JPH06183522A - Semiconductor wafer conveyer - Google Patents

Abstract

PURPOSE:To automate-retransferrence of a wafer in a wafer cassette, copying an ID card and conveying the cassette. CONSTITUTION:A copy changer 1 has a function of copying ID information in an ID card, belonging to a solid cassette, to an ID card belonging to an empty cassette. There are arranged a card stocker 9 provided with a temporarily stored magazine by inserting/extracting an ID card belonging to a wafer cassette, cassette cleaner 13 for cleaning the empty cassette, traversers 7, 8, 14, 15 for supplying the wafer cassette and an unmanned conveying vehicle 16. In this way, retransferring the wafer in the wafer cassette, copying the ID card, inserting/extracting/temporarily storing the ID card, inputting/delivering of the cassette cleaner and conveying the cassette after cleaning can be automated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor wafer transfer apparatus for transferring semiconductor wafers (hereinafter referred to as "wafers") between clean rooms having different cleanliness and for cleaning a wafer cassette.

[0002]

2. Description of the Related Art FIG. 3 is a view showing an object carried by a semiconductor wafer carrying device. In FIG. 3, the wafer 25
A wafer cassette 24 is shown containing the. In the wafer cassette 24, the wafers 25 are housed in parallel at equal intervals.

The structure of a conventional semiconductor wafer transfer apparatus will be described with reference to FIGS. 4 and 5. FIG. 4 is a diagram showing a layout of a conventional semiconductor wafer transfer device.
Further, FIG. 5 is a block diagram showing a control configuration of a conventional semiconductor wafer transfer apparatus.

In FIG. 4, reference numerals 3, 4 and 11 denote transfer stages which are installed at the entrances and exits of the same processing apparatus group (hereinafter referred to as "modules") to transfer the wafer cassette 24 to and from each transfer device. Further, 5 and 10 are ID recognition devices for reading / writing information in the ID card. Further, 6 and 12 are cassette dams for temporarily storing the wafer cassette 24, and 13 is a cassette cleaning machine for cleaning an empty cassette that has been input.

Reference numeral 17 is a partition for separating clean rooms having different cleanliness. Reference numeral 18 represents a clean room having a high degree of cleanliness (hereinafter referred to as "high clean room"), and 19 represents a clean room having a low degree of cleanliness (hereinafter referred to as "low clean room").
Represents

In FIG. 5, reference numeral 20 denotes a central control computer for giving a work instruction to a processor / transport device of several modules, and 21.
Reference numerals 22 and 22 are unit computers for controlling the carrier equipment in one module. In the figure, transfer stage 3 to cassette dam 6, ID recognition device 10 to cassette cleaning device 13
Corresponds to each device / transportation device in FIG.

Next, the operation of the conventional semiconductor wafer transfer apparatus will be described. First, the operator conveys the real cassette to the transfer stage 4 and reports the ID information of the real cassette to the unit computer 21 by the ID recognition device 5. The unit computer 21 makes a similar report to the integrated control computer 20,
The integrated control computer 20 confirms whether or not there is a problem with the conveyed actual cassette. If there is no problem, unit calculator 2
Instruct 1 to start work.

Next, the operator receives a work permit from the unit computer 21, and loads the wafer 25 in the wafer cassette 24 onto the wafer 25.
Transfer from a high clean room cassette to a low clean room cassette.

Next, the operator pulls out the ID card attached to the real cassette and uses the ID recognition device 5 to copy the ID information of the real cassette to the ID card for the low clean room. The ID cards of the removed actual cassettes are temporarily stocked here. Then, the cassette is temporarily stored in the cassette dam 6. The unit computer 21 reports the completion of the copy to the overall control computer 20 to notify that the process in the present process is completed. The operator inserts the copied low clean room ID card into the real cassette to which the wafer 25 has been transferred, and conveys it to the low clean room 19 side.

