552542 五、發明説明（1 ) 本發明係關於，製造半導体或平面型面板等元件之工 廠内之被加工工作件之運輸控制方法。 半導体或平面型顯示面板（例如液晶面板或電漿顯示 面板等）之元件之製造工廠，空氣中之細微之粉塵等對製品 之品質性能會有很大之不良影響。於是，為了排除附著在 作業者之粉塵之影響，而使用，將被加工工作件存放在卡 is等之承載件’藉由在天板、地上或地下溝内行駛之無人 自動運輸車，在各裝置間自動運輸此等承載件之系統。 參照第5圖，說明此自動運輸系統之傳統之承載件運輸 控制方法如下。 ,如第5圖所不，半導体或平面型顯示面板之元件製造工 廠，係由集中同類元件之被稱做機架方式，例如由8個裝置 群機架A〜機架Η構成。其各機架A〜機架H具有可分別使 被加工工作件暫行待機之存放倉庫1A〜m，分成機架間運 輸路徑23及機架間運輸路徑22進行運輸管理。 、接到各機架A〜Η或各該機架内之各裝置間之運輸要 求之運輸指示裝置，將立即將運輸指示分解成最小之運輸 單位，生成多數運輸單位。而運輸控制裝置則將各個運輸 早位之運輸依序發送給無人自動運輸車24，進行運輸控制。 而，在各裝置處理後之運出時，如果是存放在與被加 工工作件被運入裝置時存放之承載件不同之承載件之形態 之夕數裝置構成之製造系統時，便需要供應或回收空承体 之運輸控制。 這時，如果從各裝置接到供應空承体之要求，運輸指 本紙張尺度適财_家群（⑽Μ規格（2敝撕公幻 552542 A7 B7 五、發明説明（2 示裝置則發出，從要求之裝置所屬機架之存放倉庫將空承 載件運輸至要求之裝置之運輸指示。 同時，從各裝置接到回收空承載件之要求時，運輸指 示裝置則發出，從要求之裝置將空承体運輸至要求之裝置 所屬之存放倉庫之運輸指示。 通常，存放倉庫1A〜1H係不受空氣中之粉塵影響之構 造之無塵室，工廠内之被加工工作件及存放工作件用之承 載件，係被控制在此存放倉庫1A〜1H内待機。 最近之半導体或平面型顯示面板等之元件工廠，連結 多數加工裝置，以構成生產線之情形一直在增加。 如此，隨著構成生產線之裝置之增加，成為運輸源或 運輸目的端之裝置群在減少。因此，與第5圖所示之以傳統 例子之機架方式構成之工廠不同，如第6圖所示之，具有能 以一個運輸路徑26連繫全處理裝置21及存放倉庫25之形 態，被稱作大房間方式之工廠已成為主流。（這種形態之工 廠係記載於，例如，2000年10月27日日 本 神齋 市〆シ 7 4 口 舉辦之LCD/PDP International 2000之展 示會之研討會「PDPt $十一 2000」所分發之「基調講演/ 市場展望」文件之三宅厚夫氏之稿件有記載。） 這種大房間方式之形態卻有，存放倉庫25之數目減 少，能在存放倉庫25待機之承載件之數目也變少之問題。 另一方面，為了要降低無塵室之營運成本，稱作 FOUP(Front Open Unified Pod)或 SMIF(Standard Mechanical Interface)之密閉承載件内部，以承載件本身保 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) •、tr— :線 552542 A7 B7 五、發明説明（3 ) 持無塵環境之迷你環境（Mini Environment)之開發已有進 展。 (請先閲讀背面之注意事項再填寫本頁) 此迷你環境不必令工廠内之被加工工作件及支持工作 件用之承載件在無塵環境之存放倉庫内待機。反而是令其 在存放倉庫内待機時，會使裝置間之運輸時間發生損失。 本發明之目的在提供，在大房間式之工廠，能夠使裝 置間之被加工工作件之運輸，與供應及回收空承載件時之 運輸之運輸時間為最短之運輸控制方法。 有關實施被加工工作件之物流自動化之工廠之縮短運 輸時間之承載件運輸控制方法之發明，包括有日本國特開 平10-340939或特開2001-255924。此等均係縮短存放被加 工工作件之承載件之運輸時間，但不會降低運輸目的端之 裝置之運作時間。 本發明之特徵在於，在無法運入運輸目的端裝置時， 在運輸源裝置待機，藉此縮短存放被加工工作件之承載件 之之運輸時間，而不致於使運輸源裝置之運作降低，以及， 縮短開始工作件之加工後發生之空承載件之回收，及供應 存放已加工工作件用空承載件之運輸時間。 本發明之承載件運輸控制方法之特徵在於，在將被加 工工作件存放在承載件，使用在天板、地上或地下溝内行 駛之無人運輸車，在保有運入運出用之入出口之多數加工 裝置及/或檢查裝置之製程間，與中間緩衝區之存放倉庫之 間，運輸上述承載件，藉此將上述被加工工作件之物流， 動化之工薇， 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 552542 五 、發明說明（ 4 將上述各裝置之運入口及運 運屮夕w 汉建出口之上述承載件之運入 運出之要求狀態，與存貨狀態之資料供給電腦， 上述電腦則預先藉由内設之—定之軟体，依據供給之 選擇向運輸目的端之裝置之運輸、在運輸源之裝置 次1、或至存放倉庫之運輸，進行控制，而依據供給之 在運人目的端之出人口不是呈可運進之狀態時，如 運入源之出入口尚有一定之空閒，則令其待機到運入目 的端之出入口成為可運入之狀態，藉此減少至中間緩衝區 之存放倉庫之運輸’使上述無人運輸車之運輸距離為最短。 _再者，上述無人運輸車係指，將被加工工作件存放於 運輸用容器之承載件（Carrier)，以吊掛在天板或舖設在地 上或地下溝之執道或索道行駛者。 ，依據此架構之運輸控制方法時，當產生有必要為了下 一製程而運出存放有在某裝置完成加工處理之工作件之承 载件時，此裝置則輸出表示要求運出此承載件之信號。運 輪控制裝置便依據此要求運出信號，對下一製程之裝置之 全出入口確認是否是在可運入此承載件之狀態。確認之結 果疋可運入之狀態時，立刻作出將承载件運輸至成為下一 製程之運輸目的端之指示。運輸目的端是在不能運入此承 載件之狀態時，則指示在運輸源之裝置待機。其結果可以 使，將承載件運出到下一製程之運輸車之移動距離為最短。 但必須如下述進行出入口佔用率之管理，以避免運輸 源之裝置之全出入口被可運出之承載件佔用，致運輸源裝 置對工作件之加工處理停止下來。首先，比較預先定義之 五、發明説明（5 ) 佔用率與這時之出入口佔用率。這時 先定義之值以上時，則指干 口佔用率是預 輸目的端之裝置之存放倉庫等之別的存H ，非運 於，其他觀點之承載件運輸控制方法，其特徵在 工二Γ广裝置或檢查裝置運出處理後之被加 加工裝置及檢查裝置時存放之承載件不同之承載件運2 形態之多數裝置，及用以保管空承載件之存放倉庫之工廠， 將上述各裝置之運入口所產生之空承載件在上述運入 口之存貨狀態’及要求空承載件之其他裝置之狀態之資 料，供給電腦， 、 上述電腦則預先藉由内設之一定之軟体，選擇向其他 裝置之運輸'在運輸源之裝置之保持、或至存放倉庫之運 輸’進行控制， 、而電腦則依據上述供給之資料，在沒有要求供應空承 載件之其他裝置時，如果要求回收空承載 D有-㈣，.令其待機到產生要求 其他裝置，藉此減少至保管空承載件之存放倉庫之運輸， 使上述無人運輸車之運輸距離為最短。 依據此架構之運輸控制方法時，當在某裝置產生要求 回收空承載件之裝置時，此裝置則輸出表示運出此空承載 件之要求之信號。運輸控制裝置便依據此要求運出信號， 確認是否是在可運入此裝置之承載件之狀態。確認之結果 是可運入之狀態時，立刻作出將承載件運輸至要求空承載 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公楚） 552542 五、發明説明（ 件之運輸目的端之指示。要求運輸空承載件之裝置不存 在，或運輸目的端是在不能運入之狀態時，則指示在運輸 源之裳置待機。 但必須如下述進行出入口佔用率之管理，以避免運輸 源之裝置之全出入口被需要運出之承載件佔用，致運輸源 之裝置對工作件之加工處理停止下來。首先比較預先定義 之佔用率與這時之出入口佔用率。這時之出入口佔用率是 預先定義之值以上時，則指示從運輸源之裝置運輸至非運 輸目的^之裝置之存放倉庫等之別的存放點。其結果，可 以使運輸空承載件之運輸車之移動距離為最短。 々本&明之另一其他觀點之承載件運輸控制方法，其特 徵在於，在具備有，從加工裝置或檢查裝置運出處理後之 被加工工作件時，將上述被加工工作件存放在，與運入上 述加工裝置及檢查裝置時存放之承載件不同之承載件運出 之形態之多數裝置，及用以保管空承載件之存放倉庫之工 薇， 為了存放處理後之被加工工作件，將上述各裝置之運 出口所需要之空承載件在上述運出口之存貨狀態，及保持 空承載件之其他裝置之狀態之資料，供給電腦， 供 空 而電腦則依據上述供給之資料，選擇由其他裝置 應、由存放倉庫供應、不供應而使用上述運出口存貨之 承載件，進行控制， 果 藉此’在沒有要求回收空承載件之其他裝置時，如 要求供應空承載件之裝置之出入口有一定之空承載件時 本紙張尺國國家ϋ〇β)Α4規格（210X297公釐） 552542 五、發明説明（7 ) 令其待機到產生要求回收空承載件之其他裝置，藉此減少 從保管空承載件之存放倉庫之運輸，使上述無人運輸車之 運輸距離為最短。 依據此架構之運輸控制方法時，在發生要求供應空承 載件之裝置時，確認有無要求回收空承載件之裝置，有要 求回收之裝置存在時，立刻從該装置指示運輸承載件。沒 有要求回收之裝置存在日寺，待機到有要求回收之裝置產生 時，或決定是否從存放倉庫等之其他存放點供應。 但運輸源之裝置之全出入口有運入之必要時，比較預 先定義之佔用率與這時之出人口佔用率，以避免運輸源之 裝置對工作件之加工處理停止下來。這時之佔用率是預先 定義之值以上時，指示從存放倉庫等之別的存放點運輸。 其釔果可以使，將運輸空承載件之運輸車之移動距離為最 短。 本發明之再一其他觀點之承載件運輸控制方法，係上 述兩種架構之空承載件之運出或供應用之承載件運輸控制 方法，其特徵在於，為了縮短無人運輸車之運輸時間，對 空承載件之運輸目的端及運輸源，依據預定之優先順位及 出入口可否運輸，從多數要求回收空承載件之裝置，及多 數要求供應承載件之裝置中，選擇運輸源及運輸目的端之 裝置。 依據此架構之承載件運輸控制方法時，預先定義有各 裝置之空承載件之運輸目的端，運輸源之優先順序及可否 運輸之内容。因此，發生要求供應空承載件之裝置時，在 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 10 552542 A7 ___ B7 五、發明説明（8 ) 多數空承載件中從多數要求回收空承載件之裝置，依照預 • 定之優先順序選擇運輸源裝置。與要求回收之裝置之間之 運輸距離為一定以上時，預先定義優先順位為不可運輸， ' 不可運輸之裝置不會選擇作為運輸源。