JPH06188531A - Low expansion metal foil and laminate for printed circuit - Google Patents

Low expansion metal foil and laminate for printed circuit

Info

Publication number
JPH06188531A
JPH06188531A JP35520492A JP35520492A JPH06188531A JP H06188531 A JPH06188531 A JP H06188531A JP 35520492 A JP35520492 A JP 35520492A JP 35520492 A JP35520492 A JP 35520492A JP H06188531 A JPH06188531 A JP H06188531A
Authority
JP
Japan
Prior art keywords
low expansion
metal foil
laminate
coefficient
expansion coefficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP35520492A
Other languages
Japanese (ja)
Inventor
Masaaki Ueki
正暁 上木
Tokuo Kurokawa
徳雄 黒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Chemical Corp filed Critical Toshiba Chemical Corp
Priority to JP35520492A priority Critical patent/JPH06188531A/en
Publication of JPH06188531A publication Critical patent/JPH06188531A/en
Pending legal-status Critical Current

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  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

PURPOSE:To provide a laminate for printed board having an insulation layer applied with a metal foil to at least one side thereof in which coefficient of thermal expansion is lowered by employing a low expansion metal foil obtained by applying a selica based layer having low expansion coefficient to the roughened surface of a metal foil. CONSTITUTION:Dissolution silica and titanium oxide are admixed with water glass and alcohol and added with a small quantity of epoxy resin, as a binder, to produce a solution which is applied to the roughened surface of an electrolytic copper foil and eventually dried to provide an inorganic layer having low expansion coefficient thus producing a copper foil having low expansion coefficient. On the other hand, a glass cloth is impregnated with a heat resistant epoxy resin varnish and dried to produce a semihardened prepreg. Copper foils having low expansion coefficient are then applied to the opposite sides each of three prepregs which are then sandwiched by stainless steel plates and hot pressed integrally thus producing a low expansion laminate for printed circuit. The layer having low expansion coefficient restraings expansion of the laminate thus lowerings overall coefficient of thermal expansion of the circuit board in the surface direction.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、CLCC、TSOP等
の熱膨張率の小さいパッケージ形態の半導体装置の実装
に適し、スルーホール信頼性に優れたプリント回路用積
層板およびそれに用いる低膨張金属箔に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is suitable for mounting a semiconductor device in a package form having a small coefficient of thermal expansion such as CLCC and TSOP, and has excellent through-hole reliability, and a laminated board for a printed circuit and a low expansion metal foil used for the same. Regarding

【0002】[0002]

【従来の技術】近年の技術革新は目覚ましく、電子機器
のダウンサイジングは止まるところを知らない。それ
は、実装の高密度化、半導体の高集積化及び半導体パッ
ケージの小形化の技術によるものであり、半導体チップ
サイズに比してパッケージサイズの小さいCLCC、T
SOP等の半導体装置が多用され始めている。ところ
が、従来、産業用機器のプリント回路用積層板として用
いられてきた銅張積層板、すなわち、ガラスクロス等の
基材に、熱硬化性樹脂を含浸・乾燥したプリプレグと銅
箔とを加熱加圧一体に成形してなる銅張積層板は、必ず
しもCLCC、TSOP等の半導体装置の実装に適した
ものとは言えない。
2. Description of the Related Art Recent technological innovation has been remarkable, and downsizing of electronic devices has never stopped. It is based on the technology of high-density packaging, high integration of semiconductor, and miniaturization of semiconductor package. The package size is smaller than the semiconductor chip size.
Semiconductor devices such as SOPs are beginning to be widely used. However, a copper-clad laminate that has been used as a laminate for printed circuits in industrial equipment, that is, a substrate such as glass cloth is heated and impregnated with a thermosetting resin and dried to form a copper foil. The copper-clad laminate formed by press-fitting is not necessarily suitable for mounting semiconductor devices such as CLCC and TSOP.

【0003】CLCCは、パッケージ材質がセラミック
であって、実装一般に用いられるガラス基材エポキシ積
層板とは熱膨張率が大きく異なるうえに、パッケージに
熱応力を吸収するリードを持たない。また、TSOP
は、パッケージ材質がエポキシ封止材であっても、シリ
コンチップに対してのエポキシ封止材の量が少なく、全
体の熱膨張率は従来のパッケージに比べて非常に小さ
く、またリードも大変短い。そのため両者ともガラス基
材エポキシ積層板上に実装した場合、熱膨張率不整合に
よる半田クラック不良が多発する欠点がある。
The CLCC is made of ceramic as a package material, has a coefficient of thermal expansion greatly different from that of a glass-based epoxy laminate generally used for mounting, and has no lead for absorbing thermal stress in the package. Also, TSOP
Even if the package material is epoxy encapsulant, the amount of epoxy encapsulant on the silicon chip is small, the overall coefficient of thermal expansion is much smaller than the conventional package, and the leads are also very short. . Therefore, when both are mounted on a glass-based epoxy laminate, there is a drawback that solder crack defects frequently occur due to mismatch of thermal expansion coefficients.