The transferred empty cassette is manually conveyed to the transfer stage 11, and the ID recognition device 10 reports the ID information to the unit computer 22. Unit calculator 2
2 reports to the integrated control computer 20, confirms whether or not there is a problem with the empty cassette that has been conveyed, and thereafter issues an instruction to start the empty cassette cleaning work.

Next, the operator receives a work permit from the unit computer 22 and inserts an empty cassette into the cassette washing machine 13. After cleaning the cassette, the operator inserts the ID card into the cleaned cassette, reports the completion of cleaning to the unit computer 22 by the ID recognition device 10, and temporarily stores it in the cassette dam 12. Here, the unit computer 22 reports the end of cleaning to the overall control computer 20, and the overall control computer 20 recognizes that a cleaned empty cassette has occurred. Finally, the worker pays out the washed empty cassette with card to the outside.

[0012]

Since the conventional semiconductor wafer transfer apparatus is constructed as described above, the transfer of the wafer 25 in the wafer cassette 24, the copying of the ID card, the insertion / removal / temporary storage of the ID card are carried out. , Cassette washer 1
The operator has to carry out all operations of loading and unloading into 3 and transporting the cassette after the washing machine, which is affected by dust generated by the operator, resulting in reduced yield and workability. Therefore, there was a problem that the operation was unstable.

The present invention has been made in order to solve the above problems, and it is possible to transfer wafers in a wafer cassette, copy an ID card, insert and remove an ID card, temporarily store it, and put it in a cassette cleaning machine. -It is an object to obtain a semiconductor wafer transfer device that can automate cassette transfer after payout and cleaning.

[0014]

A semiconductor wafer cassette transfer device according to a first aspect of the present invention comprises the following means. [1] Second semiconductor wafer in the first wafer cassette
Copy changer means for transferring the ID information in the first ID card attached to the first wafer cassette to the second ID card attached to the second wafer cassette. [2] Traverser means for carrying and transferring the first and second wafer cassettes between the transfer stage and the copy changer means for carrying and carrying the wafer cassette with other modules. [3] Computer means for controlling the copy changer means and the traverser means.

A semiconductor wafer cassette carrying device according to a second aspect of the present invention comprises the following means. [1] Card stocker means for inserting / removing an ID card attached to an empty wafer cassette and temporarily storing the ID card from the time it is taken out to the time it is inserted. [2] Cassette washing machine means for washing the loaded empty wafer cassette. [3] Traverser means for transferring and transferring the empty wafer cassette between the transfer stage for transferring and transferring the wafer cassette to and from other modules and the card stocker means and the cassette cleaning means. [4] Computer means for controlling the card stocker means, the cassette washing machine means, and the traverser means.

A semiconductor wafer cassette transfer device according to a third aspect of the present invention is provided with the following means. [1] Second semiconductor wafer in the first wafer cassette
Copy changer means for transferring the ID information in the first ID card attached to the first wafer cassette to the second ID card attached to the second wafer cassette. [2] First traverser means for carrying and transferring the first and second wafer cassettes between the first transfer stage and the copy changer means for carrying and carrying the wafer cassette with another module. . [3] First low-order computer means for controlling the copy changer means and the first traverser means. [4] First I attached to the first wafer cassette
Card stocker means for temporarily storing the first ID card from the time the D card is inserted / removed to the time it is inserted. [5] Cassette cleaning device means for cleaning the loaded first wafer cassette. [6] Second transfer and transfer of the first wafer cassette between the second transfer stage for transferring and transferring the wafer cassette to and from another module and the card stocker means and the cassette cleaning device means Traverser means. [7] Second low-order computer means for controlling the card stocker means, the cassette washing machine means, and the second traverser means. [8] Automated guided vehicle means for transferring and receiving the wafer cassette between the first and second transfer stages.