其結果可以使，將 • 運輸空承載件之運輸車之移動距離為最短。 茲參照附圖，說明本發明之運輸控制方法之可取實施 例如下。 《實施例》 第1圖係表示本發明實施例1之運輸控制方法之運輸指 示裝置及運輸控制系統之架構之方塊圖。 在第1圖，運輸指示裝置1由電腦構成。該運輸指示裝 置1係從處理裝置2或檢查裝置3經由裝置控制器4輸出。具 有接收各種要求運輸資料5、6、7、8之事件接收部u、決 定運輸之裝置或存放倉庫等之運輸對象之各種決定部12〜 14、及經由運輸機器控制器17對多數存放倉庫“或多數無 • 人運輸車19進行運輸指示16之運輸指示部15。 … 要求運輸資料包括有··要求將完成處理之工作件運出 到下製私之運出工作件要求5、允許從前製程運入工作件 〃之運入許可6、要求回收完成投入工作件而變成空的承载件 ，之空承載件回收要求7、以及，要求供應用以存放完成加工 處理之工作件之空g之供應空承載件要求8。 事件接收部11在接收到上述各要求5〜8時，更新管理 各裝置之狀態之裝置狀態管理D/B 9之内容。 用以决疋運輸對象之各決定部12〜14則依據從裝置狀 本紙張尺度適用中國國家標準（CNS) A4規格（21〇χ297公复） -----------------------裝…… (請先閲讀背面之注意事項再填寫本頁) tr...............線- 11 五、發明説明（9 ) 態管理D/B 對象。 9及製程流程管理D/B 1〇取出之資料，決定運輸 亦即、’接收到運出工作件要求5時，由存放點決定部^ 於要運輸到下—裝置，或在該裝置本身待機，或者運 輸至其他存放倉庫等之存放點。 a接，到空承載件回收要求7時，由回收目的端裝置決定 部u決^，要將蜂載件運輸到其他裝置，或在該裝置本 身待機’或者運輸至其他存放倉庫等之存放點。 接收到空承載件供應要求8時，由供應源裝置決定部14 決定，要從其他裝置運輸空承載件，或運輸至其他存放倉 庫等^存放點，或者等待到要求回收空承載件之裝置出現。 ，茲參照第2圖〜第3圖，詳細說明各決定部i2〜i4之決 定運輸對象處理程序。 第2圖係由電腦構成之運輸指示裝置丨之存放點決定部 12之運輪對象決定處理程序之流程圖。 存放點決定部12在接到被加工工作件之運輸要求時 (亦即，第2圖中之步驟2-υ,參照裝置狀態管理d/b9之資 料，確認下一製程裝置之運入許可狀態（步驟2_2)。這時， 如果下一製程裝置是許可運入狀態，則發行將工作件運輸 至下一製程裝置之運輸指示（步驟2_3)。從本身裝置之出入 口上有工作件存在（以後稱做存貨）之承載件數算出出入口 發仃在本身裝置待機，而在可運入下一製程裝置時，立刻 運輸之指不（以後將其稱做待機指示）（步驟2_5)。出入口佔 本紙張尺度翻巾關緖準（CNS) A4規格（21GX297公釐） 552542 A7 .^ ^ imnm ( i〇) ' 料n大時，不得已指示其運輸至其他存放點而待機，空 出本身裝置之出入口’接受下一工作件之運入(步驟2·6)。 如此便可以作能使運輸車之移動距離為最小之正確之判 斷。 第3圖係表示回收目的端裝置決定部13之運輸對象決 定程序之流程圖。 回收目的端裝置決定部13在接到回收空承載件之要求 時（步驟3-υ’參照裝置狀態管理D/B 9,檢索要求供應空 承載件之裝置（步驟3-2)。 有要求供應之裝置存在時，藉由預先定義在製程流程 管理D/B 10之優先裝置資料，判定優先裝置（步驟3_3)。是 優先裝置時，決定將空承載件運輸至最優先裝置（步驟 3·6)。而發行運輸至該裝置之指示（步驟3_7)。 此優先順序係依運輸距離或時間設定，因此可以將運 輸日*^間最小化。 _ 如果沒有要求供給空承載件之裝置存在，或要求供給 空承載件之裝置不是優先裝置時，從該裝置本身之出入口 上之存貨承載件數算出出入口佔用率（步驟3-4)。出入口佔 用率較預定之佔用率Ν小時，發行可在該裝置處待機，而 • 在其他優先裝置要求空承載件時，立刻運輸之指示。較預 定之佔用率Ν大時，不得已指示其在其他存放點待機，空 出本身裝置之出入口，接受下一工作件之運入（步驟3_5)。 如此，便可以作能使運輸車之移動距離為最小之正確之判 斷。 本紙張尺度適用中g[國家標準（CNS〉A4規格（210X297公楚) 細 一 ......................裝..................訂 ................線 (請先閲讀背面之注意事項再填寫本頁) 552542 A7 ____B7_ 五、發明説明（n ) 第4圖係表示空承載件供應源決定部14之運輸對象決 定程序之流程圖。 空承載件供應源決定部14在接到供應空承載件之要求 時（步驟4-1)，參照裝置狀態管理D/B 9，檢索要求回收空 承載件之裝置（步驟4-2)。 有要求回收之裝置存在時，藉由預定在製程流程管理 D/B 1〇之優先裝置資料，判定優先裝置（步驟4_3)。是優先 裝置時，決定從最優先裝置運輸空承載件（步驟4_7)。而發 行運輸至該裝置之指示（步驟4-8)。 此優先順序係依運輸距離或時間設定，因此可以將運 輸時間最小化。 如果沒有要求回收空承載件之裝置存在，或要求回收 空承載件之裝置不是優先裝置時，從該裝置本身之出入口 上之存貨承載件數算出出入口佔用率（步驟4-4)。 出入口佔用率較預先定義之佔用率N小時，不供給空 承載件’使其在其他優先裝置要求回收空承載件時，立刻 運輪。較佔用率N大時，不得已指示其運輸在其他存放點 待機之空承載件，準備在本身裝置之出入口（步驟4_6)。如 此便可以作能使運輸車之移動距離為最小之正確之判斷。 以上係對實施形態進行之詳細說明，依據本發明之運 輸控制方法及系統時，可以使運輸至運輸源及運輸目的端 以外之存放倉庫等之存放點之機會為最小，因此可以使運 輸距離、時間及次數為最小。 本發明在運輸源及運輸目的端之發生要求之定時有偏 本紙張尺度_ A4規格⑵嶋7公楚) - (請先閲讀背面之注意事項再填寫本頁) 訂· t 552542 五、發明説明 12 差時’待機是在運輸源，因此不會有問題。而且是藉承栽 件佔用率抑制運輸源之出人σ，因此也可以防止，誓:置停 止工作件處理，運轉率降低造成之總生產量之降低。 同時，關於空承載件之運輸，也可以使運輸至要求回 收之裝置與要求供應之裝置以外之存放倉庫等之存放點之 機會為最小，因此可以使運輸距離、時間及次數為最小。 圖式之簡單說明 第1圖係表示本發明實施例之運輸控制方法之運輸指 示裝置及運輸控制系統之架構之方塊圖； 第2圖係表示存放點決定部之運輸對象決定程序之流 程圖； ^ 第3圖係表示空承載件回收目的端決定部之運輪對象 決定程序之流程圖； 、 第4圖係表示空承載件供應源決定部之運輸對象決定 程序之流程圖； 第5圖係表示傳統型之機架方式之工廠之架構方塊圖； 第6圖係表示大房間方式之工廠之架構方塊圖。 本紙張尺度適用中國國家標準（CNS〉Α4規格（210X297公愛）552542 V. Description of the invention (1) The present invention relates to a method for controlling the transport of work pieces in a factory that manufactures components such as semiconductors or flat panels. Semiconductor or flat-type display panels (such as liquid crystal panels or plasma display panels), component manufacturing plants, fine dust in the air, etc. will have a great adverse effect on product quality and performance. Therefore, in order to eliminate the influence of dust adhering to the operator, it is used, and the workpieces to be processed are stored in a carrier such as a card, etc., by using an unmanned automatic transport vehicle traveling on the roof, the ground, or an underground trench. A system for automatically transporting these carriers between units. Referring to Fig. 5, the conventional method for controlling the transport of the carrier of the automatic transportation system is described as follows. As shown in Figure 5, the semiconductor or flat-type display panel component manufacturing factory is called a rack method that concentrates similar components, for example, it consists of 8 device group racks A to Η. Each of the racks A to H has storage warehouses 1A to m for temporarily processing the workpieces to be processed, and is divided into an inter-rack transport path 23 and an inter-rack transport path 22 for transportation management. 