JPH06188331A - Low-expansion metal foil and laminated board for printed circuit - Google Patents

Low-expansion metal foil and laminated board for printed circuit

Info

Publication number
JPH06188331A
JPH06188331A JP35520792A JP35520792A JPH06188331A JP H06188331 A JPH06188331 A JP H06188331A JP 35520792 A JP35520792 A JP 35520792A JP 35520792 A JP35520792 A JP 35520792A JP H06188331 A JPH06188331 A JP H06188331A
Authority
JP
Japan
Prior art keywords
metal foil
low
expansion
layer
printed circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP35520792A
Other languages
Japanese (ja)
Inventor
Masaaki Ueki
正暁 上木
Tokuo Kurokawa
徳雄 黒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Chemical Corp filed Critical Toshiba Chemical Corp
Priority to JP35520792A priority Critical patent/JPH06188331A/en
Publication of JPH06188331A publication Critical patent/JPH06188331A/en
Pending legal-status Critical Current

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  • Parts Printed On Printed Circuit Boards (AREA)
  • Laminated Bodies (AREA)

Abstract

PURPOSE:To reduce the coefficient of thermal expansion in a face direction of a circuit board as a whole by a method wherein a low-expansion metal foil in which an inorganic low-rate-of-expansion layer has been formed via an adhesive layer is used as a metal foil. CONSTITUTION:A foil in which an inorganic low-rate-of-expansion layer has been formed, via an adhesive layer, on the rough face of a metal foil which is used for a printed circuit and at least one face of which has been roughened is used as a low-expansion metal foil. At this time, a copper foil, an aluminum foil or the like is used for the metal foil. In addition, for the adhesive layer, a metal foil, provided with a mixture-type adhesive, which is used mainly in a paper-based phenol laminated board for civil products may be used as an intermediate raw material, or an adhesive layer which is used by a combination and which is the same as a prepreg matrix resin may be used. Thereby, the low-rate-of-expansion layer restrains the expansion of the part of an insulating layer, and the coefficient of thermal expansion in a face direction of a circuit board as a whole can be reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、パッケージ形態がCL
CC、TSOP等におけるような、熱膨張率の小さい半
導体装置を実装するに適するとともに、スルーホール信
頼性にも優れたプリント回路用積層板およびそれに用い
る低膨張金属箔に関する。
BACKGROUND OF THE INVENTION The present invention has a package form of CL.
The present invention relates to a printed circuit laminate which is suitable for mounting a semiconductor device having a small coefficient of thermal expansion, such as CC and TSOP, and also has excellent through-hole reliability, and a low expansion metal foil used therein.

【0002】[0002]

【従来の技術】近年の技術革新は目覚ましく、電子機器
のダウンサイジングは止まるところを知らない。それ
は、実装の高密度化、半導体の高集積化及び半導体パッ
ケージの小形化の技術によるものであり、半導体チップ
サイズに比してパッケージサイズの小さいCLCC、T
SOP等の半導体装置が多用され始めている。ところ
が、従来、産業用機器のプリント回路用積層板として用
いられてきた銅張積層板、すなわち、ガラスクロス等の
基材に熱硬化性樹脂を含浸・乾燥したプリプレグと銅箔
とを加熱加圧一体に成形してなる銅張積層板は、必ずし
もCLCC、TSOP等の半導体装置の実装に適したも
のとは言えない。
2. Description of the Related Art Recent technological innovation has been remarkable, and downsizing of electronic devices has never stopped. It is based on the technology of high-density packaging, high integration of semiconductor, and miniaturization of semiconductor package. The package size is smaller than the semiconductor chip size.
Semiconductor devices such as SOPs are beginning to be widely used. However, a copper clad laminate that has been used as a laminate for a printed circuit of industrial equipment, that is, a base material such as glass cloth impregnated with a thermosetting resin and dried, and a copper foil are heated and pressed. The copper-clad laminate formed integrally is not necessarily suitable for mounting semiconductor devices such as CLCC and TSOP.