[9] High-order computer means for communicating with each of the above means regarding work instructions / reports and determining the next operation

[0017]

In the semiconductor wafer cassette transfer apparatus according to the first aspect of the present invention, the semiconductor wafer in the first wafer cassette is transferred to the second wafer cassette by the copy changer means, and the first wafer is transferred. The ID information in the first ID card attached to the cassette is copied to the second ID card attached to the second wafer cassette. Further, the first stage between the transfer stage and the copy changer means for transferring and receiving the wafer cassette to and from other modules by the traverser means.
Then, the transfer and transfer of the second wafer cassette are performed. Then, the computer means controls the copy changer means and the traverser means.

In the semiconductor wafer cassette transfer device according to the second aspect of the present invention, the ID card attached to the empty wafer cassette is inserted and removed by the card stocker means, and the ID card is temporarily stored from the time of removal to the insertion. To be done. Also, by means of cassette washer
The loaded empty wafer cassette is cleaned. Further, the transfer and transfer of the empty wafer cassette is performed between the transfer stage for transferring and transferring the wafer cassette to and from other modules and the card stocker means and the cassette cleaning device means. Then, the computer means controls the card stocker means, the cassette washing means and the traverser means.

In the semiconductor wafer cassette transfer device according to the third aspect of the present invention, the semiconductor wafer in the first wafer cassette is transferred to the second wafer by the copy changer means.
No. 1 wafer cassette and the ID information in the first ID card attached to the first wafer cassette is copied to the second ID card attached to the second wafer cassette. Further, the first traverser means transfers and transfers the first and second wafer cassettes between the first transfer stage and the copy changer means for transferring and transferring the wafer cassette to and from other modules. Done. Then, the lower computer means controls the copy changer means and the first traverser means. Further, the first ID card attached to the first wafer cassette is inserted and removed by the card stocker means, and the first ID card is temporarily stored between the removal and the insertion. Further, the cassette cleaning machine means cleans the loaded first wafer cassette. Furthermore, the first wafer cassette between the second transfer stage for transferring and receiving the wafer cassette to and from other modules by the second traverser means, and the card stocker means and the cassette cleaning machine means. The transfer and delivery are carried out. Then, the second computer means controls the card stocker means, the cassette cleaning means, and the second traverser means. Further, the transfer of the wafer cassette between the first and second transfer stages is performed by the unmanned transfer vehicle means. Then, the host computer means communicates with each of the means regarding the work instruction / report, and determines the next operation.

[0020]

【Example】

Example 1. The configuration of the first embodiment of the present invention will be described below with reference to FIGS. 1 and 2. 1 is a diagram showing a layout of a first embodiment of the present invention. Also, FIG.
FIG. 3 is a block diagram showing the control configuration of Embodiment 1 of the present invention. Note that the description of the same parts as those of the conventional device will be appropriately omitted.

In FIG. 1, reference numeral 1 denotes a wafer 25 transferred from an actual cassette to an empty cassette, and ID information concerning the actual cassette is copied to an ID card of the empty cassette I.
This is a D-card copy / wafer transfer machine (hereinafter referred to as "copy changer").

Reference numerals 2, 5 and 10 are ID recognition devices for reading / writing information in the ID card, 7, 8 and
Reference numerals 14 and 15 denote tracked robots (hereinafter, referred to as "traversers") that convey the cassettes in the module.

Further, 9 is an ID from the wafer cassette 24.
This is an ID card inserting / extracting machine (hereinafter referred to as "card stocker") in which a card is taken out, temporarily stored in a magazine, and then inserted again into the wafer cassette 24.

Numeral 16 is an on-floor type automatic guided vehicle. 3, 4 and 11 are transfer stages, 6 and 12 are cassette dams, 13 is a cassette washing machine, 17 is a partition, 18 is a high clean room, and 19 is a low clean room, all of which are the same as those of the conventional apparatus.

In FIG. 2, reference numeral 23 is an automatic guided vehicle control device for controlling the automatic guided vehicle 16. Reference numeral 20 is an overall control computer, and 21 and 22 are unit computers, all of which are similar to the conventional apparatus. In the figure, a copy changer 1 to an automated guided vehicle 16 correspond to the respective devices and transport equipments in FIG.