2. The transportation instruction device that receives the transportation requirements between each rack A ~ Η or each device in the rack will immediately decompose the transportation instructions into the smallest transportation unit to generate most transportation units. The transportation control device sends the transportation in the early position to the unmanned automatic transportation vehicle 24 in order to carry out transportation control. However, when each device is shipped out after processing, if it is a manufacturing system composed of a number of devices that is stored in a form different from that of the carrier when the processed work piece is transported into the device, it is necessary to supply or Transportation control of recovered air carriers. At this time, if a request for the supply of air carriers is received from each device, the transportation means that the paper size is suitable for the family_ 家 群 （⑽Μ 规格 (2 敝 Tearing Magic 552542 A7 B7 V. Invention Description (2) The storage warehouse of the rack to which the device belongs belongs transports the empty carrier to the requested device. At the same time, when a request is received from each device to recover the empty carrier, the transport instruction device is issued to transport the empty carrier from the requested device. Instructions for transportation to the storage warehouse to which the required device belongs. Generally, storage warehouses 1A to 1H are clean rooms constructed without the influence of dust in the air, processed work pieces in the factory, and carrier parts for storage work pieces. It is controlled to stand by in this storage warehouse 1A ~ 1H. Recently, the component factories such as semiconductors or flat-type display panels have been connected to many processing devices to form a production line. Therefore, as the devices constituting the production line have been increasing, The number of devices that have become the source or destination of transportation is increasing. Therefore, the factory structure with the traditional example of the rack shown in Figure 5 is used. Similarly, as shown in FIG. 6, a factory called a large room system having a configuration in which the full processing device 21 and the storage warehouse 25 can be connected by one transportation path 26 has been mainstreamed. For example, the "Keynote Lecture / Market Outlook" document distributed at the seminar "PDPt $ 112000" of the LCD / PDP International 2000 exhibition held at 〆 シ 7, 神 シ 7, Japan, October 27, 2000 The manuscript of Miyake Hiroshi's manuscript is recorded.) However, this large room method has the problem that the number of storage warehouses 25 is reduced, and the number of carriers that can stand by in the storage warehouse 25 is also reduced. On the other hand, in order to require Reduce the operating cost of the clean room. Inside the sealed carrier called FOUP (Front Open Unified Pod) or SMIF (Standard Mechanical Interface), the paper size of the carrier is guaranteed by the Chinese National Standard (CNS) A4 (210X297 mm). ) (Please read the precautions on the back before filling out this page) • tr—: Line 552542 A7 B7 V. Description of the invention (3) Opening of a Mini Environment that holds a dust-free environment Progress has been made. (Please read the precautions on the back before filling this page) This mini-environment does not require the processed work pieces in the factory and the supporting pieces for supporting work pieces to be in standby in a dust-free storage warehouse. Instead When making it stand by in a storage warehouse, the transportation time between the devices will be lost. The purpose of the present invention is to provide, in a large room type factory, the transportation of processed work pieces between the devices, and the supply and recovery of empty space. The transport time when the carrier is transported is the shortest transport control method. Inventions related to the transport control method for shortening the transport time of the factory that implements the logistics automation of the processed work pieces include Japanese Patent Application No. 10-340939 or special Open 2001-255924. All of these are to shorten the transportation time of the carrier storing the processed work piece, but it will not reduce the operation time of the equipment at the destination. The present invention is characterized in that when it is impossible to transport the transport destination device, it waits at the transport source device, thereby shortening the transport time of the carrier storing the processed work piece without reducing the operation of the transport source device, and To shorten the recovery of empty carriers that occur after