記積層一体化した基板の必要な
箇所に、導体回路を形成する。
Example 2 An adhesive film G604 (trade name, manufactured by Hitachi Chemical Co., Ltd.) was provided on the roughened surface of a copper foil for printed wiring board having a thickness of 18 μm shown in FIG. 2 (a). The adhesive film is heated at a pressure of 10 kgf / cm 2 and 150 ° C. for 7 minutes to be in the B stage (shown in FIG. 2 (b)). Then, as shown in FIG. With a numerically controlled drill machine,
Make a hole at the connection point. At this time, the smallest hole diameter was 0.25 mm. Subsequently, another substrate as shown in FIG. 2 (d) is superposed so as to be in contact with the adhesive layer side of the substrate having the holes, and is heated under pressure to be laminated and integrated (see FIG. 2 (e). ).). The stacking conditions at this time are 40 kgf / cm
2. The temperature was 170 ° C. for 45 minutes. Then, a hole is formed through the laminated plates (shown in FIG. 2 (f)), and copper plating is performed on the entire surface (shown in FIG. 2 (g)). Subsequently, an etching resist is formed, and unnecessary copper is removed by etching to form a conductor circuit on a necessary portion of the laminated and integrated substrate as shown in FIG. 2 (h).

【0016】実施例3 図3(a)に示すような片面銅張り積層板であるMCL−
E−67(日立化成工業株式会社製、商品名)の絶縁材
料側の表面に接着剤フィルムであるG604(日立化成
工業株式会社製、商品名)を貼り、圧力10kgf/cm2
150℃で7分間加熱して、Bステージにする(図3
(b)に示す。)。続いて、図3(c)に示すように、前記基
板に、数値制御されたドリルマシンにより、接続箇所に
穴をあける。このときに、最も小さい穴径は、0.25
mmであった。続いて、前記穴をあけた基板の接着剤層側
に、図3(d)に示すような他の基板が接触するように重
ね合わせ、加圧加熱して積層一体化する(図3(e)に示
す。)。このときの積層条件は、圧力40kgf/cm2、温度17
0℃で45分間であった。続いて、この積層した板の表面
に厚さ15μmの銅めっきを行う(図3(f)に示す。)。続い
て、エッチングレジストを形成し、不要の銅をエッチン
グ除去して、回路導体を形成する(図3(g)に示す。)。
このようにして作成した配線板を、別に図3(a)〜(c)と
同じ工程で作成した片面基板の接着剤層側に接触するよ
うに重ね合わせ、加圧加熱して積層一体化する(図3(h)
に示す。)。このときの積層条件は、圧力40kgf/cm2、温
度170℃で45分間であった。このような多層化を繰返
し、最終の積層化の後に、エッチングレジストを形成
し、不要な銅をエッチング除去して、図3(i)に示すよ
うに、前記積層一体化した基板の必要な箇所に、導体回
路を形成する。
Example 3 MCL- which is a single-sided copper-clad laminate as shown in FIG. 3 (a)
Adhesive film G604 (manufactured by Hitachi Chemical Co., Ltd.) on the surface of the insulating material side of E-67 (manufactured by Hitachi Chemical Co., Ltd.), pressure 10 kgf / cm 2 ,
Heat at 150 ° C for 7 minutes to reach B stage (Fig. 3
Shown in (b). ). Subsequently, as shown in FIG. 3 (c), a hole is drilled in the connection point on the substrate by a numerically controlled drill machine. At this time, the smallest hole diameter is 0.25
It was mm. Subsequently, the substrate having the holes is superposed on the adhesive layer side so that another substrate as shown in FIG. 3 (d) is brought into contact with the substrate, and is pressurized and heated to be laminated and integrated (see FIG. ).). The lamination conditions at this time are: pressure 40 kgf / cm 2 , temperature 17
It was 45 minutes at 0 ° C. Subsequently, the surface of this laminated plate is plated with copper having a thickness of 15 μm (shown in FIG. 3 (f)). Subsequently, an etching resist is formed, and unnecessary copper is removed by etching to form a circuit conductor (shown in FIG. 3G).
The wiring board prepared in this manner is superposed so as to come into contact with the adhesive layer side of the single-sided board prepared separately in the same process as in FIGS. (Fig. 3 (h)
Shown in. ). The lamination conditions at this time were a pressure of 40 kgf / cm 2 and a temperature of 170 ° C. for 45 minutes. Such multilayering is repeated, and after the final lamination, an etching resist is formed and unnecessary copper is removed by etching, and as shown in FIG. 3 (i), necessary portions of the laminated and integrated substrate are obtained. Then, a conductor circuit is formed.