Next, the operation of the first embodiment of the present invention will be described. The integrated control computer 20 is an automated guided vehicle control device 2
When a cassette transportation instruction is issued to 3, the automatic guided vehicle control device 2
3 issues a similar instruction to the automated guided vehicle 16, and the automated guided vehicle 1
6 carries the wafer cassette 24 into the transfer stage 4.
ID of the wafer cassette 24 carried into the transfer stage 4
The ID recognition device 5 reads the information, and the unit calculator 21
Reports to the integrated control computer 20.

The integrated control computer 20 sends a work start instruction to the unit computer 21 if there is no problem in the reported ID information. The unit computer 21 reports the start of work to the overall control computer 20 if the instructed content is a workable condition.

In response to an instruction from the unit computer 21, the traverser 7 transfers the actual lot from the transfer stage 4 to the copy changer 1, and the traverser 8 transfers the empty cassette from the transfer stage 3 to the copy changer 1.
The unit computer 21 reports the arrival of the cassette to the overall control computer 20. The unit computer 21 sends a work start instruction to the copy changer 1, and the copy changer 1
Performs the copying of the ID card and the transfer of the wafer 25 in the wafer cassette 24.

After the processing is completed, the transferred real lot is
The traverser 8 instructed by the unit computer 21 transfers the empty cassette transferred to the transfer stage 3 on the low clean room 19 side to the set dam 6 by the traverser 7, and the unit computer 21 transfers the actual lot to the integrated control computer 20. Report completion.

The unit computer 21 is the integrated control computer 20.
To issue a blank cassette payout request to the integrated control computer 20
When the condition of the delivery destination is satisfied, sends a payout work start permission. The unit computer 21 reports the processing start declaration to the overall control computer 20, and instructs the traverser 7 to transfer the empty cassette from the cassette dam 6 to the transfer stage 4.

After transfer, the unit computer 21 reports transfer completion and work completion instructions to the machine overall control computer 20. Next, the integrated control computer 20 uses the automated guided vehicle control device 23.
If the conditions are met, the unmanned transport vehicle control device 23 issues a transport instruction to the unmanned transport vehicle 16, and the empty cassette is transported from the transfer stage 4 to the transfer stage 11.

The traverser 14 transfers the empty cassette carried in the transfer stage 11 to the card stocker 9 according to an instruction from the unit computer 22. Unit calculator 22
Makes the ID recognition device 10 read the information of the ID card and reports it to the integrated control computer 20. If there is no problem in the reported information, the integrated control computer 20 instructs the unit computer 22 to start storing the cassette dam.

If the contents instructed to start work are conditions for work, the start of work is reported to the integrated control computer 20.
The unit computer 22 sends a work start instruction to the card stocker 9, and the card stocker 9 displays the ID of the empty cassette.
Remove the card and store it temporarily.

The unit computer 22 issues a transfer instruction to the transfer stage 11 for the cardless empty cassette to the traverser 14. After the transfer, the unit computer 22 sets the rubber cassette 15 so that an empty cassette without a cassette is stored in the cassette dam 12.
Give instructions to. The traverser 15 transfers an empty cassette without a card to the cassette dam 12. The unit computer 22 reports the end of cassette transfer and the end of work to the overall control computer 20.

The unit calculator 22 is the cassette washing machine 1
When the empty cassette is requested from 3, the traverser 15 is instructed to transfer the empty cassette from the cassette dam 12 to the cassette washing machine 13. After the transfer, a work start instruction is issued to the cassette washing machine 13.

After cleaning the cassette, the unit computer 22
A cassette transfer instruction is issued to the traverser 15 to the transfer stage 11, and after the transfer, the unit computer 22 issues a work start instruction to the card stocker 9 and inserts an ID card into an empty cassette.