the processing of work pieces has started, and the transportation time for supplying and storing empty carriers for processed work parts. The method for controlling the transport of a carrier according to the present invention is characterized in that an unmanned transport vehicle that is used to store a work piece to be processed on the carrier and travels on a roof, an underground or an underground ditch, and maintains the entrance and exit for the entry and exit. Most of the processing equipment and / or inspection equipment between the manufacturing process and the intermediate buffer storage warehouse, the above-mentioned carrier is transported, so as to mobilize the logistics of the above-mentioned processed work pieces, and to mobilize the work Wei, this paper standard is applicable to China Standard (CNS) A4 specification (210X297 mm) 552542 V. Description of the invention (4 Import and export of the above-mentioned various devices w Hanjian export and import of the above-mentioned carrier required status and inventory status The information is supplied to the computer, and the above-mentioned computer is controlled by the built-in-defined software in advance, according to the choice of supply, to the device of the transportation destination, the device at the transportation source, or the transportation to the storage warehouse, and According to the supply, the outbound population at the destination of the shipper is not in a state that can be transported in, and if there is still some vacancy at the entrance and exit of the transport source, it will be put on standby until the transport destination The entrances and exits of the terminal become transportable, thereby reducing the transportation to the storage warehouse in the intermediate buffer zone to minimize the transportation distance of the aforementioned unmanned transport vehicle. _ Furthermore, the aforementioned unmanned transport vehicle refers to the work to be processed The pieces are stored in the carrier of the transportation container to carry on the roof or on the ground or underground ditch of the road or ropeway. When the transportation control method according to this architecture is necessary, When a carrier is shipped out of a process that stores a work piece that has been processed in a certain device, this device outputs a signal indicating that the carrier is required to be shipped out. The ship control device then sends out the signal based on this request to the next The whole entrance of the device of the manufacturing process is confirmed to be in a state where it can be transported into this carrier. When the result of the confirmation is in a state where it can be transported in, the instructions for transporting the carrier to the transport destination of the next process are immediately given. Purpose of transport When the end is in a state where it cannot be transported into this carrier, it indicates that the device at the transport source is on standby. As a result, the carrier can be transported out to the next process. The moving distance of the car is the shortest. However, the management of the occupancy rate of the entrance and exit must be carried out as follows to prevent the entire entrance and exit of the transport source device from being occupied by the transportable carrier, causing the transport source device to stop the processing of the work piece. First Compare the pre-defined fifth, invention description (5) occupancy rate with the entrance and exit occupancy rate at this time. When the value is defined above this time, it means that the dry port occupancy rate is the other storage of the storage device of the destination device. H, non-shipping, other aspects of the method of controlling the transport of the carrier, which is characterized in that the carrier is stored in the processing device and the inspection device after the processing device is removed from the processing device and the inspection device is transported in different forms. Information on the status of the majority of the equipment, and the storage warehouse where the empty carriers are stored, the status of the empty carriers produced by the above-mentioned transport entrances at the above-mentioned transport entrances, and the status of other devices that require empty carriers The computer is provided, and the above-mentioned computer chooses to transport to other devices by using certain built-in software in advance. Hold, or transport to the storage warehouse 