【0003】CLCCは、パッケージ材質がセラミック
であって、実装に用いられるガラス基材エポキシ積層板
と熱膨張率が大きく異なるうえに、熱応力を吸収するリ
ードを持たない。また、TSOPは、パッケージ材質が
エポキシ封止材であっても、シリコンチップに対しての
エポキシ封止材の量が少なく、全体の熱膨張率は従来の
パッケージに比べて非常に小さいうえにリードも大変短
い。そのため両者ともガラス基材エポキシ積層板上に実
装した場合、熱膨張率不整合によって半田クラック不良
が多発する欠点がある。
The CLCC has a package material of ceramic, has a coefficient of thermal expansion largely different from that of a glass-based epoxy laminate used for mounting, and has no lead for absorbing thermal stress. Further, TSOP has a small amount of epoxy encapsulant with respect to a silicon chip even if the package material is an epoxy encapsulant, and the overall coefficient of thermal expansion is much smaller than that of the conventional package, and the lead is Is also very short. Therefore, when both are mounted on a glass-based epoxy laminate, there is a drawback that defective solder cracks frequently occur due to mismatch of thermal expansion coefficients.

【0004】そこで面方向(XY方向)の熱膨張率の小
さい積層板として、アラミド基材エポキシ積層板が使用
されることがある。しかし、アラミド布積層板は機械加
工が非常に難しいうえに高価で実用に適さない。また、
アラミドペーパー布積層板は面方向の熱膨張率が 6〜8p
pm/Kと非常に低く抑えられている反面、厚み方向(Z
方向)の熱膨張率が 130〜300ppm/Kと非常に大きく、
基板のスルーホール信頼性に問題があった。
Therefore, an aramid-based epoxy laminate is sometimes used as a laminate having a small coefficient of thermal expansion in the plane direction (XY direction). However, the aramid cloth laminate is very difficult to machine, expensive and not suitable for practical use. Also,
Aramid paper cloth laminate has a coefficient of thermal expansion in the plane direction of 6-8p
pm / K is very low, but in the thickness direction (Z
Direction) has a very large coefficient of thermal expansion of 130-300ppm / K,
There was a problem with the through hole reliability of the board.

【0005】また、セラミックス複合基板と呼ばれるも
のがある。これには、ガラス・エポキシ積層板の一部に
セラミックス層を設けたもの、セラミックス基板の表面
にガラス・エポキシプリプレグを配したものなどが知ら
れている。その特性は非常に優れたものであるが、前者
は、溶射法でセラミックスを基板或いは銅箔の表面に吹
付け加工して製造されるため、溶射工法上の問題から生
産性に限度がありまたその設備は非常に高価なものであ
る。後者は、セラミックス基板そのものに加工するもの
であるためサイズが限定されて、量産が難しく低コスト
での供給は困難であるという欠点がある。
There is also a ceramic composite substrate. Known examples include those in which a ceramic layer is provided on a part of a glass / epoxy laminate, and those in which a glass / epoxy prepreg is arranged on the surface of a ceramic substrate. Although its characteristics are extremely excellent, the former is manufactured by spraying ceramics onto the surface of the substrate or copper foil by a thermal spraying method, which limits productivity due to problems with the thermal spraying method. The equipment is very expensive. The latter has the drawback that the size is limited because it is processed into a ceramic substrate itself, mass production is difficult, and low-cost supply is difficult.

【0006】そこで本発明者らは、銅箔の粗面に無機系
低膨張率層を設けた低膨脹銅箔、およびそれを用いた熱
膨脹率の小さい、低コストのプリント回路用積層板を提
案した。しかし、銅箔と無機系低膨張率層との接着性に
劣るという欠点があった。
Therefore, the present inventors have proposed a low-expansion copper foil in which an inorganic low-expansion layer is provided on a rough surface of a copper foil, and a low-cost printed circuit laminate using the same, which has a small coefficient of thermal expansion. did. However, there is a drawback that the adhesion between the copper foil and the inorganic low expansion coefficient layer is poor.

【0007】[0007]

【発明が解決しようとする課題】本発明は、上記の事情
に鑑みてなされたもので、熱膨張率が小さく、実装品に
半田クラックの発生がなく、接着性、スルーホール信頼
性に優れ、しかも低コストであって、CLCC、TSO
P等の半導体装置の実装に好適な、低膨張金属箔および
プリント回路用積層板を提供しようとするものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances and has a small coefficient of thermal expansion, does not cause solder cracks in a mounted product, and has excellent adhesiveness and through-hole reliability. Moreover, the cost is low, CLCC, TSO
An object of the present invention is to provide a low expansion metal foil and a laminated board for a printed circuit suitable for mounting a semiconductor device such as P.