【0004】そこで面方向(XY方向)の熱膨張率の小
さい積層板として、アラミド基材エポキシ積層板が使用
されることがある。しかし、アラミド布積層板は機械加
工が非常に難しいうえに高価で実用に適さない。またア
ラミドペーパー布積層板は面方向の熱膨張率が 6〜8ppm
/Kと非常に低く抑えられている反面、厚み方向(Z方
向)の熱膨張率が 130〜300ppm/Kと非常に大きく、基
板のスルーホール信頼性に問題があった。
Therefore, an aramid-based epoxy laminate is sometimes used as a laminate having a small coefficient of thermal expansion in the plane direction (XY direction). However, the aramid cloth laminate is very difficult to machine, expensive and not suitable for practical use. Also, the thermal expansion coefficient of the aramid paper cloth laminate is 6 to 8 ppm in the surface direction.
However, the coefficient of thermal expansion in the thickness direction (Z direction) is extremely large at 130 to 300 ppm / K, and there is a problem in the through hole reliability of the substrate.

【0005】また、セラミックス複合基板と呼ばれるも
のがあり、これらはガラス・エポキシ積層板の一部にセ
ラミックス層を設けたもの、セラミックス基板の表面に
ガラス・エポキシプリプレグを配したものなどが知られ
ている。その特性は非常に優れたものであるが、前者は
セラミックスを溶射法で基板或いは銅箔の表面に吹付け
加工して製造されるため、溶射工法上の問題から生産性
に限度がありまたその設備は非常に高価なものである。
後者は、セラミックス基板そのものに加工したものであ
るためサイズが限定され、また量産が難しく低コストで
の供給は困難である。
There are also known ceramic composite substrates, which are known such as those in which a ceramic layer is provided on a part of a glass / epoxy laminate, and those in which a glass / epoxy prepreg is arranged on the surface of a ceramic substrate. There is. Although its characteristics are extremely excellent, the former is manufactured by spraying ceramics onto the surface of the substrate or copper foil by a thermal spraying method, so there is a limit to productivity due to problems with the thermal spraying method. The equipment is very expensive.
Since the latter is processed into a ceramic substrate itself, its size is limited, mass production is difficult, and it is difficult to supply it at low cost.

【0006】[0006]

【発明が解決しようとする課題】本発明は、上記の事情
に鑑みてなされたもので、熱膨張率が小さくて、半田ク
ラックの発生がなくスルーホール信頼性にも優れ、低コ
ストのCLCC、TSOP等の半導体装置の実装に最適
な、低膨張金属箔およびプリント回路用積層板を提供し
ようとするものである。
The present invention has been made in view of the above circumstances, and has a low coefficient of thermal expansion, does not cause solder cracks, is excellent in through-hole reliability, and is low-cost CLCC, An object of the present invention is to provide a low expansion metal foil and a laminate for a printed circuit, which are optimum for mounting a semiconductor device such as TSOP.

【0007】[0007]

【課題を解決するための手段】本発明者らは、上記の目
的を達成しようと鋭意研究を重ねた結果、金属箔にシリ
カ系低膨張率層を設けたことによって、上記の目的を達
成できることを見いだし、本発明を完成したものであ
る。
Means for Solving the Problems As a result of intensive studies to achieve the above object, the inventors of the present invention can achieve the above object by providing a silica-based low expansion coefficient layer on a metal foil. The present invention has been completed and the present invention has been completed.

【0008】即ち、本発明は、絶縁層の少なくとも片面
に金属箔を設けたプリント回路用積層板において、前記
金属箔として、少なくとも片面を粗面化した金属箔の粗
面に、シリカ系低膨張率層を設けた低膨張金属箔を用い
たことを特徴とするプリント回路用積層板およびそれに
用いる低膨張率金属箔である。
That is, according to the present invention, in a laminated board for a printed circuit in which a metal foil is provided on at least one surface of an insulating layer, the silica foil has a low expansion coefficient on the rough surface of the metal foil having at least one surface roughened as the metal foil. A low-expansion metal foil having a low-expansion metal foil and a low-expansion metal foil used for the same are provided.

【0009】以下、本発明を詳細に説明する。The present invention will be described in detail below.