'for control, and the computer is based on the information provided above, and if there is no other device required to supply the empty carrier, if the empty carrier D is requested to be recovered, there is -㈣, so that it waits until it is generated. Require other devices to reduce transportation to the storage warehouse where empty carriers are kept, so that the transportation distance of the unmanned vehicle is the shortest. When a transportation control method based on this architecture is used, when a device requiring the recovery of an empty carrier is generated in a device, the device outputs a signal indicating a request to transport the empty carrier. The transportation control device then sends out the signal according to this requirement to confirm whether it is in the state of the carrier that can be transported into the device. When the result of the confirmation is that it can be transported, immediately make the transport of the carrier to the empty carrier. The paper size is subject to the Chinese National Standard (CNS) A4 specification (210X297). 552542 5. Description of the invention Instructions. The device that requires the transport of empty carriers does not exist, or when the destination of the transportation is in a state where it cannot be transported, it is instructed to wait at the source of the transportation. However, the management of the occupancy of the entrance and exit must be performed as follows to avoid the source of transportation The entire entrance of the device is occupied by the carrier that needs to be shipped out, which causes the processing of the work piece by the device of the transportation source to stop. First, compare the predefined occupancy rate with the entrance and exit occupancy rate at this time. At this time, the entrance and exit occupancy rate is predefined When the value is above, it indicates the transportation from the device of the transportation source to the storage place of the device of the non-transportation device, etc. As a result, the moving distance of the transport vehicle for transporting the empty carrier can be minimized. & another aspect of the method for controlling the transportation of a carrier, characterized in that the method includes: When inspecting the processed work piece after the device is shipped out, store the above-mentioned processed work piece in a majority of devices in a form that is carried out of the carrier, which is different from the carrier stored when the device is transported into the processing device and the inspection device, and In order to store the processed work pieces after storage of the empty carriers, the empty carriers required for the transport of the above devices are in the state of the above-mentioned transport exits, and the other parts of the empty carriers are maintained. Information on the status of the device is provided to the computer, and the computer supplies air and the computer selects the carrier that is used by other devices, supplied by the storage warehouse, or not supplied, and uses the above-mentioned export inventory to control based on the information provided above. When there is no other device required to recover the empty carrier, if there is a certain empty carrier at the entrance and exit of the device that requires the supply of the empty carrier, the paper ruler country ϋββ) A4 specification (210X297 mm) 552542 5. Description of the invention (7) Make it stand by until other devices that require the empty carrier to be recovered, thereby reducing transportation from the storage warehouse where the empty carrier is kept In order to minimize the transportation distance of the aforementioned unmanned vehicles. In the transportation control method based on this architecture, when a device requiring the supply of an empty carrier occurs, confirm whether there is a device that requires the empty carrier to be recovered, and when a device that requires the recovery exists, immediately instruct the transport carrier from the device. No-recovery devices are stored in Nichiji, waiting until the required-recovery devices are produced, or deciding whether to supply them from other storage locations such as storage warehouses. However, if it is necessary to enter the entire entrance and exit of the device of the transportation source, compare the pre-defined occupancy rate with the population occupancy rate at this time to prevent the processing of the work piece by the transportation source device from stopping. If