JPH06182664A - Vibrating table device - Google Patents

Abstract

PURPOSE:To vibrate a vibrating table into circular motion in the X, Y-axis directions and provide various vibration modes adaptable to various uses by driving pressing members in the X, Y-axis directions, and selectively bringing an eccentric member into contact with the X, Y-axis directions of a contact member. CONSTITUTION:A vibrating table 3 is arranged on a base 1 via rolling elements 2. The vibrating table 3 is supported by elastic members 7a, 7b in the X, Y-axis directions. An eccentric member 11 is connected to a rotation source such as a motor, and its rotary shaft 12 is offset in the X, Y-axis directions against the center 13. A contact member 9 is fixed to the vibrating table 3, and X, Y-axis direction sections 9a, 9b are arranged on it. The vibrating table 3 is pressed by pressing members 15a, 15b in the X, Y-axis directions. The pressing members 15a, 15b are driven, the eccentric member 11 is selectively brought into contact with the X, Y-axis direction sections 9a, 9b, and the vibrating table 3 is vibrated in the X, Y-planes.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating table device for supporting a workpiece while applying a two-dimensional vibration thereto during polishing such as polishing and grinding.

[0002]

2. Description of the Related Art Polishing of a mold or the like requires a highly accurate finished surface without polishing unevenness after the polishing. In order to perform such high-precision polishing, it is necessary to vibrate the workpiece parallel to the feed direction of the tool. Conventionally, a so-called vibration table device has been used for the purpose of vibrating the workpiece in this way. Has been. The basic structure of this vibration table device will be described below with reference to FIG.

A table (37) for supporting a workpiece is precisely guided in the X-axis direction by a linear guide (41) arranged between the table (37) and the base (39). A spring (43) and an eccentric disc (45) are provided on the X axis with the table (37) interposed therebetween. The spring (43) is interposed between the base (39) and the end surface of the table (37) in a compressed state.
The table (37) is pressed to the right in the drawing by the elastic force of 3). Therefore, the end surface of the table (37) and the eccentric disc (45) are always in contact with each other. The eccentric disc (45) is
A rotation shaft (47) connected to a motor (not shown) and the like
Is offset in the X-axis direction with respect to the center (49). With such a configuration, when the eccentric disc (45) is rotated, the table (37) vibrates in the X-axis direction, and the workpiece supported on the table (37) is imparted with the vibration in the X-axis direction. It By sending the grindstone (51) parallel to this vibration direction (X-axis direction), a highly accurate finished surface can be obtained.

[0004]

By the way, in the above-mentioned table vibrating device, the vibrating direction of the table is limited to one direction (X-axis direction), and it is not possible to impart a two-dimensional vibration to the workpiece. There is a problem.

Therefore, for example, as shown in FIG. 10, when polishing the surface of the flat plate-like workpiece (53), the grindstone (51) is used.
When applying a circular motion feed such as a trochoidal curve to
When polishing the surface of a three-dimensional free-form surface workpiece,
When the feed direction of the grindstone (51) changes every second, it was impossible to match the feed direction of the grindstone (51) with the vibration direction of the table (37).

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a vibration table device capable of applying a two-dimensional vibration to a workpiece.

[0007]

[Means for Solving the Problems] To achieve the above object,
The device of the present invention includes a vibration table, and the vibration table
A first elastic member that elastically supports in the axial direction, a second elastic member that elastically supports the vibration table in the Y-axis direction, and a rotation source are connected, and the center of rotation is X with respect to the center.
An eccentric member that is offset in the axial and Y-axis directions, an X-axis direction portion that is fixed to the vibration table and that extends in the X-axis direction, and a Y-axis direction portion that extends in the Y-axis direction. A contact member whose axial portion is provided so as to be capable of contacting the eccentric member, a first pressing member that presses the vibration table in the X-axis direction against the first elastic member, and a second vibration table. Second pressing against the elastic member in the Y-axis direction
And a pressing member for driving the first and second pressing members, and the eccentric member rotationally driven by the rotation source is an X-axis direction portion, a Y-axis direction portion, an X-axis direction portion of the contact member, and The vibrating table is vibrated in the XY plane by selectively contacting the Y-axis direction portion (claim 1).