【0008】[0008]

【課題を解決するための手段】本発明者らは、上記の目
的を達成しようと鋭意研究を重ねた結果、金属箔に接着
剤層を介して無機系低膨張率層を設けたことによって、
上記の目的が達成できることを見いだし、本発明を完成
したものである。
Means for Solving the Problems As a result of intensive studies aimed at achieving the above object, the present inventors have found that an inorganic low expansion coefficient layer is provided on a metal foil via an adhesive layer.
The inventors have found that the above objects can be achieved and completed the present invention.

【0009】即ち、本発明は、絶縁層の少なくとも片面
に、金属箔を設けたプリント回路用積層板において、少
なくとも片面を粗面化した金属箔の粗面に、接着剤層を
介して無機微粒子の低膨張率層を設けた低膨張金属箔を
用いたことを特徴とするプリント回路用積層板およびそ
れに用いる低膨張金属箔である。
That is, according to the present invention, in a laminated board for a printed circuit in which a metal foil is provided on at least one surface of an insulating layer, inorganic fine particles are provided on the rough surface of a metal foil having at least one surface roughened via an adhesive layer. A low-expansion metal foil having a low-expansion coefficient layer is used, and a low-expansion metal foil used for the same is used for a printed circuit laminate.

【0010】以下、本発明を詳細に説明する。The present invention will be described in detail below.

【0011】本発明のプリント回路用積層板の絶縁層と
しては、基材に熱硬化性樹脂を含浸・乾燥させたプリプ
レグを絶縁層とする。ここで用いる基材には、ガラスク
ロス、ガラスペーパー等、熱硬化性樹脂積層板に用いら
れるものが全て使用できる。これらの基材の他に、合成
繊維(アラミド、フッ素樹脂、ポリイミド樹脂)等から
なる織布や不織布、金属繊維からなる織布やマット類等
も挙げられ、これらは単独または混合して使用すること
ができる。
As the insulating layer of the laminate for a printed circuit of the present invention, a prepreg obtained by impregnating a base material with a thermosetting resin and drying it is used as the insulating layer. As the base material used here, all those used for the thermosetting resin laminated plate such as glass cloth and glass paper can be used. In addition to these base materials, woven and non-woven fabrics made of synthetic fibers (aramid, fluororesin, polyimide resin) and the like, woven fabrics and mats made of metal fibers, etc. may be used alone or in combination. be able to.

【0012】本発明で基材に含浸させるに用いる熱硬化
性樹脂は、溶媒を加えて基材に含浸しやすいように粘度
調整を行ったものを使用する。具体的な熱硬化性樹脂と
しては、エポキシ樹脂、ポリイミド樹脂およびこれらの
変性樹脂等が好ましく使用されるが、特にこれらに限定
されるものではない。溶媒を加えた熱硬化性樹脂ワニス
には、本発明の目的に反しない限度において、高熱伝導
性あるいは低誘電率の充填剤を配合することができる。
高熱伝導性の充填剤としては、水酸化アルミニウム、シ
リカ等が挙げられ、また低誘電率の充填剤としてフッ素
樹脂粉末、中空ガラスビーズ等が挙げられる。また、必
要に応じてタルク、炭酸カルシウム等を適宜配合するこ
とができる。こうして得たワニスを、上述した基材に含
浸・乾燥してプリプレグをつくり、このプリプレグを絶
縁層として使用してプリント回路用積層板を製造するこ
とができる。
The thermosetting resin used for impregnating the substrate in the present invention has a viscosity adjusted so that the substrate is easily impregnated with a solvent. As specific thermosetting resins, epoxy resins, polyimide resins and modified resins thereof are preferably used, but the thermosetting resins are not particularly limited thereto. A filler having a high thermal conductivity or a low dielectric constant can be blended with the solvent-added thermosetting resin varnish as long as the object of the present invention is not impaired.
Examples of the high thermal conductivity filler include aluminum hydroxide and silica, and examples of the low dielectric constant filler include fluororesin powder and hollow glass beads. If necessary, talc, calcium carbonate, etc. may be appropriately mixed. The varnish thus obtained is impregnated into the above-mentioned substrate and dried to form a prepreg, and the prepreg can be used as an insulating layer to produce a laminated board for a printed circuit.