The unit computer 22 is connected to the traverser 14,
A wafer transfer instruction for a wafer cassette with an ID card is issued to the transfer stage 11. After the transfer, the traverser 15 is instructed to transfer the cassette to the cassette dam 12, and after the transfer, the general control computer 20 instructs the unit computer 22 to start the operation of payout when the conditions for payout are met. Upon reception, the unit computer 22 declares the work start to the integrated control computer 20, issues a transfer instruction to the traverser 15, transfers the empty cassette to the transfer stage 11, and reports the transfer end and the work completion.

Finally, when the integrated control computer 20 issues a cassette transportation instruction to the automated guided vehicle control device 23, the automated guided vehicle control device 23 issues a similar instruction to the automated guided vehicle 16, and the automated guided vehicle 16 causes the wafer cassette. Are unloaded from the transfer stage 11.

The first embodiment of the present invention, as described above,
Transfer of wafer 25 in wafer cassette 24 and ID
The purpose is to copy cards, insert / remove / temporarily store ID cards, load / unload to / from cassette washer, and automate cassette transportation after washing. Therefore, the wafer cassette 2
The wafer 25 in 4 is transferred, and the ID information in the ID card attached to the actual cassette is set to the ID attached to the empty cassette.
Copy changer 1 with the function to copy to a card
A card stocker 9 having a magazine for inserting and removing the ID card attached to the wafer cassette 24 and temporarily storing the wafer cassette 24; and a cassette cleaning machine 13 for cleaning empty cassettes.
Traversers 7, 8, 14, 15 for supplying a wafer cassette 24 and an automatic guided vehicle 16 are arranged to each of the above devices. As a result, it is possible to automate the transfer of wafers to locations having different degrees of cleanliness and the automation of physical distribution during cleaning of cassettes, thereby maintaining the cleanliness of the clean room and achieving stable operation of the semiconductor manufacturing line.

[0040]

According to the first aspect of the present invention, there is provided a semiconductor wafer cassette transfer device which transfers a semiconductor wafer in a first wafer cassette to a second wafer cassette and which is attached to the first wafer cassette. I in the 1 ID card
A second I that attaches D information to the second wafer cassette.
A copy changer means for copying to a D card, a transfer stage for transferring and receiving wafer cassettes to and from other modules, and a traverser for transferring and transferring the first and second wafer cassettes between the copy changer means. Means and computer means for controlling the copy changer means and the traverser means, so that wafer transfer in the wafer cassette / copy of the ID card,
This has the effect that the cassette transportation can be automated.

In the semiconductor wafer cassette carrying apparatus according to the second aspect of the present invention, the ID card attached to the empty wafer cassette is inserted and removed, and the I
A card stocker means for temporarily storing the D card, a cassette cleaning machine means for cleaning the loaded empty wafer cassette, a transfer stage for transferring and receiving the wafer cassette to and from other modules, the card stocker means, and Since the traverser means for transferring and receiving the empty wafer cassette to and from the cassette cleaning machine means and the computer means for controlling the card stocker means, the cassette cleaning machine means and the traverser means are provided, It is possible to automate wafer transfer, ID card copying, ID card insertion / withdrawal / temporary storage, loading / discharging to / from a cassette cleaning machine, and cassette transportation after cleaning.

According to a third aspect of the present invention, there is provided a semiconductor wafer cassette transfer device which transfers the semiconductor wafers in the first wafer cassette to the second wafer cassette, and the first wafer cassette.
ID in the first ID card attached to the wafer cassette of
Information is a second ID attached to the second wafer cassette.
Copy changer means for copying to a card, and a first for transferring and receiving a wafer cassette with another module.
First traverser means for transferring and receiving the first and second wafer cassettes between the transfer stage and the copy changer means, and a first traverser means for controlling the copy changer means and the first traverser means. Sub computer means, and a card stocker means for inserting / removing the first ID card attached to the first wafer cassette and temporarily storing the first ID card from the time it is taken out to the time it is inserted. Between the cassette cleaning unit for cleaning the first wafer cassette, the second transfer stage for transferring and receiving the wafer cassette to and from other modules, the card stocker unit, and the cassette cleaning unit. A second wafer carrier for transferring and receiving the first wafer cassette
And a second lower computer means for controlling the card stocker means, the cassette washing machine means and the second traverser means, and transfer of wafer cassettes between the first and second transfer stages. Since the automatic guided vehicle means for performing the above-described operation and the host computer means for communicating with each of the above-mentioned means regarding the work instruction / report and determining the next operation are provided, the wafer transfer in the wafer cassette / the copy of the ID card, the ID It is possible to automate the insertion / removal / temporary storage of cards, the insertion / ejection to / from the cassette cleaning machine, and the cassette transportation after cleaning.