According to a second aspect of the present invention, in the first aspect of the present invention, a rotary table, which is rotatable forward and reverse about the Z axis independently of the vibration table, is provided above the vibration table, and the rotary table is XY. It is characterized in that it is rotated according to the inclination angle of the surface of the workpiece in the cross section.

According to a third aspect of the present invention, in the first aspect of the present invention, the inclination angle of the workpiece slope is calculated from the displacement detection signal of the polishing head, and the additional rotary table is rotated based on the detected amount to rotate the workpiece. The feature is that the slope is controlled to coincide with the X axis or the Y axis.

[0010]

When the first and second pressing members are appropriately driven,
The eccentric member selectively contacts the X-axis direction portion, the Y-axis direction portion, the X-axis direction portion, and the Y-axis direction portion of the contact member. Eccentric member X
When the eccentric member is brought into contact with the axial portion, the vibration table vibrates in the Y-axis direction. Further, when the eccentric member is brought into contact with the Y-axis direction portion, the vibration table moves in the X-axis direction.
It vibrates in the axial direction. Further, when the eccentric member is brought into contact with both the X-axis direction portion and the Y-axis direction portion, the above two vibrations are combined and the vibration table makes a circular motion.

Above the vibration table, a rotary table which is rotatable independently of the vibration table in the forward and reverse directions is provided, and the rotary table is rotated in accordance with the inclination angle of the workpiece surface in the XY cross section, so that the machining unit is rotated. The workpiece surface at can be parallel to the X-axis direction or the Y-axis direction. This makes it possible to match the tool feed direction and the vibration direction.

[0012]

Embodiments of the present invention will be described below with reference to FIGS.

1A and 1B are a plan view and a side view of the device of the present invention. A vibration table (3) is arranged above the base (1) via a rolling element (2) that can roll in any direction. On top of the base (1), X
An L-shaped side wall (5) including an axial wall (5a) and a Y-axis direction wall (5b) is mounted, and a first wall is provided between the side wall (5) and the end surface of the vibrating table (3). The elastic member (7a) and the second elastic member (7b) are interposed in a compressed state. The first elastic member (7a) is a vibration table (3).
Is supported in the X-axis direction, and the second elastic member (7b) is supported in the Y-axis direction. The vibrating table (3) is constantly urged in the positive directions of the X-axis and the Y-axis by the elastic force of both elastic members (7a), (7b).

On one end surface of the vibrating table (3), specifically on the surface opposite to the mounting surface of the second elastic member (7b), there are an X-axis direction portion (9a) extending in the X-axis direction and a Y-axis direction. An L-shaped contact member (9) including an extending Y-axis direction portion (9b) is mounted. The contact member (9) is attached with the X-axis direction portion (9a) in contact with the vibration table (3) and the Y-axis direction portion (9b) positioned on the first elastic member (7a) side. The X
An eccentric member (11) that is in contact with the inner surfaces of the axial portions (9a) and (9b) is arranged in the space surrounded by the axial portion (9a) and the Y-axis portion (9b). The eccentric member (11) has a disc shape and is connected to a rotation source such as a motor. The rotation shaft (12) of the eccentric member (11) is offset in the X-axis and Y-axis directions with respect to the center (13).

On the side of the vibration table (3), a first
The pressing member (15a) and the second pressing member (15b) are arranged. The first and second pressing members (15a) (15
b) is composed of a hydraulic cylinder or the like, the first pressing member (15a) is oriented in the X-axis direction, and the second pressing member (15a)
b) is oriented in the Y-axis direction.