the occupancy rate at this time is more than a predefined value, it is instructed to transport from another storage point such as a storage warehouse. The yttrium fruit can make the moving distance of the transport vehicle for transporting the empty carrier to the shortest. In another aspect of the present invention, the method for controlling the transport of a carrier is a method for controlling the transport of an empty carrier in the above two structures, or a method for transporting a carrier, which is characterized in that in order to shorten the transport time of an unmanned transport vehicle, The destination and source of the empty carrier are selected according to the predetermined priority and whether the entrance or exit can be transported. From most of the devices that require the empty carrier to be recovered, and most of the devices that require the supply of the carrier, choose the source and destination device. . In the method of controlling the transport of the carrier according to this architecture, the destination of the transport of the empty carrier of each device, the priority of the transport source, and the content of transportability are defined in advance. Therefore, when a device requiring the supply of empty carriers occurs, the Chinese national standard (CNS) A4 specification (210X297 mm) applies to this paper size. 10 552542 A7 ___ B7 V. Description of the invention (8) Most of the empty carriers require the majority For the device that recovers the empty carrier, the transportation source device is selected according to the predetermined priority order. When the transportation distance between the device and the device requiring recycling is more than a certain value, the priority order is defined as non-transportable in advance, and 'non-transportable devices will not be selected as the transportation source. As a result, it is possible to minimize the moving distance of the transport vehicle that transports the empty carrier. A preferred embodiment of the transportation control method of the present invention will be described below with reference to the drawings. [Embodiment] Fig. 1 is a block diagram showing the structure of a transportation instruction device and a transportation control system of the transportation control method according to Embodiment 1 of the present invention. In Fig. 1, the transportation instruction device 1 is composed of a computer. This transportation instruction device 1 is output from the processing device 2 or the inspection device 3 via the device controller 4. There are event reception units u that receive various transportation materials 5, 6, 7, 8 and various decision units 12 to 14 that determine the transportation objects, such as devices or storage warehouses, and a majority of storage warehouses via the transportation machine controller 17 " Or most of the non-person transport vehicles 19 carry the transportation instruction section 15 of the transportation instructions 16.… The required transportation information includes the requirements for the finished work pieces to be shipped out to the private manufacturing work piece requirements 5. Allowing the former process Carry-in permits for work pieces that have been brought in 6. Requires the recovery of completed work pieces that have become empty carriers, and the requirements for the recovery of empty carrier parts 7, and the supply of empty g to store work pieces that have been processed. Empty carrier request 8. When the event receiving unit 11 receives each of the above-mentioned requests 5 to 8, the content of the device status management D / B 9 that manages the status of each device is updated. Each decision unit 12 to determine the transportation object 14 According to the paper size of the device, the Chinese National Standard (CNS) A4 specification is applied (21〇 × 297 public copy). … (Please read the notes on the back before filling This page) tr ............... line-11 V. Description of the invention (9) State management D / B object. 