【0017】実施例4 図4(a)に示す厚さ18μmのプリント配線板用銅箔の粗化
処理面に、接着剤フィルムG604(日立化成工業株式
会社製、商品名)層を設け、この接着剤フィルムを、圧
力10kgf/cm2、150℃で7分間加熱してBステージ
にする(図4(b)に示す。)続いて、図4(c)に示すよう
に、前記基板に、数値制御されたドリルマシンにより、
接続箇所に穴をあける。このときに、最も小さい穴径
は、0.25mmであった。続いて、図4(d)に示すよう
な他の基板を、前記穴をあけた基板の接着剤層側に接触
するように重ね合わせ、加圧加熱して積層一体化する
(図4(e)に示す。)。このときの積層条件は、40kgf/cm
2、温度170℃で45分間行った。続いて、この積層した板
の表面に厚さ15μmの銅めっきを行う(図3(f)に示
す。)。続いて、エッチングレジストを形成し、不要の
銅をエッチング除去して、回路導体を形成する(図4
(g)に示す。)。このようにして作成した配線板を、別に
図4(a)〜(c)と同じ工程で作成した基板の接着剤層側に
接触するように重ね合わせ、加圧加熱して積層一体化す
る(図4(h)に示す。)。このときの積層条件は、圧力40k
gf/cm2、温度170℃で45分間であった。このような多層
化を繰返し、最終の積層化の後に、エッチングレジスト
を形成し、不要な銅をエッチング除去して、図4(i)に
示すように、前記積層一体化した基板の必要な箇所に、
導体回路を形成する。
Example 4 An adhesive film G604 (trade name, manufactured by Hitachi Chemical Co., Ltd.) was provided on the roughened surface of a copper foil for printed wiring board having a thickness of 18 μm shown in FIG. 4 (a). The adhesive film is heated at a pressure of 10 kgf / cm 2 and 150 ° C. for 7 minutes to be in the B stage (shown in FIG. 4 (b)). Then, as shown in FIG. With a numerically controlled drill machine,
Make a hole at the connection point. At this time, the smallest hole diameter was 0.25 mm. Subsequently, another substrate as shown in FIG. 4 (d) is superposed so as to come into contact with the adhesive layer side of the substrate having the holes, and is heated under pressure to be laminated and integrated (see FIG. 4 (e)). ).). The stacking conditions at this time are 40 kgf / cm
2. The temperature was 170 ° C. for 45 minutes. Subsequently, the surface of this laminated plate is plated with copper having a thickness of 15 μm (shown in FIG. 3 (f)). Subsequently, an etching resist is formed and unnecessary copper is removed by etching to form a circuit conductor (FIG. 4).
Shown in (g). ). The wiring board prepared in this manner is superposed so as to come into contact with the adhesive layer side of the substrate prepared separately in the same steps as in FIGS. This is shown in Fig. 4 (h). The stacking conditions at this time are pressure 40k
The temperature was 170 ° C. for 45 minutes at gf / cm 2 . Such multilayering is repeated, and after the final lamination, an etching resist is formed and unnecessary copper is removed by etching, and as shown in FIG. 4 (i), necessary portions of the laminated and integrated substrate are obtained. To
Form a conductor circuit.

【0018】[0018]

【発明の効果】以上に説明したように、本発明によっ
て、配線密度に優れかつ簡便な多層プリント配線板の製
造法を提供することができる。
As described above, according to the present invention, it is possible to provide a method for manufacturing a multilayer printed wiring board which is excellent in wiring density and simple.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)〜(h)は、本発明の一実施例の各工程を説明
するための断面図である。
1A to 1H are sectional views for explaining each step of an embodiment of the present invention.

【図2】(a)〜(h)は、本発明の他の実施例の各工程を説
明するための断面図である。
2A to 2H are cross-sectional views for explaining each step of another embodiment of the present invention.

【図3】(a)〜(i)は、本発明の他の実施例の各工程を説
明するための断面図である。
3A to 3I are cross-sectional views for explaining each step of another embodiment of the present invention.

【図4】(a)〜(i)は、本発明の他の実施例の各工程を説
明するための断面図である。
4 (a) to 4 (i) are cross-sectional views for explaining each step of another embodiment of the present invention.