With such a structure, when the pressing members (15a) and (15b) are retracted as shown in the figure, the eccentric member (11) causes the eccentric member (11) to move in the X-axis direction portion (9a) and the Y-axis of the contact member (9). Contact with both sides (9b). Further, when the first pressing member (15a) is advanced, the first elastic member (7a) is compressed and the vibration table (3) moves in the negative direction of the X axis, and the eccentric member (11) and the Y axis are moved. It is not in contact with the direction part (9b). Similarly, when the second pressing member (15b) is advanced, the second elastic member (7b) is compressed and the vibration table (3) moves in the negative direction of the Y-axis, and the eccentric member (11) and the X-axis are moved. The direction part (9a) is not in contact. On the other hand, the first and second pressing members (15
When both a) and (15b) are advanced, both elastic members (7a)
(7b) is compressed, the vibration table (3) is displaced in the negative combined direction of the X axis and the Y axis, and the eccentric member (11) and the X axis direction portion (9a) and the Y axis direction portion (9b). Becomes non-contact.

The device of the present invention has the above configuration. Less than,
The operation of this device will be described with reference to FIGS.

FIG. 1A shows both pressing members (15a) (15).
The state which b) was retracted is shown. In this state, the eccentric member (1
When 1) is rotated, its movement locus becomes as shown in Fig. 3. Here, for example, considering the behavior of the contact portion (16) between the eccentric member (11) and the X-axis direction portion (9a), the movement locus of the contact portion (16) draws a circle indicated by a dotted line. Therefore, in this case, the vibration table (3) makes a circular motion.

This vibration mode is suitable when the grindstone is sent in a trochoid curve shape (see FIG. 10) in the surface polishing of a flat plate-shaped workpiece. This is because it is possible to match the vibration direction of the vibration table (3) with the feed direction of the grindstone by selecting such a vibration mode.

FIG. 2B shows a state in which the second pressing member (15b) is advanced while the first pressing member (15a) is retracted. In this state, since the eccentric member (11) and the X-axis direction portion (9a) are not in contact with each other, the vibration table (3)
Vibrates only in the X-axis direction. This vibrating form is X
It is suitable for feeding in the axial direction.

FIG. 2C shows a state in which the first pressing member (15a) is advanced and the second pressing member is retracted. In this state, the eccentric member (11) and the Y-axis direction portion (9
Since it is not in contact with b), the vibration table (3) vibrates only in the Y-axis direction. This vibration mode is suitable when the grindstone is fed in the Y-axis direction.

FIG. 2D shows both pressing members (15a) (15).
The case where b) is advanced is shown. In this state, the eccentric member (11) is not in contact with the X-axis direction portion (9a) and the Y-axis direction portion (9b), so that the vibration table (3) does not vibrate.
Therefore, it can be used as a normal stationary table.

By appropriately selecting the above-described vibration mode (FIGS. 2A to 2D), it becomes possible to perform highly accurate polishing on the workpiece. Specifically, for example, when the workpiece (19) is the pocket-shaped mold shown in FIG. 4,
When machining the short side of the pocket (20),
The X-axis direction vibration shown in (b) is selected, and the grindstone (21) is sent in the Y-axis direction. When the side surface (22) on the longitudinal side is machined, the Y-axis direction vibration shown in FIG. 7C is selected and the grindstone (21) is fed in the X-axis direction. Further, when the bottom surface (23) is processed, the rotary motion shown in FIG. 10A is selected, and the grindstone (21) is sent in the trochoid curve shape shown in FIG.

By the way, in the above-mentioned vibrating table vibrating device, a problem arises when a triangular columnar workpiece (19) as shown in FIG. 5 is machined. That is, in the above-mentioned device, the vibration direction is limited to the X-axis / Y-axis direction and the circular motion, and the slope (2
The vibration in the diagonal direction (shown by the arrow (26)) required for machining 5) cannot be applied.

As a solution to this problem, the configuration shown in FIG. 6 can be considered. In addition to the configuration of FIG.
A rotary table (27) is newly provided above the vibration table (3).
Is provided. The rotary table (27) is connected to a drive mechanism (not shown) such as a servomotor, and can be normally and reversely rotated about the Z axis independently of the vibration table (3).