9 and process flow management D / B 1 Data taken out, The decision to transport, that is, 'receiving the request for the removal of the work piece 5, the storage point determination section ^ will be transported to the next-device, or stand by the device itself, or transported to other storage points, etc. a connection When the empty carrier recovery request 7 is reached, the recovery destination device decision unit decides whether to transport the bee carrier to another device, or wait for the device itself, or transport it to another storage place such as a storage warehouse. When the empty carrier supply request 8 is reached, the supply source device decision unit 14 decides whether to transport the empty carrier from other devices, or to other storage warehouses, etc., or wait until the device that requires the empty carrier to be recovered appears. With reference to Figures 2 to 3, detailed descriptions are given to the processing procedures for determining the transportation object of each of the decision units i2 to i4. Figure 2 shows the transportation object determination processing of the storage point determination unit 12 of the transportation instruction device constructed by a computer. The flowchart of the procedure. When receiving the transportation request for the work piece being processed (that is, step 2-υ in Figure 2, refer to the information of the device status management d / b9 to confirm the status of the permit for the next process device (step 2_2). If the next process device is in the permitted state, issue a transport instruction to transport the work piece to the next process device (step 2_3). From the entrance of the own device, there is a carrier that has a work piece (hereinafter referred to as inventory). Calculate the entrance and exit locks on their own device, and when it can be transported to the next process device, the finger that immediately transports them (hereinafter referred to as the standby instruction) (step 2_5). The entrance and exit account for the paper size. (CNS) A4 specification (21GX297 mm) 552542 A7. ^ ^ Imnm (i〇) 'When the material is large, it must be instructed to transport it to other storage locations and wait for it, and vacate the entrance of its own device' to accept the next work piece. Carry in (step 2 · 6). In this way, a correct judgment can be made that minimizes the moving distance of the transport vehicle. Fig. 3 is a flowchart showing a procedure for determining a transport target by the recovery destination device determining section 13. When the collection destination device determination unit 13 receives a request to recover an empty carrier (step 3-υ ', refer to the device status management D / B 9, and searches for a device that requests the supply of an empty carrier (step 3-2). When a device exists, the priority device data is determined in advance by managing the D / B 10 priority device data in the process flow (step 3_3). When it is a priority device, it is decided to transport the empty carrier to the highest priority device (steps 3 and 6) ). And the instructions for shipping to the device are issued (step 3_7). This priority is set according to the transportation distance or time, so the transportation day can be minimized. _ If there is no device required to supply the empty carrier, or When the device that requires the supply of empty carriers is not a priority device, calculate the entrance and exit occupancy rate from the number of inventory carriers at the entrance and exit of the device itself (step 3-4). The entrance and exit occupancy rate is smaller than the predetermined occupancy rate N. Standby at the device, and • Instruction to transport immediately when other priority devices require empty carriers. When the occupancy rate N is greater than the predetermined, it must be instructed to wait at other storage locations, Exit the entrance of its own device and accept the next work piece (step 3_5). In this way, you can make a correct judgment that can minimize the moving distance of the transport vehicle. This paper is applicable in g [National Standard (CNS>) A4 specifications (210X297) .............................................. Ordering line (please read the precautions on the back before filling this page) 552542 A7 ____B7_ V. Description of the invention (n) Figure 4 shows the supply of empty carriers Flow chart of the transportation object determination procedure by the source determination unit 14. When the empty carrier supply source determination unit 14 receives a request to supply an empty carrier (step 4-1), it refers to the device status management D / B 9 and retrieves the requested recovery. Device with empty carrier (step 4-2). When there is a device requiring recovery, the priority device data of D / B 10 is scheduled to be managed in the process flow to determine the priority device (step 4_3). When it is a priority device, Decide to transport the empty carrier from the highest priority device (step 4_7) and