【符号の簡単な説明】1.片面銅張り積層板
2.接着剤 3.非貫通穴となる穴 4.配線導体 5.非貫通穴 6.貫通穴 7.銅めっき 8.銅めっきによ
る配線導体 11.銅箔
[Brief description of symbols] 1. Single-sided copper clad laminate
2. Adhesive 3. Holes that are non-through holes 4. Wiring conductor 5. Non-through hole 6. Through hole 7. Copper plating 8. Wiring conductor by copper plating 11. Copper foil

───────────────────────────────────────────────────── フロントページの続き (72)発明者 木田 明成 茨城県下館市大字小川1500番地 日立化成 工業株式会社下館研究所内 (72)発明者 畠山 修一 茨城県下館市大字小川1500番地 日立化成 工業株式会社下館研究所内 (72)発明者 浦崎 直之 茨城県下館市大字小川1500番地 日立化成 工業株式会社下館研究所内 (72)発明者 大塚 和久 茨城県下館市大字小川1500番地 日立化成 工業株式会社下館研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akinari Kida 1500 Ogawa, Shimodate, Ibaraki Pref., Shimodate Research Laboratory, Hitachi Chemical Co., Ltd. (72) Shuichi Hatakeyama 1500 Ogawa, Shimodate, Ibaraki Hitachi Chemical Co., Ltd. Shimodate Research Center (72) Inventor Naoyuki Urasaki 1500 Ogawa, Shimodate, Ibaraki Hitachi Chemical Co., Ltd. Shimodate Research Center (72) Inventor Kazuhisa Otsuka 1500 Ogawa, Shimodate, Ibaraki Hitachi Chemical Co., Ltd. Shimodate Research Center

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】以下の工程を含むことを特徴とする多層プ
リント配線板の製造法。 (a) 片面銅張り積層板の絶縁材料側の表面に接着剤層を
設け、この接着剤層をBステー ジにする工程 (b) 前記基板に穴をあける工程 (c) 前記穴をあけた基板の接着剤層側に、他の基板が接
触するように重ね合わせ、加圧 加熱して積層一体化す
る工程 (d) 前記積層一体化した基板の必要な箇所に、導体回路
を形成する工程
1. A method for manufacturing a multilayer printed wiring board, comprising the following steps. (a) A step of forming an adhesive layer on the surface of the single-sided copper-clad laminate on the side of the insulating material and using this adhesive layer as a B stage (b) A step of making a hole in the substrate (c) A hole having been made Step of stacking on the adhesive layer side of the board so that another board is in contact, pressurizing and heating to laminate and integrate (d) Step of forming a conductor circuit at a necessary portion of the board
【請求項2】以下の工程を含むことを特徴とする多層プ
リント配線板の製造法。 (a) 片面銅張り積層板の絶縁材料側の表面に接着剤層を
設け、この接着剤層をBステー ジにする工程 (b) 前記基板に穴をあける工程 (c) 前記穴をあけた基板の接着剤層側に、他の基板が接
触するように重ね合わせ、加圧 加熱して積層一体化す
る工程 (d) 前記積層一体化した基板の必要な箇所に、導体回路
を形成する工程 (e) 他の片面銅張り積層板の絶縁材料側の表面に接着剤
層を設け、この接着剤層をBス テージにする工程 (f) 前記他の基板に穴をあける工程 (g) 前記穴をあけた他の基板の接着剤層側に、前記工程
(d)で作成した基板が接触するように重ね合わせ、加圧
加熱して積層一体化する工程 (h) 必要に応じて、前記工程(e)〜(g)を繰返し、多層化
する工程
2. A method for manufacturing a multilayer printed wiring board, comprising the following steps. (a) A step of forming an adhesive layer on the surface of the single-sided copper-clad laminate on the side of the insulating material and using this adhesive layer as a B stage (b) A step of making a hole in the substrate (c) A hole having been made Step of stacking on the adhesive layer side of the board so that another board is in contact, pressurizing and heating to laminate and integrate (d) Step of forming a conductor circuit at a necessary portion of the board (e) A step of providing an adhesive layer on the surface of the other one-sided copper-clad laminate on the side of the insulating material and using this adhesive layer as a B stage (f) A step of making a hole in the other substrate (g) On the adhesive layer side of the other board with holes,
Step of stacking so that the substrates prepared in (d) are in contact with each other, pressurizing and heating to laminate and integrate (h) Steps (e) to (g) are repeated to form multiple layers, if necessary.
【請求項3】以下の工程を含むことを特徴とする多層プ
リント配線板の製造法。 (a) プリント配線板用銅箔の粗化処理面に接着剤層を設
け、この接着剤層をBステージ にする工程 (b) 前記基板に穴をあける工程 (c) 前記穴をあけた基板の接着剤層側に、他の基板が接
触するように重ね合わせ、加圧 加熱して積層一体化す
る工程 (d) 前記積層一体化した基板の必要な箇所に、導体回路
を形成する工程
3. A method for manufacturing a multilayer printed wiring board, comprising the following steps. (a) A step of providing an adhesive layer on the roughened surface of the copper foil for printed wiring board and using this adhesive layer as a B stage (b) A step of making a hole in the board (c) A board having the hole Step (d) of forming a conductor circuit on a necessary portion of the laminated and integrated substrate by superposing it on the adhesive layer side so that another substrate comes into contact therewith, and applying pressure and heating.
【請求項4】以下の工程を含むことを特徴とする多層プ
リント配線板の製造法。 (a) プリント配線板用銅箔の粗化処理面に接着剤層を設
け、この接着剤層をBステージ にする工程 (b) 前記基板に穴をあける工程 (c) 前記穴をあけた基板の接着剤層側に、他の基板が接
触するように重ね合わせ、加圧 加熱して積層一体化す
る工程 (d) 前記積層一体化した基板の必要な箇所に、導体回路
を形成する工程 (e) 他のプリント配線板用銅箔の粗化処理面に接着剤層
を設け、この接着剤層をBステ ージにする工程 (f) 前記他の基板に穴をあける工程 (g) 前記穴をあけた他の基板の接着剤層側に、前記工程
(d)で作成した基板が接触するように重ね合わせ、加圧
加熱して積層一体化する工程 (h) 必要に応じて、前記工程(e)〜(g)を繰返し、多層化
する工程
4. A method of manufacturing a multilayer printed wiring board, which comprises the following steps. (a) A step of providing an adhesive layer on the roughened surface of the copper foil for printed wiring board and using this adhesive layer as a B stage (b) A step of making a hole in the board (c) A board having the hole (D) a step of forming a conductor circuit on a necessary portion of the laminated and integrated substrate by superposing on the adhesive layer side of the substrate so that the other substrate is in contact, pressurizing and heating to laminate and integrate. e) a step of providing an adhesive layer on the roughened surface of another copper foil for printed wiring board and making this adhesive layer a B stage (f) a step of making a hole in the other substrate (g) On the adhesive layer side of the other board with holes,
Step of stacking so that the substrates prepared in (d) are in contact with each other, pressurizing and heating to laminate and integrate (h) Steps (e) to (g) are repeated to form multiple layers, if necessary.
【請求項5】加圧加熱して積層一体化する工程におい
て、Bステージの接着剤層の流動量が基板の表面方向に
対して200mm未満である接着剤を用いることを特徴と
する請求項1〜4のうちいずれかに記載の多層プリント
配線板の製造法。
5. An adhesive having a flow rate of the adhesive layer of B stage of less than 200 mm with respect to the surface direction of the substrate is used in the step of heating and pressing to laminate and integrate. 5. The method for manufacturing a multilayer printed wiring board according to any one of 4 to 4.
JP34308392A 1992-12-24 1992-12-24 Manufacture of multilayer printed-wiring board Pending JPH06196862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34308392A JPH06196862A (en) 1992-12-24 1992-12-24 Manufacture of multilayer printed-wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34308392A JPH06196862A (en) 1992-12-24 1992-12-24 Manufacture of multilayer printed-wiring board