When the slope (25) is machined using this apparatus, first, the inclination angle (θ) of the slope (25) of the workpiece (19) supported on the rotary table (27) (X axis). Relative to the displacement detection signals εx and εy used for scanning control in Japanese Patent Publication No. 4-48578 of the prior application. Next, as shown in FIG. 7, the rotary table (27) is rotated around the Z axis in accordance with the detected tilt angle (θ) to make the slope (25) parallel to the Y axis. In this state, the grindstone (21) is fed in the Y-axis direction while the vibration mode shown in FIG. 2 (c) is selected to match the feed direction of the grindstone (21) with the vibration direction of the workpiece (19). It becomes possible.

In performing the above-mentioned polishing work, the self-profiling polishing head previously proposed by the applicant (Japanese Patent Publication No. 4-485).
By using No. 78), more efficient and highly accurate grinding work becomes possible. This self-copying polishing head detects the displacement amount of the rotary axis of the grindstone in the X-axis and Y-axis directions while pressing the grindstone against the surface of the workpiece with a constant pressure, and synthesizes the detection signals to make the synthesized value a constant value. The main axis of the machine tool is copied and controlled. Therefore, the self-profiling polishing head detects the displacement amounts εx and εy of the rotation axis of the grindstone in the X-axis and Y-axis directions, calculates the tilt angle (θ) from this detection signal, and the tilt angle (θ) becomes zero. By rotating the rotary table (27) so that the surface of the workpiece (19) in the processing section can be always parallel to the vibration direction.

With this structure, the surface of the three-dimensional free-form surface mold (19) as shown in FIG. 8 can be automatically and highly accurately polished. That is, while tracing the grindstone (21) along the surface of the die (19), the inclination angle of the surface at the processing location (29) is sequentially detected and calculated, and this inclination angle is relative to the X axis or the Y axis. Rotation table (27) is rotated forward and backward so that it becomes zero. Then, the vibration in the direction in which the tilt angle becomes zero (for example, the Y-axis direction when the rotary table (27) is rotated so that the tilt angle becomes zero with respect to the Y axis) is rotated with the vibration table (3). Table (27)
To give to.

In the above description, the rotation angle is controlled by vibrating the table. However, vibration of X-axis direction, Y-axis direction and circular motion is applied to the grindstone itself, and this is applied to the shape of the workpiece. It is possible to use the same method also in the case of rotating according to.

[0030]

As described above, according to the present invention,
Since the eccentric member is selectively brought into contact with the X-axis direction portion, the Y-axis direction portion, the X-axis direction portion, and the Y-axis direction portion of the contact member by appropriately driving the first and second pressing members, vibration It is possible to vibrate the table in an X-axis direction, a Y-axis direction, and a circular motion. As a result, a wide variety of vibration modes can be obtained, and the vibration mode most suitable for the shape of the workpiece and the machining method can be selected.

Further, above the vibration table, there is provided a rotary table which can be independently rotated around the Z axis in the forward and reverse directions independently of the vibration table, and the rotary table is rotated in accordance with the inclination angle of the workpiece surface in the XY cross section. By doing so, XY
It is possible to apply vibrations in all directions in the plane. As a result, the surface polishing of the three-dimensional free-form curved surface work, which has been difficult in the past, can be performed with high accuracy.

[Brief description of drawings]

FIG. 1 is a plan view (a) and a cross-sectional view (b) taken along the line AA of the device of the present invention.

FIG. 2 is a plan view showing the operation of the device of the present invention.

FIG. 3 is a plan view showing a situation when an eccentric disc is rotated.

FIG. 4 is a plan view (a) and a sectional view (b) when the device of the present invention is used for processing a pocket-shaped mold.

FIG. 5 is a plan view when the device of the present invention is used for machining a triangular prism-shaped workpiece.

FIG. 6 is a sectional view showing another embodiment of the device of the present invention.