【0010】本発明のプリント回路用積層板の絶縁層と
しては、基材に熱硬化性樹脂を含浸・乾燥させたプリプ
レグを絶縁層とする。ここで用いる基材としては、ガラ
スクロス、ガラスペーパー等、熱硬化性樹脂積層板に用
いられるものは全て使用することができる。これらの基
材の他に合成繊維(アラミド、フッ素樹脂、ポリイミド
樹脂)等からなる織布や不織布、金属繊維からなる織布
やマット類等が挙げられ、これらは単独または混合して
使用することができる。
As the insulating layer of the laminate for a printed circuit of the present invention, a prepreg obtained by impregnating a base material with a thermosetting resin and drying is used as the insulating layer. As the substrate used here, all those used for the thermosetting resin laminated plate such as glass cloth and glass paper can be used. In addition to these base materials, woven and non-woven fabrics made of synthetic fibers (aramid, fluororesin, polyimide resin) and the like, woven fabrics and mats made of metal fibers, and the like may be used alone or in combination. You can

【0011】本発明で基材に含浸させるに用いる熱硬化
性樹脂は、溶媒を加えて基材に含浸しやすいように粘度
調整を行ったものを使用する。具体的な熱硬化性樹脂と
してはエポキシ樹脂、ポリイミド樹脂およびこれらの変
性樹脂等が好ましく使用されるが、特にこれらに限定さ
れるものではない。熱硬化性樹脂に溶媒を加えてワニス
とするが、ワニスには本発明の目的に反しない範囲にお
いて、高熱伝導性あるいは低誘電率の充填剤を配合する
ことができる。高熱伝導性の充填剤としては、水酸化ア
ルミニウム、シリカ等が挙げられ、また低誘電率の充填
剤としては、フッ素樹脂粉末、中空ガラスビーズ等が挙
げられる。また、必要に応じてタルク、炭酸カルシウム
等を適宜配合することができる。こうして得たワニス
を、上述した基材に含浸・乾燥してプリプレグをつく
り、このプリプレグを絶縁層として使用しプリント回路
用積層板を製造することができる。
The thermosetting resin used for impregnating the substrate in the present invention is a thermosetting resin whose viscosity is adjusted so that the substrate is easily impregnated. As specific thermosetting resins, epoxy resins, polyimide resins and modified resins thereof are preferably used, but the thermosetting resins are not particularly limited thereto. A varnish is prepared by adding a solvent to the thermosetting resin, and a varnish can be blended with a filler having a high thermal conductivity or a low dielectric constant as long as the purpose of the present invention is not impaired. Examples of the filler having a high thermal conductivity include aluminum hydroxide and silica, and examples of the filler having a low dielectric constant include fluororesin powder and hollow glass beads. If necessary, talc, calcium carbonate, etc. may be appropriately mixed. The varnish thus obtained is impregnated into the above-mentioned substrate and dried to form a prepreg, and the prepreg can be used as an insulating layer to manufacture a laminated board for a printed circuit.

【0012】本発明の低膨張金属箔は、プリント回路用
に用いられている少なくとも片面を粗面化した金属箔の
粗面に、シリカ系低膨張率層を設けたものを使用する。
ここでの金属箔としては銅箔、アルミニウム箔等が使用
される。低膨張率層を作成する方法は特に制限はない
が、工業的生産に適した手法として、シリカ微粒子と無
機系或いは有機系のバインダーおよび溶剤からなる混合
物を、連続的に金属箔に滴下あるいはスプレーにより塗
工し、その先に設けたスキージ或いはナイフコーターで
塗工量をコントロールし、乾燥炉で焼成する方法が適し
ている。但し、有機系バインダーは、一般的に膨張率が
大きく、使用量が増大すると本来の目的である低膨張性
を損なうので注意が必要である。こうして製造した低膨
張率金属箔は、プリプレグと組み合わせて加熱加圧一体
に成形して低膨張性のプリント回路用積層板を製造する
ことができる。
As the low-expansion metal foil of the present invention, a metal foil used for printed circuits in which at least one surface is roughened is provided with a silica-based low expansion coefficient layer on the rough surface.
Copper foil, aluminum foil, or the like is used as the metal foil here. The method of forming the low expansion coefficient layer is not particularly limited, but as a method suitable for industrial production, a mixture of silica fine particles and an inorganic or organic binder and a solvent is continuously dropped or sprayed on a metal foil. A method is suitable in which the coating amount is controlled by the above method, the coating amount is controlled by a squeegee or knife coater provided in front of the coating method, and baking is performed in a drying furnace. However, an organic binder generally has a large expansion coefficient, and if the amount used is increased, the original purpose of low expansion is impaired, so care must be taken. The low-expansion metal foil thus produced can be combined with a prepreg and integrally molded by heating and pressurization to produce a low-expansion printed circuit laminate.