issue instructions for transport to the device (step 4-8). This priority order is set according to the transport distance or time, so Transport time can be minimized. If no device that requires empty carrier recovery exists or the device that requires empty carrier recovery is not a priority device, calculate the entrance occupancy rate from the number of inventory carriers at the entrance of the unit itself (step 4) -4). The occupancy rate at the entrance / exit is smaller than the pre-defined occupancy rate N hours, and empty carriers are not supplied, so that when other priority devices require the recovery of empty carriers, the ship is immediately transported. When the occupancy rate is greater than N, the transport must be instructed Empty carrier parts waiting at other storage points are prepared at the entrances and exits of their own devices (steps 4-6). In this way, a correct judgment can be made to minimize the moving distance of the transport vehicle. The above is the detailed description of the implementation mode. When the transportation control method and system of the present invention can minimize the chance of transportation to storage points such as the storage source other than the transportation source and destination, the transportation distance, Time and frequency are minimal. The timing of the requirements of the transportation source and destination of the present invention is partial to the paper size _ A4 size ⑵ 嶋 7 cm)-(Please read the precautions on the back before filling this page) Order · t 552542 V. Description of the invention 12 Lag 'Standby is the source of transportation, so there will be no problems. In addition, the occupancy rate of the supporting parts is used to suppress the occurrence of the transportation source σ, so it can also be prevented, and the omission: stop the work piece processing, the reduction of the total production caused by the reduction of the operating rate. At the same time, with regard to the transportation of empty carriers, the opportunity of transportation to storage points such as the device requiring recovery and the storage warehouse other than the device requiring supply can be minimized, so the distance, time and frequency of transportation can be minimized. Brief description of the drawings. Fig. 1 is a block diagram showing the structure of the transportation instruction device and the transportation control system of the transportation control method according to the embodiment of the present invention. Fig. 2 is a flowchart showing the transportation object determination procedure of the storage point determination section. ^ Figure 3 is a flow chart showing the procedure for determining the shipping object of the end-determining section of the empty carrier recovery; Figure 4 is a flow chart showing the procedure for determining the transportation object of the empty source supply determining section; Figure 5 is A block diagram showing the architecture of a traditional rack-type factory; Figure 6 is a block diagram showing the architecture of a large-room factory. This paper size applies to Chinese national standards (CNS> Α4 specifications (210X297 public love)
(請先閲讀背面之注意事項再填窝本頁) -訂—(Please read the notes on the back before filling in this page) -Order—
線I 552542 A7 ____ B7五、發明説明（13 ) 元件標號對照 11…事件接收部 12…存放點決定部 13···回收目的端裝置決定部 14…供應源裝置決定部 15…運輸指示部 16…運輸指示 17···運輸機器控制器 18…存放倉庫 19…無人運輸車Line I 552542 A7 ____ B7 V. Description of the invention (13) Component reference 11 ... Event receiving section 12 ... Storage point determination section 13 ... Recycling destination device determination section 14 ... Supply source device determination section 15 ... Transportation instruction section 16 … Transportation instructions 17 ·· transport machine controller 18… storage warehouse 19… unmanned transport vehicle
1···運輪指示裝置 2·.·處理裝置 3···檢查裝置 4··.裝置控制器 5·.·工作件運出要求 6…工作件運入許可 7…空承載件回收要求 8. ·.供應空承載件要求 9. ··裝置狀態管理D/B 1 〇…製程流程管理D/B (請先閱讀背面之注意事項再填寫本頁) 訂| 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐）1 ··· wheel indication device 2 ··· processing device 3 ··· inspection device 4 ··· device controller 5 ··· workpiece outbound requirement 6 ... workpiece inbound permit 7 ... empty carrier recovery requirement 8. ·. Requirements for supply of empty carriers 9. ·· Device status management D / B 1 〇 ... Process flow management D / B (Please read the precautions on the back before filling this page) Order | This paper size applies to Chinese national standards (CNS) A4 size (210X297 mm)