FIG. 7 is a plan view of a case where a rotary table is rotated.

FIG. 8 is a cross-sectional view (a) and a cross-sectional view (b) taken along the line C-C when the device of the present invention is used for processing a three-dimensional free-form curved surface work piece.

FIG. 9 is a plan view of a conventional table vibrating device.

FIG. 10 is a plan view when the grindstone is fed in a trochoidal curved shape.

[Explanation of symbols]

 3 Vibration table 7a First elastic member 7b Second elastic member 9 Contact member 9a X axis direction part 9b Y axis direction part 11 Eccentric member 12 Rotation center 13 Center 15a First pressing member 15b Second pressing member

Claims (3)

[Claims] 1. A vibrating table, a first elastic member elastically supporting the vibrating table in the X-axis direction, a second elastic member elastically supporting the vibrating table in the Y-axis direction, and a rotation. An eccentric member that is connected to the source and has its rotation center offset in the X-axis and Y-axis directions with respect to the center; and an X-axis direction portion fixed in the vibration table and extending in the X-axis direction and a Y extending in the Y-axis direction. A contact member having an axial direction portion, the X-axis direction portion and the Y-axis direction portion being provided so as to be able to contact the eccentric member, and the vibration table is pressed in the X-axis direction against the first elastic member. A first pressing member, and a second pressing member that presses the vibration table in the Y-axis direction against the second elastic member, and appropriately drives the first and second pressing members, The eccentric member rotationally driven by the rotation source Axial section, Y-axis section, X-axis direction portion and a table vibration device according to claim alternatively the contacted by vibrating the vibrating table in the XY plane in the Y-axis direction portion. 2. A vibration table, a first elastic member that elastically supports the vibration table in the X-axis direction, a second elastic member that elastically supports the vibration table in the Y-axis direction, and rotation. An eccentric member that is connected to the source and has its rotation center offset in the X-axis and Y-axis directions with respect to the center; and an X-axis direction portion fixed in the vibration table and extending in the X-axis direction and a Y extending in the Y-axis direction. A contact member having an axial direction portion, the X-axis direction portion and the Y-axis direction portion being provided so as to be able to contact the eccentric member, and the vibration table is pressed in the X-axis direction against the first elastic member. A first pressing member, and a second pressing member that presses the vibration table in the Y-axis direction against the second elastic member, and appropriately drives the first and second pressing members, The eccentric member rotationally driven by the rotation source A table vibrating device for vibrating a vibration table in an XY plane by selectively contacting an axial direction portion, a Y axis direction portion, an X axis direction portion, and a Y axis direction portion, wherein the vibration table is provided above the vibration table. A vibration table device capable of rotating forward and backward independently about the Z-axis, and rotating the rotation table according to the inclination angle of the workpiece surface in the XY section. 3. A vibrating table, a first elastic member elastically supporting the vibrating table in the X-axis direction, a second elastic member elastically supporting the vibrating table in the Y-axis direction, and a rotation. An eccentric member that is connected to the source and has its rotation center offset in the X-axis and Y-axis directions with respect to the center; and an X-axis direction portion fixed in the vibration table and extending in the X-axis direction and a Y extending in the Y-axis direction. A contact member having an axial direction portion, the X-axis direction portion and the Y-axis direction portion being provided so as to be able to contact the eccentric member, and the vibration table is pressed in the X-axis direction against the first elastic member. A first pressing member, and a second pressing member that presses the vibration table in the Y-axis direction against the second elastic member, and appropriately drives the first and second pressing members, The eccentric member rotationally driven by the rotation source A table vibrating device that vibrates a vibration table in an XY plane by selectively contacting an axial direction portion, a Y-axis direction portion, an X-axis direction portion, and a Y-axis direction portion. A vibration table device characterized in that an inclination angle of a slope is calculated, an additional rotary table is rotated based on the detected amount, and the workpiece slope is controlled so as to coincide with the X axis or the Y axis.