JPH0617294Y2 - 半導体ウェハ用ピンセット - Google Patents

半導体ウェハ用ピンセット

Info

Publication number
JPH0617294Y2
JPH0617294Y2 JP1987140968U JP14096887U JPH0617294Y2 JP H0617294 Y2 JPH0617294 Y2 JP H0617294Y2 JP 1987140968 U JP1987140968 U JP 1987140968U JP 14096887 U JP14096887 U JP 14096887U JP H0617294 Y2 JPH0617294 Y2 JP H0617294Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
tweezers
fork
shaped
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987140968U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6447044U (OSRAM
Inventor
雅美 徳光
康朗 山根
直規 加藤
隆司 牧村
山崎　　肇
達雄 青木
暁 石田
孝知 榎木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1987140968U priority Critical patent/JPH0617294Y2/ja
Publication of JPS6447044U publication Critical patent/JPS6447044U/ja
Application granted granted Critical
Publication of JPH0617294Y2 publication Critical patent/JPH0617294Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP1987140968U 1987-09-17 1987-09-17 半導体ウェハ用ピンセット Expired - Lifetime JPH0617294Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987140968U JPH0617294Y2 (ja) 1987-09-17 1987-09-17 半導体ウェハ用ピンセット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987140968U JPH0617294Y2 (ja) 1987-09-17 1987-09-17 半導体ウェハ用ピンセット

Publications (2)

Publication Number Publication Date
JPS6447044U JPS6447044U (OSRAM) 1989-03-23
JPH0617294Y2 true JPH0617294Y2 (ja) 1994-05-02

Family

ID=31405614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987140968U Expired - Lifetime JPH0617294Y2 (ja) 1987-09-17 1987-09-17 半導体ウェハ用ピンセット

Country Status (1)

Country Link
JP (1) JPH0617294Y2 (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60142067U (ja) * 1984-02-28 1985-09-20 松下電子工業株式会社 ウエ−ハ保持具

Also Published As

Publication number Publication date
JPS6447044U (OSRAM) 1989-03-23

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