【0013】こうして製造したプリント回路用積層板
は、CLCC、TSOP等の半導体装置を実装するに好
適な、面方向の熱膨張率の小さい回路板として使用でき
る。
The printed circuit board thus manufactured can be used as a circuit board having a small coefficient of thermal expansion in the plane direction, which is suitable for mounting a semiconductor device such as CLCC or TSOP.

【0014】[0014]

【作用】本発明のプリント回路用積層板は、積層板表面
に低膨張金属箔を用いたことによって、その低膨張率層
が積層板部分の膨張を抑えて、回路基板全体の面方向熱
膨張率を小さくすることができる。また厚さ方向でも低
膨張率層が加わることにより、全体としての厚さ方向の
熱膨張率も小さくすることができた。低膨張金属箔によ
る低膨張化は、多層板を製造する場合に、より大きな効
果を発揮することができる。層数が増加するごとに基板
全体に対する低膨張率層の割合が増加してゆき、面方向
と厚さ方向ともに、より低膨張化が達成される。本発明
のプリント回路用積層板は、25〜125 ℃の温度範囲にお
ける熱膨張率が面方向で13〜15 ppm/K、厚み方向で50
〜60 ppm/Kと調整したことによって、CLCC、TS
OP等の半導体装置と面方向の熱膨張率を整合させ、ス
ルーホール信頼性を向上させることができた。
The laminated board for a printed circuit according to the present invention uses the low-expansion metal foil on the surface of the laminated board, and the low expansion coefficient layer suppresses the expansion of the laminated board portion, and the surface direction thermal expansion of the entire circuit board. The rate can be reduced. Further, the thermal expansion coefficient in the thickness direction as a whole could be reduced by adding the low expansion coefficient layer also in the thickness direction. The low expansion due to the low expansion metal foil can exert a greater effect when manufacturing a multilayer board. As the number of layers increases, the ratio of the low expansion coefficient layer to the entire substrate increases, and lower expansion is achieved in both the plane direction and the thickness direction. The printed circuit laminate of the present invention has a coefficient of thermal expansion of 13 to 15 ppm / K in the plane direction and 50 in the thickness direction in the temperature range of 25 to 125 ° C.
By adjusting to ~ 60 ppm / K, CLCC, TS
Through-hole reliability could be improved by matching the thermal expansion coefficient in the surface direction with the semiconductor device such as OP.

【0015】[0015]

【実施例】本発明を実施例によって具体的に説明する
が、本発明はこれらの実施例によって限定されるもので
はない。
EXAMPLES The present invention will be specifically described with reference to examples, but the present invention is not limited to these examples.

【0016】実施例 厚さ18μm の電解銅箔の粗面に、溶融シリカと酸化チタ
ンを水ガラスとアルコールで混練し、有機バインダーと
して少量のエポキシ樹脂を加えた溶液を塗布乾燥し、厚
さ 0.1mmの無機低膨張率層を設け、低膨張率銅箔を製造
した。厚さ 0.18mm のガラスクロスに耐熱エポキシ樹脂
ワニスを含浸・乾燥し、半硬化状態として得たプリプレ
グ 3枚の両面に上記低膨張率銅箔を重ねてステンレス板
間に挟み、加熱加圧一体に成形して厚さ 0.8mmの低膨張
のプリント回路用積層板を製造した。
EXAMPLE On a rough surface of an electrolytic copper foil having a thickness of 18 μm, fused silica and titanium oxide were kneaded with water glass and alcohol, and a solution containing a small amount of an epoxy resin as an organic binder was applied and dried to give a thickness of 0.1. An inorganic low expansion coefficient layer of mm was provided to manufacture a low expansion coefficient copper foil. A glass cloth with a thickness of 0.18 mm was impregnated with a heat-resistant epoxy resin varnish and dried, and the prepreg obtained as a semi-cured state was laminated with the low expansion coefficient copper foil on both sides, sandwiched between stainless steel plates, and integrated with heating and pressure A 0.8 mm thick low-expansion printed circuit board laminate was manufactured by molding.