【0013】本発明の低膨張金属箔は、プリント回路用
に用いられている少なくとも片面を粗面化した金属箔の
粗面に、接着剤層を介して無機系低膨張率層を設けたも
のを使用する。ここでの金属箔としては銅箔、アルミニ
ウム箔等が使用される。また、ここで用いる接着剤層と
しては、民生用の紙基材フェノール積層板に主に用いら
れる混合型接着剤付き金属箔を中間原料としてもよい
し、組み合わせて使用するプリプレグのマトリクス樹脂
と同一のものを用いてもよく、特に制限はなく広く使用
することができる。接着剤層を形成する方法としても特
に制限はないが、工業的には接着剤を連続的に金属箔に
滴下、あるいはスプレーにより塗工し、その先に設けた
スキージ或いはナイフコーターで塗工量をコントロール
し、乾燥炉で焼成する方法が適している。
The low-expansion metal foil of the present invention comprises a metal foil used for a printed circuit, at least one surface of which is roughened, and an inorganic low expansion coefficient layer provided on the rough surface of the metal foil via an adhesive layer. To use. Copper foil, aluminum foil, or the like is used as the metal foil here. As the adhesive layer used here, a metal foil with a mixed adhesive, which is mainly used for a paper-based phenol laminated plate for consumer use, may be used as an intermediate raw material, or the same as the matrix resin of the prepreg used in combination. Any one may be used, and it is not particularly limited and can be widely used. The method for forming the adhesive layer is not particularly limited, but industrially, the adhesive is continuously dropped onto the metal foil or coated by spraying, and the coating amount is provided by a squeegee or knife coater provided in front of it. A method of controlling the temperature and firing in a drying furnace is suitable.

【0014】低膨張率層を作成する方法は特に制限はな
いが、工業的生産に適した手法として、無機系微粒子と
無機系あるいは有機系のバインダーおよび溶剤からなる
混合物を、連続的に接着剤層上に滴下或いはスプレーに
より塗工し、その先に設けたスキージ或いはナイフコー
ターで塗工量をコントロールし、乾燥炉で焼成する方法
が適している。但し、低膨張率層における有機系バイン
ダーは、一般的に膨張率が大きく、使用量が増大すると
本来の目的である低膨張性を損なうので注意が必要であ
る。また、その前工程の接着剤層を設ける工程に連続し
て低膨脹率層を形成し、乾燥工程を一度に行うと工程数
および乾燥炉にかかるエネルギーコストの低減ができ好
ましい。
The method of forming the low expansion coefficient layer is not particularly limited, but as a method suitable for industrial production, a mixture of inorganic fine particles and an inorganic or organic binder and a solvent is continuously added as an adhesive. A suitable method is to coat the layer by dripping or spraying, control the coating amount with a squeegee or knife coater provided in front of the layer, and fire in a drying furnace. However, the organic binder in the low expansion coefficient layer generally has a large expansion coefficient, and if the amount used is increased, the original purpose of low expansion is impaired, so care must be taken. Further, it is preferable that the low expansion coefficient layer is formed continuously with the step of providing the adhesive layer in the previous step and the drying step is performed at one time because the number of steps and the energy cost required for the drying furnace can be reduced.

【0015】こうして製造した低膨張金属箔は、プリプ
レグと組み合わせて加熱加圧一体に成形して低膨張性の
プリント回路用積層板を製造することができる。このプ
リント回路用積層板は、CLCC、TSOP等の半導体
装置を実装するに好適に使用できる。
The low-expansion metal foil thus produced can be combined with a prepreg and integrally molded under heating and pressure to produce a low-expansion printed circuit board laminate. This printed circuit laminated board can be suitably used for mounting a semiconductor device such as CLCC or TSOP.