[Brief description of drawings]

FIG. 1 is a diagram showing a layout of a first embodiment of the present invention.

FIG. 2 is a diagram showing a control configuration according to the first embodiment of the present invention.

FIG. 3 is a diagram showing a wafer cassette carried by the semiconductor wafer cassette carrying device according to the first embodiment of the present invention.

FIG. 4 is a diagram showing a layout of a conventional semiconductor wafer cassette transfer device.

FIG. 5 is a diagram showing a control configuration of a conventional semiconductor wafer cassette transfer device.

[Explanation of symbols]

 1 Copy Changer 2, 5, 10 ID Recognition Device 3, 4, 11 Transfer Stage 6, 12 Cassette Dam 7, 8, 14, 15 Traverser 9 Card Stocker 13 Cassette Cleaning Machine 16 Unmanned Transport Vehicle 17 Partition 18 High Clean Room 19 Low Clean room 20 Integrated control computer 21, 22 Unit computer 23 Automated guided vehicle control device

Claims (3)

[Claims] 1. A semiconductor wafer in a first wafer cassette is transferred to a second wafer cassette, and ID information in a first ID card attached to the first wafer cassette is transferred to the second wafer cassette. Of the first and second wafer cassettes between the transfer stage and the copy changer means for transferring and receiving the wafer cassette to and from other modules. A semiconductor wafer transfer apparatus comprising: a traverser means for transferring and receiving, and a computer means for controlling the copy changer means and the traverser means. 2. A card stocker means for inserting / removing an ID card attached to an empty wafer cassette and temporarily storing the ID card from the time of withdrawing to the time of insertion, and a cassette cleaning machine for cleaning the inserted empty wafer cassette. Means, a transfer stage for transferring and receiving the wafer cassette to and from other modules, and a traverser means for transferring and transferring the empty wafer cassette between the card stocker means and the cassette cleaning machine means, and the card stocker means, A semiconductor wafer transfer apparatus comprising computer means for controlling the cassette cleaning machine means and the traverser means. 3. The semiconductor wafer in the first wafer cassette is transferred to the second wafer cassette, and the ID information in the first ID card attached to the first wafer cassette is transferred to the second wafer cassette. Copy changer means for copying to a second ID card attached to the first and second transfer stages between the first transfer stage and the copy changer means for transferring and receiving the wafer cassette to and from other modules. First traverser means for transferring and receiving wafer cassettes, first changer means for controlling the copy changer means, and first lower computer means for controlling the first traverser means,
A card stocker means for inserting / removing the first ID card attached to the first wafer cassette and temporarily storing the first ID card from the time of removal to the insertion of the first wafer cassette. The cassette cleaning device for cleaning, the second transfer stage for transferring and receiving wafer cassettes to and from other modules, the card stocker device, and the cassette cleaning device.
Second traverser means for transferring and receiving the wafer cassette, the card stocker means, the cassette cleaning machine means, the second lower computer means for controlling the second traverser means, the first and second transfer means. A semiconductor wafer transfer apparatus comprising: an unmanned transfer vehicle means for transferring and receiving a wafer cassette between stages; and a host computer means for communicating with each of the above-mentioned means about a work instruction / report and determining a next operation. .