【0017】比較例1 繊維平面配向の 0.1mm厚のパラ系芳香族ポリアミドペー
パー基材、テクノーラ(帝人社製、商品名)に、耐熱エ
ポキシ樹脂ワニスを含浸・乾燥してプリプレグをつく
り、このプリプレグ 8枚を重ね、その両面に厚さ18μm
の電解銅箔を配置してステンレス板間に挟み、加熱プレ
スによって一体に積層成形し、厚さ 0.8mmのアラミドペ
ーパーエポキシプリント回路用積層板を製造した。
Comparative Example 1 A prepreg was prepared by impregnating and drying a heat-resistant epoxy resin varnish, Technora (trade name, manufactured by Teijin Ltd.), a para-aromatic polyamide paper substrate having a fiber plane orientation of 0.1 mm. Eight layers are stacked, and the thickness is 18μm on both sides.
The electrolytic copper foil was placed, sandwiched between stainless steel plates, and integrally laminated by hot pressing to manufacture a 0.8 mm-thick aramid paper epoxy printed circuit laminate.

【0018】比較例2 厚さ 0.8mmの汎用ガラス基材エポキシプリント回路用積
層板(FR−4グレード)を用意した。
Comparative Example 2 A general-purpose glass substrate epoxy printed circuit laminate (FR-4 grade) having a thickness of 0.8 mm was prepared.

【0019】実施例および比較例1〜2で製造したプリ
ント回路用積層板について、熱膨張率、TSOPの接続
安定性、スルーホール信頼性を試験したので、その結果
を表1に示した。本発明はいずれの特性においても優れ
ており、本発明の効果が確認された。
The printed circuit laminates manufactured in Examples and Comparative Examples 1 and 2 were tested for thermal expansion coefficient, TSOP connection stability, and through-hole reliability. The results are shown in Table 1. The present invention is excellent in all properties, and the effect of the present invention was confirmed.

【0020】[0020]

【表1】 *1 :熱膨張率測定範囲 CTEα1 25〜125 ℃、*
2 :TSOP接続安定性とスルーホール信頼性の試験サ
イクル条件は、−40℃・1h〜 150℃・1hの気中ヒートサ
イクルである。
[Table 1] * 1: Thermal expansion coefficient measurement range CTEα 1 25 to 125 ° C, *
2: The test cycle condition for TSOP connection stability and through hole reliability is an air heat cycle of -40 ° C ・ 1h to 150 ° C ・ 1h.

【0021】[0021]

【発明の効果】以上の説明および表1から明らかなよう
に、本発明のプリント回路用積層板よび低膨張金属箔
は、熱膨張率が小さく、半田クラックの発生がなく、低
コストで、スルーホール信頼性にも優れたもので、CL
CC、TSOP等の半導体装置の実装に好適なものであ
る。
As is clear from the above description and Table 1, the laminated board for printed circuits and the low expansion metal foil of the present invention have a small coefficient of thermal expansion, no solder cracks, low cost, and through. Excellent in hole reliability, CL
It is suitable for mounting semiconductor devices such as CC and TSOP.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 絶縁層の少なくとも片面に金属箔を設け
たプリント回路用積層板において、前記金属箔として、
少なくとも片面を粗面化した金属箔の粗面に、シリカ系
低膨張率層を設けた低膨張金属箔を用いたことを特徴と
するプリント回路用積層板。
1. A printed circuit laminated board having a metal foil provided on at least one surface of an insulating layer, wherein the metal foil is:
A laminated board for a printed circuit, comprising a low expansion metal foil having a silica-based low expansion coefficient layer provided on a rough surface of a metal foil having at least one surface roughened.
【請求項2】 少なくとも片面を粗面化した金属箔の粗
面に、シリカ系低膨張率層を設けたことを特徴とする低
膨張金属箔。
2. A low-expansion metal foil, characterized in that a silica-based low expansion coefficient layer is provided on a rough surface of a metal foil having at least one surface roughened.
JP35520492A 1992-12-17 1992-12-17 Low expansion metal foil and laminate for printed circuit Pending JPH06188531A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35520492A JPH06188531A (en) 1992-12-17 1992-12-17 Low expansion metal foil and laminate for printed circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35520492A JPH06188531A (en) 1992-12-17 1992-12-17 Low expansion metal foil and laminate for printed circuit

Publications (1)

Publication Number Publication Date
JPH06188531A true JPH06188531A (en) 1994-07-08

Family

ID=18442557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35520492A Pending JPH06188531A (en) 1992-12-17 1992-12-17 Low expansion metal foil and laminate for printed circuit

Country Status (1)

Country Link
JP (1) JPH06188531A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115124362A (en) * 2022-06-20 2022-09-30 昆明冶金研究院有限公司北京分公司 Ceramic copper-clad plate and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115124362A (en) * 2022-06-20 2022-09-30 昆明冶金研究院有限公司北京分公司 Ceramic copper-clad plate and preparation method thereof

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