【0016】[0016]

【作用】本発明のプリント回路用積層板は、金属箔に接
着剤層を介して無機低膨脹率層を設けた低膨張金属箔を
用いたことによって、低膨張率層が絶縁層部分の膨張を
抑えて、回路基板全体の面方向熱膨張率を小さくするこ
とができる。また厚さ方向でも低膨張率層の部分が加わ
ることにより、全体としての熱膨張率を小さくすること
ができた。低膨張金属箔による低膨張化は、多層板を製
造する場合に、より大きな効果を発揮することができ
る。層数が増加するごとに基板全体に対する低膨張率層
の割合が増加してゆき、面方向と厚さ方向ともに、より
低膨張化が達成される。また接着剤層は導体の引剥がし
強さを向上させ、微細回路形成による基板の高密度実装
を保証するために有効である。
In the laminated board for a printed circuit according to the present invention, a low expansion metal foil having an inorganic low expansion coefficient layer provided on a metal foil via an adhesive layer is used. Can be suppressed, and the thermal expansion coefficient in the surface direction of the entire circuit board can be reduced. Also, the thermal expansion coefficient as a whole could be reduced by adding the portion of the low expansion coefficient layer even in the thickness direction. The low expansion due to the low expansion metal foil can exert a greater effect when manufacturing a multilayer board. As the number of layers increases, the ratio of the low expansion coefficient layer to the entire substrate increases, and lower expansion is achieved in both the plane direction and the thickness direction. Further, the adhesive layer is effective in improving the peeling strength of the conductor and ensuring high-density mounting of the substrate by forming a fine circuit.

【0017】本発明のプリント回路用積層板は、25〜12
5 ℃の温度範囲における熱膨張率を面方向で13〜15 ppm
/K、厚み方向で50〜60 ppm/Kと調整したことによっ
て、CLCC、TSOP等の半導体装置と面方向の熱膨
張率を整合させ、またスルーホール信頼性を向上させる
ことができた。
The laminated board for a printed circuit according to the present invention comprises 25 to 12
Coefficient of thermal expansion in the plane direction of 13 to 15 ppm in the temperature range of 5 ° C
By adjusting / K and 50 to 60 ppm / K in the thickness direction, it was possible to match the coefficient of thermal expansion in the plane direction with the semiconductor devices such as CLCC and TSOP, and to improve the reliability of through holes.

【0018】[0018]

【実施例】本発明を実施例によって具体的に説明する
が、本発明はこれらの実施例によって限定されるもので
はない。
EXAMPLES The present invention will be specifically described with reference to examples, but the present invention is not limited to these examples.

【0019】実施例1 民生用紙基材フェノール銅張積層板製造用の混合型接着
剤付き厚さ35μm の電解銅箔の粗面に、溶融シリカと酸
化チタンを水ガラスとアルコールで混練し、有機バイン
ダーとして少量のエポキシ樹脂を加えた溶液を塗布乾燥
し、厚さ0.1mmの無機低膨脹率層を設け、低膨脹率銅箔
を製造した。厚さ0.18mmのガラスクロスに耐熱エポキシ
樹脂ワニスを含浸・乾燥し半硬化状態として得たプリプ
レグ3 枚の両面に上記低膨脹率銅箔を重ねてステンレス
板間に挾み、加熱加圧一体に成形して厚さ0.8mm の低膨
脹のプリント回路用積層板を製造した。
Example 1 On a rough surface of a 35 μm-thick electrolytic copper foil with a mixed adhesive for producing a consumer paper base phenol copper clad laminate, fused silica and titanium oxide were kneaded with water glass and alcohol to prepare an organic solution. A solution containing a small amount of an epoxy resin as a binder was applied and dried to provide an inorganic low expansion coefficient layer having a thickness of 0.1 mm to manufacture a low expansion coefficient copper foil. Heat-resistant epoxy resin varnish was impregnated and dried in 0.18 mm thick glass cloth, and the above-mentioned low expansion coefficient copper foil was placed on both sides of three prepregs obtained in a semi-cured state. A 0.8 mm thick low-expansion printed circuit board laminate was manufactured by molding.

【0020】比較例1 実施例1において、接着剤層のないガラスエポキシ銅張
積層板製造用厚さ35μm の電解銅箔を用いて、実施例1
と同様にして厚さ 0.8mmの低膨張のプリント回路用積層
板を製造した。
Comparative Example 1 In Example 1, an electrolytic copper foil having a thickness of 35 μm for producing a glass epoxy copper clad laminate without an adhesive layer was used.
A low-expansion printed circuit laminate having a thickness of 0.8 mm was manufactured in the same manner as in.