Publications (1)

Publication Number Publication Date
JPH06196862A true JPH06196862A (en) 1994-07-15

Family

ID=18358815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34308392A Pending JPH06196862A (en) 1992-12-24 1992-12-24 Manufacture of multilayer printed-wiring board

Country Status (1)

Country Link
JP (1) JPH06196862A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5965245A (en) * 1995-09-13 1999-10-12 Hitachi Chemical Company, Ltd. Prepreg for printed circuit board
US7163600B2 (en) 2001-11-26 2007-01-16 Mitsui Mining & Smelting Co., Ltd. Method for preparing copper foil with insulating layer and copper foil with insulating layer prepared by the method, and printed wiring board using the copper foil with insulating layer
WO2010026895A1 (en) * 2008-09-04 2010-03-11 Fcm株式会社 Method for manufacturing multilayer laminated circuit board
US7700185B2 (en) 2003-05-19 2010-04-20 Hitachi Chemical Company, Ltd. Insulation material, film, circuit board and method of producing them

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5965245A (en) * 1995-09-13 1999-10-12 Hitachi Chemical Company, Ltd. Prepreg for printed circuit board
US7163600B2 (en) 2001-11-26 2007-01-16 Mitsui Mining & Smelting Co., Ltd. Method for preparing copper foil with insulating layer and copper foil with insulating layer prepared by the method, and printed wiring board using the copper foil with insulating layer
US7927453B2 (en) 2001-11-26 2011-04-19 Mitsui Mining & Smelting Co., Ltd. Method of manufacturing copper foil with insulating layer, copper foil with insulating layer obtained with the same method, and printed circuit board using the same copper foil with insulating layer
US7700185B2 (en) 2003-05-19 2010-04-20 Hitachi Chemical Company, Ltd. Insulation material, film, circuit board and method of producing them
WO2010026895A1 (en) * 2008-09-04 2010-03-11 Fcm株式会社 Method for manufacturing multilayer laminated circuit board
JP2010062372A (en) * 2008-09-04 2010-03-18 Fcm Kk Method of manufacturing multilayer laminated circuit board

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