【0021】比較例2 厚さ 0.8mm汎用ガラス基材エポキシプリント回路用積層
板(FR−4グレード)を用意した。
Comparative Example 2 A laminated board (FR-4 grade) for a general-purpose glass substrate epoxy printed circuit having a thickness of 0.8 mm was prepared.

【0022】実施例1および比較例1〜2で製造したプ
リント回路用積層板について、熱膨張率、TSOPの接
続安定性、スルーホール信頼性、引剥がし強さを試験し
たのでその結果を表1に示した。本発明は各特性のバラ
ンスに優れており、本発明の効果が確認された。
The printed circuit laminates manufactured in Example 1 and Comparative Examples 1 and 2 were tested for thermal expansion coefficient, TSOP connection stability, through-hole reliability, and peel strength. The results are shown in Table 1. It was shown to. The present invention is excellent in the balance of each characteristic, and the effect of the present invention was confirmed.

【0023】[0023]

【表1】 *1 :熱膨張率測定範囲 CTEα1 25〜125 ℃ *2 :TSOP接続安定性、スルーホール信頼性の試験
サイクル条件は、−40℃・1h〜150 ℃・1hの気中ヒート
サイクルである。
[Table 1] * 1: coefficient of thermal expansion of the measurement range CTEα 1 25~125 ℃ * 2: TSOP connection stability, through-hole reliability of the test cycle conditions is a gas in a heat cycle of -40 ℃ · 1h~150 ℃ · 1h.

【0024】[0024]

【発明の効果】以上の説明および表1から明らかなよう
に、本発明のプリント回路用積層板および低膨張率金属
箔は、熱膨張率が小さく、実装品に半田クラックの発生
がなくスルーホール信頼性にも優れて、CLCC、TS
OP等の実装に好適であるとともに、特に銅箔の接着性
が高く高密度実装ができる。
As is clear from the above description and Table 1, the printed circuit laminate and the low-expansion metal foil of the present invention have a small coefficient of thermal expansion and do not cause solder cracks in the mounted product and thus the through holes. Excellent reliability, CLCC, TS
It is suitable for mounting OP and the like, and in particular, the adhesiveness of the copper foil is high and high-density mounting is possible.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 H05K 3/00 R 6921−4E ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification number Office reference number FI technical display location H05K 3/00 R 6921-4E

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 絶縁層の少なくとも片面に、金属箔を設
けたプリント回路用積層板において、少なくとも片面を
粗面化した金属箔の粗面に、接着剤層を介して無機微粒
子の低膨張率層を設けた低膨張金属箔を用いたことを特
徴とするプリント回路用積層板。
1. A low expansion coefficient of inorganic fine particles on a rough surface of a metal foil having a metal foil provided on at least one surface of an insulating layer, the metal foil being roughened on at least one surface via an adhesive layer. A laminated board for a printed circuit, characterized by using a low expansion metal foil provided with layers.
【請求項2】 少なくとも片面を粗面化した金属箔の粗
面に、接着剤層を介して無機微粒子低膨張率層を設けた
ことを特徴とする低膨張金属箔。
2. A low-expansion metal foil, characterized in that a low-expansion inorganic fine particle layer is provided on the rough surface of a metal foil having at least one surface roughened via an adhesive layer.
JP35520792A 1992-12-17 1992-12-17 Low-expansion metal foil and laminated board for printed circuit Pending JPH06188331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35520792A JPH06188331A (en) 1992-12-17 1992-12-17 Low-expansion metal foil and laminated board for printed circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35520792A JPH06188331A (en) 1992-12-17 1992-12-17 Low-expansion metal foil and laminated board for printed circuit

Publications (1)

Publication Number Publication Date
JPH06188331A true JPH06188331A (en) 1994-07-08

Family

ID=18442576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35520792A Pending JPH06188331A (en) 1992-12-17 1992-12-17 Low-expansion metal foil and laminated board for printed circuit

Country Status (1)

Country Link
JP (1) JPH06188331A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100801949B1 (en) * 2007-05-30 2008-02-12 후지쯔 가부시끼가이샤 Wiring board manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100801949B1 (en) * 2007-05-30 2008-02-12 후지쯔 가부시끼가이샤 Wiring board manufacturing method

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